JP2008132776A - Photosensitive laminate manufacturing equipment - Google Patents

Abstract

There is provided a photosensitive laminate manufacturing apparatus capable of manufacturing a high-quality photosensitive laminate without wrinkles or unevenness by press-bonding a substrate and a long photosensitive web with uniform pressure.
Both ends of rubbers 83a and 83b covered with rubber rollers 80a and 80b are disposed outside the both ends in the width direction of a glass substrate 24 within a distance d = 5 to 30 mm, and a backup roller. 82a and 82b are crown-shaped, and the photosensitive webs 22a and 22b and the glass substrate 24 are pressed by the rubber rollers 80a and 80b through the backup rollers 82a and 82b, whereby the photosensitive resin layers of the photosensitive webs 22a and 22b are made of glass. Affixed to the substrate 24.
[Selection] Figure 4

Description

  The present invention provides a pair of pressure-bonding rollers which are synchronized between a substrate and a long photosensitive web provided with a photosensitive material layer on a support and are fed between the pressure-bonding rollers and backed up by a pair of backup rollers. This relates to a manufacturing apparatus for manufacturing a photosensitive laminate by attaching the photosensitive material layer to the substrate.

  For example, in a liquid crystal panel substrate, a printed wiring substrate, and a PDP panel substrate, a photosensitive sheet body (photosensitive web) having a photosensitive resin layer (photosensitive material layer) is attached to the substrate surface. In the photosensitive sheet body, a photosensitive resin layer and a protective film are sequentially laminated on a flexible plastic support.

  A manufacturing apparatus used for attaching this type of photosensitive sheet body usually conveys a glass substrate or a resin substrate such as a glass substrate or a resin substrate spaced apart from each other by a predetermined distance, and a photosensitive resin layer attached to the substrate. Corresponding to this range, a method of peeling the protective film from the photosensitive sheet body is adopted.

  For example, in the manufacturing apparatus disclosed in Patent Document 1, as shown in FIG. 11, a laminated film (photosensitive sheet body) 1 a fed out from a film roll 1 is formed by a disk cutter 2 a constituting a half cutter 2. The film is cut in the film width direction leaving the support at two positions separated by a predetermined distance in the film transport direction. Next, after the label is adhered to the cut front and rear cover films (protective films) by the label adhesion mechanism 3, the laminate film 1 a is supplied to the suction drum 4. From the laminated film 1 a supplied to the suction drum 4, the cover film connected by the label is continuously peeled, leaving a predetermined remaining portion separated by the cut portion, and wound on the cover film roll 5. .

  The laminated film 1a from which a part of the cover film has been peeled is supplied between the pair of pressure rollers 6a and 6b. In this case, the pressing rollers 6a and 6b are pressed by the backup rollers 7a and 7b, respectively. A substrate 8 is supplied between the pressure rollers 6a and 6b. As a result, the photosensitive resin layer laminated on the laminated film 1a is pressure-bonded to the substrate 8 between the pressure-bonding rollers 6a and 6b, and a photosensitive laminated body is formed. The outer peripheral portions of the pressure rollers 6a and 6b are covered with rubber in order to apply a uniform pressure to the laminated film 1a and the substrate 8.

  By the way, when the laminate film 1a is pressure-bonded to the substrate 8, in order to produce a high-quality photosensitive laminate, it is necessary to apply a uniform pressure along the longitudinal direction of the pressure-bonding rollers 6a and 6b. In Patent Document 1, backup rollers 7a and 7b having high rigidity are pressed against the pressure-bonding rollers 6a and 6b.

  In this case, as shown in FIG. 12, the backup rollers 7a and 7b are pressed against the pressure rollers 6a and 6b by displacing both ends in the direction of the arrow, so that the outer peripheral shape of the backup rollers 7a and 7b is in the axial direction. If, as shown in FIG. 13, due to the influence of deformation of the backup rollers 7a and 7b, points A1 at both ends in the width direction of the substrate 8 corresponding to both ends of the backup rollers 7a and 7b, and The pressure at the point A2 becomes higher than that in the central portion.

  On the other hand, in order to avoid uneven pressure applied to the pressure rollers 6a and 6b, a technique has been proposed in which the outer peripheral shape of the backup rollers 7a and 7b is a crown shape in which the diameters at both ends are smaller than the diameter at the center. (See Patent Document 2).

  However, even if the backup rollers 7a and 7b are crowned, if the width of the substrate 8 and the length of the pressure rollers 6a and 6b are set to be substantially the same as shown in FIG. When the position of the substrate 8 with respect to 6b fluctuates due to meandering or the like, the ends of the pressure-bonding rollers 6a and 6b press the substrate 8 and an excessive pressure is applied, or a portion that is not pressed by the pressure-bonding rollers 6a and 6b occurs. Therefore, the pressure applied to the substrate 8 is uneven. Further, when the pressure rollers 6a and 6b are pressed against the end portion in the width direction of the substrate 8, an excessive pressure is applied to the end portion, and the substrate 8 may be damaged.

