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JP2794306B2 - Magnetic garnet material and Faraday rotating element - Google Patents

Magnetic garnet material and Faraday rotating element

Info

Publication number
JP2794306B2
JP2794306B2 JP1171210A JP17121089A JP2794306B2 JP 2794306 B2 JP2794306 B2 JP 2794306B2 JP 1171210 A JP1171210 A JP 1171210A JP 17121089 A JP17121089 A JP 17121089A JP 2794306 B2 JP2794306 B2 JP 2794306B2
Authority
JP
Japan
Prior art keywords
faraday
rare earth
substituted
elements
faraday rotator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1171210A
Other languages
Japanese (ja)
Other versions
JPH0336516A (en
Inventor
和人 山沢
信治 岩塚
義和 成宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP1171210A priority Critical patent/JP2794306B2/en
Publication of JPH0336516A publication Critical patent/JPH0336516A/en
Application granted granted Critical
Publication of JP2794306B2 publication Critical patent/JP2794306B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/34Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials non-metallic substances, e.g. ferrites
    • H01F1/342Oxides
    • H01F1/344Ferrites, e.g. having a cubic spinel structure (X2+O)(Y23+O3), e.g. magnetite Fe3O4
    • H01F1/346[(TO4) 3] with T= Si, Al, Fe, Ga

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  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Soft Magnetic Materials (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は磁性ガーネット材料、これを使用したファラ
デー回転素子、及びこのファラデー回転素子を使用して
反射雑音を除去した光アイソレータに関する。
Description: TECHNICAL FIELD The present invention relates to a magnetic garnet material, a Faraday rotator using the same, and an optical isolator using the Faraday rotator to eliminate reflection noise.

(従来技術) 半導体レーザーを使用した光通信、光計測機器等にお
ける反射雑音の除去のため、光アイソレータの使用が提
案されている。光アイソレータは半導体レーザーの光路
にファラデー回転素子を挿入し、反射光の偏光面を元の
光の偏光面に対してほぼ90°回転させることにより反射
光を除去する装置である。すなわち、ファラデー回転素
子は外部磁場の大きさにより偏光面を回転させる作用が
ある磁気光学素子であるため、素子の厚さ及び外部磁界
を調節して透過光の偏光面を約45°回転するように調節
しておくと、行きと戻りで偏光面が約90°回転する。従
って波長が固定されているレーザー光の反射雑音の除去
に最適であり、又異なった波長のレーザ光に対して適応
できる様に容易に調整出来る。
(Prior Art) The use of an optical isolator has been proposed for removing reflected noise in optical communication using a semiconductor laser, optical measurement equipment, and the like. An optical isolator is a device that removes reflected light by inserting a Faraday rotator into the optical path of a semiconductor laser and rotating the plane of polarization of the reflected light by approximately 90 ° with respect to the plane of polarization of the original light. In other words, since the Faraday rotator is a magneto-optical element having a function of rotating the plane of polarization according to the magnitude of the external magnetic field, the thickness of the element and the external magnetic field are adjusted to rotate the plane of polarization of the transmitted light by about 45 °. If it is adjusted to, the plane of polarization will rotate about 90 ° between going and returning. Therefore, it is optimal for removing reflection noise of laser light having a fixed wavelength, and can be easily adjusted so as to be adaptable to laser lights of different wavelengths.

光アイソレータ用のファラデー回転素子(磁気光学素
子)の主なものにはYIG系のバルク単結晶、およびBi置
換型稀土類鉄ガーネットが知られている。
As main Faraday rotators (magneto-optical elements) for optical isolators, YIG-based bulk single crystals and Bi-substituted rare earth iron garnets are known.

