JP2657932B2 - Method for manufacturing solid electrolytic capacitor - Google Patents
Method for manufacturing solid electrolytic capacitorInfo
- Publication number
- JP2657932B2 JP2657932B2 JP32050489A JP32050489A JP2657932B2 JP 2657932 B2 JP2657932 B2 JP 2657932B2 JP 32050489 A JP32050489 A JP 32050489A JP 32050489 A JP32050489 A JP 32050489A JP 2657932 B2 JP2657932 B2 JP 2657932B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- solution
- electrolytic
- chemical
- polymerized film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Chemical Treatment Of Metals (AREA)
Description
【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は、導電性高分子膜を固体電解質として用いた
固体電解コンデンサの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial application field) The present invention relates to a method for manufacturing a solid electrolytic capacitor using a conductive polymer film as a solid electrolyte.
(従来の技術) 近年、小形高性能化の要請に応えた固体電解コンデン
サとして、特開昭60−244017号公報又は特開昭63−1813
08号公報に開示されたものがある。(Prior Art) In recent years, as a solid electrolytic capacitor responding to the demand for miniaturization and high performance, Japanese Patent Application Laid-Open No. 60-244017 or Japanese Patent Application Laid-open No.
There is one disclosed in Japanese Patent Publication No. 08-No.
これら公報に開示された技術は、表面を粗面化した弁
作用金属を化成し酸化皮膜を形成して得た陽極体を陽極
として電解液に浸漬して通電し、前記酸化皮膜上に形成
した電解重合膜を固体電解質として用いるものである
が、酸化皮膜が絶縁物であるため、陰極と効果的な通電
が行われず、酸化皮膜の欠陥部あるいは陰極との距離が
近いところに電流が集中し、固体電解質としての均一な
電解重合膜を得ることが極めて困難であった。In the technology disclosed in these publications, an anode body obtained by forming a valve action metal having a roughened surface and forming an oxide film is immersed in an electrolytic solution as an anode and energized to form an oxide film on the oxide film. Although the electropolymerized film is used as a solid electrolyte, since the oxide film is an insulator, effective energization with the cathode is not performed, and current concentrates on a defective portion of the oxide film or where the distance from the cathode is short. It has been extremely difficult to obtain a uniform electrolytic polymerized film as a solid electrolyte.
そのため、陽極体を例えばピロール溶液に浸漬し、し
かるのち酸化剤溶液に浸漬することによる化学酸化重合
手段を講じ、陽極体上にあらかじめ化学重合膜を形成
し、この化学重合膜を陽極として電解液中で電解酸化重
合を行い、化学重合膜を介して酸化皮膜と一体化した電
解重合膜を形成するようにしている。Therefore, the anode body is immersed in, for example, a pyrrole solution, and then a chemical oxidative polymerization method is performed by immersing the anode body in an oxidizing agent solution. The electrolytic oxidation polymerization is performed in the inside to form an electrolytic polymerization film integrated with the oxide film via the chemical polymerization film.
しかしながら、一般に化学酸化重合は室温下で行って
おり、このときピロール溶液−酸化剤溶液界面及びピッ
ト内での化学重合膜の形成時間に比べて酸化剤溶液中へ
のピロール溶液の流出時間が極めて短いために、酸化皮
膜表面での化学重合膜の均一で十分な形成が行われず、
容量出現率が低くなっていた。また、酸化剤溶液中に拡
散したピロールが酸化剤溶液中で重合することで形成さ
れる粒子状のポリマーが酸化皮膜表面で形成された化学
重合膜上に付着するため、化学重合膜は薄い不均一な膜
上に粒子状の突起をもった状態となる。したがって、次
工程で行う電解酸化重合は、この薄く不均一で粒子状の
突起をもった化学重合膜を陽極として行うことになる
が、電解酸化重合は電極表面の一部に突起部がある場合
にはそこに電界集中が生じ、そこに向かって電流が流れ
込み、突起部で選択的におこることになる。このため形
成された電解重合膜は非常に不均一で、非常に薄い部分
や、ややもすると形成されない部分が残されることにな
り、化学重合膜を介して平均して陽極体全表面をくるむ
状態で所望の電解重合膜が得られず、tanδ特性が悪化
し、更に、その後のグラファイト,銀ペースト層形成時
に電解重合膜の形成が不十分な部分からグラファイトや
銀ペーストが浸透して、直接酸化皮膜表面に接触するな
どして、漏れ電流特性劣化及びショート不良発生の原因
となっていた。However, in general, chemical oxidative polymerization is performed at room temperature. At this time, the outflow time of the pyrrole solution into the oxidant solution is extremely shorter than the formation time of the chemical polymerization film at the interface between the pyrrole solution and the oxidant solution and in the pits. Due to the short length, uniform and sufficient formation of the chemically polymerized film on the oxide film surface was not performed,
