JP2024057787A - Inspection socket and inspection device - Google Patents

Abstract

[Problem] To provide an inspection socket and an inspection device with high contact reliability. [Solution] The inspection socket includes at least one plate-shaped probe pin, a housing, and a conductive member. The probe pin has a first end provided on one side of a first direction and a second end provided on the other side of the first direction. The housing accommodates the probe pin inside with the first end exposed to the outside. The conductive member is provided in a portion of the housing closer to the second end than the first end in the first direction, and is electrically connected to the second end. The housing extends along a second direction intersecting the first direction, and the probe pin is accommodated inside the housing such that the second direction is the thickness direction. [Selected Figure] Figure 4

Description

This disclosure relates to an inspection socket and an inspection device.

Patent Document 1 describes an inspection device for solar cell electrodes.

JP 2008-071989 A

In general, inspection devices, including the one described in Patent Document 1, use cylindrical spring probes (so-called pogo pins). However, pogo pins usually do not have tips shaped to fit the narrow electrodes of solar cells, which can cause poor contact during inspection.

The purpose of this disclosure is to provide an inspection socket and inspection device with high contact reliability.

According to one aspect of the present disclosure, there is provided a test socket comprising:
At least one plate-like probe pin having a first end provided on one side in a first direction and a second end provided on the other side in the first direction;
a housing that accommodates the probe pin therein with the first end exposed to the outside;
a conductive member provided at a portion of the housing closer to the second end than the first end in the first direction and electrically connected to the second end,
The housing extends along a second direction intersecting the first direction,
the probe pin is accommodated inside the housing such that the second direction is a thickness direction;
The first end of the probe pin is configured to face, in the first direction, an electrode of an object to be tested, which includes an elongated electrode extending along the second direction, and to be able to contact the electrode in a state intersecting the electrode.

An inspection apparatus according to an embodiment of the present disclosure includes:
At least one test socket according to the above aspect is provided.

This disclosure provides an inspection socket and inspection device with high contact reliability.

1 is a perspective view showing an inspection device according to an embodiment of the present disclosure; FIG. 2 is an enlarged front view of the inspection device of FIG. 1 . FIG. 3 is a cross-sectional view taken along line III-III in FIG. 2 . FIG. 2 is a perspective view of a test socket according to one embodiment of the present disclosure; FIG. 5 is a cross-sectional view taken along line V-V in FIG. 4 . FIG. 5 is a perspective view showing a probe pin of the test socket of FIG. 4 . 5 is an enlarged perspective view of the test socket of FIG. 4 with the retainer member removed; FIG. FIG. 5 is a cross-sectional view showing a first modified example of the test socket of FIG. 4 . 9 is an enlarged perspective view of the inspection socket of FIG. 8 with the retainer member removed; FIG. FIG. 5 is a perspective view showing a probe pin of a second modified example of the test socket of FIG. 4 . FIG. 5 is an enlarged top view of a second modified example of the test socket of FIG. 4 . FIG. 5 is an enlarged plan view showing a probe pin of a third modified example of the test socket of FIG. 4 . FIG. 5 is an enlarged plan view showing a probe pin of a fourth modified example of the test socket of FIG. 4 . 5 is an enlarged front view showing a fifth modified example of the test socket of FIG. 4; 4. FIG. 9 is a bottom view showing a conductive member of the sixth modified example of the test socket of FIG. 4. FIG. 9 is a top view showing a conductive member of a sixth modified example of the test socket of FIG.

An example of the present disclosure will now be described with reference to the accompanying drawings. The following description is merely exemplary in nature and is not intended to limit the present disclosure, the application of the present disclosure, or the uses of the present disclosure. The drawings are schematic, and the ratios of the dimensions do not necessarily correspond to the real thing.

