JP3230503B2 - Tunnel transistor and manufacturing method thereof - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tunnel transistor and a method of manufacturing the same, and more particularly, to a tunnel transistor utilizing a tunnel phenomenon capable of high integration, high-speed operation and multi-function, and a method of manufacturing the same.

[0002]

2. Description of the Related Art The degree of integration and processing speed of integrated circuits using semiconductor elements have been remarkably improved. However, high-speed and high-integration integrated circuits using these transistors have been promoted by miniaturization of element dimensions, but there is a limit to miniaturization, and the effect of wiring delay is ignored. Can not. Therefore, in order to solve these problems, it is necessary to further reduce the number of transistors in the integrated circuit by realizing a higher speed of the element itself and realizing multi-functionality.

[0003] Therefore, we consider that p ⁺ −
A tunnel transistor utilizing a tunnel phenomenon at an n ⁺ junction has been proposed (for example, Japanese Patent Application Laid-Open No. 58-96766).
Patent Publication: Title of Invention "Semiconductor Device", Japanese Patent Laid-Open No. 6-207
No. 07: title of invention "tunnel transistor and method of manufacturing the same"; Japanese Patent Laid-Open No. 8-264806: title of invention "tunnel transistor and method of manufacturing the same").

FIG. 3 is a schematic diagram showing a layer structure of an example of the above-mentioned conventional tunnel transistor. In this tunnel transistor, a channel layer 2, an insulating layer 3, and a gate layer 4 are sequentially stacked on a substrate 1. On the substrate 1, a drain region 6 and a source region 5 are provided on one side and the other side of the channel layer 2, respectively. Further, a gate electrode 8, a source electrode 7, and a drain electrode 9 are formed on the gate layer 4, the source region 5, and the drain region 6.

Here, the source region 5 is a semiconductor region having the same conductivity type as the drain region 6 and the gate layer 4. The insulating layer 3 is formed of a material having a wide band gap. The manufacturing method and operation of this conventional tunnel transistor will be described. An i-GaAs (here, i-GaAs)
Is an abbreviation meaning an intrinsic or a non-doped semiconductor which can be regarded as substantially intrinsic: the same applies hereinafter), and n ⁺ -G
aAs, Al _0.3 Ga _0.7 As for the insulating layer 3, n-GaAs for the gate layer 4, p ⁺ -GaAs for the drain region 6 and the source region 5, Au for the gate electrode 8, source electrode 7 and the drain electrode. An example in which AuZn is used for No. 9 will be described.

First, a molecular beam crystal growth method (MBE: Mol
(e-beam), a 500 nm-thick i-GaAs film is formed on the semi-insulating GaAs substrate 1.
s is formed, and n ⁺ -GaAs (T
e = 2 × 10 ¹⁹ cm ⁻³ ) channel layer 2, thickness 30
Insulating layer 3 of Al _0.3 Ga _0.7 As with a thickness of 80 nm
nm-doped n-GaAs (Si = 5 × 10 ¹⁸ c
m ⁻³ ) is grown by sequentially applying the MBE method to obtain a laminated structure of these.

Subsequently, in order to form the drain region 6 and the source region 5 of the laminated structure, the laminated structure portions to be the drain forming region and the source region on the substrate are removed by etching. Is filled with carbon (C) -doped p ⁺ -GaAs (C = 2 × 10 ²⁰ cm ⁻³ ) by an organic metal MBE method to form a drain region 6 and a source region 5 as shown in FIG.

Next, AuZn is deposited on the p ⁺ -GaAs drain region 6 and the p ⁺ -GaAs source region 5 and alloyed at 410 ° C. to form a drain electrode 9 and a source electrode 7, respectively. Finally, Au is formed on the gate layer 4 as the gate electrode 8, and the manufacture of the tunnel transistor is completed. According to this conventional tunnel transistor, the source region 5 and the drain region 6 are connected to the gate layer 4.
Is formed in a self-aligned manner with respect to the side surface of the transistor, a transistor characteristic having a negative resistance characteristic in both directions of the drain bias can be obtained. Further, since the negative resistance characteristic depends on the carrier concentration of the channel layer 2, it is controlled by modulating the carrier concentration of the channel by the gate voltage.

