JP2013086187A - Chuck table inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily determine the quality of the suction holding performance of a chuck table.SOLUTION: The chuck table inspection device 1 inspects a bonded state in a chuck table 9 configured by bonding a base 90 to a porous member 91. An inspection ball 500 is made to fall toward the porous member 91 of the chuck table 9 from an inspection ball holding section 50 and the spring-up of the inspection ball 500 in the porous member 91 is monitored by a monitoring sensor 81. The quality of the suction holding performance of the chuck table 9 is determined depending on whether or not the spring-up of the inspection ball 500 becomes higher than the monitoring sensor 81. The quality of the suction holding performance of the chuck table 9 can be properly determined and the accurate determination is made possible since the determination is hardly affected by a temperature and humidity.

Description

  The present invention relates to an apparatus for inspecting a bonding state between a base and a porous member in a chuck table configured by bonding the base and a porous member.

  Various processing apparatuses include a table called a chuck table for holding a workpiece. The chuck table includes a porous member and a base that supports the porous member, and a suction passage that communicates the porous member and a suction source is formed in the base.

  For example, when the work piece is attached to the tape, the chuck table is sucked with the entire surface of the porous member covered with the tape, so that air is not leaked and the tape is interposed. The workpiece can be sucked and held.

  However, there may be a gap in the vertical direction between the porous member and the base due to insufficient bonding between the porous member and the base. In this case, air leaks in the suction passage, and suction holding performance There is a problem that decreases. Therefore, various methods have been proposed to determine whether the chuck table has a suction holding performance (for example, see Patent Document 1).

  For example, if there is a gap between the base and the porous member, the porous member is pulled down when the porous member is covered with a tape or the like and suction is performed. There is a method of confirming the gap between the porous member and the base by measuring the difference in height of the members. There is also a method of determining the gap between the porous member and the base by a method of hitting the porous member and measuring the frequency of the sound at that time.

JP 2007-229889 A

  However, the former method has a problem that when the gap between the porous member and the base is small, the porous member may not be pulled down even if suction is performed, and the gap cannot be confirmed. Further, the latter method has a problem in that erroneous detection may occur because the way of sound transmission is affected by temperature and humidity.

  The present invention has been made in view of such a problem, and an object of the present invention is to make it possible to easily determine whether or not the suction holding performance of the chuck table is good.

  The present invention relates to a chuck table inspection apparatus for inspecting the state of bonding of a chuck table formed by bonding a base and a porous member, and includes a chuck table inspection table on which a chuck table is placed, a hard table It is the height between the inspection ball consisting of a sphere, the inspection ball holder that holds the inspection ball at a predetermined height above the chuck table inspection table, and the chuck table inspection table and the inspection ball holding unit. The monitoring sensor that is placed at a lower height than the inspection ball holder and monitors the inspection ball, and the inspection ball that drops from the inspection ball holder and hits the porous member of the chuck table jumps higher than the monitoring sensor. In this case, it is composed of a determination unit that determines that the chuck table is normal.

  In the present invention, a monitoring sensor for monitoring the inspection ball is provided, the inspection ball is dropped from the inspection ball holding portion toward the porous member of the chuck table, and the jumping in the porous member is monitored by the monitoring sensor. The quality of the chuck table suction holding performance can be determined based on whether the jumping is higher than the monitoring sensor. That is, when the size of the gap between the base and the porous member is within an allowable range, the relative height between the inspection ball holding unit and the monitoring sensor is set so that the inspection ball jumps to a position higher than the monitoring sensor. By setting the relationship, the quality of the chuck table can be determined. Therefore, it is possible to appropriately determine whether the chuck table has a suction holding performance or not, and it is difficult to be affected by temperature and humidity, so that accurate determination can be made.

It is a perspective view which shows an example of a chuck table inspection apparatus. It is a front view showing typically the state where an inspection ball jumps up with a porous member and does not reach the height of the monitoring sensor. It is a front view which shows typically the state where the test | inspection ball jumped up with the porous member and reached the position higher than a monitoring sensor.

  A chuck table inspection apparatus 1 shown in FIG. 1 is an apparatus for inspecting a bonding state between a base 90 and a porous member 91 of a chuck table 9 configured by bonding a base 90 and a porous member 91. The chuck table inspection table 2 on which the chuck table 9 to be inspected is placed is provided. The chuck table 9 is configured such that a porous member 91 is accommodated inside a convex portion 90 a protruding in a ring shape on the surface side of the base 90.

  A column portion 3 is erected from the chuck table inspection table 2, and a horizontal support portion 4 extends from the column portion 3 in the horizontal direction. The horizontal support portion 4 supports the inspection ball holding portion 5 at the tip thereof, and the height of the inspection ball holding portion 5 is increased by sliding the horizontal support portion 4 in the vertical direction along the column portion 3. Can be adjusted. The inspection ball holding unit 5 is located above the chuck table inspection table 2.

  The inspection ball holding unit 5 includes two movable members 50. Each movable member 50 includes a side plate 50a having a semicircular cross section and a semicircular bottom plate 50b passed to the lower portion of the side plate 50a.

  In a space surrounded by the two movable members 50, an inspection ball 500 made of a hard sphere for inspection of the chuck table 9 is accommodated. The inspection ball 500 is formed of alumina ceramics, for example, and is held by the inspection ball holding unit 5 at a predetermined height.

