JP2002217265A - System and method for manufacturing electronic component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a vacant space, to realize a high-speed transfer, to improve yield and productivity, and to reduce power consumption in manufacturing an electronic component. SOLUTION: There are provided in upper and lower layers, clean tunnels 1, 13 that extend linearly and transfer a product, a group of units arranged linearly along the clean tunnels 1, 13, transfer cars 2, 14 that move in the clean tunnels 1, 13 and transfer the product, respectively. Lifting units 3, 3a, and 4, 4a are provided near the ends of clean tunnels 1, 13 to pass the product between the transfer cars 2, 14 and to form a loop-shaped transfer route that spreads over the upper and lower layers.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to an LSI (Large sc).
ale integrated circuit), liquid crystal, plasma, EL (Electro luminescence), DMD (Digital Mi
rror Device) and various display device parts, or CC
The present invention relates to a manufacturing system and a manufacturing method for electronic components manufactured in a clean atmosphere such as various sensor components such as D and an image sensor.

[0002]

2. Description of the Related Art FIG. 6 shows an example of a conventional system for manufacturing electronic parts such as semiconductors and liquid crystal display devices. Since electronic components are manufactured through many processes, many devices are required.
In addition, even when there is no rework, including whether or not there is a rework step, the device may be repeatedly manufactured with the same apparatus.

[0003] In addition, electronic parts are usually manufactured in a job shop type production line in which devices are arranged in a process order, rather than in a flow shop type in which devices are arranged in a processing order, because they are advantageous in terms of workability and space. Manufactured. FIG. 6 shows an example of a job shop type production line.

In FIG. 6, although slightly simplified, apparatuses 101, 102, 103, and 104 (for example, apparatuses for performing processes such as film dry etching, photolithography, inspection, and wet etching cleaning) are provided for each processing step. )
However, the required number of units is designed according to the processing capacity and the number of steps until a product is manufactured, and a group of devices for each number is arranged in a block on one floor.

In each device group or a part of the device group, a conveying means 10 for conveying, for example, several tens of processed products for each cassette so as to be able to rotate around the group.
5,106 (usually a floor rail type (more specifically, a magnetic tape guide type) automatic conveyance cart) is provided.

However, the space occupied by the equipment group in each process is different, or the external dimensions are different depending on the equipment in each process.
108.

Another example of a system for manufacturing electronic components in a clean room is disclosed in Japanese Patent Application Laid-Open No. Hei 7-180871. In the example described in this document, the apparatus is placed on a multi-story floor, provided with elevating means passing through the center of each floor, and the apparatus is arranged on each floor in a circular or polygonal shape around the elevating means.

[0008]

However, the conventional job shop type manufacturing line has the following various problems.

That is, a useless space is created in the clean room, and its use becomes difficult. In addition, the factory becomes huge, the site area of the building is widened, and it is difficult to locate the factory in a convenient place for transporting products. In addition, there are various large and small vacant spaces on a large area floor, air currents can stagnate in various places even if air conditioning is performed, ash dust is generated, air conditioning is difficult to maintain a uniform clean atmosphere, and yield is poor. Tends to occur.

[0010] Furthermore, while the automatic transport vehicle moves in a loop during the process, a person may cross the truck rail for maintenance or other work. In addition, the speed of the truck cannot be increased because the guide tape rail track has a curved curve or the like (for example, it is practically used at a speed of 40 m / min). Therefore, the manufacturing efficiency deteriorates, and the manufacturing lead time deteriorates.

[0011] Further, the product moves variously left and right on the loop and travels a long distance until completion, so that sometimes the bogie at the destination may hinder the movement, which may cause a loss time, and further, the production time may be reduced. Efficiency drops and production days increase. Normally, the trolley performs automatic self-drive by charging and replenishment, but in the above case, power consumption increases. For this reason, charging and replenishment may be repeated, and the production efficiency may be further deteriorated, such as an increase in the number of stopped trucks, and the production time and days may be increased.

The example described in Japanese Patent Application Laid-Open No. 7-180871 also has various problems as follows.

