CN107883964B - Device for detecting motion trail of single point on workpiece ring in ring polishing processing and method for detecting motion trail by using device - Google Patents

Abstract

The invention discloses a single-point motion trajectory detection device on a workpiece ring in ring-throwing machining and a detection method using the device, relating to a motion trajectory detection device on a workpiece ring for ring-throwing machining and a method thereof. The invention aims to solve the problems of complicated detection process and low detection accuracy of the single-point motion track on the workpiece ring in the existing ring polishing process. The device consists of a workpiece ring, a laser displacement sensor, a photoelectric position sensor and a fixing plate; the workpiece ring is arranged in parallel with the fixing plate, the laser displacement sensor is arranged inside the blind hole on the upper surface of the workpiece ring, and the photoelectric position sensor is arranged in a circular array on the fixing plate. the lower surface of the board. Method: During the rotation of the workpiece ring, the photoelectric position sensor records the plane coordinate data x and y, and the laser displacement sensor records the vertical height change z; draw x and y as a plane motion trajectory diagram, and draw x, y and z as a three-dimensional motion trajectory picture. The detection process of the invention is simple and convenient, and the precision is high, and the precision of the element surface shape evolution prediction can be improved.

Description

Single-point motion trajectory detection device on workpiece ring in ring polishing and use of the device to detect method of detection

technical field

The invention relates to a single-point motion trajectory detection device on a workpiece ring and a method thereof.

Background technique

Ring polishing is widely used as the final precision polishing of flat optical components because it can effectively suppress the mid- and high-frequency errors of the workpiece, and at the same time has a high cost performance compared to small tool polishing.

In actual processing, the motion evaluation of the polishing disc is only to detect its average speed, but the motion of the workpiece is not a regular circular trajectory due to the influence of the machine tool vibration and other factors. That is to say, the actual motion trajectory of the workpiece ring is not a circle around its center, that is, the movement of a single point on the workpiece ring not only has an offset along the radial direction of the polishing disk, but also has a jump in the direction perpendicular to the polishing disk. At present, the prediction of the surface shape evolution trend of the workpiece surface is realized by the preston equation, specifically by reconstructing the geometric model of the contact pair between the workpiece and the polishing disk, and then using the finite element method based on the contact mechanics to obtain the interface between the workpiece and the polishing disk. Then, the respective motion speeds of the workpiece and the polishing disc are obtained by coordinate transformation; finally, the surface of the workpiece is discretized to obtain the cumulative material removal of a single point on the workpiece surface, and then the surface shape evolution trend prediction of the workpiece ring surface is completed. Therefore, the existing motion model ignores the deviation of a single point on the workpiece ring along the radial direction of the polishing disk, and also ignores the runout in the direction perpendicular to the polishing disk; furthermore, there is an error in the motion representation of the polishing disk, and the material removal rate of the workpiece is not uniform. The calculation of the distribution introduces a large error.

At the same time, the prediction of the surface shape evolution trend of the workpiece ring in the ring polishing process relies heavily on the experience of the technician to judge, and then determine the workpiece ring shape accuracy. This method has the problem of low detection accuracy and also restricts the improvement of processing efficiency. ; It will also introduce a large error to the calculation of the non-uniform distribution of the workpiece material removal rate.

SUMMARY OF THE INVENTION

In order to solve the problems of low detection accuracy and large error in the motion error detection of the workpiece ring in the existing ring polishing process, the present invention proposes a single-point motion trajectory detection device on the workpiece ring in the ring polishing process and a detection method using the device. .

A single-point motion trajectory detection device on a workpiece ring in ring polishing processing, the device is composed of a workpiece ring, a laser displacement sensor, several photoelectric position sensors and a fixed plate;

The workpiece ring is arranged in parallel with the fixing plate, the workpiece ring is arranged under the fixing plate, the upper surface of the workpiece ring is provided with a blind hole, the laser displacement sensor is arranged inside the blind hole, and the laser displacement sensor is arranged perpendicular to the upper surface of the workpiece ring, and the laser displacement sensor is arranged perpendicular to the upper surface of the workpiece ring. The sensing end of the sensor is arranged towards the fixing plate; several photoelectric position sensors are arranged on the lower surface of the fixing plate in the form of an annular array, the sensing end of the photoelectric position sensor is arranged towards the workpiece ring, the center of the annular array of the photoelectric position sensor is the same as the workpiece ring. The center corresponds to the center; the center of the sensing end of the photoelectric position sensor is set corresponding to the center of the sensing end of the laser displacement sensor;