JP 2006-23407 A JP 2006-297889 A

  The present invention solves this type of problem, and it is possible to produce a high-quality photosensitive laminate without wrinkles or unevenness by pressing a substrate and a long photosensitive web with a uniform applied pressure. Another object of the present invention is to provide an apparatus for manufacturing a photosensitive laminate that does not damage the substrate.

The present invention provides a pair of pressure-bonding rollers which are synchronized between a substrate and a long photosensitive web provided with a photosensitive material layer on a support and are fed between the pressure-bonding rollers and backed up by a pair of backup rollers. In the manufacturing apparatus for manufacturing the photosensitive laminate by attaching the photosensitive material layer to the substrate by
At least one of the pair of backup rollers is formed in a crown shape, the pair of pressure rollers and the pair of backup rollers are formed to be longer than the width of the substrate, and both ends of the pair of pressure rollers or the pair Both ends of the backup roller are set to be outside in the range of 5 to 30 mm from both ends in the width direction of the substrate.

  In the present invention, since the substrate and the long photosensitive web can be pressure-bonded with a uniform applied pressure, no wrinkles are generated on the long photosensitive web, and uneven stripes and uneven density occur. Therefore, a high-quality photosensitive laminate can be produced. Further, since no excessive pressure is applied to the substrate, there is no possibility of damaging the substrate.

  FIG. 1 is a schematic configuration diagram of a photosensitive laminate manufacturing apparatus 20 according to the first embodiment of the present invention. This manufacturing apparatus 20 is a process for manufacturing a liquid crystal or a color filter for organic EL, etc. The photosensitive resin layers 28 (to be described later) of the film-like photosensitive webs 22a and 22b are parallelly transferred to the glass substrate 24 in parallel. The photosensitive webs 22a and 22b are each set to a predetermined width dimension. For example, the photosensitive web 22a is configured to be wider than the photosensitive web 22b.

  FIG. 2 is a cross-sectional view of the photosensitive webs 22 a and 22 b used in the manufacturing apparatus 20. The photosensitive webs 22a and 22b are formed by laminating a flexible base film (support) 26, a photosensitive resin layer (photosensitive material layer) 28, and a protective film 30.

  As shown in FIG. 1, the manufacturing apparatus 20 accommodates two (or more than two) photosensitive web rolls 23a and 23b obtained by winding photosensitive webs 22a and 22b in a roller shape. Width of the first and second web feed mechanisms 32a and 32b capable of synchronously feeding the photosensitive webs 22a and 22b from the photosensitive web rolls 23a and 23b, and the protective film 30 of each of the fed photosensitive webs 22a and 22b. First and second processing mechanisms 36a and 36b that form a half-cut portion (processing portion) 34 that is a boundary position that can be cut in the direction, and an adhesive label 38 (see FIG. 3) having a non-adhesive portion 38a in part. First and second label adhering mechanisms 40a and 40b for adhering to each protective film 30 are provided.

  Downstream of the first and second label adhering mechanisms 40a and 40b are first and second reservoir mechanisms 42a and 42b for changing the photosensitive webs 22a and 22b from tact feed to continuous feed, and the respective photosensitive webs. First and second peeling mechanisms 44a and 44b for peeling the protective film 30 from the 22a and 22b at a predetermined length interval, and a substrate transport mechanism 45 for transporting the glass substrate 24 to a pasting position while being heated to a predetermined temperature. And an affixing mechanism 46 for adhering the photosensitive resin layer 28 exposed by peeling off the protective film 30 to the glass substrate 24 integrally and in parallel.

  First and second detection mechanisms 47a and 47b that directly detect the respective half-cut portions 34, which are the boundary positions of the photosensitive webs 22a and 22b, are disposed in the vicinity of the attachment position in the attachment mechanism 46. The

  Near the downstream of the first and second web feed mechanisms 32a and 32b, the rear ends of the substantially used photosensitive webs 22a and 22b and the tips of the newly used photosensitive webs 22a and 22b are pasted, respectively. Is attached. A film terminal position detector 51 is disposed downstream of the attachment table 49 in order to control the displacement in the width direction due to the winding displacement of the photosensitive web rolls 23a and 23b. Here, the film terminal position adjustment is performed by moving the first and second web feed mechanisms 32a and 32b in the width direction, but may be performed by attaching a position adjustment mechanism combining rollers. The first and second web feed mechanisms 32a and 32b are configured with a multi-axis such as a biaxial or triaxial feeding shaft for loading the photosensitive web rolls 23a and 23b and feeding the photosensitive webs 22a and 22b. May be.

