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JP3278093B2 - Semiconductor devices - Google Patents

Semiconductor devices

Info

Publication number
JP3278093B2
JP3278093B2 JP23211594A JP23211594A JP3278093B2 JP 3278093 B2 JP3278093 B2 JP 3278093B2 JP 23211594 A JP23211594 A JP 23211594A JP 23211594 A JP23211594 A JP 23211594A JP 3278093 B2 JP3278093 B2 JP 3278093B2
Authority
JP
Japan
Prior art keywords
bonding wire
signal transmission
grounding
radius
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP23211594A
Other languages
Japanese (ja)
Other versions
JPH0878458A (en
Inventor
幸太郎 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP23211594A priority Critical patent/JP3278093B2/en
Publication of JPH0878458A publication Critical patent/JPH0878458A/en
Application granted granted Critical
Publication of JP3278093B2 publication Critical patent/JP3278093B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
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    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
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  • Engineering & Computer Science (AREA)
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  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Structure Of Printed Boards (AREA)
  • Wire Bonding (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【産業上の利用分野】本発明は、半導体デバイスに係わ
り、特に高周波信号を取り扱う半導体デバイスに用いて
好適なものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device, and more particularly, to a semiconductor device that handles high-frequency signals.

【０００２】[0002]

【従来の技術】従来、高周波信号を取り扱う半導体デバ
イスとしては、その一例として、多層セラミックで形成
されたパッケージの内部にＧａＡｓ（ガリウムヒ素）基
板をベースに構成された半導体チップを搭載し、この半
導体チップ上に形成された電極パッドとこれに対応する
外部引出用配線の終端部とをボンディングワイヤにて接
続した構造が知られている。2. Description of the Related Art Conventionally, as a semiconductor device for handling a high-frequency signal, as an example, a semiconductor chip formed based on a GaAs (gallium arsenide) substrate is mounted inside a package formed of a multilayer ceramic. There is known a structure in which an electrode pad formed on a chip and a corresponding terminal of an external lead-out line are connected by a bonding wire.

【０００３】ところで一般的に、高周波信号を取り扱う
半導体デバイスにおいては、伝送線路の特性インピーダ
ンス（Ｚ0 ）を５０Ωに設定するが、ボンディングワイ
ヤ部分での特性インピーダンス（Ｚ）がワイヤ自身のイ
ンダクタンスのために上記特性インピーダンス（Ｚ0 ）
を上回ることになる。このため、伝送線路上におけるイ
ンピーダンスの不整合によって定在波比が大きくなり、
これに比例して反射波の影響も大きくなる。In general, in a semiconductor device handling a high-frequency signal, the characteristic impedance (Z 0 ) of a transmission line is set to 50Ω. However, the characteristic impedance (Z) at a bonding wire portion is determined by the inductance of the wire itself. Above the characteristic impedance (Z 0 )
Will be exceeded. Therefore, the standing wave ratio increases due to impedance mismatch on the transmission line,
The effect of the reflected wave increases in proportion to this.

【０００４】[0004]

【発明が解決しようとする課題】ところが従来の半導体
デバイスでは、信号伝送用のボンディングワイヤと接地
（アース）又は電源用のボンディングワイヤとがそれぞ
れ同じ太さに設定されていたため、伝送線路上における
定在波比の数値が実用上の許容レベルである「２」を超
えてしまい、高周波信号を取り扱う半導体デバイスとし
ては反射が大きく不向きであった。また、伝送線路系の
定在波比を小さくするにはワイヤ間の距離を狭める方法
も考えられるが、そうした場合はワイヤ同士の接触によ
る短絡不良を引き起こすことになり兼ねないため、ワイ
ヤ間の距離を狭めるのにも限界があった。However, in the conventional semiconductor device, the bonding wire for signal transmission and the bonding wire for grounding (earth) or power supply are set to the same thickness, so that a constant value on the transmission line is required. The numerical value of the standing wave ratio exceeds the practically allowable level of "2", and the reflection is largely unsuitable for a semiconductor device that handles high-frequency signals. In order to reduce the standing wave ratio of the transmission line system, it is conceivable to reduce the distance between the wires. However, in such a case, short-circuit failure due to contact between the wires may be caused. There was a limit to narrowing down.

