CN103691715B - A substrate cleaning device - Google Patents

Abstract

The invention discloses a kind of substrate cleaning apparatus, comprising frame, for holding the microscope carrier of glass substrate, the cleaning head body being provided with ultrasonic transmitter, at least one laser displacement sensor and signal processor; Wherein, microscope carrier is fixed on frame; Cleaning head body is positioned at above microscope carrier, and is slidably mounted on frame; Laser displacement sensor is installed on cleaning head body and by measuring the range information between laser displacement sensor and glass baseplate surface to glass baseplate surface Emission Lasers detected ray; Signal processor judges glass substrate breakage when being connected with laser displacement sensor signal and occurring exception for the range information between laser displacement sensor and glass baseplate surface.Substrate cleaning apparatus provided by the invention can detect whether tested glass substrate has breakage exactly, and undetected situation can be avoided to occur, improves the recall rate of broken glass substrate.

Description

A substrate cleaning device

technical field

The invention relates to the field of liquid crystal display device manufacturing equipment, in particular to substrate cleaning equipment.

Background technique

In the field of semiconductor and liquid crystal display, vacuum equipment is very important production equipment. Vacuum equipment is extremely difficult to maintain, especially when the vacuum equipment is abnormally shut down, it is necessary to open the cavity to overhaul its interior. However, the vacuum equipment generally needs several hours of cooling and other special treatments before opening the cavity After the overhaul is completed and assembled, it needs to be heated up and vacuumed for up to 7 to 8 hours. After the vacuum is completed, it needs to be restored for 3 to 4 hours before normal production can resume. This is a serious problem. Affects the utilization rate of the equipment. Therefore, before each glass substrate is sent into the vacuum equipment, it is necessary to detect whether the glass substrate is damaged, so as to prevent the damaged glass substrate from being broken in the vacuum chamber of the vacuum equipment and causing the vacuum equipment to stop abnormally.

In the prior art, vacuum adsorption is usually used to detect whether the glass substrate is broken. However, there are many blind spots when the vacuum adsorption method is used to detect the glass substrate, and the cracks in the glass substrate cannot be detected, which is easy to damage the glass substrate. Occurrence of omissions.

Contents of the invention

The object of the present invention is to provide a substrate cleaning device, which can detect whether the glass substrate is damaged while cleaning the glass substrate, and has a high detection rate.

To achieve the above object, the present invention provides the following technical solutions:

A substrate cleaning device, including a frame, a stage for holding a glass substrate, a cleaning head body equipped with an ultrasonic transmitter, at least one laser displacement sensor, and a signal processor; wherein,

The carrier is fixed on the frame;

The cleaning head body is located above the platform and is slidably mounted on the frame;

The laser displacement sensor is installed on the cleaning head body, and measures the distance information between the laser displacement sensor and the surface of the glass substrate by emitting laser detection rays to the surface of the glass substrate;

The signal processor is signal-connected with the laser displacement sensor, and is used for judging the damage of the glass substrate when the distance information between the laser displacement sensor and the surface of the glass substrate is abnormal.

When the substrate cleaning equipment provided by the present invention is used to clean the glass substrate, the glass substrate is placed on the stage, and the cleaning head body is manipulated to move on the frame above the glass substrate according to the set direction. Among them, the ultrasonic transmitter on the cleaning head body continuously emits ultrasonic waves to the surface of the glass substrate to remove the dust on the surface of the glass substrate. At the same time, the laser displacement sensor installed on the side of the cleaning head body facing the stage continues to emit The laser detects rays to measure the distance information between the laser displacement sensor and the surface of the glass substrate, and feeds back the measured distance information between the laser displacement sensor and the surface of the glass substrate to the signal processor in real time; when the laser displacement sensor emits When the detection ray hits the crack or defect on the glass substrate, the distance information measured by the laser displacement sensor and the crack or defect on the surface of the glass substrate will be obviously abnormal. When the signal processor finds that the received distance When the information is abnormal, it is judged that the glass substrate under test is damaged.

Therefore, the substrate cleaning equipment provided by the present invention can accurately detect whether the glass substrate to be tested is damaged, avoiding the occurrence of missed detection, and effectively improving the detection rate of damaged glass substrates, reducing the risk of damage caused by glass substrates. And the probability of problems that cause damage to vacuum equipment.