  The first and second processing mechanisms 36a and 36b are provided with a roller pair 50 for calculating the roll diameter of each photosensitive web roll 23a and 23b accommodated and wound in the first and second web feed mechanisms 32a and 32b. Arranged downstream. Each of the first and second processing mechanisms 36a and 36b includes a single round blade 52. The round blade 52 travels in the width direction of the photosensitive webs 22a and 22b, and the photosensitive webs 22a and 22b are predetermined. A half-cut portion 34 is formed at the position.

  As shown in FIG. 2, the half-cut portion 34 needs to cut at least the protective film 30. In practice, in order to cut the protective film 30 with certainty, the photosensitive resin layer 28 to the base film 26 are cut. The cutting depth of the round blade 52 is set. The round blade 52 is fixed without rotating and moves in the width direction of the photosensitive webs 22a and 22b to form a half-cut portion 34, or without sliding on the photosensitive webs 22a and 22b. A method of moving in the width direction while rotating to form the half-cut portion 34 is employed. In place of the round blade 52, the half-cut portion 34 may employ, for example, a method of forming with a knife blade, a push cutting blade (Thomson blade) or the like in addition to a cutting method using laser light or ultrasonic waves. .

  The first and second processing mechanisms 36a and 36b are disposed at a predetermined distance in the conveying direction (direction of arrow A) of the photosensitive webs 22a and 22b, respectively, and the remaining portion 30b of the protective film 30 is disposed. Two half-cut portions 34 may be formed simultaneously with (FIG. 2) in between.

  For example, the half-cut portions 34 are set at positions where they enter into the glass substrates 24 on both sides by 10 mm each. A portion sandwiched between the half cut portions 34 between the glass substrates 24 functions as a mask when the photosensitive resin layer 28 is attached to the glass substrate 24 in a frame shape in an attaching mechanism 46 described later.

  The first and second label bonding mechanisms 40a and 40b connect the peeling portion 30aa at the front side of the peeling side and the peeling portion 30ab at the back side of the peeling side in order to leave the remaining portion 30b of the protective film 30 correspondingly between the glass substrates 24. An adhesive label 38 is supplied. As shown in FIG. 2, the protective film 30 has a remaining portion 30 b sandwiched between the first peeled portion 30 aa and the later peeled portion 30 ab.

  As shown in FIG. 3, the adhesive label 38 is formed in a strip shape, and is formed of, for example, the same resin material as the protective film 30. The adhesive label 38 has a non-adhesive portion (including a slight adhesion) 38a to which a pressure-sensitive adhesive is not applied at the center, and the front side of the non-adhesive portion 38a, that is, both ends in the longitudinal direction of the adhesive label 38 It has the 1st adhesion part 38b adhered to exfoliation part 30aa, and the 2nd adhesion part 38c adhered to back exfoliation part 30ab.

  As shown in FIG. 1, each of the first and second label bonding mechanisms 40a and 40b includes suction pads 54a to 54g, each of which can attach a maximum of seven adhesive labels 38 with a predetermined interval between them. A pedestal 56 for holding the photosensitive webs 22a and 22b from below is disposed so as to be movable up and down at the position where the adhesive label 38 is attached by the pads 54a to 54g.

  The first and second reservoir mechanisms 42a and 42b are arranged to absorb the speed difference between the tact conveyance of the upstream photosensitive webs 22a and 22b and the continuous conveyance of the downstream photosensitive webs 22a and 22b. A dancer roller 60 that can swing in a direction is provided. The second reservoir mechanism 42b includes a dancer for adjusting the lengths of the conveyance paths until the photosensitive webs 22a and 22b sent from the first and second web delivery mechanisms 32a and 32b reach the attaching mechanism 46. A roller 61 is provided.

  The first and second peeling mechanisms 44a and 44b arranged downstream of the first and second reservoir mechanisms 42a and 42b block the tension fluctuation on the delivery side of the photosensitive webs 22a and 22b, respectively, and the tension at the time of lamination is reduced. A suction drum 62 is provided for stabilization. In the vicinity of each suction drum 62, a peeling roller 63 is disposed, and the protective film 30 that is peeled off from the photosensitive webs 22a and 22b through the peeling roller 63 with an acute peeling angle except for the remaining portion 30b. Then, the film is wound around the protective film winding section 64 respectively.

  On the downstream side of the first and second peeling mechanisms 44a and 44b, first and second tension control mechanisms 66a and 66b capable of applying tension to the photosensitive webs 22a and 22b are disposed. Each of the first and second tension control mechanisms 66a and 66b includes a cylinder 68, and the tension dancer 70 swings and displaces under the driving action of the cylinder 68, whereby each tension dancer 70 is in sliding contact with the photosensitive web. The tension of 22a, 22b can be adjusted. The first and second tension control mechanisms 66a and 66b may be used as necessary, and may be deleted.