【０００５】[0005]

【課題を解決するための手段】本発明の半導体デバイス
においては、半導体チップ上に形成された入出力パッド
とその近傍に配置された信号伝送線の終端部とが信号伝
送用ボンディングワイヤによって接続される。また、半
導体チップ上に形成された接地／電源パッドとその近傍
に配置された接地／電源配線の終端部とが信号伝送用ボ
ンディングワイヤよりも太い接地／電源用ボンディング
ワイヤによって接続される。さらに、信号伝送用ボンデ
ィングワイヤの略半径分の距離を隔てて、接地用ボンデ
ィングワイヤと信号伝送用ボンディングワイヤとが近接
して配置される。In the semiconductor device of the present invention, an input / output pad formed on a semiconductor chip and a terminal end of a signal transmission line disposed near the input / output pad are connected by a signal transmission bonding wire. You. Also, the ground / power supply pad formed on the semiconductor chip and the terminal of the ground / power supply wire arranged near the pad are connected by a ground / power supply bonding wire thicker than the signal transmission bonding wire. Further, the bonding wire for grounding and the bonding wire for signal transmission are arranged close to each other with a distance of substantially the radius of the bonding wire for signal transmission.

【０００６】[0006]

【作用】本発明の半導体デバイスにおいては、接地／電
源用ボンディングワイヤを信号伝送用ボンディングワイ
ヤよりも太くするとともに、ワイヤ同士の短絡不良を回
避すべく信号伝送用ボンディングワイヤの半径分の距離
を隔てて接地／電源用ボンディングワイヤと信号伝送用
ボンディングワイヤとを配置することにより、伝送線路
の定在波比を実用上の許容レベルである２以下とするこ
とができる。In the semiconductor device according to the present invention, the bonding wire for grounding / power supply is made thicker than the bonding wire for signal transmission, and the bonding wire is separated by a distance corresponding to the radius of the bonding wire for signal transmission in order to avoid a short circuit between the wires. By disposing the bonding wire for grounding / power supply and the bonding wire for signal transmission, the standing wave ratio of the transmission line can be reduced to 2 or less, which is a practically allowable level.

【０００７】[0007]

【実施例】以下、本発明の実施例について図面を参照し
ながら詳細に説明する。図１は本発明に係わる半導体デ
バイスの第１実施例を説明する図であり、図中（ａ）は
その要部平面図、（ｂ）はその要部側面図である。図１
において、１は例えばガリウムヒ素（ＧａＡｓ）基板を
ベースに構成された半導体チップであり、この半導体チ
ップ１上には入出力パッド２と接地パッド３とが例えば
局部的に千鳥状の配列形態をもって形成されている。一
方、半導体チップ１の周辺には信号伝送線４と接地配線
５とが配置されている。このうち、信号伝送線４の終端
部は信号伝送用ボンディングワイヤ６を介して半導体チ
ップ１の入出力パッド２に接続されている。また、接地
配線５の終端部は接地用ボンディングワイヤ７を介して
半導体チップ１の接地パッド３に接続されている。Embodiments of the present invention will be described below in detail with reference to the drawings. FIGS. 1A and 1B are views for explaining a first embodiment of a semiconductor device according to the present invention. FIG. 1A is a plan view of a main part thereof, and FIG. 1B is a side view of the main part. FIG.
Numeral 1 is a semiconductor chip formed on the basis of, for example, a gallium arsenide (GaAs) substrate. On this semiconductor chip 1, input / output pads 2 and ground pads 3 are formed, for example, in a local staggered arrangement. Have been. On the other hand, a signal transmission line 4 and a ground wiring 5 are arranged around the semiconductor chip 1. Among them, the terminal end of the signal transmission line 4 is connected to the input / output pad 2 of the semiconductor chip 1 via the signal transmission bonding wire 6. The terminal end of the ground wiring 5 is connected to the ground pad 3 of the semiconductor chip 1 via the bonding wire 7 for grounding.