However, the above-described conventional tunnel transistor is provided between the gate layer 4 and the source region 5 and the gate layer 4.
N-p ⁺ junctions are formed between the gate electrode and the drain region 6, and these junction regions have problems such as a cause of gate leakage and an increase in gate capacitance. Further, the impurity concentration of the gate layer 4 in the conventional tunnel transistor is
Channel layer 2 / drain region 6 by voltage of gate layer 4
Since the modulation characteristics of the inter-band tunnel current between the channel layer and the source region 5 may be adversely affected, the impurity concentration of the channel layer 5 must be set lower. Therefore, there is a limit in improving the modulation characteristic of the interband tunnel current by the voltage of the gate layer 4.

[0010]

SUMMARY OF THE INVENTION An object of the present invention is to improve the above-mentioned disadvantages of the prior art, and in particular, to eliminate the junction region between the gate layer and the source region and the junction region between the gate layer and the drain region. Accordingly, a novel tunnel transistor with less gate leakage and gate capacitance and a method for manufacturing the same are provided.

[0011]

SUMMARY OF THE INVENTION The present invention basically employs the following technical configuration to achieve the above object. That is, a first aspect of the tunnel transistor according to the present invention is a tunnel transistor in which a channel layer is formed between a source region and a drain region, and a gate layer is formed on the channel layer via an insulating layer. , The first provided on the substrate
A conductive type channel layer, an insulating layer provided on the channel layer and formed in an inverted mesa structure, and a degenerated semiconductor having a second conductive type different from the first conductive type. A gate layer formed on the insulating layer, a drain region that is in contact with one side surface of the channel layer, and that is formed on the substrate and is made of a degenerated semiconductor of the second conductivity type; A source region that is in contact with the other side surface of the channel layer and that is formed of the degenerated semiconductor of the second conductivity type formed on the substrate, and is provided on the source region, the gate layer, and the drain region, respectively. Source electrode,
The second aspect is characterized in that the channel layer is constituted by a gate electrode and a drain electrode.
It is characterized by being formed in a mesa structure ,
In a third mode, a channel is provided between the source region and the drain region.
A channel layer, and an insulating layer on the channel layer.
Tunnel transistor with gate layer formed through
In the above, it is provided on a substrate and formed in an inverted mesa structure.
A channel layer of the first conductivity type, and
And a second conductive layer different from the first conductive type.
It is made of a degenerated semiconductor having a conductivity type, and is formed on the insulating layer.
On the formed gate layer and on one side of the channel layer
The second conductive layer contacting and formed on the substrate
A drain region comprising a degenerated semiconductor;
Contact the other side of the tunnel layer and form on the substrate
It has been the second conductivity type degenerate semiconductor or Ranaru saw
Source region, the gate region, and the drain region.
A source electrode, a gate electrode, and a drain provided respectively on the
And an electrode.

In a first aspect of the method for manufacturing a tunnel transistor according to the present invention, a channel layer is formed between a source region and a drain region, and a gate layer is formed on the channel layer via an insulating layer. A step of forming a stacked structure by sequentially stacking the channel layer and the insulating layer on the substrate; and forming a drain region portion and a source region of the stacked structure. And the exposed side surface of the insulating layer has an inverted mesa structure.
A second step of forming the second conductive type to have a thickness not exceeding the sum of the thickness of the channel layer and the thickness of the insulating layer on the substrate processed in the second step. A third step of forming the drain region, the source region, and the gate layer by a degenerated semiconductor of the above;
Which is characterized in that a fourth step of forming a gate electrode and a drain electrode respectively, The second aspect, before SL in the third step, the molecular-beam crystal growth method on the substrate The drain region, the source region, and the gate region made of the degenerated semiconductor of the second conductivity type are simultaneously buried.

