JP4073278B2 - X-ray analyzer - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an X-ray analyzer capable of detecting secondary X-rays generated by irradiation of primary X-rays and imaging a sample.
[0002]
[Prior art]
An X-ray analyzer includes an X-ray source, detection means for detecting secondary X-rays generated by irradiating the sample with primary X-rays from the X-ray source, and imaging means such as a television camera for imaging the sample And. The detection means of this X-ray analyzer is connected to an analysis means for measuring the intensity of secondary X-rays based on the detection value of the detection means and analyzing the composition of the sample, etc. The imaging unit is connected to a display unit that displays an image captured (see, for example, Patent Document 1).
[0003]
There is also known an X-ray analyzer equipped with a glass X-ray conduit capable of reducing the beam diameter of primary X-rays generated from an X-ray source to a small diameter of 10 to 100 μm. The X-ray conduit of this X-ray analyzer is connected to an X-ray source, and is configured to guide primary X-rays generated from the X-ray source and irradiate the sample with the primary X-rays from the X-ray conduit. (For example, refer to Patent Document 2).
[0004]
[Patent Document 1]
Japanese Patent No. 2900086 [Patent Document 2]
JP-A-8-15187 gazette
[Problems to be solved by the invention]
However, when the X-ray conduit as described in Patent Document 2 is adopted in the X-ray analyzer described in Patent Document 1, the reflected light of the sample may be further reflected on the outer peripheral surface of the X-ray conduit. . For this reason, the reflected light from the outer peripheral surface of the X-ray conduit affects the light that becomes the optical image of the sample, the contrast of the image picked up by the image pickup means is lowered, and the stray light of the picked up image increases and is improved. A plan was requested.
[0006]
The present invention has been made in view of such circumstances, and by providing a reflected light suppressing means for suppressing light reflection from the outer peripheral surface of the X-ray conduit between the X-ray conduit and the imaging means. An object of the present invention is to provide an X-ray analysis apparatus capable of increasing the contrast of an image captured by an imaging unit and reducing stray light in the captured image.
[0007]
It is another object of the present invention to provide an X-ray analyzer capable of simply providing reflected light suppressing means without increasing the number of parts by adopting a configuration in which the reflected light suppressing means is in close contact with an X-ray conduit. To do.
[0008]
Furthermore, by providing the reflected light suppressing means on the outer peripheral surface of the X-ray conduit from the output end of the X-ray conduit to the reflecting means, it is possible to increase the contrast of the image captured by the imaging means and An object of the present invention is to provide an X-ray analyzer capable of reducing stray light.
[0009]
[Means for Solving the Problems]
An X-ray analyzer according to the present invention is configured to provide an X-ray conduit for guiding primary X-rays generated from an X-ray source, and secondary X-rays generated by irradiating a sample with primary X-rays from the X-ray conduit. An X-ray analysis apparatus comprising: detection means for detecting; imaging means for imaging the sample; and reflecting means arranged around the X-ray conduit and reflecting light from the sample. Reflected light suppression means is provided on the outer peripheral surface of the X-ray conduit from the output end to the reflection means .
[0014]
In the present invention, the sample can be imaged around the X-ray axis of the primary X-ray. Moreover, since light reflection from the outer peripheral surface of the X-ray conduit can be suppressed, the influence of the X-ray conduit can be reduced and the contrast of the captured image can be increased when the imaging means images the sample. The stray light of the captured image can be reduced.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the drawings showing embodiments thereof.
Embodiment 1
FIG. 1 is a schematic view showing a configuration of an X-ray analyzer according to the present invention, and FIG. 2 is an enlarged schematic view of an X-ray conduit portion.
[0016]
In this X-ray analyzer, an X-ray source 2 for generating primary X-rays a is provided on an upper portion of a box-shaped X-ray analyzer body 1, and a sample 10 is placed below the X-ray analyzer body 1. The mounted table 3 is arranged so as to be movable in a three-dimensional direction.
A synthetic resin diaphragm 4 capable of transmitting the primary X-ray a, secondary X-ray b, which will be described later, and visible light is provided at the lower part of the X-ray analyzer main body 1. Further, an X-ray conduit 5 for guiding the primary X-ray a generated from the X-ray source 2 to the inside thereof is suspended from an upper portion in the X-ray analyzer body 1. The lower part is provided with a curved plate 1a that protrudes upward from the periphery of the diaphragm 4 and through which the lower side of the X-ray conduit 5 is inserted. The space between the curved plate 1a and the diaphragm 4 is sealed. X-ray irradiation space 6 is provided.