There is a case where the elevating device has only one path at the center and stagnates. As a result, in the case of multiple processes, the production efficiency is particularly poor, and the lead time is rather increased. Also, in a multi-process line, since the equipment on the first floor is limited, the floor becomes too multi-layer, making it difficult to construct a factory,
It is necessary to send water and chemicals to the high part, and the power consumption of the pump increases. Furthermore, the devices are of various shapes, large and small, and each floor has an unmanageable empty space of different shapes.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an electronic device capable of reducing empty space, improving high-speed conveyance, yield and production efficiency, and reducing power consumption. It is an object of the present invention to provide a component manufacturing system and a manufacturing method.

[0015]

An electronic component manufacturing system according to the present invention comprises a first transport path provided on a first floor and extending linearly for transporting a product, and at least a first transport path. A first group of manufacturing apparatuses arranged in a straight line along the line, a first conveying unit that moves in the first conveying path and conveys the product, and is provided on the second floor and extends linearly to convey the product. A second transport path, a second group of manufacturing apparatuses linearly arranged along at least the second transport path, and a second transport unit that moves in the second transport path and transports the product; Lifting means for connecting the first and second transport paths to form a loop-shaped transport path extending over the first and second floors; Note that the above-mentioned products include products that are being manufactured.

Since the first and second manufacturing equipment groups are arranged along the first and second transport paths extending linearly as described above, the empty space can be reduced and the clean room area can be minimized. Can be suppressed. In addition, by using a loop-shaped transport path, manufacturing apparatuses can be distributed to each floor while devising the balance of the apparatuses, and the same effect can be expected. Further, since the arrangement of the devices having different shapes and the empty space can be reduced, the stagnation region of the airflow can be suppressed as much as possible. Furthermore, since the transport means does not move around the manufacturing apparatus in a loop, and a maintenance space can be provided on the back side of the apparatus, the worker goes to the maintenance space without crossing the transport path. Can improve the safety of workers. Further, since there is no need to provide a curved portion in the transport path, a reduction in the speed of the transport means can be suppressed, and high-speed transport can be performed.

It is preferable that the first and second transfer means move at a speed of 50 m / min or more. More preferably, the first and second transport means are at least 80 m / min.
It moves at a speed of 0 m / min or less.

By performing the linear transfer, not only the above-described high-speed processing can be performed, but also the damage of the work during the transfer of the glass substrate or the like can be suppressed. It is also possible to reduce the rise of ash dust and maintain a stable yield.

The first and second transport paths preferably have extensions that extend outside the installation area of the first and second manufacturing equipment groups.

Accordingly, in the case where a trolley that performs automatic self-drive by charging and replenishment is employed as the transport means, a spare trolley and a maintenance zone and a charging zone for the trolley can be provided in the extension. As a result, the stoppage of the truck in the device area can be reduced as much as possible, and efficient operation of the truck in the process can be maintained.

A storage section for storing a product (work in process) is preferably provided near the extension section.

Thus, it is possible to secure the time for storing or removing the product (work in process) while maintaining the operation in the device area. Further, even if the length of the process on each floor is slightly different, the storage unit can be formed at a uniform position across the layers, and the storage across the layers is facilitated.

The storage section is preferably provided over the first and second floors. As a result, it is possible to create a minimum storage space by eliminating the variation in the storage amount that changes every moment on each floor. In addition, by providing a plurality of floors with receiving / extracting ports for the storage section, the storage section can be used as a bypass for the elevating device, so that the transport time can be reduced and the number of elevating devices can be reduced.

The first floor is located lower than the second floor,
The first manufacturing apparatus group includes a liquid processing system apparatus, and the second manufacturing apparatus group includes a vacuum apparatus.

As described above, the relatively large vacuum device is arranged on the upper floor with few or narrow pillars, and the liquid processing system is arranged on the lower floor. Damage can be minimized. Further, the liquid pressure for flowing the liquid is easily maintained, so that the capacity of the pump can be reduced and the power consumption can be reduced.