[0013]

DETAILED DESCRIPTION OF THE INVENTION A tunnel transistor according to the present invention has a channel layer formed between a source region and a drain region, and a gate layer formed on the channel layer via an insulating layer. A channel layer of a first conductivity type provided on a substrate;
An insulating layer provided on the channel layer, a degenerated semiconductor having a second conductivity type different from the first conductivity type and formed on the insulating layer, And a drain region formed of the degenerated semiconductor of the second conductivity type formed on the substrate, and the other side surface of the channel layer, and on the substrate. A source region formed of the degenerated semiconductor of the second conductivity type, and source electrodes respectively provided on the source region, the gate layer, and the drain region;
It is composed of a gate electrode and a drain electrode.

Therefore, in the tunnel transistor of the present invention, since the gate layer / source region and the junction region between the gate layer / drain region are eliminated, gate leakage and gate capacitance can be reduced. Further, since the drain region and the source region are in contact only with the side surfaces of the channel layer,
The carrier concentration of the gate layer can be made high regardless of the concentration of the channel layer, and the modulation characteristic of the interband tunnel current can be improved.

In a method of manufacturing a tunnel transistor according to the present invention, a channel layer is formed between a source region and a drain region, and a gate layer is formed on the channel layer via an insulating layer. In the method for manufacturing a transistor, a first step of sequentially laminating the channel layer and the insulating layer on the substrate to form a laminated structure, and forming a part to be a drain region and a part to be a source region of the laminated structure The second to remove each and expose the substrate
And the drain region of the second conductivity type degenerated semiconductor having a thickness not exceeding the sum of the thickness of the channel layer and the thickness of the insulating layer on the substrate processed in the second step. And a third forming the source region and the gate layer
And a fourth step of forming the source electrode, the gate electrode, and the drain electrode, respectively. In the second step, at least the exposed insulating layer Is formed so that the side surface has an inverted mesa structure. Therefore, when embedding the source region and the drain region, the lamination in the side surface region other than the channel layer can be prevented.

Further, since not only the drain region but also the source region are formed in a self-aligned manner with respect to the side surface of the channel layer, the fabrication is easy and the negative resistance characteristic appears regardless of the bias direction of the drain.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, specific examples of a tunnel transistor and a method of manufacturing the same according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a view showing the structure of a tunnel transistor according to the present invention and a method of manufacturing the same according to the present invention. In FIG. 1, a channel layer is provided between a source region and a drain region. In a tunnel transistor formed and having a gate layer formed on the channel layer via an insulating layer, a first conductive type channel layer 2 provided on a substrate 1 and a channel layer provided on the channel layer 2 are provided. Insulating layer 3
A gate layer 4 formed on the insulating layer 3 and having a second conductivity type different from the first conductivity type and in contact with one side surface 2 a of the channel layer 2. The drain region 6 made of a degenerated semiconductor of the second conductivity type formed on the substrate 1 and the other side surface 2b of the channel layer 2;
A source region 5 made of a degenerated semiconductor of the second conductivity type formed thereon, and a source electrode 7, a gate electrode 8 and a drain electrode provided on the source region 5, the gate layer 4 and the drain region 6, respectively. 9 shows a tunnel transistor configured such that the drain region 6 and the source region 5 are in contact with the channel layer 2 and are not in contact with the gate layer 4.

Hereinafter, the present invention will be described in more detail. In FIG. 1, the same components as those in FIG. 3 are denoted by the same reference numerals, and description thereof will be omitted. In FIG. 1, a channel layer 2, an insulating layer 3, and a gate layer 4 are stacked on a substrate 1. Further, the source region 5 and the drain region 6
Are provided on one side and the other side of the channel layer 2, respectively. Further, a gate electrode 8, a source electrode 7, and a drain electrode 9 are formed on the gate layer 4, the source region 5, and the drain region 6.

