JP2000240720A - Vibration eliminating device for vibration disliking equipment with movable mass body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce an influence of exciting force generated from the inside of vibration disliking equipment on the vibration disliking equipment itself by making a vibration eliminating table in a fixed state at the time of traveling of a movable mass body. SOLUTION: This vibration eliminating device has a vibration eliminating table 16 through which vibration disliking equipment 14 with a movable mass body 12 is elastically supported on a floor F; lock mechanisms 20 for making the vibration eliminating table 16 in a fixed state and in a operating state; and a lock control means 22 allowing the lock mechanisms 20 to fix the vibration eliminating table 16 in a traveling state of the movable mass body 12, and to operate it in a stopping state of the movable mass body 12.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anti-vibration apparatus for anti-vibration equipment, and more particularly to an anti-vibration equipment provided with a movable mass body, the movable mass body traveling and stopping in the anti-vibration equipment. The present invention relates to an anti-vibration device for an anti-vibration facility having a body.

[0002]

2. Description of the Related Art Manufacturing equipment for precision equipment and precision products dislikes vibrations, and is designed to cut off vibrations input from the outside by vibration isolators. For example, even a large wafer exposure apparatus for manufacturing IC chips is configured as a precision anti-vibration facility, and a circuit diagram is printed on a wafer using light. That is, as shown in FIG. 8, the exposure apparatus passes light F emitted from a light source 1 to a film-like substrate 2 on which a circuit pattern is written, and forms an image on a wafer 4 by a lens 3. Prints the circuit diagram of the IC chip.

Accordingly, it is necessary to precisely adjust the relative position between the base 2 and the wafer 4 depending on the relationship between the printing position and the focal position of the lens 3. Therefore, the base 2
The wafer 4 is mounted on a first stage 5 that is allowed to travel horizontally in relation to the support frame of the exposure apparatus, while the wafer 4 is mounted on a second stage 6 that is allowed to travel horizontally and vertically. The first stage 5 is controlled by a linear motor in X and Y directions along a horizontal plane, and the second stage 6 is controlled by six degrees of freedom including a linear guide in the X and Y directions and a rotation direction. The exposure is performed in a state where both the first and second stages 5 and 6 are kept still. For this reason, the exposure apparatus is installed on a vibration isolation table, and blocks vibration from the floor or the foundation.

[0004]

However, in the conventional exposure apparatus, the first and second stages 5 and 6, which are movable mass bodies, have a mass of 20 kgf to 50 kgf so that they can travel at high speed by a linear motor. It has become. For this reason, the reaction force at the time of positioning the first and second stages 5 and 6 is transmitted to the structural frame of the exposure apparatus, and it takes a long time for the vibration of the anti-vibration table to converge to shake the frame. I will. That is, by the excitation force generated by the exposure apparatus itself,
The soft anti-vibration table will be shaken on the contrary.

By the way, the vibration isolation table can be passively controlled by setting the spring rigidity of the supporting elasticity in advance according to the mass of the anti-vibration equipment to be subjected to vibration isolation. On the other hand, active control is enabled by variably controlling the spring stiffness. By performing feedforward control using this active control function, vibration control can be effectively performed against external vibration. In the feedforward control in this case, the vibration of the floor or the foundation on which the exposure apparatus is installed is sampled and controlled so that the exposure apparatus does not respond in advance. Has no effect. For this reason, in order to effectively control the vibration force of the exposure apparatus itself, feedback active control for sensing the vibration of the anti-vibration table and controlling the anti-vibration table so as not to vibrate is performed. .

However, in the above-described exposure apparatus, the driving of the first and second stages 5 and 6 produces an excitation force of several tens Kgf to several hundreds Kgf, and the response of the structural frame thereof is several tens gal to several hundred gal. turn into. On the other hand, the allowable vibration amount during exposure is 0.0
5 to 0.10 gal (response acceleration is 1/1 of several hundred gal)
(About 000 to 1/2000), and it is desired that the vibration suppression be instantaneously achieved in the exposure work. However, such a large vibration suppression effect can be promptly achieved by the feedback active control. It will be difficult. In addition, there is a problem that the sensitivity (about 1/1000) of the high-sensitivity vibration sensor used for active control is insufficient.

