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JP2013095935A - Electrode for electrical discharge surface treatment - Google Patents

Electrode for electrical discharge surface treatment Download PDF

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JP2013095935A
JP2013095935A JP2011237302A JP2011237302A JP2013095935A JP 2013095935 A JP2013095935 A JP 2013095935A JP 2011237302 A JP2011237302 A JP 2011237302A JP 2011237302 A JP2011237302 A JP 2011237302A JP 2013095935 A JP2013095935 A JP 2013095935A
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electrode
surface treatment
discharge
discharge surface
treated
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Masao Oka
昌男 岡
Haruhiro Osada
晴裕 長田
Yoshio Osawa
芳夫 大澤
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Eagle Industry Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide an electrode for electrical discharge surface treatment which achieves an efficient movement of an electrode component material to a material to be treated.SOLUTION: The electrode for electrical discharge surface treatment 10 forms a coating including at least a part of the electrode component material on the surface of the material to be treated by discharging between itself and the material to be treated. The electrode can achieve stable discharging with less deviation in which conductive diamond particles 12 dispersed in the electrode become a starting point for discharging during discharge treatment, and can transmit the heat generated by discharging to material particles 14 efficiently due to the high thermal conductivity. Thereby, the electrode for electrical discharge surface treatment 10 can achieve efficient movement of the material particles 14 to the material to be treated 18, and suppress the generation of electrode scraps while increasing an amount of the coating to be formed on the material to be treated 18 per an electrode consumption rate.

Description

本発明は、放電表面処理に用いられる放電表面処理用電極に関する。   The present invention relates to an electrode for discharge surface treatment used for discharge surface treatment.

油液中に設置した被処理材料と電極の間に放電を発生させ、当該放電のエネルギーを利用する技術として、放電加工と放電表面処理が開発されている。放電加工に用いられる電極が、放電による加工を実現できれば足りるのに対して、放電表面処理に用いられる電極には、被膜の基となる材料を圧縮成形した、内部に空隙を有する電極が用いられ、放電加工に用いられる電極とは異なる性質・機能が求められる。すなわち、放電表面処理用電極は、その構成材料の少なくとも一部が、放電エネルギーによって被処理材料表面に移動する必要があり、構成材料、強度(崩れやすさ)、電気伝導率などが、放電加工用の電極とは大きく異なる。   Electrical discharge machining and electrical discharge surface treatment have been developed as techniques for generating electrical discharge between a material to be processed and an electrode installed in an oil liquid and using the energy of the electrical discharge. Whereas the electrode used for electric discharge machining is sufficient to realize electric discharge machining, the electrode used for electric discharge surface treatment is an electrode having a void inside that is compression-molded with a material that is the basis of the coating. Therefore, properties and functions different from those of electrodes used for electric discharge machining are required. That is, at least a part of the constituent material of the discharge surface treatment electrode needs to move to the surface of the material to be treated by the discharge energy, and the constituent material, strength (easiness to collapse), electrical conductivity, etc. It is very different from the electrode for the use.

このような放電表面処理用電極に関する従来技術としては、例えば金属粉末あるいは金属化合物粉末を加圧成形した圧粉体を用いた電極が開示されている(特許文献1等参照)。しかし、従来の放電表面処理用電極は、内部に含まれる粉末の結合力の均一性を確保することが難しく、また、放電表面処理の放電エネルギーが特定の部分に集中するような場合もある。これにより、従来技術に係る放電表面用電極は、特定の部分が過剰に崩れるような現象が起きる場合があり、これに伴い、放電表面処理用電極の構成物質のうち、被処理材料に移動して被膜を形成する割合が減少するという問題が発生する。崩壊した電極の構成材料のうち、被処理材料に移動しないものは、電極くずとして油液中を浮遊する。   As a conventional technique related to such an electrode for discharge surface treatment, for example, an electrode using a green compact obtained by press-molding a metal powder or a metal compound powder is disclosed (see Patent Document 1, etc.). However, it is difficult for the conventional electrode for discharge surface treatment to ensure the uniformity of the bonding force of the powder contained therein, and the discharge energy of the discharge surface treatment may concentrate on a specific part. As a result, the discharge surface electrode according to the prior art may cause a phenomenon in which a specific portion is excessively collapsed. As a result, a problem arises in that the rate at which the film is formed decreases. Among the collapsed constituent materials of the electrode, those that do not move to the material to be processed float in the oil as electrode scraps.