The parallelism between the upper surface of the workpiece ring and the lower surface of the fixing plate is less than 5 μm;

The vertical distance between the upper surface of the workpiece ring and the lower surface of the fixing plate is 300-400 mm;

The flatness of the lower surface of the fixing plate is less than 5 μm;

The positioning accuracy of the photoelectric position sensor in the range of 3mm×3mm is less than 3μm;

The perpendicularity between the laser displacement sensor and the workpiece ring is less than 5 μm;

The photoelectric position sensor is adsorbed on the lower surface of the fixed plate through the vacuum suction cup;

The detection accuracy of the laser displacement sensor is less than 3 μm;

The method of using the single-point motion trajectory detection device on the workpiece ring in the above-mentioned ring polishing process to detect the single-point motion trajectory is carried out according to the following steps:

1. Adjust the parallelism between the upper surface of the workpiece ring and the lower surface of the fixed plate <5μm;

2. Adjust the horizontal position of the laser displacement sensor so that the center of the sensing end of the photoelectric position sensor corresponds to the center of the sensing end of the laser displacement sensor vertically;

3. Start the workpiece ring. During the rotation of the laser displacement sensor with the workpiece ring, the photoelectric position sensor is used to record the plane coordinate data x and y of the center point of the laser displacement sensor. At the same time, the laser displacement sensor is used to record the center point of the laser displacement sensor. The vertical height change z of ;

4. Draw the plane coordinate data x and y recorded by the photoelectric position sensor and the laser displacement sensor into the plane motion trajectory diagram of the center point of the laser displacement sensor, and draw the plane coordinate data x and y recorded by the photoelectric position sensor and the laser displacement sensor. The vertical height change z is drawn into the three-dimensional motion trajectory diagram of the center point of the laser displacement sensor; that is, the single-point motion trajectory detection on the workpiece ring in the ring polishing process is completed;

The working principle and beneficial effects of the present invention are:

1. In the present invention, a laser displacement sensor is embedded on the workpiece ring, and there are photoelectric position sensors in an annular array above the workpiece ring. The photoelectric position sensor is used to record the plane motion information of the workpiece ring, and the laser displacement sensor can collect the vertical displacement information of the workpiece ring. After data processing, the three-dimensional motion trajectory of a single point on the workpiece ring can be obtained;

2. The present invention aims to solve the problems of low detection accuracy and large error in the motion error detection of the workpiece ring in the existing ring polishing process. A laser displacement sensor is embedded on the workpiece ring, and an annular array of photoelectric position sensors is placed on the workpiece ring. In the process of ring motion, the single-point motion trajectory on the workpiece ring can be automatically detected, the detection process is simple and convenient, and the precision is high. Correction of motion models and contacts to improve the accuracy of component surface evolution predictions.

Description of drawings:

1 is a schematic diagram of the structure of the device of the present invention;

FIG. 2 is a schematic view of the back structure of the fixing plate 4 in the device of FIG. 1;

Fig. 3 is the plane motion trajectory diagram of the position center point of the laser displacement sensor 2 that is tested in Example 1;

FIG. 4 is a three-dimensional motion trajectory diagram of the center point of the position of the laser displacement sensor 2 tested in Example 1. FIG.

Detailed ways:

The technical solutions of the present invention are not limited to the specific embodiments listed below, but also include any reasonable combination between the specific embodiments.

Embodiment 1: This embodiment is described with reference to FIG. 1 and FIG. 2 . The single-point motion trajectory detection device on the workpiece ring in the ring polishing process in this embodiment consists of a workpiece ring 1 , a laser displacement sensor 2 , and several photoelectric position sensors 3 . and the fixed plate 4;

The workpiece ring 1 is arranged in parallel with the fixing plate 4, the workpiece ring 1 is arranged under the fixing plate 4, the upper surface of the workpiece ring 1 is provided with a blind hole 11, the laser displacement sensor 2 is arranged inside the blind hole 11, and the laser displacement sensor 2 is connected with the blind hole 11. The upper surface of the workpiece ring 1 is arranged vertically, and the sensing end of the laser displacement sensor 2 is arranged towards the fixing plate 4; several photoelectric position sensors 3 are arranged on the lower surface of the fixing plate 4 in a circular array, and the sensing end of the photoelectric position sensor 3 faces the workpiece. Ring 1 is arranged, the center of the annular array of photoelectric position sensors 3 corresponds to the center of workpiece ring 1;

The working principle and beneficial effects of this embodiment are as follows:

1. In this embodiment, a laser displacement sensor 2 is embedded on the workpiece ring. Above the workpiece ring is an annular array of photoelectric position sensors 3. The photoelectric position sensor 3 is used to record the plane motion information of the workpiece ring. The laser displacement sensor 2 can collect the information of the workpiece ring. Vertical displacement information, the three-dimensional motion trajectory of a single point on the workpiece ring can be obtained after data processing;

2. This embodiment aims to solve the problems of complex detection process and low detection accuracy of the single-point motion track on the workpiece ring in the existing ring polishing process. The laser displacement sensor 2 is embedded on the workpiece ring, and an annular array of photoelectric position sensors is placed above it. 3. During the motion of the workpiece ring, the single-point motion trajectory on the workpiece ring can be automatically detected, and the detection process is simple and convenient with high precision. The three-dimensional motion trajectory of a single point on the workpiece ring can be obtained through the device of this embodiment. Then it guides the correction of the motion model and the contact, thereby improving the accuracy of the prediction of the surface shape evolution of the component.

Embodiment 2: The difference between this embodiment and Embodiment 1 is that the parallelism between the upper surface of the workpiece ring 1 and the lower surface of the fixing plate 4 is less than 5 μm. Other steps and parameters are the same as in the first embodiment.

Embodiment 3: The difference between this embodiment and Embodiment 1 or 2 is that the vertical distance between the upper surface of the workpiece ring 1 and the lower surface of the fixing plate 4 is 300-400 mm. Other steps and parameters are the same as in the first or second embodiment.

Embodiment 4: The difference between this embodiment and one of Embodiments 1 to 3 is that the flatness of the lower surface of the fixing plate 4 is less than 5 μm. Other steps and parameters are the same as one of the specific embodiments one to three.

Embodiment 5: The difference between this embodiment and one of Embodiments 1 to 4 is that the positioning accuracy of the photoelectric position sensor 3 in the range of 3 mm×3 mm is less than 3 μm. Other steps and parameters are the same as one of the specific embodiments one to four.

Embodiment 6: The difference between this embodiment and one of Embodiments 1 to 5 is that the perpendicularity between the laser displacement sensor 2 and the workpiece ring 1 is less than 5 μm. Other steps and parameters are the same as one of the specific embodiments one to five.

Embodiment 7: The difference between this embodiment and one of Embodiments 1 to 6 is that the photoelectric position sensor 3 is adsorbed on the lower surface of the fixing plate 4 through a vacuum suction cup. Other steps and parameters are the same as one of Embodiments 1 to 6.

Embodiment 8: The difference between this embodiment and one of Embodiments 1 to 7 is that the detection accuracy of the laser displacement sensor 2 is less than 3 μm. Other steps and parameters are the same as one of the specific embodiments one to seven.

Embodiment 9: This embodiment utilizes the single-point motion trajectory detection device on the workpiece ring in the ring polishing process to perform the single-point motion trajectory detection method according to the following steps:

1. Adjust the parallelism between the upper surface of the workpiece ring 1 and the lower surface of the fixing plate 4 to be less than 5 μm;

2. Adjust the horizontal position of the laser displacement sensor 2 so that the center of the sensing end of the photoelectric position sensor 3 corresponds to the center of the sensing end of the laser displacement sensor 2 vertically;

3. Start the workpiece ring 1. During the rotation of the laser displacement sensor 2 with the workpiece ring 1, use the photoelectric position sensor 3 to record the plane coordinate data x and y of the center point of the laser displacement sensor 2, and use the laser displacement sensor 2 to record the laser The vertical height change z of the center point where the displacement sensor 2 is located;

4. Draw the plane coordinate data x and y recorded by the photoelectric position sensor 3 and the laser displacement sensor 2 into the plane motion trajectory diagram of the center point of the position of the laser displacement sensor 2, and plot the plane coordinates recorded by the photoelectric position sensor 3 and the laser displacement sensor 2. The data x and y and the vertical height change z are drawn into a three-dimensional motion trajectory diagram of the center point where the laser displacement sensor 2 is located; that is, the single-point motion trajectory detection on the workpiece ring in the ring polishing process is completed.