Next, the manufacturing method of this embodiment will be described. In this specific example, for example, i-InP,
N ⁺ -InGaAs for the channel layer 2 and AlG for the insulating layer 3
aAs, gate layer 4, drain region 6, and source region 5
P ⁺ -InGaAs, Au for the gate electrode 8, and AuZn for the source electrode 7 and the drain electrode 9.

First, on the semi-insulating InP substrate 1,
0 nm i-InAlAs, 12 nm thick n ⁺ -In
The channel layer 2 of GaAs (Si = 8 × 10 ¹⁸ cm ⁻³ ) and the insulating layer 3 of AlGaAs having a thickness of 50 nm are formed of MB.
The layers are grown by applying the E method to obtain their laminated structures. Subsequently, the drain region 6 and the source region 5 in the laminated structure
In order to form each, a layered structure portion to be a drain formation region and a source region on the substrate is removed by etching,
Be-doped p ⁺ -InGaAs is formed on the substrate after the removal.
(Be = 8 × 10 ¹⁹ cm ⁻³ ) is buried by a solid metal source MBE method, and a drain region 6, a source region 5, and a gate layer 4 are formed as shown in FIG.

Next, AuZn is converted to the above p ⁺ -InGaAs.
On the s drain region 6 and the p ⁺ -InGaAs source region 5
A drain electrode 9 and a source electrode 7 are formed by alloying at 410 ° C., respectively. Finally, Au is formed as the gate electrode 8 on the gate layer 4 to complete the manufacture of the tunnel transistor of this example. Next, the operation of the tunnel transistor of this specific example will be described.

In this specific example, the source region 5 and the drain region 6 are degenerate semiconductors formed in a cell-aligned manner with respect to the gate layer 4, and are formed between the channel layer 2 and the source region 5, An n ⁺ -P ⁺ tunnel junction is formed between the drain regions 6. One of these two tunnel junctions is a reverse bias having a low resistance value, and the other is a forward bias having a negative resistance characteristic.
Therefore, when a positive voltage is applied to the gate electrode 8, a negative resistance characteristic appears irrespective of the bias direction of the drain similarly to the Esaki diode.

Since the n-p ⁺ junction regions between the gate layer 4 and the source region 5 and between the gate layer 4 and the drain region 6 in the transistor shown in FIG. Gate leakage and gate capacitance can be greatly reduced. Since the carrier concentration of the gate layer 4 can be increased irrespective of the carrier concentration of the channel layer 2, the channel layer 2.
The modulation characteristics of the inter-band tunnel current between the drain region 6 and between the channel layer 2 and the source region 5 can be improved. According to the tunnel transistor manufactured in this manner, transistor characteristics having clear negative resistance characteristics in both directions of the drain bias were obtained, and the gate leak current was reduced to 1/10 or less as compared with the conventional structure.

As described above, according to the method for manufacturing a tunnel transistor of the present invention, the first step of sequentially laminating the channel layer 2 and the insulating layer 3 on the substrate 1 to form a laminated structure; A second step of exposing the substrate 1 by removing a portion serving as a drain region and a portion serving as a source region of the structure; and forming a film thickness of the channel layer 2 and an insulating layer on the substrate processed in the second step. A third step of forming the drain region 6, the source region 5, and the gate layer 4 by the degenerate semiconductor of the second conductivity type having a thickness t not exceeding the sum T of the thickness of the gate electrode 4. A fourth electrode for forming the source electrode 7, the gate electrode 8 and the drain electrode 9;
In the third step, the drain region 6 of the second conductive type degenerated semiconductor is formed on the substrate 1 by a molecular beam crystal growth method. The source region 5 and the gate region 8 are respectively buried at the same time.

(Second Embodiment) FIG. 2 is a view showing the structure of a second embodiment of a tunnel transistor and a method for manufacturing the same according to the present invention. A tunnel transistor formed in a mesa structure is shown,
A tunnel transistor in which the channel layer 2 is formed in an inverted mesa structure is shown.