一方で、放電表面処理用電極ではなく、放電加工用電極に関する従来技術として、電極消耗を減少させるために、微細多結晶ダイヤモンドを電極中に分散させる技術が開示されている(特許文献2等参照)。しかし、このような放電加工用電極に関する技術は、電極消耗の減少という課題を解決するためのものであり、電極構成物質の被処理材料への効率的な移動の実現という課題に対して有効であるか否かについては言及がない。また、放電加工用電極と放電表面処理用電極とでは、上述するように機械的・電気的性質が大きく異なるため、一方の技術を他方に応用するには困難が伴う。   On the other hand, as a conventional technique related to an electrode for electric discharge machining instead of an electrode for electric discharge surface treatment, a technique is disclosed in which fine polycrystalline diamond is dispersed in the electrode in order to reduce electrode consumption (see Patent Document 2, etc.). ). However, the technology related to the electrode for electric discharge machining is for solving the problem of reduction of electrode consumption, and is effective for the problem of realizing the efficient transfer of the electrode constituent material to the material to be processed. There is no mention of whether or not there is. In addition, since the mechanical and electrical properties of the electric discharge machining electrode and the electric discharge surface treatment electrode are greatly different as described above, it is difficult to apply one technique to the other.

国際公開第99/46423号International Publication No. 99/46423 特開2006−167893号公報JP 2006-167893 A

本発明は、このような課題に鑑みてなされ、その目的は、電極構成物質の被処理材料への効率的な移動を実現する放電表面処理用電極を提供することである。   This invention is made | formed in view of such a subject, The objective is to provide the electrode for discharge surface treatment which implement | achieves the efficient movement to the to-be-processed material of an electrode constituent material.

上述の課題を解決するために、本発明に係る放電表面処理用電極は、
被処理材料との間の放電により、電極構成材料の少なくとも一部を含む被膜を、前記被処理材料の表面に形成する放電表面処理用電極であって、
導電性ダイヤモンド粒子を含む。
In order to solve the above-described problems, an electrode for discharge surface treatment according to the present invention is:
A discharge surface treatment electrode for forming a film including at least a part of an electrode constituent material on a surface of the material to be treated by discharge between the material to be treated,
Contains conductive diamond particles.

導電性ダイヤモンドは、絶縁性ダイヤモンドと異なり、内部に空隙を有する比較的崩れ易い性質を有する放電表面処理用電極の内部においても、電極の導電性を阻害することなく、放電表面処理において好適に放電の起点となることができる。したがって、このような導電性ダイヤモンドが内部に分散された放電表面処理用電極は、放電箇所に偏りが少なく安定した放電を実現することができる。また、放電表面処理用電極は、内部に空隙を有しており、伝熱面積が小さく、熱が溜まり易い構造であるため、この電極に熱伝導率が高いダイヤモンドを用いることで、効率的にその周囲の電極構成物質に、放電により発生する熱を伝えることができる。これにより、本発明に係る放電表面処理用電極は、電極構成物質の被処理材料への効率的な移動を実現し、電極くずの発生を抑制することができる。   Unlike insulative diamond, conductive diamond is suitable for discharge surface treatment without impairing the conductivity of the electrode, even within the discharge surface treatment electrode having voids inside and having a relatively fragile property. Can be the starting point. Therefore, the discharge surface treatment electrode in which the conductive diamond is dispersed inside can realize a stable discharge with little unevenness in the discharge portion. In addition, since the discharge surface treatment electrode has a void inside, has a small heat transfer area, and has a structure in which heat is likely to accumulate, the use of diamond having high thermal conductivity for this electrode effectively Heat generated by the discharge can be transmitted to the surrounding electrode constituent materials. Thereby, the electrode for electrical discharge surface treatment which concerns on this invention can implement | achieve the efficient movement to the to-be-processed material of an electrode constituent substance, and can suppress generation | occurrence | production of an electrode scrap.

