JP2010223465A - Clean air conditioning system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an air conditioning system eliminating the necessity of a duplex floor and a return duct which are required in a conventional air conditioning system and in particular, capable of responding to increase in the size and weight of a device accompanying increase in the size of mother glass in recent manufacturing of color filter forming substrates for liquid crystal display devices. <P>SOLUTION: A second ceiling for covering only the entire device region along a first ceiling is provided below the first ceiling which is a ceiling of a room of a building and on the upper side of the device. A barrier for covering the device is provided downwardly from the peripheral part of the second ceiling. A barrier opening formed by opening the barrier to pass air is provided in a position lower than intended height requiring good cleanness with respect to the device. A second ceiling opening formed by opening the second ceiling is provided on the second ceiling. An air filter is mounted to the second ceiling opening, and a fan is mounted to the upper side of the air filter. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an air conditioning system that requires cleanliness of the air environment, and more particularly to an air conditioning system for manufacturing a color filter forming substrate for a liquid crystal display device.

When manufacturing a color filter forming substrate for a liquid crystal display device, the device for processing needs to improve the cleanliness of air, and conventionally, the air conditioning system shown in FIGS. It was used as a general air conditioning system.
8 and 9, 1 is a device, 4 is an air filter, 5 is a fan, 6 is a flow of air, 10 is a building room (also referred to as a room), 10a is a room floor, 10b is a room ceiling, 10c. Is a room wall, 11 is a space, 21 is a second ceiling, 22 is a second floor, 22a is a floor opening, 23 is a return duct, and arrows in the figure indicate the direction of the air flow 6. .
In the air conditioning system shown in FIGS. 8 and 9, the air is cleaned through the air filter 4 by the airflow generated by the fan 5 and reaches the device 1, and then the floor opening that opens the second floor 22. After flowing under the second floor 22 through the part 22a and sent upward through the return duct 23, it flows downward again through the air filter 4 and air circulates.
Since the air that has always passed through the air filter 4 hits the device 1, the cleanliness of the air around the device 1 is maintained.
In the air conditioning system shown in FIG. 8, a sealed space is created between the ceiling 10b of the building room and the second ceiling 21 as a passage for air.
The air conditioning system shown in FIG. 9 differs from FIG. 1 in that the duct 23 reaches the position of the air filter 4.
In the air conditioning system shown in FIG. 9, the degree of sealing between the second ceiling 21 and the ceiling 10 b of the building room does not need to be as high as that of the air conditioning system shown in FIG. 8. Is unnecessary.
The air conditioning system shown in FIG. 8 and the air conditioning system shown in FIG. 9 are different in position of the fan 5, but this is not an essential problem. In either example, the fan 5 is somewhere on the air path. It only has to exist.
When the fan 5 and the air filter 4 are brought close to each other as in the air conditioning system shown in FIG. 8, it is general to use an FFU (Fan Filter Unit) in which the fan and the filter are integrated.
Usually, since the temperature rises by the fan 5 or the device 1, an air cooling device (not shown) is provided on the air path to suppress the temperature rise as necessary.

In the conventional air conditioning systems shown in FIGS. 8 and 9, the floors are both duplicated by the second floor 22, resulting in an increase in construction cost and a prolonged construction period.
Furthermore, since the air conditioning systems shown in FIGS. 8 and 9 both require air to be sent upward through the return duct 23, construction costs for the return duct 23 are incurred, and the space of the return duct 23 is taken into consideration. This has also caused restrictions on the arrangement of the apparatus.
In particular, in the color filters for liquid crystals, with the increase in size of mother glass in recent years, the size and weight of manufacturing equipment for manufacturing the glass has increased, and the construction cost for double floors to support heavy manufacturing equipment has further increased. Tend to.