In view of the above, the present invention has been made in view of such a conventional problem. By setting the vibration isolation table in a fixed state when the movable mass body travels, the vibration force generated from inside the anti-vibration equipment is reduced. It is an object of the present invention to provide an anti-vibration equipment vibration isolator provided with a movable mass body that reduces influence on the anti-vibration equipment itself.

[0008]

In order to achieve the above object, a vibration damping apparatus for a vibration damping apparatus having a movable mass body according to the present invention is provided with a vibration damping apparatus having a movable mass body. In a vibration isolator that is elastically supported by a base via a vibration isolation table, a lock mechanism for operating the vibration isolation table and fixing the vibration isolation table is provided, and the vibration isolation table can be moved by the lock mechanism. A lock control means is provided for setting the movable body in a stationary state while the movable body is in a running state and operating the movable mass body in a stopped state.

Therefore, in this vibration damping device, the vibration damping table has no vibration damping function by providing the lock control means to fix the vibration damping table in the running state of the movable mass body. The vibration equipment can be supported in a rigid state. Therefore,
While the movable mass body travels, it is possible to prevent the generated vibration force from affecting the anti-vibration equipment and prevent the anti-vibration equipment from shaking. On the other hand, when the movable mass body is stopped, that is, when no exciting force is generated by the movable mass body, the vibration damping table is in an operating state. The equipment can be stabilized at rest.

According to a second aspect of the present invention, there is provided an anti-vibration apparatus for an anti-vibration facility having a movable mass body, wherein the lock mechanism includes an electromagnet provided on one of the anti-vibration table and the base. It is desirable to provide a magnetic body provided on the other side and to be attracted by the magnetic force generated by the electromagnet, and to fix the vibration isolation table by the attractive force between the electromagnet and the magnetic body.

Therefore, in this vibration isolator, the electromagnet is excited by energization, and the magnetic force generated thereby attracts the magnetic material to fix the vibration isolator while cutting off the power to the electromagnet. As a result, the suction force between the magnetic material and the magnetic material is removed, and the vibration isolation table can be brought into the operating state. In this manner, the fixed state and the operating state of the vibration isolation table can be switched by the magnetic force of the electromagnet, so that the response until the lock mechanism actually operates in response to the control signal output from the lock control means can be significantly improved. it can.

Further, according to a third aspect of the present invention, there is provided an anti-vibration apparatus for an anti-vibration facility having a movable mass body, wherein the lock mechanism comprises: a projection provided on one of the anti-vibration table and the base;
It is preferable that a gripping mechanism is provided on one of the other sides and is capable of gripping the projection, and the anti-vibration table is fixed by gripping the projection by the gripping mechanism.

Therefore, in this vibration damping device, when the vibration damping table is fixed, the gripping mechanism grips the protrusion, so that the fixing force of the vibration damping table can be significantly increased. For this reason, even when a large excitation force is generated in the anti-vibration equipment due to the traveling of the movable mass body, the anti-vibration table has no elastic support function and can support the anti-vibration equipment in a rigid state. Shaking can be reliably prevented.

Further, according to a fourth aspect of the present invention, there is provided an anti-vibration apparatus for an anti-vibration facility having a movable mass body, wherein the lock mechanism comprises: a projection provided on one of the anti-vibration table and the base; It is provided with a gripping mechanism provided on one of the other sides and capable of gripping the projection, and the projection and the gripping mechanism for gripping the projection are an electromagnet and a magnetic body provided respectively. It is desirable.

Therefore, in this vibration isolator, the gripping operation of the projection by the gripping mechanism can be performed by the action of the electromagnetic force, and the above-described function can be combined.

Further, in the vibration isolator of the anti-vibration equipment having the movable mass body according to claim 5 of the present invention, the lock mechanism is provided with an active control mechanism for controlling the behavior of the vibration isolation table. It is desirable that the control mechanism be feed-forward controlled from a vibration state to a vibration removal state using a traveling command signal of the movable mass body.

Therefore, in this vibration isolator, when the movable mass body stops and the vibration isolating table is activated, the vibration force of the movable mass body remains and affects the anti-vibration equipment. In some cases,
Since the active control mechanism is feed-forward controlled by the traveling command signal of the movable mass body, the responsiveness when shifting from the fixed state of the vibration isolation table to the active control state of the lock mechanism is significantly improved. Therefore, active control can be performed in a state where the vibration difference of the anti-vibration equipment between when the vibration isolator is fixed and when it is in operation is extremely small. In this way, it is possible to prevent or significantly reduce the shaking from remaining in the anti-vibration equipment when the anti-vibration table is brought into the operating state.