【０００８】ここで本実施例においては、その特徴部分
として、半導体チップ１の接地パッド３と接地配線５の
終端部とが、信号伝送用ボンディングワイヤ６よりも太
い接地用ボンディングワイヤ７によって接続されてい
る。つまり、信号伝送用ボンディングワイヤ６の半径を
「Ｒａ」とし、接地用ボンディングワイヤ７の半径を
「Ｒｂ」とすると、双方の太さ関係は「Ｒａ＜Ｒｂ」と
なっている。さらに、半導体チップ１の入出力パッド２
と信号伝送線４の終端部とを接続する信号伝送用ボンデ
ィングワイヤ６に対して、接地用ボンディングワイヤ７
が信号伝送用ボンディングワイヤ６の略半径分の距離
Ｇ、すなわちＲａ分の距離を隔てて近接配置されてい
る。In this embodiment, as a characteristic part, the ground pad 3 of the semiconductor chip 1 and the terminal end of the ground wiring 5 are connected by a ground bonding wire 7 thicker than the signal transmission bonding wire 6. ing. That is, assuming that the radius of the signal transmission bonding wire 6 is “Ra” and the radius of the ground bonding wire 7 is “Rb”, the relationship between the thicknesses is “Ra <Rb”. Further, the input / output pads 2 of the semiconductor chip 1
The signal transmission bonding wire 6 that connects the signal transmission line 4 to the signal transmission line 4 is connected to the ground bonding wire 7.
Are disposed close to each other at a distance G substantially corresponding to the radius of the bonding wire 6 for signal transmission, that is, at a distance of Ra.

【０００９】ところで、上述のごとく半径Ｒａ、Ｒｂが
それぞれ異なる２つの円筒導体を距離Ｇを隔てて平行に
配置した場合、伝送線路の特性インピーダンスＺは以下
の（１）式で与えられる。When two cylindrical conductors having different radii Ra and Rb are arranged in parallel at a distance G as described above, the characteristic impedance Z of the transmission line is given by the following equation (1).

【数１】 この（１）式において、πは円周率、μは透磁率、εは
誘電率である。(Equation 1) In the equation (1), π is a circular constant, μ is a magnetic permeability, and ε is a dielectric constant.

【００１０】一方、特性インピーダンスＺ0 の伝送線路
にこれとは別の特性インピーダンスＺをもつ伝送線路を
接続した場合の定在波比ｕは以下の（２）式で与えられ
る。On the other hand, the standing wave ratio u when a transmission line having another characteristic impedance Z is connected to the transmission line having the characteristic impedance Z 0 is given by the following equation (2).

【数２】 一般に、高周波信号を取り扱う伝送線路系では特性イン
ピーダンスＺ0 が５０Ωであり、反射の影響を考慮する
と定在波比ｕはなるべく「１」に近いことが好ましい。
しかしながら、現実にはボンディングワイヤなどの円筒
導体のインダクタンスのために特性インピーダンスＺが
大きくなるため、これに比例して定在波比（ｕ）の数値
も大きくなる。現状では、上記従来例でも述べたように
定在波比（ｕ）が「２」程度までに抑えられていれば、
高周波信号を取り扱う半導体デバイスとしても、特に問
題なく使用できるものと認識されている。(Equation 2) Generally, in a transmission line system that handles high-frequency signals, the characteristic impedance Z 0 is 50Ω, and it is preferable that the standing wave ratio u be as close to “1” as possible, considering the influence of reflection.
However, in reality, the characteristic impedance Z increases due to the inductance of a cylindrical conductor such as a bonding wire, and the numerical value of the standing wave ratio (u) increases in proportion to this. At present, if the standing wave ratio (u) is suppressed to about “2” as described in the above conventional example,
It is recognized that a semiconductor device that handles high-frequency signals can be used without any problem.