JP 2000-161735 A
JP 2004-108631 A

As described above, when manufacturing a color filter forming substrate for a liquid crystal display device, an apparatus for performing processing needs to improve the cleanliness of air. Conventionally, as shown in FIGS. The air conditioning system shown was used as a general air conditioning system, but such a conventional air conditioning system has a double floor by the second floor 22, which increases the construction cost and lengthens the construction period. The problem of being invited and the need to send air upward through the turn duct 23, so the construction cost of the return duct 23 is incurred, and the space of the return duct 23 must be taken into account, and the arrangement of the apparatus There was a problem that it also caused restrictions, and a response was required.
In particular, in the manufacture of a color filter forming substrate for a liquid crystal display device, with the recent increase in the size of mother glass, the size and weight of the device have increased, and further measures have been required.
The present invention corresponds to this, does not require the double floor and return duct required in the conventional air conditioning system, can reduce the restrictions on the arrangement of the apparatus, and increases the size of the apparatus with a simple structure, An air conditioning system that can shorten the construction period without requiring an increase in construction cost due to an increase in weight, especially in connection with an increase in the size of mother glass in the manufacture of color filter forming substrates for liquid crystal display devices in recent years. Therefore, an object of the present invention is to provide an air conditioning system that can cope with the increase in size and weight of the apparatus.

The clean air-conditioning system of the present invention is not provided with equipment or structure for improving cleanliness, and is provided for a device disposed in a room of a building that is a room surrounded by a floor, a ceiling, and a wall. A clean air-conditioning system for improving the air environment from the upper side to a desired height range, under the first ceiling, which is the ceiling of the room of the building, above the device, A second ceiling that covers only the entire area along the first ceiling is provided, and a barrier that surrounds the device is provided downward from the periphery of the second ceiling. A barrier opening for opening the barrier and allowing air to pass therethrough is provided at a position lower than the desired height at which good cleanliness is required for the device, and the ceiling is opened on the second ceiling. A second ceiling opening is provided, and the second ceiling opening An air filter is attached, and a fan is provided above the air filter. By operating the fan, air is passed through the air filter toward the device surrounded by the second ceiling and the barrier. The air that is sent downward through the air filter is allowed to flow downward from the side surrounded by the second ceiling and the barrier through the barrier opening by operating the fan. It is characterized by being.
And it is said clean air-conditioning system, Comprising: The air cooling device is distribute | arranged to the said barrier opening vicinity or the said fan vicinity, It is characterized by the above-mentioned.
Further, in any one of the clean air conditioning systems described above, the barrier opening is formed by a plurality of opening holes, and the size and density of the opening holes are adjusted, and the floor of the building room and the building In the region surrounded by the second ceiling and the barrier, the air that has flowed downward from the desired height, which requires good cleanliness for the device, may be rolled up again or at the barrier opening. Air is prevented from flowing backward from the outside to the inside of the region surrounded by the second ceiling and the barrier.
In any one of the above-described clean air conditioning systems, a third ceiling is provided between the first ceiling and the second ceiling.
In any one of the clean air conditioning systems described above, the barrier is a resin curtain having an antistatic property.
In addition, any one of the clean air conditioning systems described above is characterized in that it is an air conditioning system for manufacturing a color filter forming substrate for a liquid crystal display device.
Here, “the entire apparatus area” means the entire area required as the apparatus area. In the case of a manufacturing apparatus, the area necessary for operating the apparatus and the product with good cleanliness is also included. Is included.
“Cleanliness” is the same as cleanroom cleanliness, and in the US FED standard (FED-STD-209), the particle size per 1 cf (one cubic foot means a cube of 1 foot on each side) In the case of manufacturing a color filter forming substrate for a liquid crystal display device, the cleanliness class is usually the US FED standard (FED-STD-209), class 100. Cleanliness or better than class 100 is required.