YIG系のファラデー回転素子は温度および光の波長似
対して回転角の変化が小さいという利点を有するもの
の、ファラデー回転能が小さく(YIG単結晶で約220°/c
m)、結晶径が小さく(12mm以下)生産性が悪いといっ
た問題がある。このため実用的にはファラデー回転能が
大きく、結晶径を大きくでき(50mmφ以上)、しかも薄
型で良いBi置換型稀土類鉄ガーネットが主流となってい
る。本発明はこの系統のファラデー回転素子の改良に関
する。
The YIG-based Faraday rotator has the advantage of a small change in rotation angle with respect to temperature and light wavelength, but has a small Faraday rotator (about 220 ° / c for a YIG single crystal).
m), the crystal diameter is small (12 mm or less), and the productivity is poor. For this reason, practically, Bi-substituted rare earth iron garnets which have a large Faraday rotation capability, a large crystal diameter (50 mmφ or more), and are thin and good are mainly used. The present invention relates to an improvement of this type of Faraday rotator.

(解決すべき問題点) しかし、Bi置換型稀土類鉄ガーネットはファラデー回
転能が大きい反面回転角の温度変化および波長変化が大
きくなり、温度や波長の違いにより回転角に大きな偏差
が生じる。この問題を解決するために従来から様々な提
案が成されているが、十分に満足の行くBi置換型稀土類
鉄ガーネット材料によるファラデー回転素子は提案され
ていない。温度係数を減少する試みとしては、Biの一部
をTb、Dy等により置換する方法がある。これにより回転
角の温度係数が減少したが、Biの減少によりファラデー
回転能が減少し、その分だけ結晶の厚みを大きくする必
要がある。
(Problems to be Solved) However, Bi-substituted rare earth iron garnet has a large Faraday rotation ability, but a large change in temperature and wavelength of the rotation angle, and a large deviation in the rotation angle due to the difference in temperature and wavelength. Various proposals have hitherto been made to solve this problem, but no satisfactory Faraday rotator made of a Bi-substituted rare earth iron garnet material has been proposed. As an attempt to reduce the temperature coefficient, there is a method of replacing a part of Bi with Tb, Dy, or the like. As a result, the temperature coefficient of the rotation angle decreased, but the Faraday rotation ability decreased due to the decrease in Bi, and it was necessary to increase the crystal thickness accordingly.

(発明が解決しようとする問題点) Tb等を添加したBi置換型稀土類鉄ガーネット材料は、
上記のように厚膜化する必要があるが、厚膜化により割
れ(クラック)の問題が生じ、製品の歩留まりが低下
し、総合的に製品の歩留まりを低下させた。すなわち、
この種のファラデー回転素子はGGG(Gd3Ga5O12又はそれ
らの成分の一部を他の元素で置換したもの)基板が使用
されるが、Tb等を添加したBi置換型稀土類鉄ガーネット
材料と基板との熱膨張係数の差が大きく、例えば200μ
m以上、特に400μm以上の厚さに結晶を成長させると
外周部に行くほど同心円状の割れを小異、表面研摩のの
ちにも外周部側に溝を残し、直径約50mm、回転角45°相
当厚さに研摩し、ついで切り出して採取できる内側部分
の面積が限定され、そのため総合的に歩留まりを減じ
る。
(Problems to be Solved by the Invention) Bi-substituted rare earth iron garnet materials to which Tb or the like is added
Although it is necessary to increase the film thickness as described above, the problem of cracks occurs due to the increase in the film thickness, and the product yield is reduced, and the product yield is reduced overall. That is,
This type of Faraday rotator uses a GGG (Gd 3 Ga 5 O 12 or one in which some of these components are replaced with other elements) substrate, but a Bi-substituted rare earth iron garnet to which Tb or the like is added. The difference in thermal expansion coefficient between the material and the substrate is large, for example, 200μ
When growing the crystal to a thickness of 400 m or more, especially 400 μm or more, concentric cracks are slightly different as it goes to the outer circumference, leaving a groove on the outer circumference side after surface polishing, diameter about 50 mm, rotation angle 45 ° The area of the inner part which can be polished to a considerable thickness and then cut out and collected is limited, thereby reducing the overall yield.