The first and second transport paths include first and second clean tunnels maintained in a clean atmosphere.

As described above, by adopting the clean tunnel type transfer, it is only necessary to locally maintain the cleanliness (cleanness), so that the maintenance cost can be reduced. Also, for maintenance of the back zone of the equipment, for example, it is not necessary to take out cleanup of repair tools or hand drills can be used, so maintenance and remodeling of the equipment becomes easy, and maintenance time and remodeling time can be reduced. Becomes

The first transport means moves along the first transport path, has a clean atmosphere inside, includes a first clean box for transporting the product, and the second transport means has a first clean box. And a second clean box for transferring the product, which moves along the second transfer path and has a clean atmosphere inside. Thus, even when the clean box type transfer is adopted, it is easy to maintain the cleanliness of the entire system, and the maintenance cost can be reduced.

The first clean box moves along a first rail installed on the ceiling of the first floor, and the second clean box moves on a second rail installed on the ceiling of the second floor. Move along.

When the first and second clean boxes are of a ceiling rail type, piping zones and devices can be arranged on the floor below the clean box, and the space under the clean box can be effectively used.

In the method of manufacturing an electronic component according to the present invention, a predetermined process is performed on a product while the product is transported along a loop-shaped transport path that is linear on each floor and extends over a plurality of floors. And

As described above, since the transport path is linear on each floor, the empty space can be reduced, and the area of the clean room can be minimized. Further, similarly to the case of the above-described manufacturing system according to the present invention, a maintenance space can be provided on the back side of the apparatus, so that the safety of the worker can be improved, and a curved portion is not provided on the transport path. As a result, a reduction in the speed of the transporting means can be suppressed, and high-speed transport can be performed.

[0033]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to FIGS.

(Embodiment 1) FIG. 1 is a plan view of an upper floor of an electronic component manufacturing system according to Embodiment 1 of the present invention, FIG. 2 is a plan view of a lower floor, and FIG. FIG.

As shown in FIG. 1, on the upper floor, a clean tunnel 1, a plurality of trolleys 2, lifting devices 3 and 4,
A plurality of dry etching devices 5, an A inspection device 6,
A plurality of resist coating and exposing devices 7, a plurality of vacuum film forming devices 8 such as a CVD device and a sputtering device, a buffer unit 9, a wall unit 10, a storage place 11, and a living room 12 are installed.

Clean tunnel (first transport route) 1
Extends in a straight line, and is for conveying a product (work in process). By adopting the clean tunnel 1 in this manner, the clean management area can be reduced, and the maintenance cost can be reduced.

Further, since the clean tunnel 1 extends in a straight line, a reduction in the speed of the carriage 2 can be suppressed, and the product can be transported at a high speed. At this time, by performing the linear transfer, it is possible to suppress the breakage of the work during the transfer of the glass substrate or the like, and it is possible to reduce the ash dust caused by the convection of the air due to the high-speed transfer, which is stable. The yield can be maintained.

The clean tunnel 1 has an extension 1a at each end.
Having. The extension portions 1a are both ends of the clean tunnel 1 extending to a region where various device groups do not exist. The extension 1a is provided with an area for evacuating unnecessary carts, waiting for a spare cart, and charging and repairing the cart 2.

This makes it possible to minimize the stoppage of the truck 2 in the device area, and to maintain efficient operation of the truck 2 in the process.

A trolley (first transport means) 2 is disposed in the clean tunnel 1, and the trolley 2 moves in the clean tunnel 1 by 50 m / min or more (preferably 80 m / min or more and 150 m / min).
Minutes). For example, four trolleys 2 carrying cassettes for glass substrates, which are liquid crystal products in units of 20 (not shown), reciprocate in the clean tunnel 1.

The elevating devices 3 and 4 are arranged slightly inside the left and right ends of the operating area of the carriage 2, and carry in and out cassettes from different floors.

Dry etching device 5 and A inspection device 6
, A resist coating and exposing device 7, and a vacuum film forming device 8 (first
Are linearly arranged along the clean tunnel 1.