[0017]
The lower side of the X-ray conduit 5 protrudes into the central portion of the X-ray irradiation space 6. Further, in the X-ray irradiation space 6, a detection means 7 such as a semiconductor detector for detecting secondary X-rays b such as fluorescent X-rays generated by irradiating the primary X-rays a from the X-ray conduit 5, and A reflector 8 disposed around the X-ray conduit 5 and reflecting the light c from the sample 10 in a direction perpendicular to the axis of the X-ray conduit 5, and the light c reflected by the reflector 8 The condensing lens 9 which condenses, and the illuminator 11 which illuminates the lower part of the said diaphragm 4 part with visible light are accommodated.
[0018]
The detection means 7 is disposed on one side with respect to the X-ray conduit 5 in a state of being accommodated in one end of a cylindrical housing 13 supported by the curved plate 1a, and the condenser lens 9 is disposed on the curved plate. It is disposed on the opposite side of the detection means 7 with respect to the X-ray conduit 5 while being accommodated in one end of a cylindrical housing 14 supported by 1a. An imaging means 15 such as a CCD camera for imaging the sample 10 is provided at the other end portion of the housing 14 in which the condenser lens 9 is accommodated.
[0019]
The reflector 8 has an insertion part 8a cut into a long hole shape from one side to the center part, and is composed of a mirror through which the X-ray conduit 5 is inserted, and around the X-ray axis of the primary X-ray a. Thus, the sample 10 is supported by the housing 14 with the reflection surface facing downward so that the sample 10 can be imaged. That is, it is arranged around the X-ray conduit 5 at an angle of about 45 degrees with respect to the axis of the X-ray conduit 5, and the light (visible light) from the sample 10 is directed to the axis of the X-ray conduit 5. Thus, the light is reflected at an angle of approximately 45 degrees.
[0020]
The condenser lens 9 is arranged so that its optical axis is approximately 45 degrees with the reflecting surface of the reflector 8. The light condensed by the condensing lens 9 enters the light receiving portion of a CCD camera as the image pickup means 15.
[0021]
The X-ray conduit 5 is formed of glass so that the lower side has a small diameter. The primary X-ray a generated by the X-ray source 2 is guided to a thin beam diameter of 10 to 100 μm, and the thin beam diameter is reduced. It is configured to irradiate the primary X-ray a toward the sample 10.
[0022]
On the outer periphery of the X-ray conduit 5, specifically, on the outer peripheral surface of the X-ray conduit 5, a suppressing material 20 that suppresses light reflection from the outer peripheral surface is provided in close contact by coating or vapor deposition. The suppressor 20 is made of a non-reflective material such as a black body paint that does not reflect light, and is provided on the outer peripheral surface of the X-ray conduit 5 from the primary X-ray output end 5 a to the insertion portion 8 a of the reflector 8. It has been. Further, the suppression member 20 is also provided in the insertion portion 8a of the reflector 8 so as to suppress light reflection at the insertion portion 8a.
In FIG. 1, reference numeral 18 denotes an X-ray shielding plate provided at the lower part of the X-ray analyzer main body 1 so as to face the mounting surface of the table 3 described above.
[0023]
The detection value detected by the detection means 7 of the X-ray analyzer configured as described above is a measurement unit that measures the intensity of the secondary X-ray b based on the detection value, and a measurement output from the measurement unit. Based on the signal, it is input to the analysis means 16 having an analysis unit for analyzing the composition and the like of the sample 10. The image captured by the imaging unit 15 is displayed on the display unit 17.
[0024]
By irradiating the primary X-ray a generated from the X-ray source 2 toward the sample 10 on the stage 3 from the lower end of the X-ray conduit 5, the secondary X-ray b is generated. While being detected by the detecting means 7 in the X-ray irradiation space 6, light (visible light) generated by illumination from the illuminator 11 reflects the sample 10, and further reflects the reflector 8 to reflect the condenser lens. 9 enters the light receiving portion of the imaging means 15 and the sample 10 is imaged.