  The first and second detection mechanisms 47a and 47b are provided with photoelectric sensors 72a and 72b such as laser sensors and photosensors. The photoelectric sensors 72a and 72b are wedge-shaped groove-shaped portions of the half-cut portion 34, and are protected. A step due to the thickness of the film 30 or a change due to a combination thereof is directly detected, and this detection signal is used as a boundary position signal. The photoelectric sensors 72a and 72b are disposed to face the backup rollers 73a and 73b. In place of the photoelectric sensors 72a and 72b, an image inspection means such as a non-contact displacement meter or a CCD camera may be used.

  The position data of the half-cut portion 34 detected by the first and second detection mechanisms 47a and 47b can be statistically processed and graphed in real time, and an alarm can be issued when a variation abnormality or bias occurs.

  Further, instead of directly detecting the half-cut portion 34, holes or notches are formed in the vicinity of the first and second processing mechanisms 36a and 36b corresponding to the half-cut portion 34, or laser processing or aqua A mark portion may be formed by providing a hole or notch by jet machining, or by marking by an ink jet or a printer, and the mark portion may be detected and used as a boundary position signal.

  The substrate transport mechanism 45 includes a plurality of sets of substrate heating units (for example, heaters) 74 disposed so as to sandwich the glass substrate 24 and a transport unit 76 that transports the glass substrate 24 in the direction of arrow C. The substrate heating unit 74 constantly monitors the temperature of the glass substrate 24. When an abnormality occurs, the conveyance unit 76 is stopped or alarmed, and abnormal information is transmitted to cause the abnormal glass substrate 24 to be discharged NG in the subsequent process. It can be used for management or production management. An air levitation plate (not shown) is disposed in the conveyance unit 76, and the glass substrate 24 is levitated and conveyed in the direction of arrow C. The glass substrate 24 can be transported by a roller conveyor.

  The temperature measurement of the glass substrate 24 is preferably performed in the substrate heating unit 74 or immediately before the attachment position. The measuring method may be a contact type (for example, thermocouple) or a non-contact type.

  A substrate stocker 71 that accommodates a plurality of glass substrates 24 is provided upstream of the substrate heating unit 74. Each glass substrate 24 accommodated in the substrate stocker 71 is sucked and taken out by a suction pad 79 provided in the hand portion 75 a of the robot 75 and inserted into the substrate heating portion 74.

  The affixing mechanism 46 includes rubber rollers (compression rollers) 80a and 80b that are arranged vertically and heated to a predetermined temperature. Backup rollers 82a and 82b are in sliding contact with the rubber rollers 80a and 80b. One backup roller 82b is pressed toward the rubber roller 80b by the pressure cylinders 84a and 84b constituting the roller clamp portion 83.

  In the vicinity of the rubber roller 80a, a contact prevention roller 86 for preventing the photosensitive webs 22a and 22b from contacting the rubber roller 80a is movably disposed. In the vicinity of the upstream of the attaching mechanism 46, a preheating unit 87 for preheating the photosensitive webs 22a and 22b to a predetermined temperature is disposed. This preheating part 87 is provided with heating means, such as an infrared bar heater, for example.

  Here, the rubber rollers 80a and 80b and the backup rollers 82a and 82b constituting the attaching mechanism 46 are configured as shown in FIG.

  The rubber rollers 80a and 80b are configured by covering rubber 83a and 83b over a predetermined range of the outer peripheral portion of the shaft bodies 81a and 81b whose outer peripheral shape is linear in the axial direction. In this case, the range covered with the rubbers 83 a and 83 b is set to be outside by a distance d = 5 to 30 mm from both ends in the width direction orthogonal to the conveyance direction of the glass substrate 24. Further, the thickness e of the rubbers 83a and 83b is set in the range of 0.5 to 3.0 mm.

  The backup rollers 82a and 82b are formed in a crown shape whose diameter gradually increases from both ends to the center. The crown amount c of the backup rollers 82a and 82b is defined as c = (b−a) / 2, where b is the maximum diameter at the center of the backup rollers 82a and 82b and a is the minimum diameter at both ends. The crown amount c is set in the range of 0.3 to 1.5 mm, more preferably in the range of 0.5 to 0.8 mm.

  The glass substrate 24 is transported from the pasting mechanism 46 via a transport path 88 extending in the direction of arrow C. In the transport path 88, film transport rollers 90a and 90b and a substrate transport roller 92 are disposed. The distance between the rubber rollers 80 a and 80 b and the substrate transport roller 92 is preferably set to be equal to or less than the length of one glass substrate 24. In the vicinity of the downstream side of the substrate transport roller 92, a substrate front end detection sensor 94 that detects the front end portion of the transported glass substrate 24 is disposed.