割れの問題を解決する試みとしては、基板に初めから
割れ故意に入れてBi置換型稀土類鉄ガーネット結晶膜中
の不規則な割れを制限する方法があるが(特開昭62−29
2694号)本質的な解決にはならない。また材料の異なっ
た2層以上の積層を行なうことも提案されているが(特
開昭63−69799号、同63−270396号、特開昭63−110417
号)、工程が複雑になり好ましくない。その他、厚膜の
Bi置換型稀土類鉄ガーネット材料に言及のある文献は多
数存在するが、割れの問題を検討又は認識しておらず
(例えば特開昭63−159225号・・・・900μの膜厚に言
及があるが組成および製法から見て割れの問題は回避で
きないはず)、割れの問題を検討したら厚膜化には限界
があったはずである。
As an attempt to solve the cracking problem, there is a method of intentionally cracking the substrate from the beginning to limit irregular cracking in the Bi-substituted rare earth iron garnet crystal film (Japanese Patent Laid-Open No. Sho 62-29).
No. 2694) It is not an essential solution. It has also been proposed to laminate two or more layers of different materials (JP-A-63-69799, JP-A-63-270396, JP-A-63-110417).
No.), and the process becomes complicated, which is not preferable. Other, thick film
Although there are a large number of references mentioning Bi-substituted rare earth iron garnet materials, they have not examined or recognized the problem of cracking (for example, Japanese Patent Application Laid-Open No. 63-159225 ... However, the problem of cracking cannot be avoided from the viewpoint of the composition and the production method), but if the problem of cracking is considered, there must have been a limit to thickening the film.

(発明の目的) 従って、本発明の目的は、磁性ガーネット材料、これ
を使用したファラデー回転素子、及びこのファラデー回
転素子を使用して反射雑音を除去した光アイソレータに
において、厚膜化による割れ(クラック)の問題を解決
し、製品の歩留りを向上させることにある。
(Object of the Invention) Accordingly, an object of the present invention is to provide a magnetic garnet material, a Faraday rotator using the same, and an optical isolator that uses the Faraday rotator to eliminate reflection noise, thereby increasing the crack ( The problem is to solve the problem of (crack) and improve the yield of products.

(発明の概要) 本発明の磁性ガーネット材料は、 BixNdyTbzA3-x-y-zFe5-wBwO12 なる化学式で表わされる組成を有する磁性ガーネット材
料(ただしAはBi、Nd、およびTbに置換し得る他の稀土
類元素及びY等の元素より成る群から選ばれる一種以上
の元素であり、BはFeに置換し得るSc、Ga、Al、In等の
元素より成る群から選んだ一種以上の元素であり、また
x、y、z、wは 0.5 ≦x≦1.0 0.05≦y≦0.5 1.5 ≦z≦2.45 0 ≦w≦0.5 を満足する数値である)である。
Magnetic garnet material (SUMMARY OF THE INVENTION) The present invention, Bi x Nd y Tb z A 3-xyz Fe 5-w B w O 12 becomes a magnetic garnet material (wherein A having a composition represented by the chemical formula Bi, Nd, And at least one element selected from the group consisting of other rare earth elements and Y and the like which can be substituted for Tb, and B is a group consisting of elements such as Sc, Ga, Al and In which can be substituted for Fe. X, y, z, and w are values satisfying 0.5 ≦ x ≦ 1.0 0.05 ≦ y ≦ 0.5 1.5 ≦ z ≦ 2.45 0 ≦ w ≦ 0.5).

本発明のファラデー回転素子は上記材料を使用した光
学素子である。
The Faraday rotation element of the present invention is an optical element using the above-mentioned material.

本発明のアイソレータはこのファラデー回転素子を光
学伝送系に組み込んでなる装置である。
The isolator of the present invention is a device in which this Faraday rotator is incorporated in an optical transmission system.