(Function)
By adopting such a configuration, the clean air-conditioning system of the present invention does not require a double floor or return duct required in the conventional air-conditioning system, can reduce restrictions on the arrangement of the apparatus, and is simple. Providing an air conditioning system that does not require an increase in construction cost due to the structure and can shorten the construction period, especially in the manufacture of color filter forming substrates for liquid crystal display devices in recent years, due to the increase in the size of mother glass It is possible to provide an air conditioning system that can cope with the increase in size and weight.
Specifically, a second ceiling that covers only the entire device area along the first ceiling is provided below the first ceiling, which is the ceiling of the room of the building, and above the device. A barrier is provided to surround the device downward from the periphery of the ceiling of the ceiling, and the barrier is located at a position lower than the desired height at which good cleanliness is required for the device. A barrier opening for allowing air to pass therethrough, and a second ceiling opening for opening the ceiling is provided on the second ceiling, and an air filter is attached to the second ceiling opening. A fan is provided above the air filter. By operating the fan, air flows downward through the air filter toward the device surrounded by the second ceiling and the barrier. And also operate the fan And by, by those flowing air sent downward through air filter from the side which is surrounded by the barrier and the second ceiling through the barrier opening to the outside, have achieved this.
That is, the clean air-conditioning system of the present invention has a simple structure in which a second ceiling that covers the entire device area in a building, a barrier provided with a barrier opening, a fan, and an air filter are simply arranged, and is conventionally required. The double floor and return duct, which were previously required, can be reduced to reduce the construction cost, shorten the construction period, and improve the flexibility of the factory layout.
By operating the fan, air is allowed to flow downward through the air filter toward the device surrounded by the second ceiling and barrier, and by operating the fan, it is sent downward through the air filter. Since air is allowed to flow from the side surrounded by the second ceiling and the barrier through the barrier opening to the outside, only air with good cleanliness is touched in a range where good cleanliness is required. This makes it possible to maintain a desired area of the apparatus that requires a high degree of cleanliness.
The present invention is effective even when the apparatus is operated by limiting the range in which the cleanliness of the apparatus is required in the manufacture of a color filter forming substrate for a liquid crystal display device, etc. It was made by paying attention to certain things.
As described above, “the entire apparatus area” means the entire area required as the apparatus area. In the case of a manufacturing apparatus, in order to operate the apparatus and the product with good cleanliness. It includes the necessary space.

Further, by arranging the air cooling device in the vicinity of the barrier opening or in the vicinity of the fan, it is possible to cool the air whose temperature has been increased by the heat generated by the fan and the device.
The arrangement of the air cooling device is particularly effective in a device that requires temperature adjustment.
In addition, the barrier opening is formed by a plurality of opening holes, and the size and density of the opening holes are adjusted so that the floor of the building room, the second ceiling, and the area surrounded by the barriers The air that has flowed downward from a desired height at which good cleanliness is required for the device is rolled up again, or in the region surrounded by the second ceiling and the barrier at the barrier opening. Air can be prevented from flowing back from the outside to the inside.
Further, by providing the third ceiling between the first ceiling and the second ceiling, it is possible to prevent the dust generation from the first ceiling from falling downward.
In addition, since the barrier is a resin curtain having antistatic properties,
It is easy to handle, is advantageous in terms of cost, and can prevent foreign matter from adhering due to static electricity.
In particular, it is effective in the case of an air conditioning system for manufacturing a color filter forming substrate for a liquid crystal display device.

  As described above, the present invention does not require the double floor or return duct required in the conventional air conditioning system, can reduce the restrictions on the arrangement of the apparatus, and requires a simple structure to increase the construction cost. In addition, in providing air conditioning systems that can shorten the construction period, especially in the manufacture of color filter-formed substrates for liquid crystal display devices in recent years, with the increase in the size of mother glass, the size and weight of the equipment has increased. It is possible to provide an air conditioning system that can handle this.

It is the schematic of the clean air conditioning system of the 1st example of embodiment of the clean air conditioning system of this invention. It is the schematic of the clean air conditioning system of the 2nd example of embodiment of the clean air conditioning system of this invention. It is the schematic of the clean air conditioning system of the 3rd example of embodiment of the clean air conditioning system of invention. It is the schematic of the clean air conditioning system of the 4th example of embodiment of the clean air conditioning system of this invention. It is the schematic of the clean air conditioning system of a 1st comparative example. It is the schematic of the clean air conditioning system of a 2nd comparative example. It is the figure which showed the partial structure of the building. It is the schematic of the conventional clean air conditioning system. It is the schematic of the conventional clean air conditioning system.

Embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic diagram of a clean air conditioning system of a first example of an embodiment of a clean air conditioning system of the present invention, and FIG. 2 is a schematic diagram of a clean air conditioning system of a second example of an embodiment of the clean air conditioning system of the present invention. FIG. 3 is a schematic diagram of a clean air conditioning system according to a third example of the embodiment of the clean air conditioning system of the present invention. FIG. 4 is a schematic diagram of a fourth example of the embodiment of the clean air conditioning system according to the present invention. FIG. 5 is a schematic diagram of a clean air conditioning system of a first comparative example, FIG. 6 is a schematic diagram of a clean air conditioning system of a second comparative example, and FIG. 7 is a part of a building. It is the figure which showed the structure.
1 to 7, 1 is a device, 2 is a second ceiling, 3 is a barrier (also referred to as a boundary), 3a is a barrier opening (also referred to as an opening at the boundary), 4 is an air filter, Fan, 6 is an air flow, 6a is an air roll, 7 is an air cooling device, 8 is a third ceiling, 10 is a building room (also called a room), 10a is a room floor, 10b is a concrete slab ( 10bS is a surface portion (of a concrete slab), 10c is a steel frame, 10cS is a surface portion (of a steel frame), 11 is a space portion, 11a is a space portion (inside the barrier), and 11b is ( A space 13 (outside the barrier) is an upper surface.
In addition, the arrow in FIGS. 1-6 represents the direction of the flow of air.

First, a first example of an embodiment of the clean air conditioning system of the present invention will be described below with reference to FIG.
The clean air conditioning system of the first example is an air conditioning system for manufacturing a color filter forming substrate for a liquid crystal display device. This is a clean air-conditioning system for maintaining the air environment from the upper side of the apparatus to a desired height range in accordance with the US FED standard (FED-STD-209), class 100 cleanliness or better than class100. .
The FED standard is classified according to the number of particles having a particle diameter of 0.5 μm or more per 1 cf (one cubic foot means a cube having one side of one foot).
The clean air conditioning system of the first example covers only the entire device area along the first ceiling 10b, below the first ceiling 10b, which is the ceiling of the room 10 of the building, and above the device 1. A ceiling 2 is provided, and a barrier 3 surrounding the device is provided downward from the periphery of the second ceiling 2, and the barrier 3 has a desired height that requires good cleanliness with respect to the device 1. The second ceiling 2 is provided with a second ceiling opening that opens the second ceiling 2, although not shown in the figure. An air filter is attached to the second ceiling opening, and a fan 5 is provided above the air filter 4. By operating the fan 5, air is passed through the air filter 4 to the second ceiling 2. Down to the device surrounded by the barrier 3 So as to be, also, by operation of the fan 5, the air sent downward through air filter 4, it flows from the side which is surrounded by the second ceiling 2 and a barrier 3 through the barrier opening 3a to the outside.

  In the clean air conditioning system of the first example, the second ceiling 2 has only a size necessary for covering the device 1, and the area surrounded by the second ceiling and the barrier is occupied. Can be made small, and the degree of freedom of arrangement of the device 1 is increased.

In the first example, the air is sent downward through the air filter 4 by the fan 5, reaches the device 1, and then passes through a barrier opening 3 a provided in the barrier 3 and is an indoor space outside the barrier 3. The air is circulated by flowing upward to the part 11 and rising downward and again by the fan 5, but the air is placed at a position lower than the desired height of the barrier 3 where good cleanliness is required for the device 1. The barrier opening 3a through which the filter passes is provided, and a desired range where a good cleanliness of the apparatus is required can be improved.
As shown in FIGS. 5 (a) and 5 (b), when the barrier opening 3a provided in the barrier 3 is at a high position, the upper surface portion 13 of the device 1 has an air cleanliness. Assuming that it is a necessary part, if there is a barrier opening 3 a provided in the barrier 3 at a position higher than the height of the upper surface portion 13, the air 3 having a high cleanliness before reaching the upper surface portion 13 of the device 1. Therefore, the barrier opening 3a needs to be provided at a position lower than a portion where the air cleanliness of the device 1 is necessary.