[0018]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an exploded perspective view of an anti-vibration apparatus equipped with a movable mass according to the present invention. FIG.
6 to 6 show the vibration isolator of the present embodiment, FIG. 1 is a front view showing the whole vibration isolator, FIG. 2 is a perspective view of a vibration isolator used in the vibration isolator of the present invention, and FIG. FIG. 4 is a cross-sectional perspective view showing an elastic supporting portion of the table, FIG.
FIG. 5 is a graph showing the spring characteristics of the disc spring in terms of load-displacement, FIG. 6 is a front view of the lock mechanism shown in FIG.
It is explanatory drawing shown by the cross section of (c).

The basic configuration of the vibration damping apparatus 10 of the present invention is such that a vibration damping facility 14 having a movable mass body 12 is elastically supported on a floor F as a base via a vibration damping table 16.
A lock mechanism 20 is provided for setting the relative movement portion 18 of the vibration isolation table 16 to the operating state and the fixed state. The lock mechanism 20 is set to the fixed state in the running state of the movable mass body 12, while the movable mass body 12 is stopped. There is provided a lock control means 22 which is activated in the state.

The anti-vibration equipment 14 is constructed as a precision machine as shown in FIG. 1. The anti-vibration equipment 14 has a movable mass body 12 running with a constant mass in order to perform a predetermined work.
Is provided. The anti-vibration equipment 14 is, for example, a “conventional technology”
Is configured as a large wafer exposure apparatus in the same manner as described above, and the movable mass body 12 in this case is configured as each stage on which a base and a wafer are mounted. In the present embodiment, one movable mass body is used for convenience. It is shown as 12. Traveling and stopping of the movable mass body 12 are controlled by a traveling command signal output from the traveling control means 24.

Anti-vibration equipment 1 configured as an anti-vibration precision machine
Numeral 4 is installed on the vibration isolator base plate 26 so as to cut off vibration from the floor F or the foundation. Anti-vibration table surface plate 26
Has a rectangular shape, and is mounted on four elastic support portions 28 arranged corresponding to the respective corner portions as shown in FIG. The elastic support portion 28 is installed on a mounting plate 30 fixed to the floor F as shown in FIG. 3, and includes a laminated rubber 32 and a disc spring 34. The laminated rubber 32 is disposed below the disc spring 34, and an annular intermediate plate 36 is interposed between the laminated rubber 32 and the disc spring 34.

As is generally known, the laminated rubber 32 is formed by alternately laminating rubber layers and steel plates. A plurality of laminated rubbers 32 are provided between the intermediate plate 36 and the mounting plate 30 along the circumferential direction of the intermediate plate 36. 4 in this embodiment) are arranged at equal intervals. As shown in FIG. 4, the disc spring 34 is formed in an umbrella shape having an open central portion, and is disposed between the intermediate plate 36 and the anti-vibration table 26. The vertical load acting on the table 26 is supported by the mounting plate 30 via the disc spring 34 and the laminated rubber 32. The laminated rubber 32 absorbs displacement in the horizontal direction due to the shearing deformation thereof, and the disc spring 34 absorbs displacement in the vertical direction accompanied by the bending deformation.

Here, the disc spring 34 has a spring characteristic having a load-displacement curve shown in FIG. 5, and is set so that the disc spring 34 is bent and deformed in a nonlinear spring region R of the spring characteristic. . Here, the non-linear spring region R is a region where the fluctuation of the resilient force of the disc spring 34 is small with respect to the amount of vertical displacement of the anti-vibration table 26, and the disc spring 34 is operated within the non-linear spring region R. By doing so, even when the anti-vibration table 26 vibrates up and down, the anti-vibration equipment 14 can be supported with a substantially constant elasticity.

Each elastic support portion 28 is provided with a displacement converting means 40 for converting a vertical relative displacement between the floor F and the vibration isolator table 26 into a horizontal displacement as shown in FIG. Have been. The displacement converting means 40 includes a pair of leaf springs 40a,
One end of 40b is arranged in the horizontal direction and overlapped, and the other end is bent so as to form a V-shape.
Then, one of the V-shaped tip portions is connected to the anti-vibration table 26 and the other is connected to the intermediate plate 36. Each displacement converting means 40 is a leaf spring 40 between adjacent ones.
The V-shaped portions a and 40b are directed in the same direction, and the respective V-shaped slopes are made equal. The overlapping portions of the leaf springs 40a and 40b are connected to each other via a rigid connecting member 42 so that the horizontal displacements generated by the respective displacement converting means 40 are transmitted to each other. I have.