The capacity appearance rate was low. In addition, since the particulate polymer formed by the polymerization of pyrrole diffused in the oxidizing agent solution in the oxidizing agent solution adheres to the chemically polymerized film formed on the oxide film surface, the chemically polymerized film is thin. A uniform film has a state in which there are particulate protrusions. Therefore, the electrolytic oxidation polymerization performed in the next step is performed using the chemically polymerized film having the thin, non-uniform, and particulate projections as an anode. , An electric field concentration is generated there, and a current flows toward the electric field, and selectively occurs at the protrusion. For this reason, the formed electropolymerized film is very uneven, leaving very thin portions and portions that are not formed at all, and wraps the entire surface of the anode body on average through the chemical polymerized film. Cannot obtain the desired electrolytic polymerized film, deteriorating the tan δ characteristics. In addition, during the subsequent formation of the graphite and silver paste layers, graphite and silver paste penetrate from the insufficiently formed electrolytically polymerized film and directly oxidize. This causes deterioration of leakage current characteristics and occurrence of short-circuit failure due to contact with the film surface.
また、化学重合膜と酸化皮膜の密着性は一般によくな
いため、電解重合膜の形成が不十分なところでは、時間
の経過により化学重合膜と酸化皮膜の剥離が起こり、静
電容量,tanδ特性などの寿命特性悪化の原因となってい
た。In addition, since the adhesion between the chemically polymerized film and the oxide film is generally poor, where the formation of the electrolytic polymerized film is insufficient, the chemical polymerized film and the oxide film are peeled off with time, and the capacitance and tanδ characteristics This causes deterioration of life characteristics.
(発明が解決しようとする課題) 以上のように、導電性高分子膜を固体電解質として用
いる固体電解コンデンサは、小形高性能化の要請に応え
たものとして注目に値するが、導電性高分子膜となる所
望の電解重合膜を形成する上で解決すべき課題をもつも
のであった。(Problems to be Solved by the Invention) As described above, a solid electrolytic capacitor using a conductive polymer film as a solid electrolyte is worthy of attention as meeting the demand for miniaturization and high performance. There is a problem to be solved in forming a desired electrolytic polymerized film.
本発明は、上記の点に鑑みてなされたもので、所望の
電解重合膜を得る上の条件となる陽極体を構成する酸化
皮膜上に優れた化学重合膜を形成できる固体電解コンデ
ンサの製造方法を提供することを目的とするものであ
る。The present invention has been made in view of the above points, and is a method of manufacturing a solid electrolytic capacitor capable of forming an excellent chemically polymerized film on an oxide film constituting an anode body, which is a condition for obtaining a desired electrolytic polymerized film. The purpose is to provide.
[発明の構成] (課題を解決するための手段) 本発明の固体電解コンデンサの製造方法は、弁作用金
属に形成した酸化皮膜上に化学酸化重合により化学重合
膜を形成した後、この化学重合膜上に電解酸化重合によ
り電解重合膜を形成する固体電解コンデンサの製造方法
において、前記酸化皮膜を形成した弁作用金属をピロー
ル,チオフェン又はフランからなる複素五員環化合物溶
液に浸漬し、しかるのち、直ちに少なくともこの化合物
溶液よりも低温の酸化剤溶液中で化学酸化重合を行うこ
とを特徴とするものである。[Constitution of the Invention] (Means for Solving the Problems) In the method for manufacturing a solid electrolytic capacitor of the present invention, a chemical polymerization film is formed by chemical oxidation polymerization on an oxide film formed on a valve metal, and then the chemical polymerization is performed. In a method of manufacturing a solid electrolytic capacitor in which an electrolytic polymerized film is formed on a film by electrolytic oxidation polymerization, the valve action metal having the oxide film formed thereon is immersed in a solution of a five-membered heterocyclic compound comprising pyrrole, thiophene or furan, and thereafter The chemical oxidative polymerization is immediately performed in an oxidant solution at a temperature lower than at least the compound solution.