As shown in FIG. 1, an inspection device 1 according to an embodiment of the present disclosure includes at least one inspection socket 10. As shown in FIGS. 2 and 3, the inspection device 1 is configured such that a first end 21 of a probe pin 20 of the inspection socket 10 (described later) faces an elongated electrode 110 of an object to be inspected (e.g., a solar panel) in a first direction (e.g., Z direction) and can contact the electrode 110 while intersecting (e.g., perpendicular to) the electrode 110. The electrode 110 extends, for example, along a second direction (e.g., X direction) intersecting the first direction Z.

In this embodiment, the test object 100 has a plurality of electrodes 110 spaced apart, for example, equally spaced apart, in a third direction (e.g., Y direction) intersecting the first direction Z and the second direction X, and the test device 1 includes a plurality of test sockets 10, the number of which is the same as the number of the electrodes 110. The test sockets 10 are spaced apart, for example, equally spaced apart, in the third direction Y so that the first end 21 of the probe pin 20 of each test socket 10 can contact each electrode 110. The test device 1 is configured such that all the test sockets 10 can be moved simultaneously along the Z direction toward the test object 100.

The inspection device 1 may be configured as follows.
The dimension W1 of the probe pin 20 in the third direction Y is greater than the dimension W2 of the electrode 110 in the third direction Y.
The dimension W3 of the testing socket 10 in the third direction Y is smaller than the linear distance W4 between adjacent electrodes 110.

As shown in Figs. 4 and 5, the inspection socket 10 includes at least one plate-shaped probe pin 20, a housing 30 that accommodates the probe pin 20 therein, and a conductive member 40. In this embodiment, the inspection socket 10 includes a plurality of probe pins 20 spaced apart in the second direction X. The plurality of probe pins 20 include a first probe pin 120 and a second probe pin 220. The first probe pin 120 is, for example, a force pin, and the second probe pin 220 is, for example, a sense pin. Each probe pin 20 is formed of a single part.

As shown in FIG. 6, the probe pin 20 has a first end 21 provided on one side of the first direction Z and a second end 22 provided on the other side of the first direction Z. In this embodiment, the probe pin 20 includes a first contact portion 201 having the first end 21, a second contact portion 202 having the second end 22, and an elastic portion 203 located between the first contact portion 201 and the second contact portion 202. The first contact portion 201 and the second contact portion 202 are located on a virtual straight line L1 extending along the first direction Z, and are connected by the elastic portion 203.

The first contact portion 201 has a generally rectangular plate shape extending along the first direction Z. The end of the first contact portion 201 farther from the second contact portion 202 in the first direction Z constitutes the first end portion 21. As an example, the surface of the first end portion 21 that can contact the electrode 110 is curved. An elastic portion 203 is connected from the third direction Y to the end of the first contact portion 201 closer to the second contact portion 202 in the first direction Z.

The second contact portion 202 has a generally rectangular plate shape extending along the first direction Z. The length of the second contact portion 202 in the first direction Z is smaller than that of the first contact portion 201. The end of the second contact portion 202 farther from the first contact portion 201 in the first direction Z constitutes the second end portion 22. The elastic portion 203 is connected from the third direction Y to the end of the second contact portion 202 closer to the first contact portion 201 in the first direction Z.

The elastic portion 203 includes a plurality of members 204 arranged with gaps 205 between them. Each member 204 has a plurality of first portions 206 and a plurality of second portions 207. The first portions 206 are arranged at intervals along the first direction Z, and each extends linearly along the third direction Y. Each second portion 207 has an approximately semicircular arc shape extending along the first direction Z, and both ends are connected to the ends of the adjacent first portions 206. The first portions 206 located at both ends of each member 204 in the first direction Z are connected to the first contact portion 201 and the second contact portion 202 from the same side in the third direction Y. All of the first portions 206 and the second portions 207 are located on the same side of the side surface 208 of the first contact portion 201. The side surface 208 is one of a pair of side surfaces of the first contact portion 201 that intersect with the third direction Y, and is the side surface opposite to the side surface to which the first portion 206 of each member 204 is connected.