Preferably, the substrate cleaning equipment provided by the present invention further includes an alarm device signal-connected to the signal processor, and the signal processor is also used for when the distance information between the laser displacement sensor and the glass substrate is abnormal An alarm signal is generated at any time, and the alarm device is controlled to give an alarm according to the alarm signal. The alarm device can intuitively remind the operator that the glass substrate to be inspected is damaged, without requiring the operator to observe the processing results of the signal processor in real time, further avoiding the occurrence of missed inspections.

Preferably, the substrate cleaning equipment provided by the present invention further includes:

A drawing device connected with the signal processor to draw a point analysis diagram according to the distance information received by the signal processor;

A display that is signal-connected with the drawing device to display the point analysis diagram.

If the detected glass substrate is damaged, the operator can also intuitively see the approximate location of the damaged point on the surface of the glass substrate and the degree of damage to the glass substrate at the damaged point through the display, so that it is convenient for the operator to detect the damage on the surface of the glass substrate. to confirm.

Preferably, there are multiple laser displacement sensors closely arranged along a direction perpendicular to the sliding direction of the cleaning head body.

Preferably, it also includes a sensor mounting bracket fixedly connected to the cleaning head body, and each of the laser displacement sensors is fixed to the sensor mounting bracket. In order to facilitate the installation of the laser displacement sensor, the installation accuracy of the laser displacement sensor can be improved at the same time.

Preferably, the cleaning head body has a groove opening toward the carrier, and the sensor mounting bracket is embedded in the groove, so that the structure of the cleaning head body is more compact.

Preferably, the cleaning head body has slots with openings facing the stage and corresponding to the laser displacement sensors one by one, and each laser displacement sensor is embedded in the slot corresponding to it.

In this way, when an individual laser displacement sensor fails, it is only necessary to disassemble the failed laser displacement sensor, which facilitates the replacement of the laser displacement sensor.

Description of drawings

FIG. 1 is a schematic structural diagram of a substrate cleaning device provided by an embodiment of the present invention;

2 is a schematic cross-sectional view of the cleaning head body in the substrate cleaning equipment provided by the embodiment of the present invention;

3 is a schematic diagram of the detection of the surface of the glass substrate by the laser displacement sensor in the substrate cleaning equipment provided by the embodiment of the present invention;

Fig. 4 is a schematic diagram of the laser displacement sensor in the substrate cleaning equipment provided by the embodiment of the present invention to detect the damage on the surface of the glass substrate;

Fig. 5 is an analysis diagram of abnormal points on the damaged surface of the glass substrate.

Detailed ways

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

Please refer to Figures 1 to 3, wherein Figure 1 is a schematic structural view of a substrate cleaning device provided by an embodiment of the present invention; Figure 2 is a schematic cross-sectional view of a cleaning head body in a substrate cleaning device provided by an embodiment of the present invention; The schematic diagram of the laser displacement sensor detecting the surface of the glass substrate in the substrate cleaning equipment provided by the embodiment of the invention;

The substrate cleaning equipment provided by the present invention includes: a frame 1, a stage 3 for holding a glass substrate 2, a cleaning head body 4 equipped with an ultrasonic transmitter, at least one laser displacement sensor 5, and a signal processor; wherein,

The carrier 3 is fixed on the frame 1;

The cleaning head body 4 is located above the platform 3 and is slidably mounted on the frame 1;

The laser displacement sensor 5 is installed on the cleaning head body 4, and measures the distance information between the laser displacement sensor 5 and the surface of the glass substrate 2 by emitting laser detection rays to the surface of the glass substrate 2, as shown in FIG. 3 ;

The signal processor is signal-connected with the laser displacement sensor 5 and is used for judging the damage of the glass substrate 2 when the distance information between the laser displacement sensor 5 and the surface of the glass substrate 2 is abnormal.

Generally, the laser displacement sensor 5 includes a transmitter, a receiver, and an echo processor signally connected to the transmitter and receiver. Among them, the transmitter is used to emit laser pulses to the surface of the glass substrate to form laser detection rays; the receiver is used to receive the laser pulses returned after the laser detection rays meet the glass substrate; the echo processor starts to emit laser pulses according to the transmitter until the laser pulses return Calculate the distance information between the laser displacement sensor 5 and the surface of the glass substrate 2 according to the time required to reach the receiver. However, in the present invention, the echo processor in the laser displacement sensor 5 is connected to the signal processor to feed back the calculated distance information between the laser displacement sensor 5 and the surface of the glass substrate 2 to the signal processor in real time.