【００１１】図２は、ボンディングワイヤの半径（Ｒ
ａ，Ｒｂ）とワイヤ間の距離（Ｇ）をパラメータとし
て、定在波比（ｕ）とワイヤ半径比（Ｒｂ／Ｒａ）の関
係をグラフ化したもので、縦軸に定在波比（ｕ）、横軸
にワイヤ半径比（Ｒｂ／Ｒａ）をとっている。図２から
理解できるように、ワイヤ間の距離（Ｇ）を信号伝送用
ボンディングワイヤ６の半径分（Ｒａ）に設定した場合
（Ｇ＝Ｒａの曲線）は、接地用ボンディングワイヤ７の
半径（Ｒｂ）が信号伝送用ボンディングワイヤ６の半径
（Ｒａ）の２倍を超える領域で定在波比（ｕ）が２以下
となっている。したがって、「ワイヤ間の距離（Ｇ）＝
信号伝送用ボンディングワイヤ６の半径（Ｒａ）」の配
置条件で、且つ「接地用ボンディングワイヤ７の半径
（Ｒｂ）＞信号伝送用ボンディングワイヤ６の直径（２
Ｒａ）」の太さ関係を満たした場合に、高周波信号を取
り扱う半導体デバイスとして好適であるといえる。FIG. 2 shows the radius (R) of the bonding wire.
a, Rb) and the distance between wires (G) as parameters, and graphs the relationship between the standing wave ratio (u) and the wire radius ratio (Rb / Ra), with the vertical axis representing the standing wave ratio (u). ), And the horizontal axis shows the wire radius ratio (Rb / Ra). As can be understood from FIG. 2, when the distance (G) between the wires is set to the radius (Ra) of the bonding wire 6 for signal transmission (G = Ra curve), the radius (Rb) of the bonding wire 7 for grounding is set. ) Exceeds 2 times the radius (Ra) of the bonding wire 6 for signal transmission, and the standing wave ratio (u) is 2 or less. Therefore, "distance between wires (G) =
Under the arrangement condition of “radius (Ra) of bonding wire 6 for signal transmission” and “radius (Rb) of bonding wire 7 for grounding> diameter of bonding wire 6 for signal transmission (2)
When the thickness relationship of (Ra) is satisfied, it can be said that the semiconductor device is suitable as a semiconductor device that handles a high-frequency signal.

【００１２】ちなみに、接地用ボンディングワイヤ６の
半径（Ｒｂ）を無限大とした場合（Ｒｂ→∞）、理論的
には定在波比（ｕ）が１．６程度まで小さくなるが、現
実的にはワイヤ本数やチップサイズなどの制約により信
号伝送用ボンディングワイヤ６の数倍に接地用ボンディ
ングワイヤ７の太さが設定されるため、定在波比（ｕ）
は１．８程度にとどまる。When the radius (Rb) of the ground bonding wire 6 is infinite (Rb → ｂ), the standing wave ratio (u) theoretically decreases to about 1.6, but it is practical. Because the thickness of the bonding wire 7 for grounding is set to several times the bonding wire 6 for signal transmission due to restrictions such as the number of wires and the chip size, the standing wave ratio (u)
Remains at about 1.8.

【００１３】一方、ワイヤ間の距離（Ｇ）を信号伝送用
ボンディングワイヤ６の半径分（Ｒａ）の１．２倍に設
定した場合（Ｇ＝１．２Ｒａの曲線）、つまり先程より
もワイヤ間の距離（Ｇ）を２０％ほど拡げた場合は、
「ワイヤの半径比（Ｒｂ／Ｒｂ）＝２」の条件で、定在
波比（ｕ）がおよそ２．２となっており、ワイヤ間の距
離（Ｇ）を２０％ほど拡げたにもかかわらず定在波比
（ｕ）は１０％ほどの増加で済んでいる。On the other hand, when the distance (G) between the wires is set to be 1.2 times the radius (Ra) of the bonding wire 6 for signal transmission (G = 1.2 Ra curve), that is, the distance between the wires is larger than that of the previous case. If the distance (G) of is increased by about 20%,
Under the condition of “the radius ratio of the wire (Rb / Rb) = 2”, the standing wave ratio (u) is about 2.2, and the distance (G) between the wires is increased by about 20%. However, the standing wave ratio (u) only needs to be increased by about 10%.

