JP2003029394A - Photomask washing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a space-saving and energy-saving photomask washing device which has high washing effect and is adaptive to a large-sized mask. SOLUTION: This device which washes a photomask being carried in a device main body by supplying processing liquid to the photomask is equipped with a carrying means which carries the photomask M in a posture of a slight tilt from a vertically standing posture. The carrying means is composed of a roller conveyor equipped with rollers 11 and 12. As compare with horizontal conveyance, no slack is caused and a large-sized photomask can be handled in a small space.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for cleaning plate-like objects, and more particularly to a photomask cleaning apparatus for cleaning a large photomask.

[0002]

2. Description of the Related Art Generally, in a manufacturing process of a liquid crystal display device (LCD), a plasma display panel (PDP), etc.,
Various types of fine processing are performed to form a patterned product on a plate-shaped substrate such as a glass plate. Since this fine processing is usually required to have high processing accuracy, it is often performed by a photolithography method. In this photolithography method, many photomasks are repeatedly used, but the photomask often becomes dirty during exposure,
In order to maintain the processing accuracy, it is necessary to wash this dirt.

As a method for cleaning such a photomask, a manual method using a low-adhesion roller is convenient. Further, as a device for automatically cleaning the photomask, a spin cleaning device, an ultrasonic dip cleaning device, a scrub cleaning device, etc. are widely used, and a general horizontal transfer type wet cleaning device is also used. .

[0004]

By the way, recently,
In the manufacturing process of LCDs, PDPs, etc., in order to improve production efficiency, the number of impositions is increasing, and the use of large photomasks is becoming indispensable. That is, a large photomask is expensive, but a small photomask requires step exposure in order to support multi-sided attachment, and in order to form the positional relationship between the surfaces in the same glass with high accuracy. This is because a complicated and extremely expensive exposure apparatus is required and the tact time is slow, and therefore it is preferable to collectively form one photomask.

When such a large-sized photomask is used, cleaning of dirt becomes a problem. For example, although the method using the low-adhesion roller described in the conventional technique is simple,
It cannot be denied that the cleaning effect is insufficient. On the other hand, the spin cleaning apparatus has a relatively simple apparatus configuration and is not costly, but cannot support a large photomask. In addition, since the ultrasonic dip cleaning device performs steam cleaning with a solvent (isopropyl alcohol, CFC substitutes, etc.), the device becomes bulky and requires energy for heating, and the problem of solvent disposal and the use of CFC substitutes are expensive. There are many problems such as Since the scrubbing cleaning device is configured to reciprocate the photomask in the vertical direction and clean it with a brush, it requires height and is difficult to attach / detach to / from the support part of the photomask. Not realistic. Further, in the horizontal transport type wet cleaning device, when a large photomask is held on the end surface, the brush is bent, so that the brush does not hit uniformly. Thus, none of the conventional cleaning devices can handle large photomasks.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a photomask cleaning apparatus which has a high cleaning effect, is space-saving and energy-saving, and is compatible with a large mask. To provide.

[0007]

According to a first aspect of the present invention, there is provided a photomask cleaning apparatus which cleans a photomask by supplying a processing liquid to the photomask being conveyed in the apparatus body. The apparatus is characterized in that it is provided with a transporting means for transporting the photomask in a posture in which the photomask is erected in a vertical state.

A photomask cleaning apparatus according to a second aspect of the present invention is the photomask cleaning apparatus according to the first aspect, wherein the transporting means are provided above and below the transporting direction of the photomask and are orthogonal to the transporting direction. It is characterized in that it is a roller conveyor provided with a plurality of rollers having a supporting shaft.

According to a third aspect of the present invention, in the photomask cleaning apparatus according to the second aspect, the rollers of the conveying means contact only the outer edges of the upper and lower sides of the photomask. Is characterized by.

A photomask cleaning device according to a fourth aspect of the present invention is the photomask cleaning device according to the second or third aspect, in which the roller supporting the outer edge of the upper side of the photomask is in the height direction. The position of is variable.

A photomask cleaning apparatus according to a fifth aspect of the present invention is the photomask cleaning apparatus according to the first aspect, wherein the apparatus main body is provided with an inlet for setting the photomask and water on both sides of the photomask. A pre-washing unit for spraying, a processing liquid supply unit for supplying the processing liquid, a brush cleaning unit for cleaning both sides of the photomask with brushes, and a rinse unit for supplying water to the brush-cleaned photomask to remove the processing liquid. And a drying section for spraying air on both sides of the photomask to perform draining and drying, and an outlet section for taking out the photomask.