  A movable member opening / closing part 6 that opens and closes two movable members 50 is disposed on the side surface of the horizontal support part 4. The movable member opening / closing unit 6 includes a cylinder 60 fixed to the horizontal support unit 4 and a piston 61 that is driven by the cylinder 60 to move forward and backward. A side plate 50 a of the movable member 50 is fixed to the tip of the piston 61. ing.

  Two shaft portions 70, 71 extending in the vertical direction are disposed on the side portion of the chuck table inspection table 2, and monitoring sensors 80, 81 are fixed to the respective shaft portions 70, 71, respectively. The monitoring sensors 80 and 81 are disposed at a position lower than the inspection ball holding unit 5.

  In the illustrated example, the monitoring sensor 80 includes a light emitting unit 80a, the monitoring sensor 81 includes a light receiving unit 81a, and the light emitting unit 80a of the monitoring sensor 80 and the light receiving unit 81a of the monitoring sensor 81 face each other in the horizontal direction. As shown in FIG. 2, a detection line 82 that connects the light emitting unit 80a and the light receiving unit 81a is formed. When the inspection ball 500 passes through the detection line 82, the light emitted from the light emitting unit 80a is blocked, so that the monitoring sensor 81 can detect the blocking of the light due to the passage of the inspection ball 500. The monitoring sensor 81 is connected to a determination unit 83 that determines whether the chuck table 9 is normal according to the detection result of the monitoring sensor 81.

  In the chuck table inspection apparatus 1 shown in FIG. 1, the base 90 side of the chuck table 9 is placed on the chuck table inspection table 2 so that the porous member 91 faces upward. Further, the inspection ball holding part 5 is fixed at a predetermined height. Specifically, when the size of the gap between the base 90 and the porous member 91 is within an allowable range, the horizontal support portion 4 is set so that the inspection ball 500 jumps to a position higher than the monitoring sensors 80 and 81. Is moved in the vertical direction to adjust the vertical position of the test ball holder 5. When the monitoring sensors 80 and 81 are movable in the vertical direction, the relative positional relationship with the inspection ball holding unit 5 can be adjusted by adjusting the positions of the monitoring sensors 80 and 81. In any case, the heights of the monitoring sensors 80 and 81 are a predetermined height in relation to the height of the inspection ball holding unit 5.

  When the chuck 60 retreats the piston 61 with the chuck table 9 placed in this manner, the two movable members 50 are separated from each other and there is a gap between the two bottom plates 50b, and the test ball holding unit 5 holds them. The inspection ball 500 falls. Then, the falling inspection ball 500 passes through the detection line 82. When the monitoring sensor 81 detects that the inspection ball 500 has passed the detection line 82, it is assumed that the inspection ball 500 hits the porous member 91 and the inspection 500 jumps up, and the inspection ball 500 again sets the detection line 82. Start monitoring whether to block.

  As shown in FIG. 2, when the inspection ball that has bounced up does not reach the detection line 82 within a certain time, there is an unacceptable gap between the base 90 and the porous member 91, so that the chuck table 9 The determination unit 83 determines that there is a problem with the suction holding performance of the chuck table 9.

  On the other hand, as shown in FIG. 3, when the inspection ball hitting the porous member 91 jumps higher than the detection line 82, when the monitoring sensor 81 detects that, the determination unit 83 determines that the base 90 and the porous member 91 are porous. It is determined that there is no gap with the mass member 91 or that the gap is within the allowable range, and the suction holding performance of the chuck table 9 is normal.

  In this manner, the quality of the suction holding performance of the chuck table 9 is determined according to the height at which the inspection ball 500 jumps up against the porous member 91.

  As described above, in the chuck table inspection apparatus 1, the inspection ball 500 is dropped on the porous member 91 of the chuck table 9, and the chuck table 9 has the rebound height at a certain level or more. The quality of the suction holding performance can be determined, and the quality of the suction holding performance can be appropriately determined by using the amount of jump according to the size of the gap between the base 90 and the porous member 91 as a reference. be able to. In addition, since it is hardly affected by temperature and humidity, accurate determination is possible.

1: Chuck table inspection device 2: Chuck table inspection table 3: Column part 4: Bracket 5: Inspection ball holding part 50: Movable member 50a: Side plate 50b: Bottom plate 500: Inspection ball 6: Movable member opening / closing part 60: Cylinder 61: Pistons 70, 71: Shafts 80, 81: Monitoring sensor 80a: Light emitting part 81a: Light receiving part 82: Detection line 83: Judgment part 9: Chuck table 90: Base 91: Porous member

Claims (1)

A chuck table inspection device for inspecting a bonding state between the base and the porous member in a chuck table configured by bonding a base and a porous member,
A chuck table inspection table on which the chuck table is placed;
Inspection balls made of hard spheres for inspection,
An inspection ball holding section for holding the inspection ball at a predetermined height above the chuck table inspection table;
A monitoring sensor for monitoring the inspection ball, the height between the chuck table inspection table and the inspection ball holding unit, the height being lower than the inspection ball holding unit;
A determination unit that drops the inspection ball from the inspection ball holding unit and determines that the chuck table is normal when the inspection ball that jumps up and hits the porous member of the chuck table rises higher than the monitoring sensor;
Chuck table inspection device composed of

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