When the substrate cleaning equipment provided by the present invention is used to clean the glass substrate, the glass substrate 2 is first placed on the stage 3 by the manipulator and the lifting mechanism 6, and the glass substrate 2 is fixed through the air suction hole on the stage 3, and the After the glass substrate 2 is fixed, the cleaning head body 4 is manipulated to move on the frame 1 above the stage 3 in accordance with the set direction. During the movement of the cleaning head body 4, the ultrasonic transmitter on the cleaning head body 4 is directed towards the glass substrate. 2, the surface continuously emits ultrasonic waves to remove the dust on the surface of the glass substrate 2. At the same time, the laser displacement sensor 5 installed on the side of the cleaning head body 4 facing the stage 3 continuously emits laser detection rays to the surface of the entire glass substrate 2 to measure the laser The distance information between the displacement sensor 5 and the surface of the glass substrate 2, and the measured distance information between the laser displacement sensor 5 and the surface of the glass substrate 2 is fed back to the signal processor in real time. When the laser detection ray emitted by the laser displacement sensor 5 When the crack or defect on the glass substrate 2 is irradiated, the distance information measured by the laser displacement sensor 5 and the surface of the glass substrate 2 will be obviously abnormal. When the signal processor finds that the received distance information is abnormal, it will judge The glass substrate 2 under test was damaged.

For example, as shown in FIG. 3 , the distance L1 between the laser displacement sensor 5 and the glass substrate 2 is 13 mm, the thickness h of the glass substrate is 7 mm, and the distance L2 between the side of the laser displacement sensor 5 facing the stage 3 and the upper surface of the stage 3 During the detection process, as shown in FIG. 4 , when the distance information fed back by the laser displacement sensor 5 to the signal processor is greater than 13 mm, the signal processor judges that the area on the glass substrate 2 is damaged.

Of course, after the signal processor judges that the glass substrate 2 is damaged, the cleaning head body 4 will continue to move to complete the cleaning and detection. After the cleaning and detection of the entire glass substrate are completed, the cleaning equipment will stop for the convenience of the operator Confirm whether the glass substrate 2 is damaged, thereby avoiding the waste of the glass substrate caused by false detection.

Therefore, the substrate cleaning equipment provided by the present invention can accurately detect whether the glass substrate 2 to be tested is damaged, avoiding the occurrence of missed detection, and effectively improving the detection rate of the damaged glass substrate 2, reducing the risk of damage caused by glass substrates. 2 The probability of damage to the vacuum equipment due to damage.

In addition, in order to further improve the accuracy of the detection of the glass substrate 2 by the laser displacement sensor 5, when detecting the glass substrate 2, the number of reciprocating movements of the cleaning head body 4 can be increased, thereby increasing the detection accuracy of the laser displacement sensor 5 on the same glass substrate 2. detection times.

In a preferred embodiment, the substrate cleaning equipment provided by the present invention also includes an alarm device connected to the signal processor. When the distance information between the laser displacement sensor 5 and the glass substrate 2 is abnormal, the signal processor generates an alarm. signal, and control the alarm device to alarm according to the alarm signal. The alarm device can visually remind the operator that the inspected glass substrate 2 is damaged, without requiring the operator to observe the processing results of the signal processor in real time, further avoiding the occurrence of missed inspections.

The alarm device can be an audible and visual alarm, an alarm module integrated in the signal processor, or other forms of alarm devices, as long as the alarm prompt issued by the alarm device can be discovered by the operator in time.

In some preferred embodiments, the substrate cleaning equipment provided by the present invention also includes:

A drawing device that is connected to the signal processor and draws a contour map and a point analysis map (as shown in Figure 5) according to the distance information obtained by the signal processor;

A display that is signal-connected to a plotting device to display contour plots and point analysis plots. Generally, the above-mentioned drawing device may be a drawing computer.

The drawing device can draw the contour map and point position analysis map of the surface of the glass substrate 2 according to the signal processor receiving the distance information in real time and the surveying coordinates preset in the drawing device, and transmit it to the display connected with the signal for display. In this way, if the detected glass substrate 2 is damaged, the operator can also visually see the approximate position of the damaged point on the surface of the glass substrate 2 and the damage degree of the glass substrate 2 at the damaged point through the display, so as to facilitate the operator. The damaged part on the surface of the glass substrate 2 was confirmed.