また、例えば、本発明に係る放電表面処理用電極は、前記被処理材料に移動させる材料粒子をさらに含み、
前記導電性ダイヤモンド粒子は、不純物が添加されたダイヤモンドであり、前記導電性ダイヤモンド粒子が、前記材料粒子中に分散されていても良い。
Further, for example, the discharge surface treatment electrode according to the present invention further includes material particles to be moved to the material to be treated,
The conductive diamond particles may be diamond to which impurities are added, and the conductive diamond particles may be dispersed in the material particles.

導電性のダイヤモンド粒子としては、いくつかのタイプが考えられるが、その一つとして、ホウ素等の不純物が添加されたダイヤモンドが挙げられる。このタイプの導電性ダイヤモンド粒子を含む放電表面処理用電極は、導電性ダイヤモンド粒子以外に、被処理材料に移動させる材料粒子を含む。導電性ダイヤモンド粒子は、電極表面処理時に放電の起点となり、安定した放電を実現するとともに、このような放電表面処理用電極は、内部に空隙を有しており、伝熱面積が小さく、熱が溜まり易い構造であっても、この電極に熱伝導率が高いダイヤモンドを用いることで、その周囲の電極構成物質に対して、放電で発生する熱を効率的に伝えることができる。   There are several types of conductive diamond particles, one of which is diamond to which impurities such as boron are added. The discharge surface treatment electrode including this type of conductive diamond particles includes material particles that move to the material to be processed in addition to the conductive diamond particles. Conductive diamond particles become the starting point of discharge during electrode surface treatment, and realize stable discharge. Such a discharge surface treatment electrode has voids inside, has a small heat transfer area, and heat is Even if the structure tends to accumulate, the heat generated by the discharge can be efficiently transmitted to the surrounding electrode constituent materials by using diamond having high thermal conductivity for this electrode.

また、例えば、前記導電性ダイヤモンド粒子は、ダイヤモンドと、当該ダイヤモンドの表面にコーティングされた導電性材料とを含んでも良い。   For example, the conductive diamond particles may include diamond and a conductive material coated on the surface of the diamond.

導電性ダイヤモンド粒子の他の例としては、導電性を有しない通常のダイヤモンドの表面に、導電性材料をコーティングしたものが挙げられる。このような導電性ダイヤモンド粒子も、電極表面処理時に放電の起点となり、安定した放電を実現することができる。また、このような導電性ダイヤモンド粒子を用いた放電表面処理用電極は、ダイヤモンドにコーティングされた導電性材料を、放電表面処理の際に被処理材料に移動させ、被膜の材料とすることも可能である。   As another example of the conductive diamond particles, a surface of normal diamond having no conductivity and a conductive material coated thereon may be mentioned. Such conductive diamond particles also serve as the starting point of discharge during electrode surface treatment, and can realize stable discharge. In addition, the electrode for discharge surface treatment using such conductive diamond particles can also be used as a coating material by moving the conductive material coated with diamond to the material to be treated during the discharge surface treatment. It is.

図1は、本発明の一実施形態に係る放電表面処理用電極を用いた表面処理の概要を表す概念図である。FIG. 1 is a conceptual diagram showing an outline of surface treatment using a discharge surface treatment electrode according to an embodiment of the present invention. 図2は、放電表面処理用電極の微細構造を表す概念図である。FIG. 2 is a conceptual diagram showing the fine structure of the discharge surface treatment electrode.