Therefore, the displacement converting means 40 is connected to the connecting member 42.
, Rocking rotational vibration generated on the vibration isolation table surface plate 26 can be effectively prevented. That is, when there is an input vibration that causes a vertical relative displacement between the anti-vibration table base 26 and the floor F, and different vertical vibration loads occur on both sides of the anti-vibration table base 26, Each of the elastic supporting portions 2
8, the relative displacement in the up-down direction is differently generated, and a rocking rotational vibration is about to occur on the anti-vibration table 26.
However, the vertical vibration loads applied to the displacement conversion means 40 are converted into horizontal vibration loads corresponding to the vertical vibration loads, and the vibration loads are transmitted to each other via the connecting member 42. Locking rotational vibration of the equipment 14 can be prevented.

The intermediate plates 36 of the elastic support portions 28 adjacent to each other, that is, the free end side of the laminated rubber 32 are connected to each other via a rigid beam member 44. In this way, the behavior of the free end of the laminated rubber 32 adjacent via the beam member 44 is regulated, so that each laminated rubber 32
Can be prevented from tilting independently and sinking locally. For this reason, even when an eccentric load is applied to the anti-vibration table base 26, the anti-vibration table base 26 can be prevented from being tilted. Needless to say, even if the vibration isolation table 16 is not provided with the displacement conversion means 40 and the beam member 44, the vibration isolation table 16 is provided with a vibration isolation function of the anti-vibration equipment 14, although its function is reduced.

Here, the lock mechanism 20 provided on each elastic support portion 28 is attached to the lower surface of the anti-vibration table 26 as shown in FIG. A rigid hanging column 46 as a projection penetrating through the center of the plate 36 and a lower end of the hanging column 46 from the mounting plate 30 are provided so as to surround the lower end of the hanging column 46 with a slight gap. An inverted cantilever 48 made of a thin iron plate is provided. An electromagnet 50 is attached to the hanging column 46, and a permanent magnet 52 as a magnetic material is attached to the inverted cantilever 48.

The hanging column 46 is formed in a rectangular cross section as shown in FIG. 3C, while the inverted cantilever 48 is
6, four inverted cantilever beams 48 are formed as a gripping mechanism for gripping the outside of the hanging column 46. The electromagnet 50 is housed in an aluminum case 46 a provided at the lower end of the hanging column 46, and the permanent magnet 52 is located at the same height as the electromagnet 50.

The electromagnet 50 is excited and demagnetized by the ON-OFF signal of the current output from the lock control means 22. When the electromagnet 50 is excited by the ON signal, the permanent magnet 52 is bent while the inverted cantilever 48 is deformed. The permanent magnet 52 is fixed to the side surface of the aluminum case 46a by being attracted by the electromagnet 50. Then, the four inverted cantilever beams 48 are in a state of gripping the hanging columns 46, whereby the relative moving portion 18 is fixed, and the vibration isolation function of the vibration isolation table 16 is lost. On the other hand, when the electromagnet 50 is demagnetized by the OFF signal, the relative moving portion 18 is released from the fixed state and becomes in the operating state, and the vibration isolation table 16 exhibits the original vibration isolation function.

An ON-OFF signal output from the lock control means 22 to the lock mechanism 20 is output based on a travel command signal output from the travel control means 24 to the movable mass 12. The movable mass body 12 travels by an ON signal output from the travel control means 24 and stops by an OFF signal. The travel control signal is introduced to the lock control means 22. That is, when the travel control signal is ON, the lock control means 22 outputs an ON signal to the lock mechanism 20 to fix the vibration isolation table 16, while when the travel control signal is OFF, the lock control means 22 outputs the lock mechanism 20.
Is output to output the vibration isolation table 16 to the operating state.