(作用) 以上の構成によれば、陽極体を複素五員環化合物溶液
へ浸漬後、直ちに酸化剤溶液に浸漬することで行われる
化学酸化重合の際に、複素五員環化合物溶液が酸化剤溶
液中に拡散することがほとんどなく、重合が陽極体表面
の複素五員環化合物溶液−酸化剤溶液界面で一気に行わ
れ、その後順次浸透していった酸化剤溶液によりピット
内に保持されている複素五員環化合物もすべてピット内
で重合されることにより、ピット内を含めて陽極体表面
全体に均一で十分な化学重合膜が形成される。また、酸
化剤溶液内への複素五員環化合物の拡散がないために、
粒子状のポリマーが陽極体表面に形成された化学重合膜
に付着することなく、得られた化学重合膜表面は突起部
のない極めて平滑なものとなる。(Action) According to the above configuration, the solution of the complex five-membered ring compound is oxidized during the chemical oxidative polymerization performed by immersing the anode body in the solution of the five-membered heterocyclic compound and immediately immersing it in the solution of the oxidant. It hardly diffuses into the solution, the polymerization is carried out at once at the interface between the heteropentacyclic compound solution and the oxidizing agent solution on the surface of the anode body, and then held in the pits by the oxidizing solution that has permeated sequentially. Since all of the five-membered heterocyclic compounds are also polymerized in the pits, a uniform and sufficient chemically polymerized film is formed on the entire surface of the anode body including the pits. In addition, because there is no diffusion of the five-membered heterocyclic compound into the oxidizing agent solution,
The particulate polymer does not adhere to the chemically polymerized film formed on the surface of the anode body, and the surface of the obtained chemically polymerized film is extremely smooth without protrusions.
したがって、その後の電解酸化重合による均一な電解
重合膜形成に大きく寄与し、得られた電解重合膜は、結
果として化学重合膜を介して平均して陽極体全表面をく
るむ状態で酸化皮膜と一体化したものとなる。Therefore, it greatly contributes to the formation of a uniform electrolytic polymerized film by the subsequent electrolytic oxidative polymerization, and the resulting electrolytically polymerized film is integrated with the oxide film in a state of wrapping the entire surface of the anode body on average through the chemical polymerized film. It becomes a thing.
(実施例) 以下本発明の一実施例につき説明する。すなわち、第
1図に示すようにエッチングによって表面積を拡大し化
成工程を経て表面に酸化皮膜1を形成した、例えば高純
度アルミニウムからなる陽極箔2をピロール又はチオフ
ェンあるいはフラン/エタノール水溶液に5分間浸漬し
た後、更にこのピロール又はチオフェンあるいはフラン
/エタノール水溶液よりも少なくとも低温の過硫酸アン
モニウム水溶液に浸漬して化学酸化重合を施し、酸化皮
膜1上に導電性高分子からなる化学重合膜4を形成す
る。しかるのち、この化学重合膜4を形成した陽極箔2
を支持電解質及びピロール,チオフェン又はフランなど
の複素五員環化合物を含む電解液中に浸漬し、電解酸化
重合を施し前記化学重合膜4上に導電性の電解重合膜5
を生成する。次にこの電解重合膜5上にコロイダルカー
ボンまたは銀ペーストを塗布−焼成して陰極層6を形成
し、この陰極層6の部分に陰極リード(図示せず)を取
着し、最後に外装を施してなるものである。(Example) An example of the present invention will be described below. That is, as shown in FIG. 1, the anode foil 2 made of, for example, high-purity aluminum, having an oxide film 1 formed on the surface through a chemical conversion step by etching to increase the surface area, is immersed in pyrrole, thiophene, or a furan / ethanol aqueous solution for 5 minutes After that, the film is further immersed in an aqueous solution of ammonium persulfate at least lower than the aqueous solution of pyrrole, thiophene, or furan / ethanol to perform chemical oxidation polymerization to form a chemical polymerization film 4 made of a conductive polymer on the oxide film 1. Thereafter, the anode foil 2 on which the chemically polymerized film 4 is formed is formed.
Is immersed in an electrolytic solution containing a supporting electrolyte and a five-membered heterocyclic compound such as pyrrole, thiophene or furan, and subjected to electrolytic oxidative polymerization to form a conductive electrolytic polymer film 5 on the chemical polymer film 4.