  Further, a cooling mechanism 122 and a base automatic peeling mechanism 142 are provided downstream of the substrate transport roller 92. The automatic base peeling mechanism 142 continuously peels the long base film 26 affixed to each glass substrate 24 separated by a predetermined interval, and includes a pre-peeling portion 144 and a relatively small-diameter peeling roller. 146, a winding shaft 148, and an automatic pasting machine 150. The take-up shaft 148 preferably applies torque control during driving to apply tension to the base film 26, while providing a tension detector (not shown) on the peeling roller 146, for example, to perform tension feedback control. . The pre-peeling portion 144 includes a peeling bar 156 that can move up and down between the glass substrates 24.

  A measuring instrument 158 that measures the area position of the photosensitive resin layer 28 actually attached to the glass substrate 24 is disposed downstream of the automatic base peeling mechanism 142. The measuring device 158 includes, for example, a camera 160 such as a CCD that images the glass substrate 24 on which the photosensitive resin layer 28 is attached.

  A photosensitive laminate stocker 132 in which a plurality of photosensitive laminates 106 whose area positions are measured in the photosensitive resin layer 28 by the measuring device 158 is accommodated downstream of the automatic base peeling mechanism 142. The photosensitive laminate 106 from which the base film 26 and the remaining portion 30b have been peeled off by the automatic base peeling mechanism 142 is sucked and taken out by the suction pad 136 provided on the hand portion 134a of the robot 134, and the photosensitive laminate stocker 132 is removed. Is housed in.

  In the manufacturing apparatus 20 configured as described above, the first and second web feed mechanisms 32a and 32b, the first and second processing mechanisms 36a and 36b, the first and second label adhesion mechanisms 40a and 40b, The first and second reservoir mechanisms 42a and 42b, the first and second peeling mechanisms 44a and 44b, the first and second tension control mechanisms 66a and 66b, and the first and second detection mechanisms 47a and 47b Although arranged above, conversely, the first and second web delivery mechanisms 32a, 32b to the first and second detection mechanisms 47a, 47b are arranged below the attaching mechanism 46. The photosensitive webs 22a and 22b may be turned upside down, and the photosensitive resin layer 28 may be attached to the lower side of the glass substrate 24. Further, the entire manufacturing apparatus 20 is configured linearly. It may be.

  As shown in FIG. 1, the entire manufacturing apparatus 20 is controlled by a laminating process control unit 100. For example, a laminating control unit 102, a substrate heating control unit 104, and a base are provided for each functional unit of the manufacturing apparatus 20. A peeling control unit 108 and the like are provided, and these are connected to each other by an in-process network. Further, the laminating process control unit 100 is connected to a factory network, and performs information processing for production such as production management and operation management of instruction information (condition setting and production information) from a factory CPU (not shown).

  The substrate heating control unit 104 receives the glass substrate 24 from the upstream process, controls the operation of heating the glass substrate 24 to a desired temperature and supplying the glass substrate 24 to the pasting mechanism 46, and handling of information on the glass substrate 24.

  The laminating control unit 102 controls each functional unit as a master of the entire process, and the position of the half cut portion 34 of the photosensitive webs 22a and 22b detected by the first and second detection mechanisms 47a and 47b. Based on the information, a control mechanism capable of controlling the relative position between each boundary position and the glass substrate 24 at the pasting position and the relative position between the respective boundary positions is configured.

  The base peeling control unit 108 controls the operation of peeling the base film 26 from the photosensitive webs 22a and 22b attached to the glass substrate 24 and transporting it downstream as the photosensitive laminated body 106, and the photosensitive laminated body. The information of 106 is handled and controlled.

  The inside of the manufacturing apparatus 20 is partitioned into a first clean room 112a and a second clean room 112b through a partition wall 110. The first clean room 112a accommodates the first and second web delivery mechanisms 32a and 32b to the first and second tension control mechanisms 66a and 66b, and the second clean room 112b contains the first and second detections. The mechanisms 47a and 47b and thereafter are accommodated. The first clean room 112a and the second clean room 112b communicate with each other through the penetration part 114.

  Next, operation | movement and effect of the manufacturing apparatus 20 comprised as mentioned above are demonstrated.

  First, the photosensitive webs 22a and 22b are sent out from the respective photosensitive web rolls 23a and 23b attached to the first and second web delivery mechanisms 32a and 32b. The photosensitive webs 22a and 22b are conveyed to the first and second processing mechanisms 36a and 36b.

  In the first and second processing mechanisms 36a and 36b, the round blade 52 moves in the width direction of the photosensitive webs 22a and 22b, and the photosensitive webs 22a and 22b are moved from the protective film 30 to the photosensitive resin layer 28 to the base film. Cut to 26 to form a half-cut portion 34 (see FIG. 2). Further, as shown in FIG. 1, the photosensitive webs 22a and 22b are stopped after being transported in the direction of the arrow A corresponding to the dimension of the remaining portion 30b of the protective film 30, and the half-blade 52 is halfway under the traveling action. A cut site 34 is formed. Thus, the photosensitive webs 22a and 22b are provided with a front peeling portion 30aa and a rear peeling portion 30ab with the remaining portion 30b interposed therebetween (see FIG. 2).