In this example, the barrier opening 3a is formed by a plurality of opening holes, and the size and density of the opening holes are adjusted, so that they are surrounded by the floor 10a of the building room, the second ceiling 2, and the barrier 3. In this region, the air that has flowed downward from a desired height at which good cleanliness is required for the device 1 winds up again, or is surrounded by the second ceiling 2 and the barrier 3 at the barrier opening 3a. The air is prevented from flowing back from the outside to the inside.
In order to prevent the backflow of air from the outside of the barrier 3, it is desirable that the opening hole of the barrier opening 3a is narrow, but if it is too narrow, the air in the lower part is rolled up as shown in FIG.
The part close to the floor is not desirable because foreign matter is likely to collect and foreign matter may be rolled up by the air that has been rolled up.
The barrier opening 3a is adjusted so that the air inside the barrier 3 does not wind up.
In the case of an opening as shown in FIG. 6, the size of the opening hole may be adjusted, and in the case of an opening like a mesh, the number and density of holes (opening holes) in the mesh may be adjusted.
Actually, the optimum opening is obtained by air flow simulation at the design stage, and fine adjustment is made by measuring the air flow after construction.

In the clean air conditioning system of the first example, the barrier 3 and the barrier opening 3a provided in the barrier 3 are the second floor 22 and the floor opening of the conventional clean air conditioning system shown in FIGS. It replaces 22a and makes the second floor 22 unnecessary.
In the clean air conditioning system of the first example, the space 3 in the chamber 10 is divided into a space 11 a inside the barrier 3 and a space 11 b outside the barrier 3 by the barrier 3, and the space 11 b is used. By flowing air upward, the space portion 11b replaces the return duct 23 in the clean air conditioning system shown in FIGS. 8 and 9, and the return duct 23 is unnecessary.

  The filter 4 is a filter with a structure in which a paper-like filter medium with a small amount of binder added to a thin glass fiber with a diameter of 1 μm or less is closely folded to increase the area of the filter medium, and a separator is inserted between them. The filter employs a HEPA filter (High Efficiency Particulate Air Filter) of 99.97% or more with respect to 0.3 μm dust, or a filter medium made of very thin fibers, and has a dust collection efficiency of 0.1 μm. A VEPA filter (Very High Efficiency Particulate Air Filter) of 99.99997% or more with respect to dust is used.

The material of the second ceiling 2 is not limited as long as it does not generate dust.
The barrier 3 may be made of any material as long as it does not generate dust, but it is effective to use a vinyl curtain in terms of cost and ease of handling.
In ordinary vinyl, foreign matter adheres due to static electricity. In this example, a resin curtain having an antistatic property is used.

Instead of the filter 4 and the fan 5 in this example, an FFU (Fan Filter Unit, also referred to as a blower with a filter) and an ULPA (also referred to as Ultra Low Penetration Air Filter, an air conditioning high-performance filter) may be provided. .
ULPA (high-performance air conditioning filter) is a type of air filter used to remove dust, dust, etc. from the air to make it clean air, and is usually used as the main filter for air purifiers and clean rooms. .

For the floor, the first ceiling, and the wall that form the room 10 of the building, a non-dusting member is preferably used, but the material is not particularly limited.
The floor, the first ceiling, and the surface of the wall may be covered with a non-dusting material, or may be surface treated to have no dusting.

Next, a second example and a third example of the embodiment of the clean air conditioning system of the present invention will be described based on FIG. 2 and FIG. 3, respectively.
The clean air conditioning system of the second example shown in FIG. 2 further includes an air cooling device 7 in the clean air conditioning system of the first example to improve the cooling effect of the device 1. Here, The air cooling device 7 is disposed in the vicinity of the fan and at a position before the air in the space 11 b enters the fan 5.
The clean air conditioning system of the third example shown in FIG. 3 also has an air cooling device 7 arranged in the clean air conditioning system of the first example to improve the cooling effect of the device 1. Here, The air cooling device 7 is arranged outside the barrier opening 3a from which air flows out from the device 1 side.
The air cooling device 7 is used when the device 1 that requires air cleanliness is sensitive to temperature conditions and requires temperature adjustment. After the air reaches the device 1, the air cooling device 7 is again passed through the filter 4 downward. It is arranged on the route until it is washed away.
In a clean air conditioning system, the temperature of the circulating air may rise due to heat generated by the device or the fan.
As the air cooling device 7, it is common to use a cooling coil that lowers the temperature of air through air in a metal pipe in which cold water is flowed and fins attached thereto.