以下に、図面等を用いて本発明の一実施形態に係る放電表面処理用電極の説明を行う。
図1は、本発明の一実施形態に係る放電表面処理用電極10を用いた放電表面処理の概要を表す概念図である。放電表面処理では、加工液16中に設置した被処理材料18と放電表面処理用電極10の間に放電を発生させ、そのエネルギーにより、被処理材料18の表面に硬質被膜20を形成する。放電表面処理において形成される被膜20は、放電時に溶融等した放電表面処理用電極10の電極構成材料を用いて形成される。
The discharge surface treatment electrode according to an embodiment of the present invention will be described below with reference to the drawings and the like.
FIG. 1 is a conceptual diagram showing an outline of discharge surface treatment using a discharge surface treatment electrode 10 according to an embodiment of the present invention. In the discharge surface treatment, a discharge is generated between the material to be treated 18 installed in the machining liquid 16 and the discharge surface treatment electrode 10, and the hard film 20 is formed on the surface of the material to be treated 18 by the energy. The coating film 20 formed in the discharge surface treatment is formed using the electrode constituent material of the discharge surface treatment electrode 10 that is melted or the like during discharge.

図2は、図1に示す放電表面処理用電極10の微細構造を表す概念図である。図2に示すように、放電表面処理用電極10は、材料粒子14と、材料粒子14中に分散された導電性ダイヤモンド粒子12を含む。放電表面処理用電極10における導電性ダイヤモンド粒子12の含有割合は特に限定されず、材料粒子14の材質や、放電処理によって被処理材料18表面に形成される被膜20の性質等に応じて調整されるが、例えば5%〜95%の範囲とすることができる。   FIG. 2 is a conceptual diagram showing the microstructure of the discharge surface treatment electrode 10 shown in FIG. As shown in FIG. 2, the discharge surface treatment electrode 10 includes material particles 14 and conductive diamond particles 12 dispersed in the material particles 14. The content ratio of the conductive diamond particles 12 in the discharge surface treatment electrode 10 is not particularly limited, and is adjusted according to the material of the material particles 14 and the properties of the coating 20 formed on the surface of the material 18 to be treated by the discharge treatment. However, it can be in the range of 5% to 95%, for example.

図2に示すように、材料粒子14及び導電性ダイヤモンド粒子12は、加圧成型等によって直接結合していても良いが、これらの粒子の間に、粒子の結合を媒介する他の金属粉末、樹脂又は炭素等が存在していても良い。また、電極が適度な強度を有していれば、電極内部の空隙はどのような形状でもよい。   As shown in FIG. 2, the material particles 14 and the conductive diamond particles 12 may be directly bonded by pressure molding or the like, but between these particles, other metal powders that mediate the bonding of the particles, Resin or carbon may be present. Moreover, as long as an electrode has moderate intensity | strength, the space | gap inside an electrode may be what kind of shape.

材料粒子14の少なくとも一部は、放電表面処理によって被処理材料18表面に移動され、被処理材料18表面の被膜20を構成する材料となる。材料粒子14の材質は、放電表面処理用電極10の放電表面処理によって被処理材料18表面に形成する被膜20に応じて選択され、特に限定されないが、例えば金属、金属化合物等が挙げられ、さらに具体的には、チタン(Ti)、チタン水素化物(TiH)、チタン炭化物(TiC)、チタンニッケル合金(TiN)、タングステンカーバイド、クロムカーバイド、コバルト、BN、B4C、ホウ化物、MoSi、酸化鉄、酸化亜鉛等が挙げられる。なお、被処理材料18表面に形成される被膜20の性質は、材料粒子14そのものだけでなく、放電条件、電極10の構成材料が放電エネルギーにより反応した物質、被処理材料18の材質の影響を受け得る。 At least a part of the material particles 14 is moved to the surface of the material 18 to be processed by the discharge surface treatment, and becomes a material constituting the coating 20 on the surface of the material 18 to be processed. The material of the material particles 14 is selected according to the coating 20 formed on the surface of the material to be treated 18 by the discharge surface treatment of the discharge surface treatment electrode 10, and is not particularly limited, and examples thereof include metals and metal compounds. Specifically, titanium (Ti), titanium hydride (TiH 2 ), titanium carbide (TiC), titanium nickel alloy (TiN), tungsten carbide, chromium carbide, cobalt, BN, B4C, boride, MoSi 2 , oxidation Examples thereof include iron and zinc oxide. Note that the properties of the coating film 20 formed on the surface of the material to be processed 18 are affected not only by the material particles 14 themselves, but also by the discharge conditions, the substance in which the constituent material of the electrode 10 reacts with the discharge energy, and the material of the material 18 to be processed. I can receive it.