本発明によると、厚膜形成、特に700μm以上の膜を
形成しても割れの問題が生じないから、品質が安定化
し、製品の歩留まりが向上する。
According to the present invention, cracking does not occur even when a thick film is formed, particularly when a film having a thickness of 700 μm or more is formed, so that the quality is stabilized and the product yield is improved.

(発明の具体的な説明) 本発明は従来公知のBi置換型稀土類鉄ガーネットの、
改良に関するものであり、その基本的な組成は公知であ
る。すなわち、本発明で基本組成として使用するBi置換
型稀土類鉄ガーネットは BixTbzA3-x-y-zFe5-wBwO12 で表わされる。ここにAは零(特開昭62−105931号)又
は少量のGd(特開昭63−35421号)、La(特開昭63−159
225号)、Yb(特開昭62−288199号)、Pr(特開昭64−3
6005号)の一種以上であり、又Bは零又は少量のAl、G
a、In、Sc等の少なくとも一種である。これらの成分の
添加理由及び量についてをそれぞれの文献を参照された
い。本発明のx,z及びwに関しては大体従来の選択基準
が成り立つ。
(Specific Description of the Invention) The present invention relates to a conventionally known Bi-substituted rare earth iron garnet,
It relates to improvements, the basic composition of which is known. That, Bi substituted rare earth iron garnet used as a basic composition in the present invention is represented by Bi x Tb z A 3-xyz Fe 5-w B w O 12. Here, A is zero (JP-A-62-105931) or a small amount of Gd (JP-A-63-35421), La (JP-A-63-15921).
225), Yb (JP-A-62-288199), Pr (JP-A-64-3)
No. 6005) and B is zero or a small amount of Al, G
a, In, Sc, etc. Refer to the respective documents for reasons and amounts of addition of these components. With respect to x, z and w in the present invention, generally conventional selection criteria hold.

本発明では厚膜を成膜する際に生じ得る割れ(クラッ
ク)の問題を解決するためにさらにNdを添加することを
特徴とする。上に見た様に、稀土類金属元素を添加して
ファラデー回転能等を改善することは従来提案されてい
るが、具体的にNdを添加する例はいかなる目的にも従来
の文献には記載がないし、まして、本発明の主題である
割れを抑制又は防止するための手段として何の示唆もな
い。
The present invention is characterized in that Nd is further added in order to solve the problem of cracks that can occur when forming a thick film. As seen above, it has been proposed to add a rare earth metal element to improve the Faraday rotability, etc., but specific examples of adding Nd are described in conventional literature for any purpose. And there is no suggestion as a means to control or prevent cracking which is the subject of the present invention.

より具体的には、本発明は BixNdyTbzA3-x-y-zFe5-wBwO12 なる化学式で表わされる磁性ガーネット材料、それを使
用したファラデー回転素子、及びそれを使用したアイソ
レータ(ただしAはBi、Nd、およびTbに置換し得る他の
稀土類元素及びY等の元素より成る群から選ばれる一種
以上の元素であり、BはFeに置換し得るSc、Ga、Al、In
等の元素より成る群から選んだ一種以上の元素であり、
またx、y、z、wは 0.5 ≦x≦1.0 0.05≦y≦0.5 1.5 ≦z≦2.45 0 ≦w≦0.5 を満足する数値である)。
More specifically, the present invention relates to a magnetic garnet material represented by the chemical formula of Bi x Nd y Tb z A 3-xyz Fe 5-w B w O 12, a Faraday rotating element using the same, and an isolator using the same. (Where A is one or more elements selected from the group consisting of other rare earth elements which can be substituted for Bi, Nd, and Tb and elements such as Y, and B is Sc, Ga, Al, which can be substituted for Fe, In
One or more elements selected from the group consisting of
X, y, z, and w are numerical values satisfying 0.5 ≦ x ≦ 1.0 0.05 ≦ y ≦ 0.5 1.5 ≦ z ≦ 2.450 ≦ w ≦ 0.5).