Next, a fourth example of the embodiment of the clean air conditioning system of the present invention will be described with reference to FIG.
The clean air conditioning system of the fourth example shown in FIG. 4 is further provided with a third ceiling 8 between the first ceiling 10b and the second ceiling 2 in the clean air conditioning system of the first example. This is a form that prevents dust from falling from the first ceiling 10b.
Since the 3rd ceiling 8 is for preventing dust generation, intensity | strength is unnecessary and simple construction may be sufficient.
In addition, there is an advantage that piping, wiring, and the like can be removed between the first ceiling 10a and the third ceiling 8 of the room 10 of the building.
In addition, as shown in FIG. 7, the ceiling of the building of the clean air conditioning system of the first example shown in FIG. 1 has a structure in which the concrete slab 10b is supported by the steel frame 10c, and the concrete slab 10b and the steel frame 10c are exposed. However, there is a possibility of dust generation from the surface portions 10bS and 10cS, and it is possible to take measures against dust generation such as surface treatment of the surface portions 10bS and 10cS or covering with a metal plate that does not generate dust. Still, there is a possibility that dust is generated from the joint portion between the concrete slab 10b and the steel frame 10c.
Furthermore, since the steel frame is assembled in the rainy weather outdoors without a roof, many foreign objects are adhered to the surface immediately after construction.
It can be removed by cleaning, but it takes time to completely remove it.

1 Device 2 Second ceiling 3 Barrier (also called border)
3a Barrier opening (also called boundary opening)
4 Air Filter 5 Fan 6 Air Flow 6a Air Winding 7 Air Cooling Device 8 Third Ceiling 10 Building Room (also called Room)
10a Room floor 10b Concrete slab (also called first ceiling)
10bS (concrete slab) surface part 10c steel frame 10cS (steel) surface part 11 space part 11a (inside the barrier) space part 11b (outside the barrier) space part 13 upper surface part

Claims (6)

  The range of the desired height from the upper side of the device placed in the room of the building, which is a room surrounded by floors, ceilings, and walls, without equipment or structure for improving cleanliness A clean air-conditioning system for keeping the air environment at a high level of cleanliness, wherein the entire ceiling of the device area is placed below the first ceiling, which is the ceiling of the room of the building, and above the device. A second ceiling is provided, and a barrier is provided to surround the device downward from a peripheral portion of the second ceiling, and the barrier has a good cleanliness with respect to the device. Is provided at a position lower than the desired height required, and a barrier opening that opens the barrier and allows air to pass therethrough is provided, and the second ceiling opening that opens the ceiling is provided on the second ceiling. An air filter is attached to the second ceiling opening, A fan is provided above the air filter. By operating the fan, air flows through the air filter downward toward the device surrounded by the second ceiling and the barrier, and By operating the fan, the air sent downward through the air filter flows through the barrier opening from the side surrounded by the second ceiling and the barrier to the outside. Air conditioning system.   2. The clean air conditioning system according to claim 1, wherein an air cooling device is disposed in the vicinity of the barrier opening or in the vicinity of the fan.   3. The clean air conditioning system according to claim 1, wherein the barrier opening is formed by a plurality of opening holes, the size and density of the opening holes are adjusted, and the building is formed. In the region surrounded by the floor of the room, the second ceiling, and the barrier, the air that has flowed downward from the desired height at which good cleanliness is required for the device is rolled up again, A clean air-conditioning system characterized in that air does not flow backward from the outside to the inside of the region surrounded by the second ceiling and the barrier at the barrier opening.   The clean air conditioning system according to any one of claims 1 to 3, wherein a third ceiling is provided between the first ceiling and the second ceiling. system.   The clean air conditioning system according to any one of claims 1 to 4, wherein the barrier is a resin curtain having antistatic properties.   The clean air conditioning system according to any one of claims 1 to 4, wherein the air conditioning system is used for manufacturing a color filter forming substrate for a liquid crystal display device.

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