Generate Next, a colloidal carbon or silver paste is applied and baked on the electrolytic polymerized film 5 to form a cathode layer 6, a cathode lead (not shown) is attached to the cathode layer 6, and finally, the exterior is covered. It is something that is given.
以上の構成による固体電解コンデンサの製造方法によ
れば、陽極箔2上に均一で十分な平滑化された化学重合
膜4形成が可能となり、電解酸化重合によって得られる
固体電解質としての電解重合膜5が化学重合膜4を介し
て陽極箔2全表面に酸化皮膜1と一体化した状態で、か
つ均一で十分に形成でき、静電容量,tanδ特性改善が成
されるとともに、グラファイト,銀ペーストが直接酸化
皮膜1に接触することなく、漏れ電流特性、並びにショ
ート不良の改善に大きく寄与する。According to the method for manufacturing a solid electrolytic capacitor having the above-described configuration, it is possible to form a uniform and sufficiently smoothed chemical polymer film 4 on the anode foil 2, and the electrolytic polymer film 5 as a solid electrolyte obtained by electrolytic oxidation polymerization. Can be formed uniformly and sufficiently on the entire surface of the anode foil 2 via the chemical polymerized film 4 with the oxide film 1 to improve the capacitance and the tan δ characteristics, and the graphite and silver paste can be formed. Without directly contacting the oxide film 1, it greatly contributes to the improvement of leakage current characteristics and short-circuit failure.
また、電解重合膜5が均一化した化学重合膜4をくる
み均一に形成されるため、電解重合膜5を介して酸化皮
膜1に対する化学重合膜4の密着性が改善され、経時変
化も少なく寿命特性向上にも大きく寄与する。Further, since the electrolytically polymerized film 5 wraps around the uniformized chemically polymerized film 4 and is formed uniformly, the adhesion of the chemically polymerized film 4 to the oxide film 1 via the electrolytically polymerized film 5 is improved, and there is little change over time and the life is short. It greatly contributes to the improvement of characteristics.
次に、本発明によって得られた固体電解コンデンサ
と、従来例及び比較例によって得られた固体電解コンデ
ンサの諸特性比較について述べる。Next, comparison of various characteristics between the solid electrolytic capacitor obtained by the present invention and the solid electrolytic capacitors obtained by the conventional example and the comparative example will be described.
次表は、以下に記した実施例A〜Cと従来例D及び比
較例Eによる定格10V−3μFの固体電解コンデンサの
特性比較を示すもので、第2図〜第4図は105℃下にお
ける時間に対する寿命特性を示すものである。The following table shows a comparison of the characteristics of the solid electrolytic capacitors rated at 10V-3 μF according to Examples A to C, Conventional Example D and Comparative Example E described below. FIGS. 2 to 4 show the characteristics at 105 ° C. It shows life characteristics with respect to time.
なお、表中の数値でショート不良を除いたものは、試
料100個の平均値で、( )内はバラツキを示す。The values in the table excluding short-circuit defects are the average values of 100 samples, and the values in parentheses indicate variations.
実施例A (1)化学酸化重合条件 45℃のピロール/エタノール溶液に化成処理したアル
ミニウム陽極箔を5分間浸漬後、支持電解質としてパラ
トルエンスルホン酸テトラエチルアンモニウム0.05mol/
lを含む10℃の0.1mol/l過硫酸アンモニウム水溶液に5
分間浸漬。Example A (1) Chemical oxidative polymerization conditions After immersing a chemically treated aluminum anode foil in a pyrrole / ethanol solution at 45 ° C. for 5 minutes, 0.05 mol / mol of tetraethylammonium paratoluenesulfonate was used as a supporting electrolyte.
l in a 0.1 mol / l aqueous solution of ammonium persulfate at 10 ° C
Soak for a minute.
(2)コンデンサ素子形状 平板形状 (3)電解酸化重合条件 ピロールモノマー1mol/l及び支持電解質としてパラト
ルエンスルホン酸テトラエチルアンモニウム1mol/lを含
むアセトニトリルからなる電解液中に浸漬し、定電流酸
化重合(1mA/cm2,30分)を行う。(2) Capacitor element shape Flat plate shape (3) Electrolytic oxidation polymerization conditions Immersion in an electrolytic solution composed of acetonitrile containing 1 mol / l of pyrrole monomer and 1 mol / l of tetraethylammonium paratoluenesulfonate as a supporting electrolyte, and constant-current oxidative polymerization ( 1 mA / cm 2 for 30 minutes).
