JP2004340583A - X-ray measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve a problem wherein the number of objects to be inspected not inspected heretofore only by visible light is increased as the development of a miniaturizing high density mounting technique for electronic parts in recent years, a measuring inspection system using X-ray inspection together is developed and the optical image and X-ray transmission image of the object to be inspected are taken by a TV camera of the same type and synthesized to be displayed on one screen but this system is complicated structurally and expensive, and no stability is obtained. <P>SOLUTION: This X-ray measuring instrument is constituted of an X-ray source for emitting X-rays, an iris means having an X-ray transmission part in an X-ray emitting direction and also having an X-ray cutting-off part in the direction other than the X-ray emitting direction and a mirror integrally provided to the X-ray transmission part of the iris means so as to form an angle with respect to the X-ray emitting direction and reflecting light with a desired wavelength but permitting X-rays to transmit. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an X-ray measuring device that measures a subject with X-rays.
[0002]
[Prior art]
2. Description of the Related Art In recent years, with the development of technology for downsizing and high-density mounting of electronic components, the number of inspection objects that cannot be inspected only with visible light has increased, and measurement and inspection systems that use X-ray inspection in combination have been developed.
[0003]
Such a conventional X-ray measurement apparatus arranges both inspection functions linearly with respect to the visual field of the object to be inspected in order to simultaneously perform the inspection by visible light and the inspection by X-ray, and collects an image. I have. At this time, in order to obtain the same field of view, mirrors are installed at two places, and their reflection images are taken by a TV camera. Although a fluorescent plate is used for conversion of the X-ray image, a micro-channel plate image amplifier for amplifying an image signal is provided because the generated image luminance is small in such a configuration. For this reason, the structure becomes complicated, not only the accuracy is reduced, but also the cost is significantly increased. (For example, see Patent Document 1)
It is also known about the importance of simultaneously obtaining and inspecting visible light and X-ray images. (For example, see Non-Patent Document 1.)
FIG. 4 shows the conventional visible light / X-ray hybrid fluoroscope, in which 400 is an object, 401 is an X-ray source, 402 is a mirror, 403 is a microchannel plate image amplifier, 404 is a TV camera, and 405 is a signal. A synthesizer 406 is an image display.
[0004]
The operation of the X-ray measuring device configured as described above will be described. The X-rays emitted from the X-ray source 401 are transmitted through a mirror 402, and a transmitted image of the subject 400 is amplified by a microchannel plate image amplifier 403, and this image is captured by a TV camera 404 by another mirror 402 of the same type. I do. Further, an optical image of the subject 400 is projected on a mirror 402 and photographed by a TV camera 404 of the same type. The two images are combined by the signal combiner 405 and displayed on the image display 406. It is characterized in that an optical image and an X-ray transmission image of a subject are photographed by the same type of TV camera, combined, and displayed on one screen. However, since the micro-channel plate image amplifier 403 is used as a technique for obtaining an X-ray transmission image, the structure becomes complicated, and the design of the mirror 402 and the optical coaxiality with the TV camera are difficult in terms of design. State is easy to occur.
[0005]
[Patent Document 1]
US Pat. No. 5,590,170 [Non-Patent Document 1]
Paul J. Handler, "Advanced in AOI and AXI Result in Incremented Quality and Speed", SMT Vol. 16 (2), 2002
[0006]
[Problems to be solved by the invention]
However, the conventional X-ray measuring apparatus has a problem that the structure is complicated, stability cannot be obtained, and the apparatus is expensive.
[0007]
An object of the present invention is to provide a high-performance X-ray measurement device having a simple structure.
[0008]
[Means for Solving the Problems]
In order to solve the above problems, an X-ray measurement apparatus according to the present invention has an X-ray source for irradiating X-rays, and an X-ray transmitting unit for the irradiation direction of the X-rays. An aperture unit having an X-ray shielding unit, and a mirror that passes an X-ray that reflects light of a desired wavelength at an angle to an X-ray irradiation direction at an X-ray transmitting unit of the aperture unit are provided integrally. Things.
[0009]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to FIGS.
[0010]
(Embodiment 1)
In FIG. 1, 1 is an X-ray source, 2 is a mirror that transmits X-rays, 3 is an imaging body for capturing an image reflected by the mirror 2, 4 is an X-ray imaging body that captures a fluoroscopic image, Reference numeral 5 denotes a light irradiator, 6 denotes an object, 7 denotes an X-ray shield integrated with the mirror 2, 8 denotes a data processing device for collecting image data, 9 denotes an image display, and 10 denotes a housing. It is.
[0011]
The operation of the X-ray measuring device configured as described above will be described.
[0012]
The X-rays emitted from the focal point of the X-ray source 1 are made to pass only through the portion of the subject 6 to be inspected by the X-ray shield 7 integrated with the mirror 2. The transmission image of the subject 6 is detected by the X-ray imaging body 4.
[0013]
In addition, the object 7 is irradiated with light emitted by the irradiator 5 that emits light of a desired wavelength, and the reflected light from the object 7 is reflected by the mirror 2 and imaged by the imaging body 3. I have.
[0014]
An example of the X-ray imaging body 4 includes a scintillator that converts X-rays into visible light and a two-dimensional optical sensor that is closely attached to the scintillator. As a result, since the configuration is not complicated as in the related art, assembly and adjustment are easy, accuracy is improved, and the cost is low.
[0015]
(Embodiment 2)
In the present embodiment, the same portions as those in the first embodiment are denoted by the same reference numerals, and detailed description is omitted.
[0016]
In FIG. 2, the point that the distance between the focal point of the X-ray source 1 and the subject 6 matches the distance between the subject 6 and the focal point of the optical system where the light reflected by the mirror 2 forms an image. Different from the first embodiment.
[0017]
Hereinafter, the operation of the X-ray measurement apparatus according to the present embodiment will be described.
[0018]
X-rays emitted from the focal point of the X-ray source 1 pass through the mirror 2 and project a transmission image of the subject 6 onto the X-ray imaging body 4. On the other hand, since the subject 6 has a height, the oblique incident component on the imaging body 3 affects the image. Therefore, in forming a desired light beam, by making the focal length in the imaging body 3 coincide with that of the X-ray, the compared images can be made the same. As a result, the measurement can be performed with high accuracy even in the peripheral portion.
[0019]
(Embodiment 3)
In the present embodiment, the same portions as those in the first embodiment are denoted by the same reference numerals, and detailed description is omitted.
[0020]
In FIG. 3, the solid angle between the focal point of the X-ray source 1 and the object 6 and the solid angle of the object 6 and the optical system on which the light reflected from the mirror 2 forms an image are matched. Different from 1.
[0021]
Hereinafter, the operation of the X-ray measurement apparatus according to the present embodiment will be described.
[0022]
X-rays emitted from the focal point of the X-ray source 1 pass through the mirror 2 and project a transmission image of the subject 6 onto the X-ray imaging body 4. At this time, since the object 6 has a height, the oblique incident component on the imaging body 3 affects the image. Therefore, in the imaging of a desired light beam, by making the solid angle in the imaging body 3 coincide with that of the X-ray, the compared images can be made the same. As a result, the measurement can be performed with high accuracy even in the peripheral portion.
[0023]
As described above, according to the present embodiment, since the X-ray shield 7 and the mirror 2 are integrated, the configuration of the imaging system becomes easy, and the leakage of X-rays to the peripheral portion is reduced. In addition, the housing 10 can be simplified, and high-precision measurement can be performed despite its low cost and small size.
[0024]
Although the X-ray imaging body 1 is a two-dimensional planar matrix sensor in the first embodiment, the X-ray imaging body 1 is not limited to this.
[0025]
【The invention's effect】
As described above, the present invention can realize an inexpensive and high-performance X-ray measuring apparatus by integrating the X-ray shield and the mirror.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of an X-ray measurement device according to a first embodiment of the present invention; FIG. 2 is a configuration diagram of an X-ray measurement device according to a second embodiment of the present invention; FIG. Configuration diagram of X-ray measurement device [FIG. 4] Configuration diagram of conventional X-ray measurement device [Description of reference numerals]
REFERENCE SIGNS LIST 1 X-ray source 2 Mirror 3 Imager 4 X-ray imager 5 Irradiator 6 Subject 7 X-ray shield 8 Data processor 9 Image display 10 Housing