At this time, the light reflected from the sample 10 is reflected by the reflector 8 through the light guide region around the X-ray conduit 5, but the outer peripheral surface of the X-ray conduit 5 is a suppressing material such as a non-reflective paint. Since 20 is provided in close contact, the light in the light guide region can be prevented from being reflected by the outer peripheral surface of the X-ray conduit 5 as much as possible. Therefore, the influence of the X-ray conduit 5 can be reduced, the contrast of the captured image can be increased, and stray light of the captured image can be reduced. As a result, it is easy to perform accurate observation on the display means 17.
[0025]
Embodiment 2
FIG. 3 is a schematic diagram showing the configuration of the second embodiment of the X-ray analyzer.
In the X-ray analysis apparatus according to the second embodiment, the reflector 8 and the condenser lens 9 are eliminated, and the imaging means 15 disposed above the output end 5a of the X-ray conduit 5 images the sample 10. In the X-ray analyzer configured as described above, a suppressant 20 that suppresses light reflection on the outer peripheral surface is applied to or adhered to the outer peripheral surface of the glass X-ray conduit 5. . The suppressor 20 is made of a non-reflective material such as a black body paint that does not reflect light, and is provided in a lower portion of the X-ray conduit 5, specifically, a portion disposed in a light guide region of the X-ray conduit 5. ing.
[0026]
Even in the second embodiment, since the suppressing material 20 such as a non-reflective coating is in close contact with the outer peripheral surface of the X-ray conduit 5, the light in the light guide region is reflected by the outer peripheral surface of the X-ray conduit 5. To do as little as possible. Therefore, the influence of the X-ray conduit 5 can be reduced, the contrast of the captured image can be increased, and stray light of the captured image can be reduced.
Since other configurations and operations are the same as those in the first embodiment, the same components are denoted by the same reference numerals, and detailed descriptions, descriptions of operations, and effects are omitted.
[0027]
Embodiment 3
The X-ray analysis apparatus according to the third embodiment replaces the suppression material 20 used in the first and second embodiments as a reflected light suppression unit that suppresses light reflection from the outer peripheral surface of the X-ray conduit 5. A restraining cylinder fitted around the X-ray conduit 5 is used.
[0028]
This suppression cylinder includes a cylinder made of a non-reflective material, a cylinder having a non-reflective surface treatment on the outer peripheral surface, and a cylinder having a non-reflective black body paint or the like in close contact with the outer peripheral surface. The outer fitting is held around the outer periphery of the X-ray conduit 5. Moreover, although this suppression cylinder is externally fitted to the portion where the suppression material 20 is provided in the first and second embodiments, it may be externally fitted over almost the entire length of the X-ray conduit 5. Further, the suppression cylinder may be a tube (for example, a heat-shrinkable tube).
Since other configurations and operations are the same as those of the first embodiment, the same components are denoted by the same reference numerals, and detailed description thereof and description of operations and effects are omitted.
[0029]
In the embodiment described above, as the reflected light suppressing means for suppressing the light reflection from the outer peripheral surface of the X-ray conduit 5, the suppressing member 20 is closely attached, or the suppressing cylinder is inserted. A non-reflective black body tape may be applied to the outer peripheral surface of the X-ray conduit 5.
[0030]
【The invention's effect】
As described above in detail, according to the present invention , the sample can be imaged around the X-ray axis of the primary X-ray, and light reflection from the outer peripheral surface of the X-ray conduit can be suppressed. When the imaging unit takes an image, the influence of the X-ray conduit can be reduced, the contrast of the taken image can be increased, and stray light of the taken image can be reduced.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing a configuration of an X-ray analyzer according to the present invention.
FIG. 2 is an enlarged schematic view of an X-ray conduit portion of the X-ray analyzer according to the present invention.
FIG. 3 is a schematic diagram showing the configuration of a second embodiment of the X-ray analyzer according to the present invention.
[Explanation of symbols]
2 X-ray source 5 X-ray conduit 5a Output end 7 Detection means 8 Reflector (reflection means)
8a Insertion part 15 Imaging means 20 Suppressing material (reflected light suppressing means)

Claims (1)

  An X-ray conduit for guiding primary X-rays generated from an X-ray source, detection means for detecting secondary X-rays generated by irradiating the sample with primary X-rays from the X-ray conduit, and imaging the sample In an X-ray analysis apparatus comprising an imaging means for performing reflection and a reflection means arranged around the X-ray conduit and reflecting light from the sample, the output from the output end of the X-ray conduit to the reflection means An X-ray analyzer characterized in that reflected light suppression means is provided on the outer peripheral surface of the X-ray conduit.

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