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IT8321446A0 - Attrezzatura per il rivestimento e taglio a filo di una pellicola plastica protettica delle fette di silicio per la lappatura finale. - Google Patents

Attrezzatura per il rivestimento e taglio a filo di una pellicola plastica protettica delle fette di silicio per la lappatura finale.

Info

Publication number
IT8321446A0
IT8321446A0 IT8321446A IT2144683A IT8321446A0 IT 8321446 A0 IT8321446 A0 IT 8321446A0 IT 8321446 A IT8321446 A IT 8321446A IT 2144683 A IT2144683 A IT 2144683A IT 8321446 A0 IT8321446 A0 IT 8321446A0
Authority
IT
Italy
Prior art keywords
coating
equipment
plastic film
silicon wafers
wire cutting
Prior art date
Application number
IT8321446A
Other languages
English (en)
Other versions
IT1212747B (it
Inventor
Giuseppe Barbieri
Gianni Cesare Caprotti
Original Assignee
Ates Componenti Elettron
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ates Componenti Elettron filed Critical Ates Componenti Elettron
Priority to IT8321446A priority Critical patent/IT1212747B/it
Publication of IT8321446A0 publication Critical patent/IT8321446A0/it
Priority to US06/616,111 priority patent/US4568407A/en
Priority to GB08413825A priority patent/GB2140770B/en
Priority to FR8408891A priority patent/FR2547764B1/fr
Application granted granted Critical
Publication of IT1212747B publication Critical patent/IT1212747B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F1/00—Perforating; Punching; Cutting-out; Stamping-out; Apparatus therefor
    • B26F1/38—Cutting-out; Stamping-out
    • B26F1/3846—Cutting-out; Stamping-out cutting out discs or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/02—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor using sheet or web-like material
    • B29C63/024—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor using sheet or web-like material the sheet or web-like material being supported by a moving carriage
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C2793/00—Shaping techniques involving a cutting or machining operation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/12—Surface bonding means and/or assembly means with cutting, punching, piercing, severing or tearing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/12—Surface bonding means and/or assembly means with cutting, punching, piercing, severing or tearing
    • Y10T156/1317—Means feeding plural workpieces to be joined
    • Y10T156/1343—Cutting indefinite length web after assembly with discrete article
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/12—Surface bonding means and/or assembly means with cutting, punching, piercing, severing or tearing
    • Y10T156/1348—Work traversing type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means
    • Y10T156/1788—Work traversing type and/or means applying work to wall or static structure
    • Y10T156/1795—Implement carried web supply
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/18—Surface bonding means and/or assembly means with handle or handgrip

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Mechanical Engineering (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Details Of Cutting Devices (AREA)
IT8321446A 1983-06-03 1983-06-03 Attrezzatura per il rivestimento e taglio a filo di una pellicola plastica protettica delle fette di silicio per la lappatura finale. IT1212747B (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IT8321446A IT1212747B (it) 1983-06-03 1983-06-03 Attrezzatura per il rivestimento e taglio a filo di una pellicola plastica protettica delle fette di silicio per la lappatura finale.
US06/616,111 US4568407A (en) 1983-06-03 1984-05-30 Equipment for coating and flush cutting of a protective plastics film of silicon slices for final lapping
GB08413825A GB2140770B (en) 1983-06-03 1984-05-31 Applying a protective film to silicon slices
FR8408891A FR2547764B1 (fr) 1983-06-03 1984-06-01 Appareil pour recouvrir d'une pellicule plastique de protection des rondelles de silicium en vue de leur rodage final et pour couper ladite pellicule a ras bord de celles-ci

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT8321446A IT1212747B (it) 1983-06-03 1983-06-03 Attrezzatura per il rivestimento e taglio a filo di una pellicola plastica protettica delle fette di silicio per la lappatura finale.

Publications (2)

Publication Number Publication Date
IT8321446A0 true IT8321446A0 (it) 1983-06-03
IT1212747B IT1212747B (it) 1989-11-30

Family

ID=11181898

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8321446A IT1212747B (it) 1983-06-03 1983-06-03 Attrezzatura per il rivestimento e taglio a filo di una pellicola plastica protettica delle fette di silicio per la lappatura finale.

Country Status (4)

Country Link
US (1) US4568407A (it)
FR (1) FR2547764B1 (it)
GB (1) GB2140770B (it)
IT (1) IT1212747B (it)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4978414A (en) * 1985-01-18 1990-12-18 Nippon Cmk Corp. Apparatus for stretching silk including means to move cramp members independently of each other
FR2613275B1 (fr) * 1987-03-30 1989-06-09 Essilor Int Procede et appareil pour coller un film protecteur sur une face d'une serie de lentilles ophtalmiques
JPH01143211A (ja) * 1987-11-27 1989-06-05 Takatori Haitetsuku:Kk ウエハーに対する保護テープの貼付け切り抜き方法および装置
US5182896A (en) * 1991-09-09 1993-02-02 Sweetheart Cup Company Inc. Apparatus and method for heat-sealing a film cover to open ended containers
JPH1032179A (ja) * 1996-07-15 1998-02-03 Teikoku T-Pingu Syst Kk シリコンウエハー加工用マスキングシートの切断方法
JP3303294B2 (ja) * 1999-06-11 2002-07-15 株式会社東京精密 半導体保護テープの切断方法
US9499921B2 (en) 2012-07-30 2016-11-22 Rayton Solar Inc. Float zone silicon wafer manufacturing system and related process
US9404198B2 (en) * 2012-07-30 2016-08-02 Rayton Solar Inc. Processes and apparatuses for manufacturing wafers
ITMI20132004A1 (it) * 2013-11-29 2015-05-30 Saipem Spa Apparecchiatura, stazione di lavoro e metodo per applicare un foglio protettivo di materiale polimerico a una tubazione e programma per elaboratore per attuare il metodo

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3971691A (en) * 1975-03-27 1976-07-27 Hercules Incorporated Apparatus for film application
JPS5737836A (en) * 1980-08-20 1982-03-02 Nec Corp Manufacture of semiconductor device
JPS5745929A (en) * 1980-09-02 1982-03-16 Nec Corp Grinding method for semiconductor wafer
US4385956A (en) * 1981-03-19 1983-05-31 Gerber Garment Technology, Inc. Apparatus and methods for spreading sheet material

Also Published As

Publication number Publication date
GB2140770B (en) 1986-01-22
GB2140770A (en) 1984-12-05
FR2547764A1 (fr) 1984-12-28
US4568407A (en) 1986-02-04
IT1212747B (it) 1989-11-30
GB8413825D0 (en) 1984-07-04
FR2547764B1 (fr) 1989-01-13

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Legal Events

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TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970628