  Next, the respective photosensitive webs 22 a and 22 b are conveyed to the first and second label adhering mechanisms 40 a and 40 b, and a predetermined application site of the protective film 30 is arranged on the cradle 56. In the first and second label adhering mechanisms 40a and 40b, a predetermined number of adhesive labels 38 are adsorbed and held by the adsorbing pads 54b to 54g, and each adhering label 38 straddles the remaining portion 30b of the protective film 30, and a front peeling portion. 30aa and the rear peeling portion 30ab are integrally bonded (see FIG. 3).

  For example, the photosensitive webs 22a and 22b to which the seven adhesive labels 38 are bonded, as shown in FIG. 1, after the first and second reservoir mechanisms 42a and 42b are prevented from changing the tension on the delivery side, It is continuously conveyed to the first and second peeling mechanisms 44a and 44b. In the first and second peeling mechanisms 44a and 44b, as shown in FIG. 5, the base film 26 of the photosensitive webs 22a and 22b is adsorbed and held by the suction drum 62, and the protective film 30 leaves the remaining portion 30b. It peels from the said photosensitive webs 22a and 22b. The protective film 30 is peeled off via the peeling roller 63 and wound around the protective film take-up portion 64 (see FIG. 1).

  Under the action of the first and second peeling mechanisms 44a and 44b, after the protective film 30 is peeled from the base film 26 leaving the remaining portion 30b, the photosensitive webs 22a and 22b are moved to the first and second tension control mechanisms. The tension is adjusted by 66a and 66b, and the half-cut portion 34 is detected by the photoelectric sensors 72a and 72b by the first and second detection mechanisms 47a and 47b.

  Each photosensitive web 22a, 22b is quantitatively transported to the affixing mechanism 46 under the rotational action of the film transport rollers 90a, 90b based on the detection information of the half-cut region 34, respectively. On the other hand, the glass substrate 24 is transported to the affixing position in a heated state under the action of the substrate transport mechanism 45. The glass substrate 24 is temporarily disposed between the rubber rollers 80a and 80b corresponding to the portion where the photosensitive resin layer 28 of the photosensitive webs 22a and 22b arranged in parallel is attached.

  In this state, by raising the backup roller 82b and the rubber roller 80b, the glass substrate 24 is sandwiched between the rubber rollers 80a and 80b with a predetermined pressing pressure. Next, as shown in FIG. 5, the photosensitive webs 22a and 22b and the glass substrate 24 are conveyed in the direction of arrow C under the rotating action of the rubber roller 80a, and each photosensitive resin layer 28 is transferred (laminated) to the glass substrate 24. The

  The lamination conditions are as follows: the speed is 1.0 m / min to 10.0 m / min, the temperature of the rubber rollers 80a and 80b is 80 ° C. to 150 ° C., and the hardness of the rubber 83a and 83b coated on the rubber rollers 80a and 80b is as follows. The press pressure (linear pressure) of the rubber rollers 80a and 80b is 50 N / cm to 400 N / cm.

  Here, in the first embodiment, as shown in FIG. 4, the ranges in the axial direction of the rubbers 83 a and 83 b covered by the shaft bodies 81 a and 81 b of the rubber rollers 80 a and 80 b are set at both ends in the width direction of the glass substrate 24. Distance d = 5 to 30 mm, and the outer peripheral shape of the backup rollers 82a and 82b is a crown shape.

  In this case, when pressure is applied to the rubber rollers 80a and 80b by the backup rollers 82a and 82b, the outer peripheral shape of the backup rollers 82a and 82b is deformed from the crown shape to the linear shape by the pressure, so that the backup rollers 82a and 82b When displaced by a predetermined amount, a substantially uniform pressure is applied to the photosensitive webs 22a and 22b and the glass substrate 24 through the rubber rollers 80a and 80b. Further, since both end portions in the width direction of the glass substrate 24 and both end portions of the rubbers 83a and 83b are set apart by a predetermined distance d, the position of the glass substrate 24 meanders with respect to the rubbers 83a and 83b. However, both ends of the rubber 83a and 83b do not press the glass substrate 24 and an excessive pressure is not applied, and the excessive pressure does not concentrate on both ends in the width direction of the glass substrate 24. . As a result, as shown by the solid line in FIG. 6, a substantially uniform pressure can be obtained between the points A1 and A2 corresponding to both ends of the glass substrate 24 in the width direction.

  Thus, since the pressure between the points A1 and A2 of the glass substrate 24 becomes substantially uniform, wrinkles do not occur in the photosensitive webs 22a and 22b, and unevenness in the pasting state does not occur. Therefore, a good transfer state can be realized.

  In addition, by setting the crown amount c of the backup rollers 82a and 82b for applying pressure to the rubber rollers 80a and 80b to 0.3 to 1.5 mm, more preferably 0.5 to 0.8 mm, the rubber rollers 80a and 80b The pressure between the points A1 and A2 of the glass substrate 24 can be made uniform with respect to a predetermined pressing pressure of 80b.

