JP2007040946A - Ic contactor for device under test - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To miniaturize the whole of an IC contactor while preventing deterioration from occurring in durability of a vertex part of a conductive slider to more stabilize contact resistance of a device under test to an electrode terminal. <P>SOLUTION: This IC contactor 10 comprises: a conductive case 15; an elastomer 16 disposed in the conductive case 15; and the conductive slider 11, with its sliding stroke regulated, energized by the elastomer 16 toward the electrode terminal 8 side of the device 7 under test to make sliding contact with an inner surface of the conductive case 15 with the vertex part making pressing contact with the electrode terminal 8. The whole of the IC contactor 10 is somewhat laterally inclined relative to a vertical line P. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an inspection jig (so-called “IC contactor”) for testing and evaluating the performance of a device under test such as a semiconductor electronic component.

  The electrode terminals of the device under test are composed of an input side and an output side of an electric signal, and their thicknesses are usually different. In addition, stability of contact resistance is required for an IC contactor for evaluating the performance of the device under test. Therefore, in order to satisfy the stability of the contact resistance and cope with the electrode terminals having different thicknesses, there is a so-called pogo pin type as shown in FIG. In this type of IC contactor 1, a spring (not shown) is built in a conductive case 2, and the conductive movable pins 3 a and 3 b protruding above and below the case 1 are positioned on the center line by the spring. Each is biased outward. The movable pins 3a and 3b are restricted in their movable strokes in the urging direction.

  An insulative housing 5 that holds the IC contactor 1 is disposed on a PC board or the like 4 and includes a large number of inspection holes 6 and 6. The inspection holes 6 and 6 are formed at positions corresponding to the pair of electrode terminals 8 and 8 of the device under inspection 7.

  When the performance test of the device under test 7 is performed, the housing 5 is arranged on the PC board 4 or the like, the IC contactor 1 is set up in each of the many test holes 6 and 6, and the electrode terminals 8 and 8 8 is brought into pressure contact with the movable pin 3a (3b), and an electrical signal in a predetermined frequency band is energized to determine whether the electrical performance of the device under test 7 is good or bad.

  However, according to the conventional IC contactor 1, since the two movable pins 3a (3b) and the spring for biasing them are built in, the entire IC contactor can be physically short (small). As a result, the contact resistance increases and the high-frequency characteristics are also limited. Further, since the movable pin 3a (3b) is urged to be positioned on the center line and is in point contact with the electrode terminals 8 and 8, by repeating this contact, the tip of the pin is oxidized and contact is not achieved. There were problems in durability and contact performance due to stabilization and alloying with impurities.

  The present invention has been made to solve these problems. That is, the first of the present invention is a conductive case, an elastomer disposed in the conductive case, and the elastomer is biased toward the electrode terminal side of the device under test, and is in sliding contact with the inner surface of the conductive case. An IC of a device under test characterized in that the top portion is composed of a conductive slider with a regulated sliding stroke that is in press contact with the electrode terminal, and the whole has a slight inclination in the lateral direction with respect to the perpendicular. Contactor.

  A second aspect of the present invention is a conductive case, an elastomer disposed in the conductive case, and the elastomer is biased toward the electrode terminal side of the device under test, and is in sliding contact with the inside of the conductive case. The top of the head is composed of a conductive slider whose sliding stroke is restricted so as to be in press contact with the electrode terminal, and the conductive slider is disposed to be inclined with respect to the contact surface of the electrode terminal to inspect the device under test. An IC contactor for a device under test characterized in that the tops of conductive sliders are sometimes placed close to each other.

  According to the present invention, the entire IC contactor has a slight inclination in the horizontal direction with respect to the perpendicular, or the slider is arranged to be inclined with respect to the contact surface of the electrode terminal, whereby the wiping function works on the slider, The top of the slider is rubbed by the surface of the electrode terminal. As a result, the slider head is always polished and in a state similar to that of a new one. The conventional head contact with the electrode terminal as in the conventional case is caused by a point contact failure, for example, the head due to oxidation of the head or alloying with impurities. Deterioration of the durability at the top can be prevented in advance, and the contact performance can also be improved. In addition, by making one slider and energizing it with an elastomer, miniaturization can be realized and high frequency performance can be obtained. Furthermore, according to the second embodiment of the present invention, when the device under test is inspected, it is also applied to a device under test having a short distance between the electrode terminals by arranging the tops of the conductive sliders close to each other. can do.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  1 and 2 are sectional views showing a first embodiment of the present invention. The conductive slider 11 includes a pin portion 12, a stroke bar 13, and a sliding base portion 14. The sliding base portion 14 is accommodated in a case 15 having a conductive cylindrical shape, and its peripheral surface is in sliding contact with the inner surface of the case 15. Accordingly, the slider 11 is slidable in the vertical direction while the movable range is restricted. Further, an elastomer 16 is disposed in close contact with the sliding base 14 at the bottom of the case 15 so as to bias the slurder 11 upward, that is, toward the electrode terminals 8 and 8 of the device 7 to be inspected. The slider 11, the case 15, and the elastomer 16 constitute the IC contactor 10 of the present invention.