Therefore, in the vibration isolator of the anti-vibration equipment having the movable mass body of the present embodiment, an OFF signal is continuously output from the lock control means 22 to the electromagnet 50 at the time of normal vibration isolation. The lock mechanism 20 keeps the vibration isolation table 16 in operation. In this state, the anti-vibration equipment 14 includes an elastic support portion 28 including the laminated rubber 32 and the disc spring 34 of the vibration isolation table 16.
Elastically supported by the elastic support portion 2 and vibrates due to an earthquake input from the floor F, and minute vibrations such as traffic vibrations and living vibrations.
By virtue of 8, the vibration can be passively removed, and the vibration of the anti-vibration equipment 14 can be prevented. Accordingly, by using the anti-vibration equipment 14 as a large wafer exposure apparatus as in the present embodiment, a circuit diagram of an IC chip can be printed with high accuracy.

Here, when the movable mass body 12 configured as a stage travels when the anti-vibration equipment 14 is an exposure apparatus, the movable mass body 12 travels and travels according to a travel command signal from the travel control means 24. Although stopped, the running command signal is introduced into the lock control means 22 to output an excitation signal to the electromagnet 50 of the lock mechanism 20. That is, when the traveling command signal is turned ON to cause the movable mass body 12 to travel, when the ON signal, that is, the excitation signal of the electromagnet 50 is output from the lock control unit 22 to the lock mechanism 20, the inverted cantilever 48 is The relative movement portion 18 of the vibration isolation table 16 is fixed by grasping the hanging column 46.

That is, while the movable mass body 12 is running, the vibration isolation table 16 is fixed by the lock mechanism 20, and the vibration isolation function is eliminated, and the anti-vibration equipment 14 can be supported in a rigid state. Therefore, while the movable mass body 12 is traveling, the vibration force generated by the movable mass body 12 does not affect the anti-vibration equipment 12, and the vibration of the anti-vibration equipment 12 can be prevented.

On the other hand, when the traveling command signal is turned off to stop the movable mass body 12, a degaussing signal is output from the lock control means 22 to the electromagnet 50 of the lock mechanism 20,
The permanent magnet 52 is separated from the hanging pillar 46 by its own resilient force of the inverted cantilever 48, and the locking mechanism 20 is
To the operating state. Therefore, the relative movement portion 18 can freely move relative to each other, and the vibration damping table 16 exerts its original vibration damping function to dampen vibration from the floor F, and stabilizes the anti-vibration equipment 12 in a stationary state. Can be changed.

In the present embodiment, the lock mechanism 20 of the vibration isolation table 16 uses the magnetic force generated in the electromagnet 50 to bring the vibration isolation table 16 into the fixed state and the operating state. Responsiveness to the signal until the lock mechanism 20 actually operates can be significantly improved. Therefore, the control performance of the anti-vibration table 16 when the movable mass body 12 travels and stops can be greatly improved, and the reliability of the anti-vibration function of the anti-vibration equipment 12 can be significantly improved.

When the magnetic force of the electromagnet 50 is used for the lock mechanism 20, the electromagnet 50 is connected to the rigid hanging column 46.
On the other hand, a permanent magnet 52 is provided on an inverted cantilever 48 arranged so as to surround the outer surface of the hanging pillar 46,
When the electromagnet 50 is excited, the inverted cantilever beam 48 grips the hanging column 46 and fixes the vibration isolation table 16, so that the fixing force of the relative moving portion 18 can be significantly increased. Therefore, even when a large excitation force is generated in the anti-vibration equipment 14 due to the traveling of the movable mass body 12 having a large mass, the anti-vibration table 16 loses the elastic support function and supports the anti-vibration equipment 14 in a rigid state. Therefore, the vibration of the anti-vibration equipment 14 can be reliably prevented.

By the way, in the present embodiment, by using the permanent magnet 52 as the magnetic material attracted by the excitation of the electromagnet 50, a larger attractive force can be generated between the two, but the present invention is not limited to this permanent magnet 52. A substance that is attracted by being attracted by a magnetic force, for example, an iron piece can also be used as the magnetic substance. In addition, a gripping mechanism is configured by using the flexible inverted cantilever 48, and the inverted cantilever 48 grips the hanging column 46 while bending, but of course, the gripping mechanism is not limited to this. Any configuration can be used as long as the outside of the hanging pillar 46 can be reliably grasped.

FIG. 7 shows an active control mechanism 100 according to another embodiment of the present invention.
00 is provided in the lock mechanism 20 so as to control the behavior of the vibration isolation table 16. The active control mechanism 100 performs feedforward control of the vibration isolation table 16 from a vibration state to a vibration isolation state using a traveling command signal of the movable mass body 12.