Claims (6)

X-ray source for irradiating X-rays, aperture means having an X-ray transmitting part in the X-ray irradiation direction, and X-ray shielding parts in other directions, and X-rays of the aperture means An X-ray measuring apparatus in which a transmitting part is integrally provided with a mirror that passes an X-ray that reflects light of a desired wavelength at an angle to an irradiation direction of the X-ray. 2. The X-ray measuring apparatus according to claim 1, wherein the mirror is formed of a substance having a line resistance of 100 Ω · cm or less. X-ray source for irradiating X-rays, aperture means having an X-ray transmitting part in the X-ray irradiation direction, and X-ray shielding parts in other directions, and X-rays of the aperture means An X-ray measuring apparatus in which a mirror that transmits an X-ray that reflects light of a desired wavelength at an angle with respect to the X-ray irradiation direction is integrally provided in a transmission unit, and a flat matrix sensor is provided in the X-ray irradiation direction. . X-ray source for irradiating X-rays, aperture means having an X-ray transmitting part in the X-ray irradiation direction, and X-ray shielding parts in other directions, and X-rays of the aperture means A mirror that transmits X-rays that reflects light of a desired wavelength at an angle to the X-ray irradiation direction is provided integrally with the transmission unit, and a flat matrix X-ray sensor is provided in the X-ray irradiation direction, An X-ray measurement apparatus provided with a two-dimensional matrix sensor that receives light having a wavelength reflected by a mirror. X-ray source for irradiating X-rays, aperture means having an X-ray transmitting part in the X-ray irradiation direction, and X-ray shielding parts in other directions, and X-rays of the aperture means A mirror that transmits X-rays that reflects light of a desired wavelength at an angle to the X-ray irradiation direction is provided integrally with the transmission unit, and a flat matrix X-ray sensor is provided in the X-ray irradiation direction, A two-dimensional matrix sensor that receives light having a wavelength reflected by a mirror is provided, and a distance between a light source focal point of the X-rays and an object arranged in an irradiation direction of the X-rays, and a focal length of a light-receiving sensor of the reflected light are The same X-ray measurement device. X-ray source for irradiating X-rays, aperture means having an X-ray transmitting part in the X-ray irradiation direction, and X-ray shielding parts in other directions, and X-rays of the aperture means A mirror that transmits X-rays that reflects light of a desired wavelength at an angle to the X-ray irradiation direction is provided integrally with the transmission unit, and a flat matrix X-ray sensor is provided in the X-ray irradiation direction, A two-dimensional matrix sensor for receiving light having a wavelength reflected by a mirror; an angle at which a subject arranged in a direction in which the X-rays are irradiated from a light source focal point of the X-rays; An X-ray measurement device having the same viewing angle for imaging a specimen.

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