  Further, as shown in FIG. 7, a step f in which the thickness of the rubber 83a, 83b covered by the shaft bodies 81a, 81b is set thin is provided in the range of the distance d that does not contact the both ends in the width direction of the glass substrate 24. Accordingly, an excessive pressure is not applied to both end portions in the width direction of the glass substrate 24, and a situation in which the glass substrate 24 is damaged can be avoided. The step portion f is preferably about 1 mm.

  Moreover, in the structure mentioned above, the range of the distance d between the width direction both ends of the glass substrate 24 and the both ends of rubber | gum 83a, 83b shall be 5-30 mm, and it is trying for a pressurizing force to become uniform. However, as shown in FIG. 8, the widths of the rubbers 83a and 83b are set to be sufficiently larger than the width of the glass substrate 24, while both ends of the backup rollers 82a and 82b have a distance d = 5 to 30 mm. You may set so that it may become the outer side of the width direction both ends. In this case, both ends of the backup rollers 82a and 82b can be prevented from coming into contact with the rubber 83a and 83b, and a substantially uniform pressure can be obtained.

  Further, in the above-described configuration, the upper and lower backup rollers 82a and 82b have a crown shape, but the same effect can be obtained even if only one of the backup rollers 82a and 82b has a crown shape. When only one backup roller 82a, 82b has a crown shape, the crown amount c is an added value when both backup rollers 82a, 82b have a crown shape, c = 0.6 to 3.0 mm. It is preferable to set in the range.

  As shown in FIG. 9, the backup rollers 82a and 82b have a straight shape, and a step g in which the diameters of the backup rollers 82a and 82b are set small in the range of a distance d that is separated from both ends in the width direction of the glass substrate 24 is formed. By providing, excessive pressure is not applied to the width direction both ends of the glass substrate 24, and the situation where the glass substrate 24 is damaged can be avoided.

  When the lamination of one photosensitive web 22a, 22b is completed on the glass substrate 24 via the rubber rollers 80a, 80b, the rotation of the rubber roller 80a is stopped, while the photosensitive webs 22a, 22b are laminated. A glass substrate 24 (hereinafter also referred to as a bonded substrate 24 a) is clamped by a substrate transport roller 92.

  Then, the rubber roller 80b is retracted in the direction away from the rubber roller 80a to release the clamp, and the rotation of the substrate transport roller 92 is started, so that the bonded substrate 24a is quantitatively transported in the direction of arrow C, and the photosensitive web. The position between the substrates 22a and 22b moves to a predetermined position near the lower side of the rubber roller 80a. On the other hand, the next glass substrate 24 is transported toward the attaching position via the substrate transport mechanism 45.

  When the tip of the next glass substrate 24 is disposed between the rubber rollers 80a and 80b, the rubber roller 80b is raised, and the next glass substrate 24 and the photosensitive webs 22a and 22b are clamped by the rubber rollers 80a and 80b. Is done. Lamination is started under the rotational action of the rubber rollers 80a and 80b and the substrate transport roller 92, and the bonded substrate 24a is transported in the direction of arrow C.

  At that time, as shown in FIG. 5, the pasting substrate 24a is covered with the remaining portion 30b at each end. Therefore, when the photosensitive resin layer 28 is transferred to the glass substrate 24, the rubber rollers 80a and 80b are not soiled by the photosensitive resin layer 28.

  The pasted substrate 24 a laminated by the pasting mechanism 46 is cooled through the cooling mechanism 122 and then transferred to the pre-peeling portion 144. In the pre-peeling portion 144, the peeling bar 156 enters between the glass substrates 24 and rises, whereby the protective film 30 between the glass substrates 24 is lifted and peeled from the rear end and the leading end of the adjacent glass substrates 24. To do.

  Next, in the automatic base peeling mechanism 142, the base film 26 is continuously wound from the pasting substrate 24 a under the rotating action of the winding shaft 148. Further, after separation when trouble stops or separation when defective products are separated, the base film 26 wound on the winding shaft 148 and the tip of the base film 26 of the pasting substrate 24a which has been newly laminated are started. 26 is automatically pasted via the automatic pasting machine 150.

  The bonded substrate 24a from which the base film 26 has been peeled is placed at an inspection station corresponding to the measuring instrument 158. In this inspection station, images of the glass substrate 24 and the photosensitive resin layer 28 are captured by the camera 160 with the glass substrate 24 positioned and fixed. Then, by applying image processing, the pasting position is calculated.

  The attachment substrate 24 a on which the attachment position of the photosensitive resin layer 28 is confirmed is taken out by the robot 134 and accommodated in the photosensitive laminate stocker 132 as the photosensitive laminate 106.

