JP2003045952A5 - - Google Patents

Claims (14)

A mounting body for mounting a target object, and an electrostatic chuck layer formed on the mounting body and made of a ceramic sprayed layer having an electrode layer inside, are processed by the electrostatic chuck layer during plasma processing. A mounting apparatus for adsorbing a body, wherein the ceramic sprayed layer is formed by sealing the upper side of the electrode layer with methacrylic resin. The mounting apparatus according to claim 1, wherein the ceramic sprayed layer is formed by sealing a lower side of the electrode layer with methacrylic resin. The mounting surface according to claim 1 or 2, wherein an outer peripheral surface of the mounting body is covered with a ceramic sprayed layer formed integrally with the ceramic sprayed layer of the electrostatic chuck layer. apparatus. The mounting apparatus according to claim 3, wherein the ceramic sprayed layer covering the outer peripheral surface of the mounting body is sealed with methacrylic resin. The mounting apparatus according to any one of claims 1 to 4, wherein the methacrylic resin is obtained by curing a resin raw material liquid containing methyl methacrylate as a main component. The mounting apparatus according to any one of claims 1 to 5, wherein the ceramic sprayed layer is made of at least one of aluminum oxide, aluminum nitride, silicon nitride, and titanium oxide. The flatness of the surface of the said ceramic sprayed layer is Ra = 0.2-0.3, The mounting apparatus of any one of Claims 1-6 characterized by the above-mentioned. The mounting apparatus according to claim 1, wherein a thickness of the ceramic sprayed layer on the upper side of the electrode layer is 250 μm or less. A plasma processing apparatus comprising the mounting apparatus according to claim 1 . A mounting body for mounting a target object, and an electrostatic chuck layer formed on the mounting body and made of a ceramic sprayed layer having an electrode layer inside, are processed by the electrostatic chuck layer during plasma processing. a method of manufacturing a mounting device for adsorbing body, the more Engineering for forming the electrostatic chucking layer on the mounting surface of the upper described mounting body by spraying the ceramic material while heating the above described mounting body A method for manufacturing a mounting apparatus, comprising: The method for manufacturing a mounting apparatus according to claim 10, comprising a step of impregnating the electrostatic chuck layer with a methacrylic resin raw material liquid and a step of curing the methacrylic resin raw material liquid. The method for manufacturing a mounting apparatus according to claim 10 or 11 , wherein the ceramic sprayed layer is formed in a state where compressed air is supplied to a gas passage provided in the mounting body. The method for manufacturing a mounting apparatus according to claim 10, wherein a deaeration process is performed in the step of curing the methacrylic resin raw material liquid. The method for manufacturing a mounting apparatus according to claim 13, wherein the deaeration process is performed at 0.1 Torr or less.