【００１４】これに対して、ワイヤ間の距離（Ｇ）を信
号伝送用ボンディングワイヤ６の半径分（Ｒａ）の０．
５倍に設定した場合（Ｇ＝０．５Ｒａの曲線）、つまり
最初の条件（Ｇ＝Ｒａ）よりもワイヤ間の距離（Ｇ）が
半分に狭まった場合は、「ワイヤの半径比（Ｒｂ／Ｒ
ｂ）＝２」の条件で、定在波比（ｕ）がおよそ１．５と
なっており、高周波信号を取り扱う半導体デバイスとし
ては一層好ましいものとなる。しかしながら、ボンディ
ングワイヤの半径は通常で１５〜２５μｍ程度となって
いるため、ワイヤ間の距離（Ｇ）を信号伝送用ボンディ
ングワイヤ６の半径分（Ｒａ）の０．５倍に設定した場
合は、ワイヤ間の距離（Ｇ）が７〜１２μｍ程度ときわ
めて狭くなってしまう。このため、ワイヤ同士の接触に
よって短絡不良（ワイヤショート）が多発することにな
り、この問題をクリアーしない限り現状では実施不可能
である。On the other hand, the distance (G) between the wires is set to be equal to 0.1 mm of the radius (Ra) of the bonding wire 6 for signal transmission.
When set to 5 times (G = 0.5Ra curve), that is, when the distance (G) between the wires is reduced by half from the first condition (G = Ra), the “radius ratio of wire (Rb / Rb / R
Under the condition of “b) = 2”, the standing wave ratio (u) is about 1.5, which is more preferable as a semiconductor device that handles high-frequency signals. However, since the radius of the bonding wire is usually about 15 to 25 μm, when the distance (G) between the wires is set to 0.5 times the radius (Ra) of the bonding wire 6 for signal transmission, The distance (G) between the wires is extremely small, about 7 to 12 μm. For this reason, short-circuit failure (wire short-circuit) frequently occurs due to contact between the wires, and it is not possible at present at present unless this problem is cleared.

【００１５】したがって、実施の可能性を考慮すると、
先の図１で示したように、ワイヤ間の距離（Ｇ）を信号
伝送用ボンディングワイヤ６の半径分（Ｒａ）の距離に
設定し、しかも接地用ボンディングワイヤ７を信号伝送
用ボンディングワイヤ６よりも太くする（さらに好まし
くＲｂ＞２Ｒａとする）ことが実用上の最適条件である
といえる。Therefore, considering the possibility of implementation,
As shown in FIG. 1, the distance (G) between the wires is set to a distance (Ra) corresponding to the radius of the signal transmission bonding wire 6, and the ground bonding wire 7 is separated from the signal transmission bonding wire 6. Thickness (more preferably, Rb> 2Ra) can be said to be a practically optimum condition.

【００１６】このように本第１実施例においては、信号
伝送用ボンディングワイヤ６における定在波比（ｕ）を
容易に２程度まで小さくできるため、その分だけ伝送線
路系での入射波の反射を低減することが可能となる。ま
た、半導体チップ１の接地パッド３と接地配線５の終端
部とを、信号伝送用ボンディングワイヤ６よりも太い接
地用ボンディングワイヤ７で接続するようにしたので、
半導体チップ１の接地がより確実となり、接地配線系の
導体部分を電位０の安定した状態に保つことが可能とな
る。As described above, in the first embodiment, since the standing wave ratio (u) of the bonding wire 6 for signal transmission can be easily reduced to about 2, the reflection of the incident wave on the transmission line system is correspondingly reduced. Can be reduced. Further, the ground pad 3 of the semiconductor chip 1 and the terminal end of the ground wiring 5 are connected by the ground bonding wire 7 which is thicker than the signal transmission bonding wire 6.
The grounding of the semiconductor chip 1 becomes more reliable, and the conductor portion of the grounding wiring system can be kept at a stable state of zero potential.

【００１７】図３は本発明に係わる半導体デバイスの第
２実施例を説明する要部平面図である。なお、本第２実
施例では、上記第１実施例と同様の構成部分に同じ符号
を付して説明する。図３において、１は半導体チップ、
２は半導体チップ１上に形成された入出力パッド、３は
同じく半導体チップ１上に形成された接地パッド、４は
信号伝送線、５は接地配線、６は入出力パッド２と信号
伝送線４の終端部とを接続する信号伝送用ボンディング
ワイヤ、７は接地パッド３と接地配線５の終端部とを接
続する接地用ボンディングワイヤである。FIG. 3 is a plan view of a principal part for explaining a second embodiment of the semiconductor device according to the present invention. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals and described. In FIG. 3, 1 is a semiconductor chip,
2 is an input / output pad formed on the semiconductor chip 1, 3 is a ground pad also formed on the semiconductor chip 1, 4 is a signal transmission line, 5 is a ground wiring, 6 is an input / output pad 2 and a signal transmission line 4 Is a bonding wire for signal transmission that connects to the terminal of the ground wiring 7 and a bonding wire for ground that connects the ground pad 3 to the terminal of the ground wiring 5.