As shown in FIG. 4, the housing 30 extends along the second direction X, and as shown in FIG. 5, the housing 30 is configured to be able to accommodate the probe pin 20 therein with the first end 21 exposed to the outside. In this embodiment, the housing 30 includes a first housing 31 that accommodates the probe pin 20, and a second housing 32 that can accommodate and hold the first housing 31.

As shown in FIG. 5, the first housing 31 has a generally T-shaped cross section. The first housing 31 has a plurality of slit-shaped first housing sections 33 capable of housing one probe pin 20 with the first end 21 exposed to the outside. The first housing 31 is provided with a number of first housing sections 33 equal to or greater than the number of probe pins 20. The probe pins 20 are housed in the first housing sections 33 such that the second direction X is their thickness direction. The plurality of first housing sections 33 are arranged along the second direction X such that the first ends 21 of the housed probe pins 20 are aligned in a row along the second direction X (see FIG. 3).

As shown in FIG. 4, the second housing 32 has a substantially rectangular parallelepiped shape. As shown in FIG. 5, the second housing 32 has a second housing portion 34 capable of housing and holding the first housing 31, and a plurality of holes 35 capable of housing a fastening member 60 for fixing the pressing member 50 described later to the housing 30. The second housing portion 34 penetrates the second housing 32 in the first direction Z, and the opening 342 opening on the top surface 322 near the second end 22 is larger than the opening 341 opening on the bottom surface 321 near the first end 21 of the probe pin 20 in the first direction Z. As an example, the first housing 31 housed in the second housing portion 34 has one end 311 in the first direction Z protruding slightly from the opening 341 to the outside of the second housing 32. The plurality of holes 35 are provided on the top surface 322 of the second housing 32. The first housing 31 housed in the second housing portion 34 is positioned relative to the second housing 32, for example, by a positioning pin 61 (see FIG. 7).

As shown in FIG. 4, base members 36 are attached to both ends of the housing 30 in the second direction X. Each base member 36 extends from the upper surface 322 of the second housing 32 along the first direction Z.

As shown in FIG. 5, the conductive member 40 is provided in a portion of the housing 30 closer to the second end 22 than the first end 21 of the probe pin 20 in the first direction Z, and is electrically connected to the second end 22. In this embodiment, the conductive member 40 includes two electrically independent conductive sheets (hereinafter, referred to as the first member 41 and the second member 42). The first member 41 is in electrical contact with the first probe pin 120, and the second member 42 is in electrical contact with the second probe pin 220. The first member 41 and the second member 42 include, for example, copper.

As shown in FIG. 7, the first member 41 has a first main body 43 extending along the second direction X, and a first protrusion 44. The first protrusion 44 extends from the first main body 43 in the third direction Y and in a direction approaching the second member 42, and contacts the second end 22 of the first probe pin 120 as shown in FIG. 5. The pressing member 50 is omitted in FIG. 7.

As shown in FIG. 7, the second member 42 is positioned with a gap in the third direction Y relative to the first member 41. The second member 42 has a second main body 45 extending along the second direction Z, and a second protrusion 46. The second protrusion 46 extends from the second main body 45 in the third direction Y and in a direction approaching the first member 41, and is in electrical contact with the second end 22 of the second probe pin 220 as shown in FIG. 5.

As shown in FIG. 5, the conductive member 40 is located between the housing 30 and the pressing member 50, and is fixed to the housing 30 by the pressing member 50. As shown in FIG. 4, at both ends of the conductive member 40 in the second direction X, connection portions 47 to which terminals 70 are connected are provided. One end of the connection portion 47 is electrically connected to the first member 41, and the other end of the connection portion 47 is electrically connected to the second member 42.