Hereinafter, the second specific example will be described in more detail with reference to FIG. In FIG. 2, FIG.
The same reference numerals are given to the same components as those in FIG. In this specific example, since the shape of the side surface of the portion serving as the drain region and the source region has an inverted mesa structure, it is characterized in that the lamination in the side surface region other than the channel layer which causes gate leakage is prevented.

The operation principle of the second embodiment is the same as that of the first embodiment, and the n ⁺ -formed between the channel layer 2 and the source region 5 and between the channel layer 2 and the drain region 6.
Due to the p ⁺ tunnel junction, a negative resistance characteristic appears regardless of the drain bias direction. Next, a manufacturing method of this specific example will be described. In this specific example, for example, the substrate 1
I-InP, n ⁺ -InGaAs for the channel layer 2, AlGaAs for the insulating layer 3, P ⁺ -InGaAs for the gate layer 4, the drain region 6 and the source region 5, Au for the gate electrode 8, source electrode 7 and the drain electrode, respectively. Au on 9
It is assumed that Zn is used.

First, on the semi-insulating InP substrate 1,
0 nm i-InAlAs, 12 nm thick n ⁺ -In
The channel layer 2 of GaAs (Si = 8 × 10 ¹⁸ cm ⁻³ ) and the insulating layer 3 of AlGaAs having a thickness of 50 nm are formed of MB.
Each layer is grown by applying the E method to obtain a laminated structure thereof. Subsequently, in order to form the drain region 6 and the source region 5 in the laminated structure, a portion of the laminated structure to be a drain forming region and a source region on the substrate is etched away. At this time, the shape of the side surface is to prevent lamination on the side surface region other than the channel layer which causes the gate leakage.
It has an inverted mesa structure. Be-doped p ⁺ on the substrate after removal
-InGaAs (Be = 8 × 10 ¹⁹ cm ⁻³ ) is buried by a solid metal source MBE method, and a drain region 6, a source region 5, and a gate layer 4 are formed as shown in FIG.

Next, AuZn is converted to the above p ⁺ -InGaAs.
On the s drain region 6 and the p ⁺ -InGaAs source region 5
A drain electrode 9 and a source electrode 7 are formed by alloying at 410 ° C., respectively. Finally, Au is formed as the gate electrode 8 on the gate layer 4 to complete the manufacture of the tunnel transistor of this example. According to the tunnel transistor thus formed, the gate leakage is greatly reduced, and the leakage current is reduced by one in comparison with the conventional structure.
/ 50 or less.

The present invention is not limited to the above.
For example, the formation of drain and source regions
Injection method may be used. In addition, as a semiconductor material such as a substrate
Is GaAs, Si, Ge, SiGe, I other than InP
Other semiconductors such as nP, InGaAs, and GaSb may be used.
No. The insulating layer 3 is made of G in addition to AlGaAs.
aAs, InAlAs, InP
Other semiconductors, SiO _Two, Si_ThreeN_Four, AlN, etc.
It may be an edge.

Further, as a material of the gate electrode 8, other metal material that forms an ohmic junction with the gate layer 4, or a low-resistance semiconductor material other than Au may be used. Also,
In the above specific example, the conductivity type of the channel layer 2 has been described as n-type, but this may be p-type. However, in this case, the other regions also need to be of the opposite conductivity type to the above specific example.

[0032]

Since the tunnel transistor and the method of manufacturing the same according to the present invention are constructed as described above, the junction region between the gate layer and the source / drain region is eliminated. And gate capacitance can be greatly reduced.

Further, in the tunnel transistor of the present invention, since the drain region and the source region are in contact only with the side surfaces of the channel layer, the carrier concentration of the gate layer can be increased, and the modulation characteristics of the interband tunnel current can be improved. Can be improved. Further, in the tunnel transistor of the present invention, the shape of the side surface of the portion serving as the drain region and the side surface of the portion serving as the source region has an inverted mesa structure.
When the source region and the drain region are buried, stacking in side regions other than the channel layer can be prevented, and gate leakage can be reduced.