導電性ダイヤモンド粒子12は、導電性を付与したダイヤモンドの粒子であり、少なくとも不純物が添加されたダイヤモンドと、ダイヤモンドの表面に導電性材料をコーティングしたものが存在する。不純物が添加されたダイヤモンドとしては、ホウ素、リン、窒素等がドープされたダイヤモンドが挙げられ、高温高圧法や、マイクロ波プラズマCVD法によって製造される。不純物を含まない通常のダイヤモンドは絶縁体であるが、例えばホウ素をドープしたダイヤモンドは、ホウ素の添加量に応じて導電性を帯びる。   The conductive diamond particles 12 are diamond particles imparted with conductivity, and there are diamonds to which at least impurities are added and those obtained by coating the surface of diamond with a conductive material. Examples of the diamond to which impurities are added include diamond doped with boron, phosphorus, nitrogen, or the like, and is manufactured by a high-temperature high-pressure method or a microwave plasma CVD method. Normal diamond containing no impurities is an insulator. For example, diamond doped with boron has conductivity depending on the amount of boron added.

ダイヤモンドの表面に導電性材料をコーティングするタイプの導電性ダイヤモンド粒子12は、例えば金属元素等の導電性材料を、ダイヤモンドの表面にコーティングしたものである。コーティングの方法やコーティングに使用される導電性材料は特に限定されず、コーティング後の粒子表面が、導電経路となるように処理されていれば良い。   The type of conductive diamond particles 12 in which the surface of diamond is coated with a conductive material is obtained by coating the surface of diamond with a conductive material such as a metal element. The coating method and the conductive material used for coating are not particularly limited as long as the particle surface after coating is treated so as to be a conductive path.

図1及び図2に示す放電表面処理用電極10の製造方法の一例を以下に示す。
放電表面処理用電極10の製造方法では、まず、原材料となる材料粒子14と導電性ダイヤモンド粒子12を準備する。材料粒子14は、ボールミル等によって粉砕して生成された粉体であってもよく、粉末が凝集した凝集体であっても良い。材料粒子14の粒径は特に限定されないが、例えば1〜100μm程度とすることができる。導電性ダイヤモンド粒子12の製造方法は、上述したとおりであり、その粒径は特に限定されないが、例えば0.1〜100μm程度とすることができる。
An example of a method for producing the discharge surface treatment electrode 10 shown in FIGS. 1 and 2 is shown below.
In the method for manufacturing the discharge surface treatment electrode 10, first, material particles 14 and conductive diamond particles 12 as raw materials are prepared. The material particles 14 may be a powder produced by pulverization with a ball mill or the like, or an aggregate in which the powder is agglomerated. Although the particle diameter of the material particle 14 is not specifically limited, For example, it can be set as about 1-100 micrometers. The manufacturing method of the conductive diamond particles 12 is as described above, and the particle diameter is not particularly limited, but can be set to about 0.1 to 100 μm, for example.

次に、材料粒子14と導電性ダイヤモンド粒子12を混合し、電極材料の混合粉末を作製する。この際、例えば材料粒子14の結合力に応じて、軟性金属等を、結合材として添加しても良い。さらに、混合粉末を加圧成型したのち焼結し、放電表面処理用電極10を得る。   Next, the material particles 14 and the conductive diamond particles 12 are mixed to produce a mixed powder of the electrode material. At this time, for example, a soft metal or the like may be added as a binder depending on the binding force of the material particles 14. Further, the mixed powder is pressure-molded and then sintered to obtain the discharge surface treatment electrode 10.