A photomask cleaning device according to a sixth aspect of the present invention is the photomask cleaning device according to the fifth aspect, in which the support of the brush is fixed to the main body of the device, and the rotation axis of the brush is in the carrying direction. It is characterized by being orthogonal.

A photomask cleaning apparatus according to a seventh aspect of the present invention is the photomask cleaning apparatus according to the fifth aspect, characterized in that the brush is retracted to a position where the brush does not contact the photomask. .

According to an eighth aspect of the present invention, there is provided a photomask cleaning device according to the fifth aspect, in which the photomask is reciprocated while being sandwiched between the brushes in the brush cleaning section. It has a feature.

A photomask cleaning apparatus according to a ninth aspect of the present invention is the photomask cleaning apparatus according to the fifth aspect, wherein the processing liquid nozzle of the processing liquid supply unit, the brush of the brush cleaning unit, and the rinse unit are provided. It is characterized in that the rinse nozzle is one unit and the photomask is cleaned by sliding the unit back and forth while the photomask is stopped.

A photomask cleaning apparatus according to a tenth aspect of the present invention is the photomask cleaning apparatus according to the fifth aspect, wherein the drying section is parallel to the surface of the photomask to be transported and orthogonal to the transportation direction. It is characterized by having an air supply means installed with a certain inclination angle with respect to the direction.

According to an eleventh aspect of the present invention, there is provided a photomask cleaning apparatus according to the fifth aspect, wherein the inlet portion and the outlet portion are connected to a transfer means for transferring the photomask and transferred. It is characterized in that it is provided with a connecting means for delivering the photomask between the means and the cleaning apparatus main body.

The photomask cleaning apparatus according to a twelfth aspect of the present invention is characterized in that, in the photomask cleaning apparatus according to the fifth aspect, the inlet portion also serves as the outlet portion.

The photomask cleaning apparatus according to a thirteenth aspect of the present invention is the photomask cleaning apparatus according to the twelfth aspect, wherein the water supply means of the preliminary water washing section also serves as the water supply means of the rinse section. It has a feature.

A photomask cleaning apparatus according to a fourteenth aspect of the present invention is the photomask cleaning apparatus according to the thirteenth aspect, wherein a water supply means is provided on the inlet / outlet side with the brush interposed and on the opposite side. It is characterized in that a treatment liquid supply means is arranged.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a schematic configuration diagram showing an example of a photomask cleaning apparatus according to the present invention, and FIG. 2 is a side view showing a state of carrying a photomask in the apparatus main body. In FIG.
Reference numeral 10 is an apparatus main body for cleaning the photomask, and 20 is a carriage as a photomask transfer means for the apparatus main body 10. The photomask cleaning step performed by this cleaning apparatus will be described below.

First, the carriage 20 is installed at the entrance A of the apparatus body 10.
And the photomask M is transferred to the entrance A of the apparatus body 10.

The apparatus main body 10 comprises a plurality of lower rollers 1
Roller conveyors composed of the upper roller 1 and the upper roller 12 are provided above and below in the carrying direction, and as shown in FIG. 2, the photomask M is carried in a state in which it is laid down slightly from a state of standing vertically. There is. That is, each roller 1
As shown in FIG. 2, reference numerals 1 and 12 have support shafts 11a and 12a orthogonal to the transport direction, and the flange portion 11
b, 12b, and is conveyed while being in contact with only the outer end portions of the upper side and the lower side so as not to damage the mask surface of the photomask M. The position of the roller 12 that supports the outer edge of the upper side of the photomask M is variable in the height direction to accommodate photomasks of different sizes.

On the other hand, the carriage 20 has a roller conveyor composed of a lower roller 21 and an upper roller 22 like the apparatus main body 10, and accommodates the photomask M at the same inclination as the apparatus main body 10. The position of the roller 22 that supports the outer edge of the upper side of the photomask M is variable in the height direction. The trolley 20 is movable by wheels 23, and a coupling means including, for example, a pin 20a and a receiving portion 10a is provided between the trolley 20 and the device body 10. When the trolley 20 is coupled to the device body 10, a pass line is provided. Coincides with each other, and the entrance A of the carriage 20 and the apparatus main body 10
The photomask M is delivered to and from.

