JP1700782S - Boat for substrate processing equipment - Google Patents
Boat for substrate processing equipmentInfo
- Publication number
- JP1700782S JP1700782S JP2021007894F JP2021007894F JP1700782S JP 1700782 S JP1700782 S JP 1700782S JP 2021007894 F JP2021007894 F JP 2021007894F JP 2021007894 F JP2021007894 F JP 2021007894F JP 1700782 S JP1700782 S JP 1700782S
- Authority
- JP
- Japan
- Prior art keywords
- boat
- substrate processing
- processing equipment
- screws
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
本願物品は、基板処理装置の縦型反応室内に複数の基板を水平に保持するためのボートで、上端のリングは複数の支柱とネジにより固定されている。The subject article is a boat for holding multiple substrates horizontally in a vertical reaction chamber of a substrate processing apparatus, and the ring at the upper end is fixed by multiple supports and screws.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021007894F JP1700782S (en) | 2021-04-14 | 2021-04-14 | Boat for substrate processing equipment |
| TW110305463F TWD225037S (en) | 2021-04-14 | 2021-10-08 | Part of wafer boat for substrate processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021007894F JP1700782S (en) | 2021-04-14 | 2021-04-14 | Boat for substrate processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1700782S true JP1700782S (en) | 2021-11-29 |
Family
ID=78766350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021007894F Active JP1700782S (en) | 2021-04-14 | 2021-04-14 | Boat for substrate processing equipment |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP1700782S (en) |
| TW (1) | TWD225037S (en) |
-
2021
- 2021-04-14 JP JP2021007894F patent/JP1700782S/en active Active
- 2021-10-08 TW TW110305463F patent/TWD225037S/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TWD225037S (en) | 2023-05-01 |
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