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IT7822795A0 - Apparecchiatura perfezionata perl'impiantamento di ioni. - Google Patents

Apparecchiatura perfezionata perl'impiantamento di ioni.

Info

Publication number
IT7822795A0
IT7822795A0 IT7822795A IT2279578A IT7822795A0 IT 7822795 A0 IT7822795 A0 IT 7822795A0 IT 7822795 A IT7822795 A IT 7822795A IT 2279578 A IT2279578 A IT 2279578A IT 7822795 A0 IT7822795 A0 IT 7822795A0
Authority
IT
Italy
Prior art keywords
ion implantation
improved equipment
equipment
improved
implantation
Prior art date
Application number
IT7822795A
Other languages
English (en)
Other versions
IT1112625B (it
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/794,276 external-priority patent/US4135097A/en
Priority claimed from US05/794,275 external-priority patent/US4118630A/en
Application filed by Ibm filed Critical Ibm
Publication of IT7822795A0 publication Critical patent/IT7822795A0/it
Application granted granted Critical
Publication of IT1112625B publication Critical patent/IT1112625B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24405—Faraday cages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
IT22795/78A 1977-05-05 1978-04-28 Apparecchiatura perfezionata per l'impiantamento di ioni IT1112625B (it)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US05/794,276 US4135097A (en) 1977-05-05 1977-05-05 Ion implantation apparatus for controlling the surface potential of a target surface
US05/794,275 US4118630A (en) 1977-05-05 1977-05-05 Ion implantation apparatus with a cooled structure controlling the surface potential of a target surface

Publications (2)

Publication Number Publication Date
IT7822795A0 true IT7822795A0 (it) 1978-04-28
IT1112625B IT1112625B (it) 1986-01-20

Family

ID=27121491

Family Applications (1)

Application Number Title Priority Date Filing Date
IT22795/78A IT1112625B (it) 1977-05-05 1978-04-28 Apparecchiatura perfezionata per l'impiantamento di ioni

Country Status (5)

Country Link
DE (1) DE2819114C3 (it)
FR (1) FR2389998B1 (it)
GB (1) GB1584224A (it)
IT (1) IT1112625B (it)
NL (1) NL7804691A (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2490873A1 (fr) * 1980-09-24 1982-03-26 Varian Associates Procede et dispositif destines a produire une neutralisation amelioree d'un faisceau d'ions positifs
FR2793951B1 (fr) * 1999-05-21 2001-08-17 Centre Nat Etd Spatiales Procede et installation de traitement d'un substrat tel qu'un circuit integre par un faisceau focalise de particules electriquement neutres

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2890342A (en) * 1954-09-29 1959-06-09 Gen Electric System for charge neutralization
US3313969A (en) * 1966-03-25 1967-04-11 Boeing Co Charged particle deflecting apparatus having hemispherical electrodes
US3507709A (en) * 1967-09-15 1970-04-21 Hughes Aircraft Co Method of irradiating dielectriccoated semiconductor bodies with low energy electrons
US3997846A (en) * 1975-06-30 1976-12-14 International Business Machines Corporation Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus
US4011449A (en) * 1975-11-05 1977-03-08 Ibm Corporation Apparatus for measuring the beam current of charged particle beam
US4013891A (en) * 1975-12-15 1977-03-22 Ibm Corporation Method for varying the diameter of a beam of charged particles

Also Published As

Publication number Publication date
DE2819114B2 (de) 1981-07-16
DE2819114C3 (de) 1982-03-04
FR2389998B1 (it) 1981-11-20
NL7804691A (nl) 1978-11-07
IT1112625B (it) 1986-01-20
GB1584224A (en) 1981-02-11
DE2819114A1 (de) 1978-11-16
FR2389998A1 (it) 1978-12-01

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