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JP1731670S - - Google Patents

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Publication number
JP1731670S
JP1731670S JP2022004465F JP2022004465F JP1731670S JP 1731670 S JP1731670 S JP 1731670S JP 2022004465 F JP2022004465 F JP 2022004465F JP 2022004465 F JP2022004465 F JP 2022004465F JP 1731670 S JP1731670 S JP 1731670S
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022004465F
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2022004465F priority Critical patent/JP1731670S/ja
Priority to TW111303487F priority patent/TWD228269S/zh
Priority to US29/848,819 priority patent/USD1053830S1/en
Application granted granted Critical
Publication of JP1731670S publication Critical patent/JP1731670S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2022004465F 2022-03-04 2022-03-04 Active JP1731670S (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022004465F JP1731670S (ja) 2022-03-04 2022-03-04
TW111303487F TWD228269S (zh) 2022-03-04 2022-07-14 基板處理裝置用基板保持具
US29/848,819 USD1053830S1 (en) 2022-03-04 2022-08-05 Wafer support of semiconductor manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022004465F JP1731670S (ja) 2022-03-04 2022-03-04

Publications (1)

Publication Number Publication Date
JP1731670S true JP1731670S (ja) 2022-12-08

Family

ID=84322250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022004465F Active JP1731670S (ja) 2022-03-04 2022-03-04

Country Status (3)

Country Link
US (1) USD1053830S1 (ja)
JP (1) JP1731670S (ja)
TW (1) TWD228269S (ja)

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
KR20000002833A (ko) * 1998-06-23 2000-01-15 윤종용 반도체 웨이퍼 보트
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
TWD119910S1 (zh) * 2006-05-01 2007-11-11 東京威力科創股份有限公司 晶舟
TWD119911S1 (zh) * 2006-05-01 2007-11-11 東京威力科創股份有限公司 晶舟
TWD130137S1 (zh) * 2006-10-25 2009-08-01 東京威力科創股份有限公司 晶舟
US9153466B2 (en) 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
TWD166332S (zh) * 2013-03-22 2015-03-01 日立國際電氣股份有限公司 基板處理裝置用晶舟之部分
TWD163542S (zh) * 2013-03-22 2014-10-11 日立國際電氣股份有限公司 基板處理裝置用晶舟
TWD165429S (zh) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD168827S (zh) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD167988S (zh) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 半導體製造裝置用晶舟
JP1537629S (ja) * 2014-11-20 2015-11-09
JP1563649S (ja) * 2016-02-12 2016-11-21
JP1597807S (ja) * 2017-08-21 2018-02-19
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
JP1638282S (ja) * 2018-09-20 2019-08-05
JP1640260S (ja) * 2018-11-19 2019-09-02
JP1678278S (ja) * 2020-03-19 2021-02-01 基板処理装置用ボート
JP1682719S (ja) 2020-06-15 2021-04-05
JP1700777S (ja) * 2021-03-15 2021-11-29 基板処理装置用ボート

Also Published As

Publication number Publication date
TWD228269S (zh) 2023-11-01
USD1053830S1 (en) 2024-12-10

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