A photomask M is provided at the entrance A of the apparatus body 10.
After being set, the photomask M is conveyed from the inlet portion A through the drying portion B to the cleaning portion C. In the apparatus main body 10 of FIG. 1, in the area of the cleaning section C, a preliminary water washing section for spraying water on both sides of the photomask, a processing solution supply section for supplying a processing solution, and a brush for cleaning both sides of the photomask with a brush. A cleaning unit and a rinse unit for supplying water to the brush-cleaned photomask to remove the processing liquid are arranged. FIG. 3 shows a state where the photomask passes through the cleaning section C.

The photomask M is carried to the left end of the apparatus main body 10 while being prewashed with pure water sprayed from the rinse nozzles 13 on both sides in the carrying direction, and is inverted at the position m shown by the solid line in FIG. After being inverted, the treatment liquid (detergent) is sprayed from the treatment liquid nozzles 14 on both sides in the transport direction, both sides are cleaned by the roll brushes 15, and then the treatment liquid is washed with pure water sprayed from the rinse nozzle 13. . While being cleaned in this way, the photomask M repeats a reciprocating motion for a predetermined time between a position m shown by a solid line and a position n shown by a broken line. During this cleaning, the time for spraying the treatment liquid and the time for spraying pure water can be appropriately set. In the apparatus shown in FIG. 1, the water supply means of the preliminary water washing section also serves as the water supply means of the rinse section.

The support 15a of the roll brush 15 is fixed to the apparatus main body 10 and the rotary shaft 15 of the roll brush 15 is provided.
b is orthogonal to the transport direction. If the roll brushes 15 can be retracted to positions where they do not contact the photomask M, the cleaning sequence can be assembled in various ways. For example, 1) Do not apply a brush during preliminary washing, spray with a detergent, and then apply a brush.
2) In order to take a long rinse time, cleaning such as reciprocating motion without applying a brush can be performed.

As shown in FIG. 4, the roll brush 1
5 and the rinse nozzles 13 and the processing nozzles 14 on both sides thereof are integrated by, for example, a support 15a to form a unit, and while the photomask M is stopped, the unit is slid left and right in the apparatus main body 10 to slide and reciprocate the photomask M. May be washed.

The photomask M which has undergone a predetermined cleaning in the cleaning section C returns to the drying section B, where it is transported while being drained and dried by the air knife 16, and stopped at the inlet section A which also serves as the outlet section. Air knife 16 in the drying section B
Is installed with a certain inclination angle with respect to the direction parallel to the surface of the photomask M and orthogonal to the transport direction as shown in FIG. 1, so that air is blown downward to drain water. Therefore, the photomask M after cleaning can be quickly dried.

The cleaned photomask M that has returned to the entrance A that also serves as the exit is transferred to the carriage 20 and returned to the exposure step. And another photomask M is a dolly 2
It is carried at 0, and washing is performed one after another by the same washing process.

Although the embodiments of the present invention have been described in detail above, the photomask cleaning apparatus according to the present invention is not limited to the above-described embodiments and does not depart from the gist of the present invention. It goes without saying that various changes can be made in.

[0033]

The photomask cleaning device according to the first aspect of the present invention is a device for cleaning the photomask by supplying a processing liquid to the photomask being conveyed in the main body of the device. Since the photomask is equipped with a transporting device that transports the photomask from a vertical state in a slightly laid posture, compared to the horizontal transport, it does not cause any deflection and a large photomask with a small space. In addition, by slightly laying it down, the transport system is simpler, such as not having to be sandwiched by the transport rollers, compared to the case where it is completely vertical, and the liquid draining accuracy is better than when horizontally transported. Play.

A photomask cleaning apparatus according to a second aspect of the present invention is the photomask cleaning apparatus according to the first aspect, wherein the transporting means are provided above and below the transporting direction of the photomask and are orthogonal to the transporting direction. Since it is characterized in that it is a roller conveyor having a plurality of rollers having a supporting shaft, in addition to the above effects, it is only necessary to put on the roller conveyor, the effect that it is easy to attach and detach to the transport means Play.

A photomask cleaning apparatus according to a third aspect of the present invention is the photomask cleaning apparatus according to the second aspect, wherein the rollers of the conveying means are in contact only with the outer edges of the upper and lower sides of the photomask. In addition to the above effects, there is an effect that the mask surface is not soiled during cleaning.