実施例B (1)化学酸化重合条件 35℃のピロール/エタノール溶液に化成処理したアル
ミニウム陽極箔を5分間浸漬後、支持電解質としてパラ
トルエンスルホン酸テトラエチルアンモニウム0.05mol/
lを含む10℃の0.1mol/l過硫酸アンモニウム水溶液に5
分間浸漬。Example B (1) Chemical Oxidation and Polymerization Conditions After immersing a chemical conversion-treated aluminum anode foil in a pyrrole / ethanol solution at 35 ° C. for 5 minutes, 0.05 mol / mol of tetraethylammonium paratoluenesulfonate was used as a supporting electrolyte.
l in a 0.1 mol / l aqueous solution of ammonium persulfate at 10 ° C
Soak for a minute.
(2)コンデンサ素子形状 実施例Aと同じ (3)電解酸化重合条件 実施例Aと同じ 実施例C (1)化学酸化重合条件 15℃のピロール/エタノール溶液に化成処理したアル
ミニウム陽極箔を5分間浸漬後、支持電解質としてパラ
トルエンスルホン酸テトラエチルアンモニウム0.05mol/
lを含む10℃の0.1mol/l過硫酸アンモニウム水溶液に5
分間浸漬。(2) Capacitor element shape Same as Example A (3) Electrolytic oxidation polymerization conditions Same as Example A Example C (1) Chemical oxidation polymerization conditions Aluminum anode foil chemically treated with a pyrrole / ethanol solution at 15 ° C. for 5 minutes After immersion, 0.05 mol / mol of tetraethylammonium paratoluenesulfonate as a supporting electrolyte
l in a 0.1 mol / l aqueous solution of ammonium persulfate at 10 ° C
Soak for a minute.
(2)コンデンサ素子形状 実施例Aと同じ (3)電解酸化重合条件 実施例Aと同じ 従来例D (1)化学酸化重合条件 25℃のピロール/エタノール溶液に化成処理したアル
ミニウム陽極箔を5分間浸漬後、支持電解質としてパラ
トルエンスルホン酸テトラエチルアンモニウム0.05mol/
lを含む25℃の0.1mol/l過硫酸アンモニウム水溶液に5
分間浸漬。(2) Capacitor element shape Same as Example A (3) Electrolytic oxidation polymerization conditions Same as Example A Conventional example D (1) Chemical oxidation polymerization conditions An aluminum anode foil chemically treated with a pyrrole / ethanol solution at 25 ° C. for 5 minutes After immersion, 0.05 mol / mol of tetraethylammonium paratoluenesulfonate as a supporting electrolyte
l in a 0.1 mol / l ammonium persulfate aqueous solution at 25 ° C containing
Soak for a minute.
(2)コンデンサ素子形状 実施例Aと同じ (3)電解酸化重合条件 実施例Aと同じ 比較例E (1)化学酸化重合条件 25℃のピロール/エタノール溶液に化成処理したアル
ミニウム陽極箔を5分間浸漬後、支持電解質としてパラ
トルエンスルホン酸テトラエチルアンモニウム0.05mol/
lを含む40℃の0.1mol/l過硫酸アンモニウム水溶液に5
分間浸漬。(2) Capacitor element shape Same as Example A (3) Electrolytic oxidation polymerization conditions Same as Example A Comparative example E (1) Chemical oxidation polymerization conditions An aluminum anode foil chemically treated with a pyrrole / ethanol solution at 25 ° C. for 5 minutes After immersion, 0.05 mol / mol of tetraethylammonium paratoluenesulfonate as a supporting electrolyte
l in a 0.1 mol / l aqueous solution of ammonium persulfate at 40 ° C
Soak for a minute.
(2)コンデンサ素子形状 実施例Aと同じ (3)電解酸化重合条件 実施例Aと同じ 上表から明らかなように、実施例A〜Cに係るもの
は、従来例D及び比較例Eに係るものと比較して静電容
量,tanδ,漏れ電流特性のいずれも著しく改善されると
ともに、ショート不良の大幅な改善効果がみられる。(2) Capacitor element shape Same as Example A (3) Electrolytic oxidation polymerization conditions Same as Example A As is clear from the above table, those according to Examples A to C have significantly improved capacitance, tan δ, and leakage current characteristics as compared with those according to Conventional Example D and Comparative Example E. Significant improvement effect of short-circuit failure is seen.