【００１８】本第２実施例においては、その特徴部分と
して、先ず、上記第１実施例と同様に半導体チップ１の
接地パッド３と接地配線５の終端部とが、信号伝送用ボ
ンディングワイヤ６よりも太い接地用ボンディングワイ
ヤ７によって接続されている。つまり、信号伝送用ボン
ディングワイヤ６の半径を「Ｒａ」とし、接地用ボンデ
ィングワイヤ７の半径を「Ｒｂ」とすると、双方の太さ
関係は「Ｒａ＜Ｒｂ」となっている。さらに、接地用ボ
ンディングワイヤ７が信号伝送用ボンディングワイヤ６
の両側にそれぞれ配置されており、しかも半導体チップ
１の入出力パッド２と信号伝送線４の終端部とを接続す
る信号伝送用ボンディングワイヤ６に対して、これに隣
接する接地用ボンディングワイヤ７が信号伝送用ボンデ
ィングワイヤ６の半径乃至直径分の距離Ｇ、すなわちＲ
ａ〜２Ｒａ分の距離を隔てて近接配置されている。The second embodiment is characterized in that the ground pad 3 of the semiconductor chip 1 and the terminal end of the ground wiring 5 are connected to the signal transmission bonding wire 6 in the same manner as in the first embodiment. Are connected by a thick grounding bonding wire 7. That is, assuming that the radius of the signal transmission bonding wire 6 is “Ra” and the radius of the ground bonding wire 7 is “Rb”, the relationship between the thicknesses is “Ra <Rb”. Further, the bonding wire 7 for grounding is connected to the bonding wire 6 for signal transmission.
And a signal bonding wire 6 connecting the input / output pad 2 of the semiconductor chip 1 and the terminal end of the signal transmission line 4, and a bonding wire 7 for grounding adjacent thereto. The distance G corresponding to the radius or diameter of the bonding wire 6 for signal transmission, that is, R
They are arranged close to each other with a distance of a to 2Ra.

【００１９】本第２実施例の場合には、信号伝送用ボン
ディングワイヤ６の両側にそれぞれ接地用ボンディング
ワイヤ７が近接配置されているため、上記第１実施例で
のワイヤ間の距離Ｇを等価的に半分にしたのと同じ結果
になることから、その特性インピーダンスＺは上記
（１）式で与えられる数値のほぼ半分となる。したがっ
て、上記（２）式で与えられる定在波比（ｕ）について
も、本第２実施例の場合は図２におけるワイヤ間の距離
（Ｇ）を半分に読み換えたものと等しくなるため、第１
実施例における「Ｇ＝０．５Ｒａ」の条件が本第２実施
例では「Ｇ＝Ｒａ」の条件と同等になり、また第１実施
例における「Ｇ＝Ｒａ」の条件が本第２実施例では「Ｇ
＝２Ｒａ」の条件と同等になる。In the case of the second embodiment, since the bonding wires 7 for grounding are arranged close to each other on both sides of the bonding wires 6 for signal transmission, the distance G between the wires in the first embodiment is equivalent. Since the result is the same as that obtained by halving the characteristic impedance, the characteristic impedance Z is substantially half of the numerical value given by the above equation (1). Therefore, the standing wave ratio (u) given by the above equation (2) is also equal to that obtained by reading the distance (G) between the wires in FIG. 2 by half in the case of the second embodiment. First
The condition of "G = 0.5Ra" in the embodiment is equivalent to the condition of "G = Ra" in the second embodiment, and the condition of "G = Ra" in the first embodiment is the same as that of the second embodiment. Then "G
= 2Ra ".