The test socket 10 can provide the following benefits:

The inspection socket 10 includes at least one plate-shaped probe pin 20, a housing 30, and a conductive member 40. The probe pin 20 has a first end 21 provided on one side of the first direction and a second end 22 provided on the other side of the first direction. The housing 30 accommodates the probe pin 20 inside with the first end 21 exposed to the outside. The conductive member 40 is provided in a portion of the housing 30 closer to the second end 22 than the first end 21 in the first direction, and is electrically connected to the second end 22. The housing 30 extends along a second direction intersecting the first direction, and the probe pin 20 is accommodated inside the housing 30 so that the second direction is the thickness direction. The first end 21 of the probe pin 20 faces an electrode 110 of the inspection object 100 including an elongated electrode 110 extending along the second direction in the first direction, and is configured to be able to contact the electrode 110 in a state intersecting the electrode 110. This configuration allows the probe pins 20 to more reliably contact the narrow electrodes 110, reducing the occurrence of poor contact. As a result, a test socket 10 with high contact reliability can be realized.

Since a pogo pin is usually composed of multiple parts, the current characteristics are not stable in an inspection socket using a pogo pin. In addition, for example, when inspecting the function of a solar panel, it is necessary to irradiate the entire surface of the solar panel to be inspected. For this reason, there is a demand for making the inspection socket used for inspecting the solar panel smaller or thinner so that the size of the socket does not block the light irradiated to the solar panel as much as possible. In order to meet this demand, the probe pin housed in the inspection socket must also be made smaller. However, if the probe pin is made smaller, the conductive path through which a high current flows becomes narrower, and the probe pin generates heat when it is conductive, so there is a demand for improving the heat dissipation of the inspection socket. Since the inspection socket 10 uses a plate-shaped probe pin 20, which is a single component, it is possible to stabilize the current characteristics and stabilize the measured value during inspection. In addition, since the plate-shaped probe pin 20 can have a larger area in contact with the air than the pogo pin, it is possible to improve the heat dissipation of the inspection socket 10 and suppress the increase in the resistance value of the probe pin 20.

The inspection socket 10 can adopt any one or more of the following configurations. In other words, any one or more of the following configurations can be deleted if they were included in the above-mentioned embodiment, and can be added if they were not included in the above-mentioned embodiment. By adopting such a configuration, an inspection socket 10 with high contact reliability can be more reliably realized.

The test socket 10 has a plurality of probe pins 20 spaced apart along the second direction.

The plurality of probe pins 20 include a first probe pin 120 and a second probe pin 220. The conductive member 40 includes a first member 41 that is in electrical contact with the first probe pin 120, and a second member 42 that is spaced apart from the first member 41 in the third direction, is electrically independent from the first member 41, and is in electrical contact with the second probe pin 220. The first member 41 has a first body portion 43 that extends along the second direction, and a first protruding portion 44 that extends from the first body portion 43 in the third direction and in a direction approaching the second member 42, and is in electrical contact with the second end 22 of the first probe pin 120. The second member 42 has a second body portion 45 that extends along the second direction, and a second protruding portion 46 that extends from the second body portion 45 in the third direction and in a direction approaching the first member 41, and is in electrical contact with the second end 22 of the second probe pin 220.

The inspection device 1 can achieve the following effects:

The inspection device 1 is equipped with an inspection socket 10. The inspection socket 10 allows the inspection device 1 to have high contact reliability.

The inspection device 1 can optionally employ any one or more of the following configurations. In other words, any one or more of the following configurations can be optionally deleted if they were included in the above-described embodiment, and can be optionally added if they were not included in the above-described embodiment. By employing such configurations, an inspection device 1 with high contact reliability can be more reliably realized.

The dimension W1 of the probe pin 20 in the third direction is greater than the dimension W2 of the electrode 110 in the third direction.

The dimension W3 of the inspection socket 10 in the third direction is smaller than the distance W4 between adjacent electrodes 110.