また、第2図〜第4図から明らかなように、容量変化
率及びtanδの寿命特性の改善に貢献すると同時に、寿
命特性における漏れ電流の大幅な改善に貢献することが
わかる。2 to 4, it can be seen that it contributes to the improvement of the life characteristics of the rate of change of capacitance and the tan δ, as well as to the significant improvement of the leakage current in the life characteristics.
更に、上表及び第2図〜第4図に示した実験結果か
ら、複素五員環化合物溶液と酸化剤溶液の温度は、酸化
剤溶液<複素五員環化合物溶液の関係において差が大き
いほど初期特性並びに寿命特性上に有効であり、この関
係が逆の場合は、両者の温度差がない場合よりも好まし
くないことがわかる。Further, from the experimental results shown in the above table and FIGS. 2 to 4, the temperature of the heterocyclic five-membered ring compound solution and the temperature of the oxidizing agent solution become larger as the difference between the oxidizing agent solution and the heterocyclic five-membered ring compound solution becomes larger. It is effective on the initial characteristics and the life characteristics, and it is understood that when this relationship is reversed, it is less preferable than when there is no temperature difference between the two.
なお、上記実施例では陽極箔としてアルミニウム箔を
用いたものを例示して説明したが、タンタル箔又はニオ
ブ箔などの弁作用金属箔を用いたものに適用できること
はもとより、これらの弁作用金属箔を巻回又はこれらの
弁作用金属からなる粉末を焼結し焼結体としたものに適
用できることは勿論である。In the above-described embodiment, an example in which an aluminum foil is used as the anode foil has been described. However, the present invention can be applied to a case in which a valve action metal foil such as a tantalum foil or a niobium foil is used. It is needless to say that the present invention can be applied to a product obtained by winding a sintered body or by sintering a powder made of these valve action metals.
[発明の効果] 本発明によれば、陽極箔上に均一で、十分でかつ、平
滑な化学重合膜の形成が可能となり、これを陽極として
形成された電解重合膜も均一で十分に形成され、初期の
諸特性改善に大きく貢献すると同時に、寿命特性の改善
に貢献できる固体電解コンデンサの製造方法を得ること
ができる。[Effects of the Invention] According to the present invention, a uniform, sufficient, and smooth chemical polymerized film can be formed on an anode foil, and an electrolytic polymerized film formed using the film as an anode can be formed uniformly and sufficiently. Thus, it is possible to obtain a method of manufacturing a solid electrolytic capacitor that can greatly contribute to improvement of initial characteristics and also contribute to improvement of life characteristics.
第1図は本発明の一実施例に係る製造途中のコンデンサ
素子構成を示す一部切欠概略断面図、第2図は時間−容
量変化率特性曲線図、第3図は時間−tanδ特性曲線
図、第4図は時間−漏れ電流特性曲線図である。 1……酸化皮膜、2……陽極箔 4……化学重合膜、5……電解重合膜FIG. 1 is a partially cut-away schematic cross-sectional view showing a configuration of a capacitor element during manufacture according to an embodiment of the present invention, FIG. 2 is a time-capacitance change rate characteristic curve, and FIG. 3 is a time-tan δ characteristic curve. FIG. 4 is a time-leakage current characteristic curve. 1 ... oxide film, 2 ... anode foil 4 ... chemically polymerized film, 5 ... electrolytic polymerized film
Claims (1)
化重合により化学重合膜を形成した後、この化学重合膜
上に電解酸化重合により電解重合膜を形成する固体電解
コンデンサの製造方法において、前記酸化皮膜を形成し
た弁作用金属をピロール,チオフェン又はフランからな
る複素五員環化合物溶液に浸漬し、しかるのち、直ちに
少なくともこの化合物溶液よりも低温の酸化剤溶液中で
化学酸化重合を行うことを特徴とする固体電解コンデン
サの製造方法。1. A method for manufacturing a solid electrolytic capacitor, comprising: forming a chemically polymerized film by chemical oxidation polymerization on an oxide film formed on a valve metal and then forming an electrolytic polymerized film by electrolytic oxidation polymerization on the chemically polymerized film. The valve metal having the oxide film formed thereon is immersed in a solution of a five-membered heterocyclic compound comprising pyrrole, thiophene or furan, and then immediately subjected to chemical oxidative polymerization in an oxidant solution at least lower than the compound solution. A method for manufacturing a solid electrolytic capacitor, comprising:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32050489A JP2657932B2 (en) | 1989-12-12 | 1989-12-12 | Method for manufacturing solid electrolytic capacitor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32050489A JP2657932B2 (en) | 1989-12-12 | 1989-12-12 | Method for manufacturing solid electrolytic capacitor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03183111A JPH03183111A (en) | 1991-08-09 |