In the example shown in FIG. 1, the first manufacturing apparatus group is arranged only on one side of the clean tunnel 1, but they may be arranged on both sides of the clean tunnel 1. In the case of the two-sided arrangement, the transfer path can be shortened, and in the case of the one-sided arrangement, the layout design can be facilitated even with an odd number of devices.

Also, a clean tunnel 1 extending linearly.
Since the manufacturing apparatus group is arranged along the line, the empty space can be reduced, and the irregularly arranged apparatus and the empty space can be reduced, so that the stagnation region of the airflow can be suppressed as much as possible.

The buffer unit 9 is provided near one end of the clean tunnel 1 and has built-in upper, lower, left and right transport units, and can store cassettes over a plurality of layers.

By providing the buffer section 9 in the vicinity of the extension 1a of the clean tunnel 1, it is possible to secure the time for storing or removing the product while maintaining the operation in the apparatus area, and the length of the process on each floor is slightly reduced. Even if different, the buffer unit 9 can be formed at a uniform position across the layers, and storage across the layers becomes easy.

Further, by providing the buffer unit 9 over the upper and lower floors, it is possible to eliminate the variation of the storage amount that changes every moment on each floor and to create a minimum storage space. Further, by providing a plurality of floors with receiving / extracting ports for the storage unit, it can be used as a bypass for the lifting / lowering devices 3 and 4, thereby shortening the transport time and increasing the height of the lifting / lowering devices 3 and 4.
Can be reduced.

As shown in FIG. 1, the first manufacturing equipment group is arranged on one side of the clean tunnel 1, so that the operator can set the first manufacturing equipment group in the back space of the equipment group (the space opposite to the side where the cart 2 passes). The vehicle can be safely arrived without crossing the transport path, and with the loss reduced without stopping the carriage 2. As a result, not only work such as maintenance of the apparatus becomes easy, but also improvement of worker safety and improvement of production efficiency can be achieved.

Further, since a space of a certain area can be secured inside or outside the wall portion 10, a storage place 11 for maintenance members and consumables and an upper-level living room 12 can be provided.

On the lower floor shown in FIG. 2, a clean tunnel (second transport route) 13, a plurality of trucks (second transport means) 14, lifting devices 3a and 4a, and a wet processing device 15 are provided. , B inspection device 16, cleaning device 17 (second manufacturing device group), buffer transfer portion 18, wall portion 19
And a gas-based supply management unit 20, a solvent and liquid-based supply management unit 21, and a living room 22.

By arranging various devices in the upper and lower layers as described above, the manufacturing devices can be distributed on each floor by devising the balance of the devices, which is also effective in reducing the empty space and the stagnation area of the airflow. Can make a contribution.

Further, since a relatively large vacuum device is arranged on the upper floor with few or narrow columns and the liquid treatment system is arranged on the lower floor, the damage of the liquid leakage can be reduced while effectively utilizing the wide space of the upper floor. Can be minimized. Further, the liquid pressure for flowing the liquid is easily maintained, so that the capacity of the pump can be reduced and the power consumption can be reduced.

As shown in FIG. 3, the lifting devices 3, 3a,
4, 4a transport the cassette in the up-down direction or one of the up-down directions, and form a loop-shaped transport path extending over the upper and lower floors.

In the electronic component manufacturing system having the above-described configuration, the product is subjected to a predetermined process by a predetermined device on an upper floor, and then the product is cleaned by the truck 2 in the clean tunnel 1.
Is transported straight inside. Then, when the processing on the upper floor is completed, it is transported to the lower floor by the elevating device 3 or 4, and the predetermined processing is performed on the lower floor.

That is, according to the manufacturing system of the present invention,
A predetermined process can be performed on the product while transporting the product along a loop-shaped transport route that is linear on each floor and extends over a plurality of floors.

FIG. 4 shows the transport speed of the truck 2 and the value of the truck 2 measured by a particle counter installed at a fixed point near the apparatus.
The experimental results on the relationship between the amount of particles soaring and the speed of the trolley 2 are shown.