The inspection device 1 and the inspection socket 10 can also be configured as follows:

The number of probe pins 20 in the inspection socket 10 may be one or three or more. Figures 8 and 9 show an inspection socket 10 in which the housing 30 includes multiple first housings 31, each housing containing multiple probe pins 20. In Figure 9, the pressing member 50 is omitted.

In the test socket 10 of FIG. 8 and FIG. 9, the multiple probe pins 20 include four first probe pins 120 and two second probe pins 220, and are arranged in the order of two first probe pins 120, two second probe pins 220, and two first probe pins 120 along the second direction X. As shown in FIG. 9, the conductive member 40 has two first protrusions 44 and one second protrusion 46. The first protrusions 44 and the second protrusions 46 are arranged at intervals along the second direction X, and the second protrusion 46 is located between the two first protrusions 44. As shown in FIG. 8, two first probe pins 120 are in contact with each first protrusion 44, and two second probe pins 220 are in contact with each second protrusion 46. In other words, the inspection socket 10 may be configured so that the number of first probe pins 120 is greater than the number of second probe pins 220, and the number of first protrusions 44 is greater than the number of second protrusions 46.

The first probe pin 120 and the second probe pin 220 may have the same configuration or different configurations. For example, the probe pin 20 shown in FIG. 10 may be used as the first probe pin 120, and the probe pin 20 shown in FIG. 6 may be used as the second probe pin 220. In the probe pin 20 in FIG. 10, the second contact portion 202 is not located on the virtual line L1, but is located on a virtual line L2 parallel to the virtual line L1 and spaced apart in the third direction Y from the virtual line L1. The probe pin 20 in FIG. 10 has fewer first portions 206 and second portions 207 in each member 204 of the elastic portion 203 than the probe pin 20 in FIG. 6.

Suppose that the probe pin 20 shown in FIG. 10 is used as the first probe pin 120, and the probe pin 20 in FIG. 6 is used as the second probe pin 220. In this case, for example, as shown in FIG. 11, the shape of the second protrusion 46 may be changed to match the position of the second end 22 of the second probe pin 220. Conversely, when the probe pin 20 in FIG. 6 is used as the first probe pin 120, and the probe pin 20 in FIG. 10 is used as the second probe pin 220, for example, the shape of the first protrusion 44 may be changed to match the position of the first probe pin 120. In other words, the number and shapes of the first protrusions 44 and the second protrusions 46 can be changed depending on the design of the inspection socket 10, etc. In the test socket 10 of FIG. 11, the second ends 22 of the four first probe pins 120 are located on an imaginary straight line L3 extending along the second direction X, and the second ends 22 of the two second probe pins 220 are located on an imaginary straight line L4 that is parallel to the imaginary straight line L3 and spaced apart in the third direction Y from the imaginary straight line L3.

The probe pin 20 may be plate-shaped and have a first end 21 and a second end 22. For example, as shown in FIG. 12, the first end 21 of the probe pin 20 may have a flat surface 211 that can contact the electrode 110. As shown in FIG. 13, the second end 22 of the probe pin 20 may have two protrusions 221. The probe pin 20 in FIG. 13 includes two second contact portions 202 located at both ends in the third direction Y, and each second contact portion 202 is provided with one protrusion 221.

As shown in FIG. 14, the housing 30 may have a window 301 through which the probe pin 10 housed therein can be seen from outside the housing 10. By providing the window 301, the state of the housed probe pin 20 can be confirmed without removing the first housing 31 from the second housing 32, and the heat dissipation of the inspection socket 10 can be improved.

The conductive member 40 is not limited to a sheet, and may be, for example, a substrate (hereinafter, referred to as the third member 48). The third member 48 has a pair of surfaces 481, 482 intersecting the first direction Z on which the electrode pattern is formed, as shown in, for example, FIG. 15 and FIG. 16. The surface 481 of the third member 48 is a surface facing the housing 30, and the surface 482 of the third member 48 is a surface facing the pressing member 50. The electrode pattern includes a first electrode pattern 483 electrically connected to the first probe pin 120, and a second electrode pattern 484 electrically connected to the second probe pin 220.