In some optional embodiments, the above-mentioned signal processor is also connected with the control device of the manipulator that grabs the glass substrate 2. When the signal processor determines that the detected glass substrate 2 is damaged, the signal processor generates a grabbing rejection signal. , and sent to the control device of the manipulator, so that the control device controls the manipulator to stop the grabbing action, so that the operator can confirm whether the glass substrate 2 is damaged.

In order to ensure the accuracy of the detection results of the laser displacement sensor 5 , as shown in FIG. 1 , in a preferred embodiment, there are multiple laser displacement sensors 5 closely arranged along a direction perpendicular to the sliding direction of the cleaning head body 4 .

In this way, the cleaning head body 4 reciprocates back and forth, so that the laser displacement sensor 5 can detect the entire glass substrate back and forth, which improves the accuracy of the detection results, avoids the occurrence of missed detection, and also improves the detection accuracy of the entire glass substrate. Detection efficiency of glass substrates.

Specifically, the substrate cleaning equipment provided by the present invention further includes a sensor mounting bracket (not shown) fixedly connected to the cleaning head body 4 , and each laser displacement sensor 5 is fixed to the sensor mounting bracket. In this way, all the laser displacement sensors 5 can be installed in the sensor installation bracket in advance, and then the sensor installation bracket is fixed on the cleaning head body 4, which facilitates the installation of the laser displacement sensor 5 .

More specifically, as shown in Figure 2, the cleaning head body 4 has a groove 7 with its opening facing the carrier 3, and the sensor mounting bracket is embedded in the groove 7, so that the cleaning head body 4 is more compact, and the laser beam can also be improved. The installation accuracy of the displacement sensor 5.

In addition, in some other optional implementations, the cleaning head body 4 may have slots with openings facing the stage and corresponding to the laser displacement sensors 5 one-to-one. Each laser displacement sensor 5 is individually embedded in its corresponding slot. in the slot. When an individual laser displacement sensor 5 breaks down, it is only necessary to disassemble the failed laser displacement sensor 5 , which will not affect the installation position of other lasers at the sensor 5 , which facilitates the replacement of the laser displacement sensor 5 .

Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, the present invention also intends to include these modifications and variations.

Claims (7)

1. A substrate cleaning device, characterized in that it comprises a frame, a stage for accommodating a glass substrate, a cleaning head body equipped with an ultrasonic transmitter, at least one laser displacement sensor, and a signal processor; wherein, The carrier is fixed on the frame; The cleaning head body is located above the stage, and is slidably installed on the frame; wherein, after the signal processor judges that the glass substrate is damaged, the cleaning head body continues to move to complete this time. cleaning and testing; The laser displacement sensor is installed on the cleaning head body, and measures the distance information between the laser displacement sensor and the surface of the glass substrate by emitting laser detection rays to the surface of the glass substrate; The signal processor is signal-connected with the laser displacement sensor, and is used for judging the damage of the glass substrate when the distance information between the laser displacement sensor and the surface of the glass substrate is abnormal; Take the signal connection of the control device of the manipulator of the glass substrate. When the signal processor determines that the detected glass substrate is damaged, the signal processor generates a rejection signal and sends it to the control device of the manipulator, so that the control device Control the manipulator to stop the grabbing action. 2. The substrate cleaning equipment according to claim 1, further comprising an alarm device connected to the signal processor, and the signal processor is also used for when the laser displacement sensor is connected to the glass substrate When the distance information between them is abnormal, an alarm signal is generated, and the alarm device is controlled to give an alarm according to the alarm signal. 3. The substrate cleaning equipment according to claim 1, further comprising: A drawing device connected with the signal processor to draw a point analysis diagram according to the distance information received by the signal processor; A display that is signal-connected with the drawing device to display the point analysis diagram. 4. The substrate cleaning equipment according to any one of claims 1-3, wherein there are multiple laser displacement sensors closely arranged along a direction perpendicular to the sliding direction of the cleaning head body. 5 . The substrate cleaning equipment according to claim 4 , further comprising a sensor mounting bracket fixedly connected to the cleaning head body, and each of the laser displacement sensors is fixed to the sensor mounting bracket. 6 . The substrate cleaning equipment according to claim 5 , wherein the cleaning head body has a groove opening toward the stage, and the sensor mounting bracket is embedded in the groove. 7. The substrate cleaning equipment according to claim 4, characterized in that, the cleaning head body has an opening facing the carrier and corresponding to the laser displacement sensor one-to-one, each of the laser displacement sensors The sensor is embedded in the corresponding groove.