The working principle and beneficial effects of this embodiment are as follows:

1. In this embodiment, a laser displacement sensor 2 is embedded on the workpiece ring. Above the workpiece ring is an annular array of photoelectric position sensors 3. The photoelectric position sensor 3 is used to record the plane motion information of the workpiece ring. The laser displacement sensor 2 can collect the information of the workpiece ring. Vertical displacement information, the three-dimensional motion trajectory of a single point on the workpiece ring can be obtained after data processing;

2. This embodiment aims to solve the problems of complex detection process and low detection accuracy of the single-point motion track on the workpiece ring in the existing ring polishing process. The laser displacement sensor 2 is embedded on the workpiece ring, and an annular array of photoelectric position sensors is placed above it. 3. During the movement of the workpiece ring, the single-point motion trajectory on the workpiece ring can be automatically detected, and the detection process is simple and convenient with high precision. The three-dimensional motion trajectory of a single point on the workpiece ring can be obtained by the method of this embodiment. Then it guides the correction of the motion model and the contact, thereby improving the accuracy of the prediction of the surface shape evolution of the component.

Adopt the following examples to verify the beneficial effects of the present invention:

Example 1:

In this embodiment, a workpiece ring with a diameter of 1650 mm is selected for verification;

In this embodiment, the single-point motion trajectory detection device on the workpiece ring in the ring polishing process is composed of a workpiece ring 1, a laser displacement sensor 2, several photoelectric position sensors 3 and a fixing plate 4;

The workpiece ring 1 is arranged in parallel with the fixing plate 4, the workpiece ring 1 is arranged under the fixing plate 4, the upper surface of the workpiece ring 1 is provided with a blind hole 11, the laser displacement sensor 2 is arranged inside the blind hole 11, and the laser displacement sensor 2 is connected with the blind hole 11. The upper surface of the workpiece ring 1 is arranged vertically, and the sensing end of the laser displacement sensor 2 is arranged towards the fixing plate 4; several photoelectric position sensors 3 are arranged on the lower surface of the fixing plate 4 in a circular array, and the sensing end of the photoelectric position sensor 3 faces the workpiece. Ring 1 is set, and the center of the annular array of photoelectric position sensor 3 corresponds to the center of workpiece ring 1; the center of the sensing end of photoelectric position sensor 3 is set corresponding to the center of the sensing end of laser displacement sensor 2;

The parallelism between the upper surface of the workpiece ring 1 and the lower surface of the fixing plate 4 is less than 5 μm;

The vertical distance between the upper surface of the workpiece ring 1 and the lower surface of the fixing plate 4 is 300mm;

The flatness of the lower surface of the fixing plate 4 is less than 5 μm;

The positioning accuracy of the photoelectric position sensor 3 in the range of 3mm×3mm is less than 3μm;

The perpendicularity between the laser displacement sensor 2 and the workpiece ring 1 is less than 5 μm;

The photoelectric position sensor 3 is adsorbed on the lower surface of the fixed plate 4 through a vacuum chuck;

The detection accuracy of the laser displacement sensor 2 is less than 3 μm;

The method of using the single-point motion trajectory detection device on the workpiece ring in the above-mentioned ring polishing process to detect the single-point motion trajectory is performed according to the following steps:

1. Adjust the parallelism between the upper surface of the workpiece ring 1 and the lower surface of the fixing plate 4 to be less than 5 μm;

2. Adjust the horizontal position of the laser displacement sensor 2 so that the center of the sensing end of the photoelectric position sensor 3 corresponds to the center of the sensing end of the laser displacement sensor 2 vertically;

3. Start the workpiece ring 1. During the rotation of the laser displacement sensor 2 with the workpiece ring 1, use the photoelectric position sensor 3 to record the plane coordinate data x and y of the center point of the laser displacement sensor 2, and use the laser displacement sensor 2 to record the laser The vertical height change z of the center point where the displacement sensor 2 is located;

4. Draw the plane coordinate data x and y recorded by the photoelectric position sensor 3 and the laser displacement sensor 2 into the plane motion trajectory diagram of the center point of the position of the laser displacement sensor 2, and plot the plane coordinates recorded by the photoelectric position sensor 3 and the laser displacement sensor 2. The data x and y and the vertical height change z are drawn into a three-dimensional motion trajectory diagram of the center point where the laser displacement sensor 2 is located; that is, the single-point motion trajectory detection on the workpiece ring in the ring polishing process is completed;

The plane coordinate data x and y and the vertical height change z of a single point on the workpiece ring with a diameter of 1650 mm obtained in this embodiment are shown in Table 1; the plane coordinate data x and y in Table 1 are drawn into a plane motion trajectory diagram, As shown in FIG. 3 , the plane coordinate data x and y and the vertical height change z are drawn into a three-dimensional motion trajectory diagram, as shown in FIG. 4 , that is, the detection in this embodiment is completed. It can be seen from Figure 3 and Figure 4 that the plane roundness error of the workpiece ring is 132.924mm, and the height motion error is 4.833mm, indicating that the radial motion error of the workpiece ring is large, and the control of the radial movement of the workpiece should be increased. At the same time, the radial motion error affects the actual motion trajectory of the workpiece, and the influence of radial motion should be added to its motion model.