That is, the active control mechanism 100 is provided at the lower end of the hanging column 46, and the first, second, and third electromagnets 102, 104, and 106 are provided at predetermined intervals from the lowermost end. Then, a first permanent magnet 108 is provided to face the first electromagnet 102 in the Z direction, and a second permanent magnet 110 is provided to face the second electromagnet 104 in the X direction. Third in the Y direction
A permanent magnet 112 is provided. The first permanent magnet 108 is mounted on the mounting plate 30, and the second and third permanent magnets 110 and 112 are supported via rigid mounting plates 114 and 116 erected from the mounting plate 30. Of course, although not shown, the electromagnets 5, 104, and 106 are provided above the mounting portions of the electromagnets 5, 104, and 106.
It is assumed that a lock mechanism 20 including a zero, a permanent magnet 52, and an inverted cantilever 48 is provided.

First to third electromagnets 102, 104, 106
The excitation and demagnetization signals (ON and OFF currents) are output from the active control circuit 118, and the X,
The behavior in the Y and Z directions is controlled. That is, the first electromagnet 10
The displacement in the up-down direction (Z direction) is controlled between the second electromagnet 104 and the second permanent magnet 11.
The displacement in the left-right direction (X direction) is controlled between 0 and the displacement in the front-rear direction (Y direction) between the third electromagnet 106 and the third permanent magnet 112 is controlled.

In the active control circuit 118, a traveling command signal for the movable mass body 12, that is, in this embodiment, the traveling command signal includes a signal to a drive motor for positioning the movable mass body 12, or a signal for driving the movable mass body 12. A movement support signal in the X and Y planes when the robot is moved at high speed using a linear motor or the like is input.
00 is feed-forward controlled.

Therefore, in this embodiment, when the movable mass body 12 stops and the vibration isolation table 16 is activated,
Even when the exciting force of the movable mass body 12 remains and affects the anti-vibration equipment 14, the active control mechanism 100 is feed-forward controlled by the traveling command signal of the movable mass body 12, so that the vibration isolation table 16 is fixed. The responsiveness when the lock mechanism 20 is shifted to the active control state from the above can be improved. Therefore, active control can be performed in a state where the vibration difference of the anti-vibration equipment 14 between the time when the vibration isolation table 16 is fixed and the time when the vibration isolation table 16 is operated by the lock mechanism 20 is extremely small. By effectively controlling the behavior of the shaking table 16, it is possible to prevent or significantly reduce shaking from remaining in the anti-vibration facility 14 when the vibration isolating table 16 is activated. The active control mechanism 100
In the case where the vibration isolation table 16 is actively controlled using the method, the conventional high-sensitivity vibration sensor can be used because the vibration difference between the fixed state and the operation state is reduced.

In each of the above embodiments, a large wafer exposure apparatus has been described as the anti-vibration equipment 14, and each stage on which a base and a wafer are mounted is assumed as the movable mass body 12. Needless to say, the present invention can be applied to any other precision equipment, such as an anti-vibration apparatus that vibrates anti-vibration equipment having a movable part that becomes a mass body.

[0044]

The anti-vibration apparatus of the anti-vibration equipment provided with the movable mass body of the present invention having the above-described configuration fixes the vibration isolation table in the running state of the movable mass body by the lock mechanism, and stops the movable mass body. By setting the anti-vibration table in the operating state in the state, while the movable mass body travels, the vibration force generated thereby does not affect the anti-vibration equipment, thereby preventing the anti-vibration equipment from shaking. On the other hand, when the movable mass body is stopped, the anti-vibration table exhibits its original anti-vibration function, and the anti-vibration equipment can be stabilized in a stationary state.

Further, by fixing the anti-vibration table by the lock mechanism using the magnetic force generated in the electromagnet, the responsiveness until the lock mechanism actually operates in response to the control signal output from the lock control means is remarkably increased. Can be enhanced.
Therefore, the control performance of the anti-vibration table when the movable mass body travels and stops can be greatly improved, and the reliability of the anti-vibration function of the anti-vibration equipment can be significantly improved.

Further, by fixing the anti-vibration table by the lock mechanism by a gripping mechanism, the fixing force of the anti-vibration table can be significantly increased. Therefore, even when a large exciting force is generated in the anti-vibration equipment due to the traveling of the movable mass body having a large mass, the anti-vibration table can support the anti-vibration equipment in a rigid state without the elastic support function. Shaking of the equipment can be reliably prevented.