Various embodiments of the present disclosure have been described above in detail with reference to the drawings. Finally, various aspects of the present disclosure will be described. In the following description, reference symbols will also be used as examples.

The test socket 10 according to the first aspect of the present disclosure comprises:
At least one plate-shaped probe pin 20 having a first end 21 provided on one side in a first direction and a second end 22 provided on the other side in the first direction;
a housing 30 that accommodates the probe pin 20 therein with the first end 21 exposed to the outside;
a conductive member provided at a portion of the housing closer to the second end than to the first end in the first direction, the conductive member being electrically connected to the second end,
The housing 30 extends along the second direction,
The probe pin 20 is accommodated in the housing 30 such that a second direction intersecting the first direction corresponds to a thickness direction of the housing 30;
The first end 21 of the probe pin 20 is configured to face, in the first direction, an electrode of an object to be tested, which includes an elongated electrode extending along the second direction, and to be able to contact the electrode in a state intersecting the electrode.

The inspection socket 10 according to the second aspect of the present disclosure is the inspection socket 10 according to the first aspect,
The probe pins 20 are spaced apart from one another along the second direction.

The inspection socket 10 according to the third aspect of the present disclosure is the inspection socket 10 according to the second aspect,
The plurality of probe pins 20 include a first probe pin 120 and a second probe pin 220 different from the first probe pin 120 .

The inspection socket 10 according to the fourth aspect of the present disclosure is the inspection socket 10 according to the second aspect,
The plurality of probe pins 20 include a first probe pin 120 and a second probe pin 220,
The conductive member 40 is
a first member 41 electrically contacting the first probe pin 120;
a second member 42 that is spaced apart from the first member 41 in a third direction intersecting the first direction and the second direction, is electrically independent from the first member 41, and is in electrical contact with the second probe pin 220;
The first member 41 is
A first main body portion 43 extending along the second direction;
a first protrusion 44 extending from the first body 43 in the third direction and in a direction approaching the second member 42 and electrically contacting the second end 22 of the first probe pin 120;
The second member 42 is
A second main body portion 45 extending along the second direction;
The second body portion 45 has a second protrusion portion 46 that extends in the third direction and in a direction approaching the first member 41 and that electrically contacts the second end portion 22 of the second probe pin 220 .

The inspection socket 10 of the fifth aspect of the present disclosure is the inspection socket 10 of the third or fourth aspect,
The number of the first probe pins 120 is greater than the number of the second probe pins 220;
The number of the first protrusions 44 is greater than the number of the second protrusions 46 .

The inspection socket 10 of a sixth aspect of the present disclosure is the inspection socket 10 of any one of the first to fifth aspects,
The housing 30 has a window 301 through which the probe pin 20 housed therein can be seen from the outside.

The inspection device 1 according to the seventh aspect of the present disclosure includes:
The device includes at least one test socket 10 according to any one of the first to sixth aspects.

An inspection device 1 according to an eighth aspect of the present disclosure is the inspection device 1 according to the seventh aspect,
A dimension of the probe pin 20 in a third direction intersecting the first direction and the second direction is larger than a dimension of the electrode in the third direction.

The inspection device 1 of a ninth aspect of the present disclosure is the inspection device 1 of the seventh or eighth aspect,
The first end 21 of the probe pin 20 has a flat surface 211 capable of coming into contact with the electrode.

The inspection device 1 of a tenth aspect of the present disclosure is the inspection device 1 of any one of the seventh to ninth aspects,
the test object includes a plurality of the electrodes arranged at intervals in a third direction intersecting the first direction and the second direction,
The dimension of the test socket 10 in the third direction is smaller than the distance between adjacent electrodes.