As shown in FIG. 4, the speed of the carriage 2 is 80 m.
/ Min, the amount of particles slightly increases,
It is a usable area up to 50 m / min. In consideration of variations in mass production and safety, it may be preferable to suppress the speed of the truck 2 to 80 m / min or less depending on mass production conditions. However, in the conventional process, the truck speed is 40 m / min. As a result, the speed can be increased about twice or more.

It is preferable that the bogie rail has a normal rail structure track and is not a rechargeable self-propelled bogie but a continuous power feeding bogie. By adopting the linear clean tunnels 1 and 13 as in the present invention, it is possible to use a truck having a power supply structure at all times.

In the present embodiment, since the cassette is transported in the clean tunnel 1, it is not necessary to increase the cleanness of the external area of each device.

It is preferable that air is blown from the apparatus side to the clean tunnel 1 side so that particles in the clean tunnel 1 are not brought into the apparatus for film formation, exposure, and the like. The speed of the carriage 2 is 15 from 80 m / min.
In the case of 0 m / min, the blowing air speed is about 0.3 m / sec.
If it is about 0.6 m / sec or more, it is possible to prevent particles from flowing into the apparatus.

Further, by providing the lifting device at two locations, the refuge and loss of the carriage 2 can be effectively reduced. However, depending on the product, one or three or more lifting devices may be provided. Further, as long as the connection between the clean tunnels 1 and 13 is established, the installation position of the elevating device can be arbitrarily selected.

Further, the present invention is applicable to a clean room having three or more floors.

It is not always necessary to provide a clean tunnel. Further, a part of the apparatus group may be arranged in the transport path in the vertical direction, a transport path different from the central transport path may be provided, and the tact and the arrangement of the apparatuses may be adjusted.

(Embodiment 2) Next, Embodiment 2 of the present invention will be described with reference to FIG. FIG. 5 is a side view showing a transport system according to the second embodiment.

As shown in FIG. 5, in the second embodiment,
A cassette 23 containing a plurality of substrates (products) is conveyed by a hermetically sealed clean box 24 in which the inside is cleaned by nitrogen gas replacement or the like. This eliminates the need to clean the entire factory, and simplifies equipment and management for maintaining cleanliness compared to cleaning the entire factory. There is no need to worry about adjusting and managing the flow so that a particle pool is not created.

The clean box 24 moves along a ceiling rail 25 installed on the ceiling of each floor. As a result, gas and liquid are placed under the clean box 24 in the device 2.
A piping zone such as a gas or liquid supply pipe 27 for supplying the gas to or from the gas supply line 6 can be provided, and the space below the clean box 24 can be effectively used. As a result, the floor area of the clean room can be reduced.

The cassette is transferred from the bottom of the clean box 24 to the apparatus.
4 below. Thereby, the floor area can be further reduced.

Although the embodiments of the present invention have been described above, the embodiments disclosed this time are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is defined by the terms of the claims, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

[0069]

According to the present invention, since the empty space can be reduced, it is possible to suppress the enlargement of the factory, reduce the site area of the building, and select a convenient place for transporting products. Further, since the stagnation region of the airflow can be suppressed as much as possible, uniform cleanliness can be maintained, and the yield can be improved. Furthermore, high conveyance processing can be performed while improving the safety of the worker, and the production efficiency can be improved. In addition, by enabling high-speed conveyance, the number of conveyance means can be reduced, and it is possible to prevent the movement of other conveyance means from being hindered by the moving conveyance means, thereby further increasing production efficiency. Can be improved. Further, since the moving distance of the transporting means can be reduced, the power consumption can be reduced. In addition, since the transfer unit is driven linearly, power can be directly supplied to the transfer unit. In this case, there is no need to stop the transfer unit for charging, which can also contribute to improvement in production efficiency. .

[Brief description of the drawings]

FIG. 1 is a plan view of an upper floor of an electronic component manufacturing system according to Embodiment 1 of the present invention.