図2に示すような導電性ダイヤモンド粒子12を含む放電表面処理用電極10は、放電処理時において、電極中に分散している導電性ダイヤモンド粒子12が放電の起点となり、偏りが少なく安定した放電を実現し、また、その高い熱伝導性により、放電により発生する熱を材料粒子14に効率的に伝えることができる。これにより、放電表面処理用電極10は、材料粒子14の被処理材料18への効率的な移動を実現し、単位電極消耗量に対する被処理材料18への膜形成量が増加するとともに、電極くずの発生を抑制することができる。   In the discharge surface treatment electrode 10 including the conductive diamond particles 12 as shown in FIG. 2, the conductive diamond particles 12 dispersed in the electrode become the starting point of discharge during the discharge treatment, and the discharge is stable with little bias. In addition, due to its high thermal conductivity, the heat generated by the discharge can be efficiently transferred to the material particles 14. As a result, the discharge surface treatment electrode 10 realizes efficient movement of the material particles 14 to the material 18 to be treated, and the amount of film formation on the material 18 to be treated with respect to the unit electrode consumption amount increases, and the electrode scraps Can be suppressed.

ここで、放電表面処理用電極10に含まれる導電性ダイヤモンド粒子12は、絶縁性ではなく、導電性であることにより、このような顕著な効果を奏する。一般的に、放電表面処理用電極は、放電加工用電極とは異なり、その一部が被処理材料18表面に移動し、被処理材料18表面に新たな被膜20を付与することを予定しているため、放電加工用電極と比較して密ではなく、内部に空隙を有し、また被処理材料18に移動させるための材料が電極材料として選定されるため、電気伝導率が比較的低い材料が選定されることもあり、電気伝導率が低い電極も作成される可能性がある。このような放電表面処理用電極では、放電加工用電極と同様に絶縁性である通常のダイヤモンドを含んでいたとしても、当該部分での導電経路が十分に形成されないなどの問題に起因して、安定的な放電の起点となることが困難である。   Here, the conductive diamond particles 12 included in the discharge surface treatment electrode 10 have such a remarkable effect because they are not insulating but conductive. In general, an electrode for electric discharge surface treatment is different from an electrode for electric discharge machining, and a part of the electrode moves to the surface of the material to be processed 18 and a new coating 20 is applied to the surface of the material to be processed 18. Therefore, it is not dense as compared with the electrode for electric discharge machining, has a gap inside, and a material for moving to the material to be processed 18 is selected as the electrode material, so that the material having a relatively low electric conductivity is used. May be selected, and an electrode having low electrical conductivity may be produced. In such an electrode for surface treatment of electric discharge, even if it contains ordinary diamond that is insulating like the electrode for electric discharge machining, due to problems such as insufficient formation of a conductive path in the part, It is difficult to be a starting point for stable discharge.

しかし、導電性ダイヤモンド粒子12を含む放電表面処理用電極10は、導電性ダイヤモンド粒子12が導電性を有しているために、放電表面処理における放電の起点となることができる。また、放電表面処理用電極は構成材料を被処理材料へと移動させるため、放電によって構成材料が崩れるが、従来の放電処理用電極は、特定の部分から放電されることにより電極構成材料が崩れた際に、次の放電の起点がランダムに発生するおそれがある。しかし、本実施形態に係る放電表面処理用電極10は、導電性ダイヤモンド粒子が存在することにより、被処理材料18に近い導電性ダイヤモンドが放電の起点となり、安定した放電を行うことができる。   However, the discharge surface treatment electrode 10 including the conductive diamond particles 12 can serve as a starting point of discharge in the discharge surface treatment because the conductive diamond particles 12 have conductivity. In addition, since the discharge surface treatment electrode moves the constituent material to the material to be treated, the constituent material is destroyed by the discharge. However, in the conventional discharge treatment electrode, the electrode constituent material is destroyed by being discharged from a specific portion. In this case, the starting point of the next discharge may occur randomly. However, in the discharge surface treatment electrode 10 according to the present embodiment, since conductive diamond particles are present, conductive diamond close to the material to be treated 18 becomes a starting point of discharge, and stable discharge can be performed.