Table 1

Claims (9)

1. The utility model provides a single point motion trail detection device on work piece ring in processing is thrown to ring which characterized in that: the device consists of a workpiece ring (1), 1 laser displacement sensor (2), a plurality of photoelectric position sensors (3) and a fixing plate (4);

the workpiece ring (1) and the fixing plate (4) are arranged in parallel, the workpiece ring (1) is arranged below the fixing plate (4), a blind hole (11) is formed in the upper surface of the workpiece ring (1), the laser displacement sensor (2) is arranged in the blind hole (11), the laser displacement sensor (2) is perpendicular to the upper surface of the workpiece ring (1), and the sensing end of the laser displacement sensor (2) faces the fixing plate (4); the photoelectric position sensors (3) are arranged on the lower surface of the fixing plate (4) in an annular array mode, the sensing ends of the photoelectric position sensors (3) are arranged towards the workpiece ring (1), and the centers of the annular arrays of the photoelectric position sensors (3) correspond to the center of the workpiece ring (1); the center of the sensing end of the photoelectric position sensor (3) is arranged corresponding to the center of the sensing end of the laser displacement sensor (2).

2. The device for detecting the single-point motion trajectory on the workpiece ring in the ring polishing process according to claim 1, characterized in that: the parallelism between the upper surface of the workpiece ring (1) and the lower surface of the fixing plate (4) is less than 5 mu m.

3. The device for detecting the single-point motion trajectory on the workpiece ring in the ring polishing process according to claim 1, characterized in that: the vertical distance between the upper surface of the workpiece ring (1) and the lower surface of the fixing plate (4) is 300-400 mm.

4. The device for detecting the single-point motion trajectory on the workpiece ring in the ring polishing process according to claim 1, characterized in that: the flatness of the lower surface of the fixing plate (4) is less than 5 mu m.

5. The device for detecting the single-point motion trajectory on the workpiece ring in the ring polishing process according to claim 1, characterized in that: the positioning accuracy of the photoelectric position sensor (3) in the range of 3mm multiplied by 3mm is less than 3 mu m.

6. The device for detecting the single-point motion trajectory on the workpiece ring in the ring polishing process according to claim 1, characterized in that: the verticality between the laser displacement sensor (2) and the workpiece ring (1) is less than 5 mu m.

7. The device for detecting the single-point motion trajectory on the workpiece ring in the ring polishing process according to claim 1, characterized in that: the photoelectric position sensor (3) is adsorbed on the lower surface of the fixing plate (4) through a vacuum chuck.

8. The device for detecting the single-point motion trajectory on the workpiece ring in the ring polishing process according to claim 1, characterized in that: the detection precision of the laser displacement sensor (2) is less than 3 mu m.

9. A method for detecting a single point motion trajectory by using the single point motion trajectory detection device on the workpiece ring in ring polishing processing according to claim 1, characterized in that: the method comprises the following steps:

firstly, adjusting the parallelism between the upper surface of the workpiece ring (1) and the lower surface of the fixed plate (4) to be less than 5 mu m;

adjusting the horizontal position of the laser displacement sensor (2) to enable the center of the sensing end of the photoelectric position sensor (3) to vertically correspond to the center of the sensing end of the laser displacement sensor (2);

thirdly, starting the workpiece ring (1), recording plane coordinate data x and y of a central point of the position where the laser displacement sensor (2) is located by using the photoelectric position sensor (3) and recording vertical height change z of the central point of the position where the laser displacement sensor (2) is located by using the laser displacement sensor (2) in the process that the laser displacement sensor (2) rotates along with the workpiece ring (1);

drawing the plane coordinate data x and y recorded by the photoelectric position sensor (3) into a plane motion track diagram of the central point of the position where the laser displacement sensor (2) is located, and drawing the plane coordinate data x and y and the vertical height change z recorded by the photoelectric position sensor (3) and the laser displacement sensor (2) into a three-dimensional motion track diagram of the central point of the position where the laser displacement sensor (2) is located; and then the single-point motion track detection on the workpiece ring in the ring polishing processing is completed.

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