A photomask cleaning apparatus according to a fourth aspect of the present invention is the photomask cleaning apparatus according to the second or third aspect, wherein the roller supporting the outer edge of the upper side of the photomask is in the height direction. Since the position of is variable, the effect of being able to deal with photomasks of different sizes is obtained in addition to the above effect.

A photomask cleaning apparatus according to a fifth aspect of the present invention is the photomask cleaning apparatus according to the first aspect, wherein the apparatus main body is provided with an inlet for setting the photomask and water on both sides of the photomask. A pre-washing unit for spraying, a processing liquid supply unit for supplying the processing liquid, a brush cleaning unit for cleaning both sides of the photomask with brushes, and a rinse unit for supplying water to the brush-cleaned photomask to remove the processing liquid. In addition to the above effects, cleaning in a desired step is also possible because the photomask is equipped with a drying section for blowing water on both sides of the photomask to perform draining and drying, and an exit section for taking out the photomask. It can be carried out.

A photomask cleaning apparatus according to a sixth aspect of the present invention is the photomask cleaning apparatus according to the fifth aspect, wherein the brush support is fixed to the apparatus main body, and the rotating shaft of the brush is in the carrying direction. Since they are orthogonal to each other, in addition to the above effects, there is an effect that the space of the brush cleaning unit in the device length direction can be reduced.

A photomask cleaning apparatus according to a seventh aspect of the present invention is the photomask cleaning apparatus according to the fifth aspect, characterized in that a mechanism is provided for retracting the brush to a position where it does not contact the photomask. Therefore, in addition to the above effects, it is possible to employ a variety of cleaning sequences.

According to an eighth aspect of the present invention, there is provided a photomask cleaning device according to the fifth aspect, wherein the photomask cleaning device reciprocates in the brush cleaning section while being sandwiched between the brushes. Since this is a feature, in addition to the above effects, there is an effect that a cleaning time can be set and reliable cleaning can be performed without depending on the length of the apparatus.

A photomask cleaning apparatus according to a ninth aspect of the present invention is the photomask cleaning apparatus according to the fifth aspect, wherein the processing liquid nozzle of the processing liquid supply unit, the brush of the brush cleaning unit, and the rinse unit are provided. In addition to the above effects, in addition to the above effects, the photomask is characterized in that the rinse nozzle is one unit and the unit is configured to slide and reciprocate this unit while the photomask is stopped. As compared with the reciprocating method, the length of the apparatus main body for cleaning becomes shorter, and there is an effect that space saving can be achieved.

A photomask cleaning apparatus according to a tenth aspect of the present invention is the photomask cleaning apparatus according to the fifth aspect, wherein the drying section is parallel to the surface of the photomask to be transported and orthogonal to the transportation direction. Since it is characterized by having an air supply means installed with a certain inclination angle with respect to the direction, in addition to the above effects, water can be drained downward, and quick drying is possible. Has the effect.

The photomask cleaning apparatus according to the invention of claim 11 is the same as the photomask cleaning apparatus of claim 5, wherein the inlet and the outlet are connected to a transfer means for transferring the photomask and transferred. In addition to the above effects, the photomask can be put in and taken out of the apparatus main body without any manual labor, since the connecting means for transferring the photomask between the cleaning means and the cleaning apparatus main body is provided. There is an effect that can be done.

A photomask cleaning apparatus according to a twelfth aspect of the present invention is characterized in that, in the photomask cleaning apparatus according to the fifth aspect, the inlet portion also serves as the outlet portion. In addition, there is an effect that further space saving can be achieved.

According to a thirteenth aspect of the present invention, in the photomask cleaning apparatus according to the twelfth aspect, the water supplying means of the preliminary water washing section also serves as the water supplying means of the rinse section. Since this is a feature, it is not necessary to separately provide a preliminary water washing section, so that the facility cost can be suppressed and further space saving can be achieved.

A photomask cleaning apparatus according to a fourteenth aspect of the present invention is the photomask cleaning apparatus according to the thirteenth aspect, in which the water supply means is provided on the inlet / outlet side with the brush interposed, and on the opposite side. Since the treatment liquid supply means is arranged, there is an effect that space saving can be achieved in addition to the above effect.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram showing an example of a photomask cleaning apparatus according to the present invention.