FIG. 2 is a plan view of a lower floor of the electronic component manufacturing system according to the first embodiment of the present invention.

FIG. 3 is a cross-sectional view straddling the upper floor and the lower floor of the electronic component manufacturing system according to the first embodiment of the present invention.

FIG. 4 is a diagram showing an experimental result on a relationship between a truck speed and a particle amount.

FIG. 5 is a side view illustrating a transport system according to a second embodiment of the present invention.

FIG. 6 is a plan view showing an example of a conventional job shop type production line.

[Explanation of symbols]

1,13 Clean tunnel, 1a extension, 2,14
Cart, 3,3a, 4,4a Lifting device, 5 Dry etching device, 6A inspection device, 7 Resist coating and exposing device, 8 Vacuum film forming device, 9 Buffer unit, 10, 19
Wall part, 11 storage place, 12, 22 living room, 15 wet processing equipment, 16 B inspection equipment, 17 cleaning equipment, 1
8 buffer delivery unit, 20 gas supply management unit,
21 supply management unit for solvent and liquid system, 23 cassette, 24
Clean box, 25 ceiling rail, 26 equipment, 2
7 Gas and liquid supply pipes.

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3F022 AA08 BB09 CC02 EE05 MM01 MM04 MM11 5F031 CA02 CA05 DA01 DA09 DA17 EA14 GA58 GA60 MA03 MA06 MA09 MA26 MA28 MA29 MA32 MA33 NA02 NA04 NA08 NA16 PA06 PA08

Claims (11)

[Claims] 1. A first manufacturing apparatus which is provided on a first floor, extends linearly, and conveys products, and a first manufacturing apparatus which is linearly arranged at least along the first conveying path. A group, a first transport unit that moves in the first transport path and transports the product, and a second transport that is provided on a second floor, extends linearly, and transports the product. A second manufacturing apparatus group linearly arranged along at least the second transport path; a second transport unit that moves in the second transport path and transports the product; An electronic component manufacturing system, comprising: elevating means for connecting the first and second transport paths to form a loop-shaped transport path extending over the first and second floors. 2. The apparatus according to claim 1, wherein said first and second transporting means include:
The electronic component manufacturing system according to claim 1, wherein the electronic component manufacturing system moves at a speed of at least m / min. 3. The apparatus according to claim 1, wherein the first and second transporting means are
The electronic component manufacturing system according to claim 2, wherein the electronic component manufacturing system moves at a speed of not less than m / min and not more than 150 m / min. 4. The first and second transport paths are connected to the first
The electronic component manufacturing system according to any one of claims 1 to 3, further comprising an extension part extending to outside the installation area of the second manufacturing apparatus group. 5. The electronic component manufacturing system according to claim 4, wherein a storage section for storing the product is provided near the extension section. 6. The electronic component manufacturing system according to claim 5, wherein the storage unit is provided across the first and second floors. 7. The first floor is located at a lower level than the second floor, the first manufacturing apparatus group includes a liquid processing system apparatus, and the second manufacturing apparatus group is a vacuum processing apparatus. The electronic component manufacturing system according to claim 1, further comprising an apparatus. 8. The manufacturing of an electronic component according to claim 1, wherein said first and second transport paths include first and second clean tunnels maintained in a clean atmosphere. system. 9. The first transfer means moves along the first transfer path, has a clean atmosphere inside, and includes a first clean box for transferring a product; The transporting means according to any one of claims 1 to 7, wherein the transporting means moves along the second transporting path, has a clean atmosphere inside, and includes a second clean box for transporting a product. Electronic component manufacturing system. 10. The first clean box moves along a first rail installed on a ceiling of the first floor, and the second clean box moves on a ceiling of the second floor. The electronic component manufacturing system according to claim 9, wherein the electronic component manufacturing system moves along the installed second rail. 11. A method of manufacturing an electronic component, wherein a predetermined process is performed on a product while transporting the product along a loop-shaped transport path that is linear on each floor and extends over a plurality of floors.