By appropriately combining any of the various embodiments or modifications described above, it is possible to achieve the effects of each. In addition, it is possible to combine embodiments with each other, or to combine examples with each other, and it is also possible to combine features of different embodiments or examples.

Although the present disclosure has been fully described in connection with the preferred embodiments with reference to the accompanying drawings, various modifications and alterations will be apparent to those skilled in the art. Such modifications and alterations are to be understood as being included within the scope of the present disclosure as defined by the appended claims, unless they depart therefrom.

The inspection socket disclosed herein can be applied, for example, to an inspection device used to inspect solar panels.

The inspection device disclosed herein can be used, for example, as an inspection device for solar panels.

1 Inspection device 10 Inspection socket 10 Probe pin 21 First end 22 Second end 30 Housing 31 First housing 32 Second housing 33 First storage portion 34 Second storage portion 35 Hole portion 36 Base member 40 Conductive member 41 First member 42 Second member 43 First main body portion 44 First protrusion portion 45 Second main body portion 46 Second protrusion portion 47 Connection portion 48 Third member 50 Pressing member 60 Fastening member 61 Positioning pin 70 Terminal 100 Inspection object 110 Electrode 120 First probe pin 201 First contact portion 202 Second contact portion 203 Elastic portion 204 Member 205 Gap 206 First portion 207 Second portion 208 Side surface 211 Plane 220 Second probe pin 221 Protrusion 301 Window portion 321 Bottom surface 322 Top surface 341, 342 Openings 481, 482 Surface 483 First electrode pattern 484 Second electrode pattern

Claims (10)

At least one plate-like probe pin having a first end provided on one side in a first direction and a second end provided on the other side in the first direction;
a housing that accommodates the probe pin therein with the first end exposed to the outside;
a conductive member provided at a portion of the housing closer to the second end than the first end in the first direction and electrically connected to the second end,
The housing extends along a second direction intersecting the first direction,
the probe pin is accommodated inside the housing such that the second direction is a thickness direction;
a test socket, the first end of the probe pin being configured to face, in the first direction, an electrode of a test object including an elongated electrode extending along the second direction, and to be capable of contacting the electrode in a state intersecting the electrode. The test socket of claim 1, comprising a plurality of the probe pins spaced apart along the second direction. The test socket of claim 2, wherein the plurality of probe pins includes a first probe pin and a second probe pin different from the first probe pin. the plurality of probe pins include a first probe pin and a second probe pin;
The conductive member is
a first member in electrical contact with the first probe pin;
a second member that is positioned with a gap from the first member in a third direction intersecting the first direction and the second direction, is electrically independent from the first member, and is in electrical contact with the second probe pin;
The first member is
A first body portion extending along the second direction;
a first protrusion extending from the first body in the third direction and in a direction approaching the second member, the first protrusion being in electrical contact with the second end of the first probe pin;
The second member is
A second body portion extending along the second direction;
3. The test socket of claim 2, further comprising a second protrusion extending from the second body portion in the third direction and toward the first member, the second protrusion electrically contacting the second end of the second probe pin. the number of the first probe pins is greater than the number of the second probe pins;
5. The test socket of claim 3, wherein the number of the first protrusions is greater than the number of the second protrusions. An inspection socket according to any one of claims 1 to 4, wherein the housing has a window through which the probe pin housed inside can be viewed from the outside. An inspection device comprising at least one inspection socket according to any one of claims 1 to 4. The inspection device according to claim 7, wherein the dimension of the probe pin in a third direction intersecting the first direction and the second direction is greater than the dimension of the electrode in the third direction. The inspection device according to claim 7, wherein the first end of the probe pin has a flat surface that can contact the electrode. the test object includes a plurality of the electrodes arranged at intervals in a third direction intersecting the first direction and the second direction,
The testing device according to claim 7 , wherein a dimension of the test socket in the third direction is smaller than a distance between adjacent electrodes.

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