【００２０】その結果、本第２実施例においては、同じ
定在波比（ｕ）を得る場合にワイヤ間の距離Ｇを第１実
施例の２倍までも拡げることができ、反対にワイヤ間の
距離（Ｇ）を同じに設定した場合には第１実施例よりも
定在波比を小さくすることができる。このため、ワイヤ
同士の接触による短絡不良を防止しつつ、伝送線路系の
反射を効果的に低減することが可能となる。さらに本第
２実施例では、信号伝送用ボンディングワイヤ６の両側
に接地用ボンディングワイヤ７が配置されている、つま
り信号伝送用ボンディングワイヤ６が接地用ボンディン
グワイヤ７によって囲まれた配置形態となっているた
め、接地用ボンディングワイヤ７がシールド効果を発揮
するようになり、周囲の雑音が信号に混入することを防
止するといった効果も得られる。As a result, in the second embodiment, when the same standing wave ratio (u) is obtained, the distance G between the wires can be increased to twice as large as that in the first embodiment. When the distance (G) is set to be the same, the standing wave ratio can be made smaller than in the first embodiment. For this reason, it is possible to effectively reduce the reflection of the transmission line system while preventing short circuit failure due to contact between the wires. Further, in the second embodiment, the bonding wires 7 for grounding are arranged on both sides of the bonding wires 6 for signal transmission, that is, the arrangement is such that the bonding wires 6 for signal transmission are surrounded by the bonding wires 7 for grounding. Therefore, the ground bonding wire 7 exhibits a shielding effect, and an effect of preventing ambient noise from being mixed into a signal can be obtained.

【００２１】なお、上記第１及び第２実施例において
は、信号伝送用ボンディングワイヤ６よりも太いボンデ
ィングワイヤとして、いずれも接地用ボンディングワイ
ヤ７を一例として挙げたが、本発明はこれに限定される
ことなく、一定電位であれば電源用ボンディングワイヤ
であってもよい。さらに、第２実施例においては、それ
ぞれ異なる定電位の電源用ボンディングワイヤを信号伝
送用ボンディングワイヤ６の両側に配置してもよい。In the first and second embodiments, the bonding wire 7 for grounding is given as an example of a bonding wire thicker than the bonding wire 6 for signal transmission. However, the present invention is not limited to this. Instead, a power supply bonding wire may be used as long as the potential is constant. Further, in the second embodiment, power supply bonding wires having different constant potentials may be arranged on both sides of the signal transmission bonding wire 6.

【００２２】また、上記第１及び第２実施例では、特性
インピーダンスが５０Ωの伝送線路系を例に挙げて説明
したが、これ以外の特性インピーダンスをもつ伝送線路
系であってもよく、またそうした場合はワイヤ径及びワ
イヤ間距離などの数値が上記実施例での数値と異なるこ
とは言うまでもない。In the first and second embodiments, the transmission line system having a characteristic impedance of 50Ω has been described as an example. However, transmission line systems having other characteristic impedances may be used. In this case, it goes without saying that the numerical values such as the wire diameter and the distance between the wires are different from the numerical values in the above embodiment.

【００２３】[0023]

【発明の効果】以上、説明したように本発明によれば、
接地／電源用ボンディングワイヤを信号伝送用ボンディ
ングワイヤよりも太くするとともに、信号伝送用ボンデ
ィングワイヤの半径分の距離を隔てて接地／電源用ボン
ディングワイヤと信号伝送用ボンディングワイヤとを配
置することにより、ワイヤショートの発生を回避しつ
つ、伝送線路上の定在波比を実用上の許容レベルまで小
さくすることができ、高周波信号を取り扱うのに好適な
半導体デバイスを提供することが可能となる。As described above, according to the present invention,
By making the grounding / power bonding wire thicker than the signal transmission bonding wire, and arranging the ground / power bonding wire and the signal transmission bonding wire at a distance corresponding to the radius of the signal transmission bonding wire, The standing wave ratio on the transmission line can be reduced to a practically allowable level while avoiding the occurrence of wire shorts, and a semiconductor device suitable for handling high-frequency signals can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明に係わる半導体デバイスの第１実施例を
説明する図である。FIG. 1 is a diagram illustrating a first embodiment of a semiconductor device according to the present invention.

【図２】定在波比とワイヤ半径比の関係を示す図であ
る。FIG. 2 is a diagram showing a relationship between a standing wave ratio and a wire radius ratio.

【図３】本発明に係わる半導体デバイスの第２実施例を
説明する要部平面図である。FIG. 3 is a main part plan view for explaining a second embodiment of the semiconductor device according to the present invention.