Further, according to the method for manufacturing a tunnel transistor of the present invention, not only the drain region but also the source region are formed in a self-alignment manner with respect to the side surface of the channel layer, so that the manufacturing is easy and the drain bias is improved. Negative resistance characteristics appear regardless of the direction. As described above, according to the present invention, the reality of the fine structure and the reduction of the gate leak and the gate capacitance are easy, and an ultra-high-integration and ultra-high-speed functional circuit can be realized.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a layer structure of a first specific example of the present invention.

FIG. 2 is a schematic diagram showing a layer structure of a second specific example of the present invention.

FIG. 3 is a schematic diagram showing a conventional layer structure.

[Explanation of symbols]

 Reference Signs List 1 substrate 2 channel layer 3 insulating layer 4 gate layer 5 source region 6 drain region 7 source electrode 8 gate electrode 9 drain electrode

──────────────────────────────────────────────────続 き Continued on the front page (58) Fields surveyed (Int. Cl. ⁷ , DB name) H01L 29/78 H01L 21/336

Claims (5)

(57) [Claims] In a tunnel transistor, a channel layer is formed between a source region and a drain region, and a gate layer is formed on the channel layer via an insulating layer. A channel layer of the first conductivity type, an insulating layer provided on the channel layer and having an inverted mesa structure, and a degenerated semiconductor having a second conductivity type different from the first conductivity type. A gate layer formed on the insulating layer, and a drain region which is in contact with one side surface of the channel layer and is made of a degenerated semiconductor of the second conductivity type formed on the substrate. A source region that is in contact with the other side surface of the channel layer and that is formed on the substrate and is made of a degenerated semiconductor of the second conductivity type;
A tunnel transistor comprising: a source electrode, a gate electrode, and a drain electrode provided on the source region, the gate layer, and the drain region, respectively. 2. The semiconductor device according to claim 1, wherein said channel layer has an inverted mesa structure.
The tunnel transistor according to claim 1, wherein:
Ta. (3)There is a chip between the source and drain regions.
A channel layer is formed, and an insulating layer is formed on the channel layer.
Through which a gate layer is formed through a tunnel transistor
In A first conductor provided on a substrate and formed in an inverted mesa structure;
And a conductive channel layer, and an insulating layer provided on the channel layer.
An edge layer having a second conductivity type different from the first conductivity type;
Made of a degenerated semiconductor and formed on the insulating layer
Contacting the gate layer with one side surface of the channel layer;
Degeneration of the second conductivity type formed on the substrate
A drain region made of a semiconductor, and the channel layer.
The other side, and formed on the substrate
A source region made of a degenerated semiconductor of the second conductivity type;
Provided on the source region, the gate layer and the drain region, respectively.
Source electrode, gate electrode and drain electrode
A tunnel transistor, comprising: (4)There is a chip between the source and drain regions.
A channel layer is formed, and an insulating layer is formed on the channel layer.
Through which the gate layer is formed Transis
In the method of manufacturing The channel layer and the insulating layer are sequentially laminated on the substrate.
A first step of forming a laminated structure by A part to be a drain region and a source region of the stacked structure
While exposing the substrate by removing
The exposed side surface of the insulating layer is formed to have an inverted mesa structure.
A second step to be performed; Forming a channel layer on the substrate processed in the second step;
The second film thickness not exceeding the sum of the film thickness and the film thickness of the insulating layer.
The drain region of the conductive type degenerated semiconductor and the
A third step of forming a source region and the gate layer; The source electrode, the gate electrode and the drain electrode
And a fourth step of forming the tunnel.
Manufacturing method of transistor. 5. The method according to claim 3, wherein the third step is a method of growing a molecular beam crystal.
A degenerate semiconductor of the second conductivity type on the substrate by a method
The drain region, the source region, and the gate
And embedding each of them at the same time.
A method for manufacturing a tunnel transistor according to claim 4.