  In the first embodiment, two photosensitive web rolls 23a and 23b are used. However, the present invention is not limited to this. One photosensitive web roller or three or more photosensitive web rolls are used. A roller may be employed. The same applies to the second embodiment described below.

  FIG. 10 is a schematic configuration diagram of a manufacturing apparatus 300 according to the second embodiment of the present invention. In addition, the same referential mark is attached | subjected to the component same as the manufacturing apparatus 20 which concerns on 1st Embodiment, and the detailed description is abbreviate | omitted.

  The manufacturing apparatus 300 includes an inter-substrate web cutting mechanism 48 that is disposed downstream of the attaching mechanism 46 and that can integrally cut the photosensitive webs 22 a and 22 b between the glass substrates 24.

  In the manufacturing apparatus 300 configured as described above, the pasting substrate 24a laminated by the pasting mechanism 46 is transported in the direction of arrow C, as in the first embodiment. When the space between the bonded substrates 24a reaches a position corresponding to the inter-substrate web cutting mechanism 48, the inter-substrate web cutting mechanism 48 moves in the direction of arrow C at the same conveyance speed as the bonded substrate 24a, The two photosensitive webs 22a and 22b are integrally cut between the pasting substrates 24a.

  After this cutting, the inter-substrate web cutting mechanism 48 is returned to a predetermined standby position, while the base film 26 and the remaining portion 30b are sequentially peeled (single-wafer peeling) on the bonded substrate 24a, and the photosensitive laminate 106 is formed. Manufactured.

It is a schematic block diagram of the manufacturing apparatus which concerns on the 1st Embodiment of this invention. It is sectional drawing of the elongate photosensitive web used for the said manufacturing apparatus. It is explanatory drawing of the state by which the adhesive label was adhere | attached on the said elongate photosensitive web. It is composition explanatory drawing of the pressurization roller and backup roller in a sticking mechanism. It is explanatory drawing of the state which laminates the photosensitive resin layer on a glass substrate. It is a relation explanatory view of the substrate position in the 1st embodiment of the present invention, and the pressure given to it. It is explanatory drawing of the modification of the press roller shown in FIG. It is another structure explanatory drawing of the pressurization roller and backup roller in a sticking mechanism. It is explanatory drawing of the modification of the backup roller shown in FIG. It is a schematic block diagram of the manufacturing apparatus which concerns on the 2nd Embodiment of this invention. It is a schematic block diagram of the manufacturing apparatus of patent document 1. It is composition explanatory drawing of the pressurization roller and backup roller which are comparative examples. FIG. 13 is an explanatory diagram of the relationship between the substrate position and the pressure applied thereto in the configuration shown in FIG. 12.

Explanation of symbols

DESCRIPTION OF SYMBOLS 20,300 ... Manufacturing apparatus 22a, 22b ... Photosensitive web 24 ... Glass substrate 26 ... Flexible base film 28 ... Photosensitive resin layer 30 ... Protective film 46 ... Pasting mechanism 74 ... Substrate heating part 80a, 80b ... Rubber roller 82a 82b ... backup rollers 83a, 83b ... rubber

Claims (6)

The photosensitive material is fed by the pair of pressure rollers that are fed back between the pair of pressure rollers by synchronizing the substrate and the long photosensitive web provided with the photosensitive material layer on the support between the pair of pressure rollers. In a manufacturing apparatus for manufacturing a photosensitive laminate by attaching a layer to the substrate,
At least one of the pair of backup rollers is formed in a crown shape, the pair of pressure rollers and the pair of backup rollers are formed to be longer than the width of the substrate, and both ends of the pair of pressure rollers or the pair An apparatus for producing a photosensitive laminate, wherein both ends of the backup roller are set to be outside in a range of 5 to 30 mm from both ends in the width direction of the substrate. The manufacturing apparatus according to claim 1,
The apparatus for producing a photosensitive laminate, wherein a crown amount, which is a difference between a maximum radius and a minimum radius of the backup roller, is set in a range of 0.3 to 1.5 mm. The manufacturing apparatus according to claim 2, wherein
The said laminated amount is set to the range of 0.5-0.8 mm, The manufacturing apparatus of the photosensitive laminated body characterized by the above-mentioned. In the manufacturing apparatus of Claims 1-3,
The pair of pressure-bonding rollers are rubber rolls in which the outer peripheral portion of a shaft body is covered with rubber. The manufacturing apparatus according to claim 4, wherein
The thickness of the said rubber is set to the range of 0.5-3.0 mm, The manufacturing apparatus of the photosensitive laminated body characterized by the above-mentioned. The manufacturing apparatus according to claim 1,
In a range where the both ends of the pair of pressure rollers are not in contact with the substrate, a step where the diameter of each pressure roller is set smaller than that of the portion in contact with the substrate is provided in a portion separated from the substrate. An apparatus for producing a photosensitive laminate, comprising:

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