上記の組成においてx、y、z及びwの範囲を限定し
た理由は次ぎの通りである。
The reasons for limiting the ranges of x, y, z and w in the above composition are as follows.

xは少なすぎるとファラデー回転能が低下し、多すぎ
るとファラデー回転角の温度変化及び波長変化が大きく
なるためである。yは少なすぎると割れ防止に対する効
果がなく、多すぎると光吸収損失が大きくなるためであ
る。zは少なすぎると温度安定性を欠き、多すぎるとフ
ァラデー回転能が低下するためである。
If x is too small, the Faraday rotation ability decreases, and if it is too large, the temperature change and wavelength change of the Faraday rotation angle increase. If y is too small, there is no effect on crack prevention, and if y is too large, light absorption loss increases. If z is too small, the temperature stability is lost, and if it is too large, the Faraday rotation ability is reduced.

本発明では組成及び成分比率を上記の範囲にすること
により、ファラデー回転能が温度安定化剤あるTbの添加
によって低下した分を補うに充分な厚さを、割れの問題
を生じないで達成することが出来る。本発明によると、
ある組成において直径50mmのGGG基体に厚さ約500μmで
膜形成したときに、割れもスワールも生じないこと、そ
のため歩留まり100%が達成出来ることが分かった。
In the present invention, by setting the composition and the component ratio in the above ranges, a thickness sufficient to compensate for the decrease in the Faraday rotation ability due to the addition of the temperature stabilizer Tb is achieved without causing a cracking problem. I can do it. According to the present invention,
It was found that when a film was formed with a thickness of about 500 μm on a GGG substrate having a diameter of 50 mm with a certain composition, neither crack nor swirl was generated, and therefore, 100% yield could be achieved.

以下に本発明の実施例を詳しく説明する。 Hereinafter, examples of the present invention will be described in detail.

実施例1、2、3、4、5、比較例1、2、3 PbO−Bi2O3−B2O3融剤を使用し、基板として格子定数
aが12.496のCa−Mg−Zr置換GGGの直径50mm単結晶板を
使用し、周知の液相エピタキシアル成長法によりこの基
板の上に次の表1ないし8に示した組成及び厚さの磁気
ガーネット膜を成膜した。次いで2種のレーザ光波長に
ついてファラデー回転能(透過長1cmあたりの偏光面の
回転角度)、温度特性(1℃あたりの偏光面の回転角度
の変動、すなわち温度係数)、波長特性(1nmあたりの
偏光面の回転角度の変動、すなわち波長係数)、割れ
(クラック、試料周辺部分における割れの深さ)、及び
スワール(うずまき状の成長模様の深さ)を測定した。
結果をこれらの表に示した。
Examples 1, 2, 3, 4, 5 and Comparative Examples 1, 2, 3 Ca—Mg—Zr substitution using a PbO—Bi 2 O 3 —B 2 O 3 flux and having a lattice constant a of 12.496 as a substrate A magnetic garnet film having the composition and thickness shown in the following Tables 1 to 8 was formed on this substrate by a well-known liquid phase epitaxial growth method using a single crystal plate of 50 mm in diameter of GGG. Next, for two types of laser light wavelengths, the Faraday rotation ability (rotation angle of the polarization plane per 1 cm of transmission length), temperature characteristics (fluctuation of the rotation angle of the polarization plane per 1 ° C., ie, temperature coefficient), and wavelength characteristics (per 1 nm) The variation of the rotation angle of the polarization plane, that is, the wavelength coefficient, the cracks (cracks, the depth of the cracks around the sample), and the swirl (the depth of the spiral growth pattern) were measured.
The results are shown in these tables.

(作用効果) 表から、本発明によるとNdを添加すると、割れ及びス
ワールが著しく改善されるることが分かる。Ndの添加に
よりファラデー回転能は低下するが厚さを増すことによ
り容易に補償することが出来る。スワールの部分は表面
研磨により簡単に除くことが出来ためファラデー回転素
子を歩留まり100%で切り出すことが出来る。
(Effects) From the table, it can be seen that cracking and swirl are significantly improved by adding Nd according to the present invention. The addition of Nd lowers the Faraday rotatory power, but can be easily compensated for by increasing the thickness. Since the swirl portion can be easily removed by surface polishing, the Faraday rotator can be cut out at a yield of 100%.