Further, the locking mechanism is a projection and a gripping mechanism for gripping the projection, and each of them is provided with an electromagnet and a magnetic body, so that the gripping mechanism of the projection is gripped by the action of electromagnetic force. It can improve both responsiveness and fixing force.

Further, the lock mechanism is provided with an active control mechanism for controlling the behavior of the anti-vibration table, and the active control mechanism is switched from the vibrating state to the anti-vibration state using a traveling command signal of the movable mass body. By performing feedforward control up to this point, responsiveness when shifting from the fixed state of the vibration isolation table to the active control state of the lock mechanism can be significantly improved. Therefore, when the movable mass body is stopped and the vibration isolation table is activated, even if the vibration force of the movable mass body remains and affects the anti-vibration equipment, the vibration isolation table can be operated when the vibration isolation table is fixed. Active control can be performed in a state where the vibration difference of the anti-vibration equipment with time is extremely small. For this reason, even when the exciting force of the movable mass body is large, the behavior control of the vibration isolation table is effectively performed to prevent the vibration from remaining in the anti-vibration equipment when the vibration isolation table is activated. It has an excellent effect that it can be significantly reduced.

[Brief description of the drawings]

FIG. 1 is a front view of an entire vibration isolator according to an embodiment of the present invention.

FIG. 2 is a perspective view of a vibration isolation table used in the vibration isolation device of FIG.

FIG. 3 is a sectional perspective view of an elastic support portion of the vibration isolation table of FIG. 1;

FIG. 4 is a perspective view of a disc spring used in the vibration isolation table of FIG. 1;

FIG. 5 is a graph showing a spring characteristic of a disc spring used in one embodiment of the present invention by load-displacement.

FIG. 6 is an explanatory view showing a lock mechanism used in the vibration damping device of FIG. 1 in a front view of (a), a vertical section of (b), and a cross section of (c).

FIG. 7 is a perspective view showing an active control mechanism used in another embodiment of the present invention.

FIG. 8 is a schematic configuration diagram showing a conventional anti-vibration facility.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Vibration isolation apparatus 12 Movable mass body 14 Anti-vibration equipment 16 Vibration isolation table 18 Relative moving part 20 Lock mechanism 22 Lock control means 24 Travel control means 46 Hanging column (shaft) 48 Inverted cantilever (grip mechanism) 50 Electromagnet 52 Permanent magnet (magnetic material) 100 Active control mechanism

Claims (5)

[Claims] An anti-vibration device having a movable mass body is elastically supported by a base via an anti-vibration table. In a vibration isolator, a lock mechanism for setting the anti-vibration table to an operating state and a fixed state. While the vibration isolating table is fixed by the lock mechanism in the traveling state of the movable mass body,
An anti-vibration apparatus for a vibration-damping facility including a movable mass body, comprising: a lock control unit that activates the movable mass body when the movable mass body is stopped. 2. The lock mechanism includes an electromagnet provided on one of the vibration isolation table and the base, and a magnetic body provided on one of the other and attracted by a magnetic force generated by the electromagnet. 2. The vibration isolation table is fixed by an attractive force between the electromagnet and the magnetic body.
A vibration damping device for a vibration control facility comprising the movable mass body according to Claim 1. 3. The lock mechanism includes a projection provided on one of the vibration isolation table and the base, and a gripping mechanism provided on one of the other and capable of gripping the projection. The anti-vibration apparatus of a vibration-proofing apparatus provided with a movable mass body according to claim 1, wherein the anti-vibration table is fixed by gripping the protrusion by a gripping mechanism. 4. The lock mechanism includes a projection provided on one of the vibration isolation table and the base, and a gripping mechanism provided on one of the other and capable of gripping the projection. 2. An anti-vibration apparatus for a vibration-proof equipment having a movable mass body according to claim 1, wherein said projections and a gripping mechanism for gripping said projections are an electromagnet and a magnetic body, respectively. . 5. The lock mechanism is provided with an active control mechanism for controlling the behavior of the vibration isolation table, and the active control mechanism switches from the vibration state to the vibration isolation state using a traveling command signal of the movable mass body. The anti-vibration apparatus of the anti-vibration equipment comprising the movable mass body according to claim 1, wherein the anti-vibration apparatus is configured to perform feedforward control up to the feed-forward control.