JP2657932B2 true JP2657932B2 (en) | 1997-09-30 |
Family
ID=18122190
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32050489A Expired - Lifetime JP2657932B2 (en) | 1989-12-12 | 1989-12-12 | Method for manufacturing solid electrolytic capacitor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2657932B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11270847B1 (en) | 2019-05-17 | 2022-03-08 | KYOCERA AVX Components Corporation | Solid electrolytic capacitor with improved leakage current |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0745481A (en) * | 1993-07-29 | 1995-02-14 | Nec Corp | Solid electrolytic capacitor and manufacture thereof |
JP4507297B2 (en) * | 1998-07-06 | 2010-07-21 | 株式会社村田製作所 | Conductive polymer, solid electrolytic capacitor and manufacturing method thereof |
CN1193057C (en) * | 1998-07-06 | 2005-03-16 | 昭和电工株式会社 | Conductive polymer, solid electrolytic capacitor and process for producing these |
SG111043A1 (en) * | 2001-02-08 | 2005-05-30 | Matsushita Electric Ind Co Ltd | Solid electrolytic capacitor and manufacturing method thereof |
KR20040048569A (en) * | 2002-12-04 | 2004-06-10 | 파츠닉(주) | Method for forming a conductive polymeric layer of tantalum condenser |
-
1989
- 1989-12-12 JP JP32050489A patent/JP2657932B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11270847B1 (en) | 2019-05-17 | 2022-03-08 | KYOCERA AVX Components Corporation | Solid electrolytic capacitor with improved leakage current |
Also Published As
Publication number | Publication date |
---|---|
JPH03183111A (en) | 1991-08-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5135618A (en) | Process for manufacturing a solid state electrolytic capacitor | |
JP2657932B2 (en) | Method for manufacturing solid electrolytic capacitor | |
JP3245567B2 (en) | Method for manufacturing solid electrolytic capacitor | |
JP2001217159A (en) | Solid electrolytic capacitor and its manufacturing method | |
JP3202640B2 (en) | Method for manufacturing solid electrolytic capacitor | |
JP3198518B2 (en) | Method for manufacturing solid electrolytic capacitor | |
JP4553770B2 (en) | Solid electrolytic capacitor and manufacturing method thereof | |
JP2001110685A (en) | Solid electrolytic capacitor | |
JP2811648B2 (en) | Method for manufacturing solid electrolytic capacitor | |
JPH05159979A (en) | Manufacture of solid electrolytic capacitor | |
JP3195819B2 (en) | Method for manufacturing solid electrolytic capacitor | |
JP3750476B2 (en) | Manufacturing method of solid electrolytic capacitor | |
JP3083587B2 (en) | Method for manufacturing solid electrolytic capacitor | |
JP3669164B2 (en) | Manufacturing method of solid electrolytic capacitor | |
JP2001155965A (en) | Manufacturing method of solid electrolytic capacitor | |
JPH05152169A (en) | Manufacture of solid electrolytic capacitor | |
JPH04137517A (en) | Manufacture of solid electrolytic capacitor | |
JPH03139816A (en) | Manufacturing method of solid electrolytic capacitor | |
JP2513369B2 (en) | Method for manufacturing solid electrolytic capacitor | |
JPH0373509A (en) | Manufacturing method of solid electrolytic capacitor | |
JP3401447B2 (en) | Solid electrolytic capacitor and method of manufacturing the same | |
JPH033311A (en) | Manufacture of solid electrolytic capacitor | |
JP3454733B2 (en) | Method for manufacturing solid electrolytic capacitor | |
JPH10321474A (en) | Solid electrolytic capacitor and its manufacture | |
JPH11307396A (en) | Manufacture of solid electrolytic capacitor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080606 Year of fee payment: 11 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090606 Year of fee payment: 12 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090606 Year of fee payment: 12 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 13 Free format text: PAYMENT UNTIL: 20100606 |
|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100606 Year of fee payment: 13 |