なお、導電性ダイヤモンド粒子12として、導電性材料をコーティングしたものを用いる場合は、放電表面処理用電極は、図2に示すような材料粒子14がなくても、コーティングされた導電性材料を被処理材料18に移動させて被膜20の材料とし、放電表面処理を実施することができる。   When the conductive diamond particles 12 coated with a conductive material are used, the discharge surface treatment electrode is coated with the coated conductive material even without the material particles 14 as shown in FIG. It can be moved to the treatment material 18 and used as the material of the coating 20, and the discharge surface treatment can be performed.

10…放電表面処理用電極
12…導電性ダイヤモンド粒子
14…材料粒子
16・・・加工液
18・・・被処理材料
20・・・被膜
DESCRIPTION OF SYMBOLS 10 ... Electrode for discharge surface treatment 12 ... Conductive diamond particle 14 ... Material particle 16 ... Processing liquid 18 ... Material to be processed 20 ... Film

Claims (3)

被処理材料との間の放電により、電極構成材料の少なくとも一部を含む被膜を、前記被処理材料の表面に形成する放電表面処理用電極であって、
導電性ダイヤモンド粒子を含むことを特徴とする放電表面処理用電極。
A discharge surface treatment electrode for forming a film including at least a part of an electrode constituent material on a surface of the material to be treated by discharge between the material to be treated,
An electrode for discharge surface treatment, comprising conductive diamond particles.
前記被処理材料に移動させる材料粒子をさらに含み、
前記導電性ダイヤモンド粒子は、不純物が添加されたダイヤモンドであり、前記導電性ダイヤモンド粒子が、前記材料粒子中に分散されていることを特徴とする請求項1に記載の放電表面処理用電極。
Further comprising material particles to be transferred to the material to be treated;
2. The discharge surface treatment electrode according to claim 1, wherein the conductive diamond particles are diamond to which impurities are added, and the conductive diamond particles are dispersed in the material particles.
前記導電性ダイヤモンド粒子は、ダイヤモンドと、当該ダイヤモンドの表面にコーティングされた導電性材料とを含むことを特徴とする請求項1に記載の放電表面処理用電極。   2. The discharge surface treatment electrode according to claim 1, wherein the conductive diamond particles include diamond and a conductive material coated on a surface of the diamond.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001024961A1 (en) * 1999-09-30 2001-04-12 Mitsubishi Denki Kabushiki Kaisha Electrode for discharge surface treating and production method thereof and discharge surface treating method
JP2005532472A (en) * 2002-07-08 2005-10-27 プロ アクア ディアマントエレクトローデン プロドゥクツィオーン ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートエアヴェルプスゲゼルシャフト Diamond electrode and manufacturing method thereof
JP2010024506A (en) * 2008-07-22 2010-02-04 Central Japan Railway Co Method for producing boron-doped diamond, boron-doped diamond, and electrode

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001024961A1 (en) * 1999-09-30 2001-04-12 Mitsubishi Denki Kabushiki Kaisha Electrode for discharge surface treating and production method thereof and discharge surface treating method
JP2005532472A (en) * 2002-07-08 2005-10-27 プロ アクア ディアマントエレクトローデン プロドゥクツィオーン ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートエアヴェルプスゲゼルシャフト Diamond electrode and manufacturing method thereof
JP2010024506A (en) * 2008-07-22 2010-02-04 Central Japan Railway Co Method for producing boron-doped diamond, boron-doped diamond, and electrode

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