更に温度特性及び波長特性は従来と遜色のないことが
分かる。
Further, it can be seen that the temperature characteristics and the wavelength characteristics are not inferior to those of the related art.

フロントページの続き (58)調査した分野(Int.Cl.6,DB名) G02F 1/09 - 1/095 G02B 27/28 C30B 28/00 - 35/00 H01F 1/12 - 1/375 H01F 10/00 - 10/30 H01F 41/14 - 41/28 G11B 11/00 - 13/06 G01R 33/00 - 33/64 G01R 15/00 - 17/22 CA(STN) REGISTRY(STN)Continuation of the front page (58) Field surveyed (Int.Cl. 6 , DB name) G02F 1/09-1/095 G02B 27/28 C30B 28/00-35/00 H01F 1/12-1/375 H01F 10 / 00-10/30 H01F 41/14-41/28 G11B 11/00-13/06 G01R 33/00-33/64 G01R 15/00-17/22 CA (STN) REGISTRY (STN)

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】BixNdyTbzA3-x-y-zFe5-wBwO12なる化学式
で表わされる組成を有する磁性ガーネット材料(ただし
AはBi、Nd、およびTbに置換し得る他の稀土類元素及び
Yより成る群から選ばれる一種以上の元素であり、Bは
Feに置換し得るSc、Ga、Al、In等の元素より成る群から
選んだ一種以上の元素であり、またx、y、z、wは 0.5 ≦x≦1.0 0.05≦y≦0.5 1.5 ≦z≦2.45 0 ≦w≦0.5 を満足する数値である)。
1. A magnetic garnet material having a composition represented by the chemical formula of Bi x Nd y Tb z A 3-xyz Fe 5-w B w O 12 (where A is Bi, Nd, and other R is at least one element selected from the group consisting of rare earth elements and Y, and B is
At least one element selected from the group consisting of elements such as Sc, Ga, Al, and In which can be substituted for Fe, and x, y, z, and w are 0.5 ≦ x ≦ 1.0 0.05 ≦ y ≦ 0.5 1.5 ≦ z ≦ 2.45 0 ≦ w ≦ 0.5).
【請求項2】BixNdyTbzA3-x-y-zFe5-wBwO12なる化学式
で表わされるファラデー回転素子(ただしAはBi、Nd、
およびTbに置換し得る他の稀土類元素及びYより成る群
から選ばれる一種以上の元素であり、BはFeに置換し得
るSc、Ga、Al、In等の元素より成る群から選んだ一種以
上の元素であり、またx、y、z、wは 0.5 ≦x≦1.0 0.05≦y≦0.5 1.5 ≦z≦2.45 0 ≦w≦0.5 を満足する数値である)。
2. A Faraday rotator represented by a chemical formula of Bi x Nd y Tb z A 3-xyz Fe 5-w B w O 12 (where A is Bi, Nd,
And at least one element selected from the group consisting of Y and other rare earth elements that can be substituted for Tb, and B is a kind selected from the group consisting of elements such as Sc, Ga, Al, and In that can be substituted for Fe. The above elements, and x, y, z and w are numerical values satisfying 0.5 ≦ x ≦ 1.0 0.05 ≦ y ≦ 0.5 1.5 ≦ z ≦ 2.450 ≦ w ≦ 0.5).
【請求項3】前記第2項記載のファラデー回転素子を用
いた光アイソレータ。
3. An optical isolator using the Faraday rotator according to claim 2.
JP1171210A 1989-07-04 1989-07-04 Magnetic garnet material and Faraday rotating element Expired - Lifetime JP2794306B2 (en)

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JP2794306B2 true JP2794306B2 (en) 1998-09-03

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