【符号の説明】[Explanation of symbols]

１ 半導体チップ ２ 入出力パッド ３ 接地パッド ４ 信号伝送線 ５ 接地配線 ６ 信号伝送用ボンディングワイヤ ７ 接地用ボンディングワイヤ Ｇ ワイヤ間の距離 Ｒａ 信号伝送用ボンディングワイヤの半径 Ｒｂ 接地用ボンディングワイヤの半径 Reference Signs List 1 semiconductor chip 2 input / output pad 3 ground pad 4 signal transmission line 5 ground wiring 6 signal transmission bonding wire 7 ground bonding wire G distance between wires Ra radius of signal transmission bonding wire Rb radius of ground bonding wire

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H01L 21/60 301 H01L 23/12 301 H05K 1/02 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 7 , DB name) H01L 21/60 301 H01L 23/12 301 H05K 1/02

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項１】 半導体チップ上に形成された入出力パッ
ドとその近傍に配置された信号伝送線の終端部とを信号
伝送用ボンディングワイヤにて接続するとともに、前記
半導体チップ上に形成された接地／電源パッドとその近
傍に配置された接地／電源配線の終端部とを接地／電源
用ボンディングワイヤによって接続してなる半導体デバ
イスにおいて、 前記接地／電源用ボンディングワイヤは、前記信号伝送
用ボンディングワイヤよりも太く、且つ前記信号伝送用
ボンディングワイヤと該信号伝送用ボンディングワイヤ
の略半径分の距離を隔てて近接配置されていることを特
徴とする半導体デバイス。An input / output pad formed on a semiconductor chip is connected to a terminal end of a signal transmission line disposed near the input / output pad by a signal transmission bonding wire, and a ground formed on the semiconductor chip. A semiconductor device in which a grounding / power supply wire and a terminal of a grounding / power supply wire arranged in the vicinity thereof are connected by a grounding / power supply bonding wire. A semiconductor device, which is thicker and is disposed close to the signal transmission bonding wire with a distance substantially equal to the radius of the signal transmission bonding wire. 【請求項２】 半導体チップ上に形成された入出力パッ
ドとその近傍に配置された信号伝送線の終端部とを信号
伝送用ボンディングワイヤにて接続するとともに、前記
半導体チップ上に形成された接地／電源パッドとその近
傍に配置された接地／電源配線の終端部とを接地／電源
用ボンディングワイヤによって接続してなる半導体デバ
イスにおいて、 前記接地／電源用ボンディングワイヤは、前記信号伝送
用ボンディングワイヤよりも太く、且つ前記信号伝送用
ボンディングワイヤの両側に該信号伝送用ボンディング
ワイヤの半径乃至直径分の距離を隔ててそれぞれ近接配
置されていることを特徴とする半導体デバイス。2. An input / output pad formed on a semiconductor chip and a terminal end of a signal transmission line arranged near the input / output pad are connected by a signal transmission bonding wire, and a ground formed on the semiconductor chip. A semiconductor device in which a grounding / power supply wire and a terminal of a grounding / power supply wire arranged in the vicinity thereof are connected by a grounding / power supply bonding wire. A semiconductor device, which is thicker and arranged close to both sides of the signal transmission bonding wire with a distance corresponding to a radius or a diameter of the signal transmission bonding wire.
JP23211594A 1994-08-31 1994-08-31 Semiconductor devices Expired - Fee Related JP3278093B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23211594A JP3278093B2 (en) 1994-08-31 1994-08-31 Semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23211594A JP3278093B2 (en) 1994-08-31 1994-08-31 Semiconductor devices

Publications (2)

Publication Number Publication Date
JPH0878458A JPH0878458A (en) 1996-03-22
JP3278093B2 true JP3278093B2 (en) 2002-04-30

Family

ID=16934248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23211594A Expired - Fee Related JP3278093B2 (en) 1994-08-31 1994-08-31 Semiconductor devices

Country Status (1)

Country Link
JP (1) JP3278093B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4054188B2 (en) * 2001-11-30 2008-02-27 富士通株式会社 Semiconductor device
JP4570868B2 (en) * 2003-12-26 2010-10-27 ルネサスエレクトロニクス株式会社 Semiconductor device
JP6277550B2 (en) * 2014-04-07 2018-02-14 パナソニックＩｐマネジメント株式会社 Current measuring instrument, current measuring instrument for distribution board, distribution board, manufacturing method of current measuring instrument
CN106980158A (en) * 2016-01-19 2017-07-25 青岛海信宽带多媒体技术有限公司 A kind of optical module

Also Published As

Publication number Publication date
JPH0878458A (en) 1996-03-22

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