FIG. 2 is a side view showing a state where the photomask is conveyed in the apparatus body of the photomask cleaning apparatus.

FIG. 3 is a top view showing a state in which a photomask passes through a cleaning section in the apparatus body of the photomask cleaning apparatus.

FIG. 4 is an explanatory diagram showing a mode in which a processing liquid nozzle of a processing liquid supply unit, a brush of a brush cleaning unit, and a rinse nozzle of a rinse unit are combined into one unit.

[Explanation of symbols]

A entrance B Drying part C cleaning section M photomask 10 Device body 10a receiving part 11,12 roller 11a, 12a support shaft 11b, 12b Flange part 13 Rinse nozzle 14 Processing liquid nozzle 15 roll brush 15a support 15b rotating shaft 16 air knife 20 carts 20a pin 21,22 roller 23 wheels

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) B08B 7/04 B08B 7/04 A H01L 21/68 H01L 21/68 A F term (reference) 2H095 BB19 BB20 BB23 BB29 BB30 BB31 3B116 AA02 AB16 AB27 BA02 BA15 BB22 CA01 CC01 CC03 3B201 AA02 AB07 AB16 AB27 AB37 BA02 BA15 BB22 BB93 BB94 CA01 CC01 CC12 4F042 AA06 CC04 DA01 DA08 DE01 DF19 DF25 DF26 ED05 5F031 CA07

Claims (14)

[Claims] 1. An apparatus for cleaning a photomask by supplying a treatment liquid to the photomask being transported in the apparatus body, wherein the photomask is in a state of standing upright and lying down slightly. An apparatus for cleaning a photomask, characterized in that the apparatus comprises a transfer means for transferring the same. 2. The transporting means is a roller conveyor provided with a plurality of rollers which are arranged above and below in the transporting direction of the photomask and have a support shaft orthogonal to the transporting direction. Photo mask cleaning equipment. 3. The photomask cleaning apparatus according to claim 2, wherein the rollers of the conveying means contact only the outer edges of the upper side and the lower side of the photomask. 4. The photomask cleaning apparatus according to claim 2, wherein the roller supporting the outer edge of the upper side of the photomask has a variable position in the height direction. 5. The apparatus main body comprises an inlet for setting a photomask, a prewashing unit for spraying water on both sides of the photomask, a treatment liquid supply unit for supplying a treatment liquid, and a brush for cleaning both sides of the photomask. Brush cleaning section, a rinse section that supplies water to the brush-cleaned photomask to remove the processing liquid, a drying section that sprays air on both sides of the photomask to drain and dry, and an outlet section that takes out the photomask The photomask cleaning apparatus according to claim 1, further comprising: 6. The brush support is fixed to the apparatus main body,
The photomask cleaning device according to claim 5, wherein the rotation axis of the brush is orthogonal to the transport direction. 7. The photomask cleaning apparatus according to claim 5, further comprising a mechanism capable of retracting the brush to a position where the brush does not contact the photomask. 8. The photomask cleaning apparatus according to claim 5, wherein the photomask reciprocates in the brush cleaning unit while being sandwiched between the brushes. 9. A photomask comprising a treatment liquid nozzle of a treatment liquid supply unit, a brush of a brush cleaning unit, and a rinse nozzle of a rinse unit as one unit, and sliding the unit back and forth while the photomask is stopped. 6. The photomask cleaning apparatus according to claim 5, wherein the cleaning is performed. 10. The drying section has an air supply means installed parallel to the surface of the photomask to be conveyed and having a constant inclination angle with respect to a direction orthogonal to the conveying direction. The photomask cleaning apparatus according to claim 5. 11. The inlet part and the outlet part are provided with connecting means for connecting a transfer means for transferring the photomask and for transferring the photomask between the transfer means and the cleaning apparatus main body. The photomask cleaning device according to claim 5. 12. The photomask cleaning apparatus according to claim 5, wherein the inlet portion also serves as the outlet portion. 13. The photomask cleaning apparatus according to claim 12, wherein the water supply means of the preliminary water washing section also serves as the water supply means of the rinse section. 14. The photomask cleaning apparatus according to claim 13, wherein the water supply means is arranged on the inlet / outlet side with the brush interposed, and the treatment liquid supply means is arranged on the opposite side.