  In the present invention, the entire IC contactor 10 is slightly inclined in the lateral direction with respect to the perpendicular P in order to provide a wiping function to the pin portion 12 of the slider 11. Thus, when the electrode terminals 8 and 8 of the device under test 7 are pressed against the pin portion 12, the pin portion 12 can be slightly moved in the x-axis direction with respect to the electrode terminals 8 and 8.

  Accordingly, the IC contactor 10 described above has an electric frequency of a predetermined frequency band in a state where the pin portion 12 is set up in the inspection hole 6 of the housing 5 and the electrode terminals 8 and 8 of the device to be inspected 7 are pressed against the pin portion 12. When the signal is energized, the electrical signal is transmitted from the electrode terminals 8 and 8 of the device under test 7 to the PC board 4 via the slider 11 and the case 15.

  Since the slider 11 and the case 15 are made of a conductive material, when the slider 11 is pushed and sinks, the sliding base portion 14 is in sliding contact with the inner surface of the case 15. Connected even during operation.

  Further, since the electrodes 8 and 8 of the device under test 7 have different thicknesses, the contact resistance of the slider 11 becomes a problem. However, the slider 11 is urged by the elastomer 16, respectively. Since the elastomer 16 absorbs the pressing force of the slider 11 according to the thickness, a stable contact resistance can be realized.

  It should be noted that the wiping function works on the slider 11. As described above, since the entire IC contactor 10 is slightly inclined in the lateral direction with respect to the perpendicular line P, when the electrode terminals 8 and 8 are pressed against the pin portion 12, the pin portion 12 is connected to the electrode terminals 8 and 8. However, it moves slightly in the x-axis direction. Then, since the top of the pin portion 12 is rubbed by the surfaces of the electrode terminals 8 and 8, the top of the pin portion 12 is always polished and is in a state similar to that of a new product. Therefore, it is possible to prevent problems caused by continuous point contact of the pins with the electrode terminals 8 and 8 as in the past, for example, deterioration of the durability of the pins due to oxidation of the pin tops or alloying with impurities. In addition, the contact performance can be improved.

  FIG. 3 is a sectional view showing a second embodiment of the present invention. In this embodiment, the conductive case 21 is formed in a box shape, and the conductive slider 23 is urged toward the electrode terminals 8 and 8 of the device under test 7 by the elastomer 22 disposed in the case 21. An IC contactor 20 is constituted by the case 21, the elastomer 22 and the slider 23. The slider 23 is disposed so as to be inclined with respect to the electrode surfaces of the electrode terminals 8 and 8, and the wiping function works on the top of the head.

  Such an IC contactor 20 is arranged on the electrode terminals 8 and 8 with the tops of the sliders 23 being close to each other when the device under test 7 is inspected. Thus, the present invention can be applied even when the distance between the electrode terminals 8 and 8 is minimized. Since other operations and effects are the same as those in the first embodiment, a detailed description thereof will be omitted.

  It is sectional drawing of the IC contactor which shows the 1st Example of this invention.   It is a whole sectional view showing the inspection state of the device to be inspected using the IC contactor of FIG.   It is the same figure as FIG. 2 using the IC contactor which shows the 2nd Example of this invention.   It is whole sectional drawing which shows the test | inspection state of the to-be-inspected device using the conventional IC contactor.

Explanation of symbols

4 PC board 5 Housing 6 Inspection hole 7 Device under test 8 Electrode terminal 10, 20 IC contactor 11, 23 according to the present invention Conductive slider 12 Pin portion 13 Stroke bar 14 Sliding base 15, 21 Conductive case 16, 22 Elastomer P perpendicular

Claims (2)

  A conductive case, an elastomer disposed in the conductive case, and the elastomer is urged toward the electrode terminal side of the device under test, and the head portion is pressed against the electrode terminal by sliding contact with the inner surface of the conductive case. An IC contactor for a device under test, characterized in that it is composed of a conductive slider with a regulated sliding stroke and has a slight inclination in the horizontal direction with respect to the normal.   A conductive case, an elastomer disposed in the conductive case, and the elastomer is urged toward the electrode terminal side of the device under test, and the head portion presses and contacts the electrode terminal in sliding contact with the inside of the conductive case The conductive slider is arranged to be inclined with respect to the contact surface of the electrode terminal, and when the device under test is inspected, the tops of the conductive sliders are connected to each other. An IC contactor for a device under test, wherein the contactor is disposed in contact with an electrode terminal of the device under test in a state of being in close proximity to each other.