HK1028439A1 - Microactuator - Google Patents

Microactuator

Info

Publication number: HK1028439A1
Authority: HK; Hong Kong
Prior art keywords: area; thermal insulation; thin portion; semiconductor substrate; flexible area
Prior art date: 1999-02-23

Application number

HK00107817A

Other languages

English (en)

Inventor

Shigeaki Tomonari

Hitoshi Yoshida

Masanao Kamakura

Hiroshi Kawada

Masaaki Saito

Kazuhiro Nobutoki

Ogiharajun

Shuichi Nagao

Original Assignee

Matsushita Electric Works Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1999-02-23

Filing date

2000-12-06

Publication date

2001-04-12

1999-02-23 Priority claimed from JP04559299A external-priority patent/JP4042244B2/ja

2000-12-06 Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd

2001-04-12 Publication of HK1028439A1 publication Critical patent/HK1028439A1/xx

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
- F16K99/0009—Lift valves the valve element held by multiple arms
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0044—Electric operating means therefor using thermo-electric means
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/008—Multi-layer fabrications
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay

Landscapes

Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Chemical & Material Sciences (AREA)
Dispersion Chemistry (AREA)
Physics & Mathematics (AREA)
Microelectronics & Electronic Packaging (AREA)
Computer Hardware Design (AREA)
Theoretical Computer Science (AREA)
Fluid Mechanics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
General Physics & Mathematics (AREA)
Manufacturing & Machinery (AREA)
Power Engineering (AREA)
Micromachines (AREA)
Saccharide Compounds (AREA)
Details Of Resistors (AREA)
Die Bonding (AREA)

HK00107817A 1999-02-23 2000-12-06 Microactuator HK1028439A1 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP04559299A JP4042244B2 (ja)	1999-02-23	1999-02-23	半導体マイクロアクチュエータ及び半導体マイクロバルブ及び半導体マイクロリレー
JP4561599		1999-02-23

Publications (1)

Publication Number	Publication Date
HK1028439A1 true HK1028439A1 (en)	2001-04-12

Family

ID=26385605

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
HK00107817A HK1028439A1 (en)	1999-02-23	2000-12-06	Microactuator

Country Status (7)

Country	Link
US (1)	US6791233B2 (xx)
KR (1)	KR100414513B1 (xx)
CN (1)	CN1178272C (xx)
AT (1)	ATE363030T1 (xx)
CA (1)	CA2299131C (xx)
DE (1)	DE60034899T2 (xx)
HK (1)	HK1028439A1 (xx)

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KR100477448B1 (ko) *	2002-08-30	2005-03-22	재단법인 포항산업과학연구원	형상기억합금 박막을 이용한 나노 유량 제어용 마이크로밸브 및 이를 이용한 페하 센서 기준전극
KR101348553B1 (ko) *	2004-07-13	2014-01-07	더 차레스 스타크 드레이퍼 래보레이토리, 인코포레이티드	칩 스케일 기기를 현수하기 위한 장치, 시스템 및 이에관련된 방법
WO2006025456A1 (ja) *	2004-09-01	2006-03-09	Advantest Corporation	バイモルフ素子、バイモルフスイッチ、ミラー素子及びこれらの製造方法
DE102005035058B4 (de) *	2005-07-27	2016-01-21	Robert Bosch Gmbh	Mikromechanische Vorrichtung, mikromechanischer Sensor und Verfahren
WO2007107901A2 (en) *	2006-03-20	2007-09-27	Koninklijke Philips Electronics N.V.	A system-in-package platform for electronic-microfluidic devices
DE102006029831A1 (de) *	2006-06-27	2008-01-03	Acandis Gmbh & Co. Kg	Verfahren zur Herstellung strukturierter Schichten aus Titan und Nickel
JP4933192B2 (ja) *	2006-08-09	2012-05-16	キヤノン株式会社	可燃性ガス検出器、及び可燃性ガス検出器を搭載した燃料電池システム
JP5549532B2 (ja) *	2010-10-21	2014-07-16	富士電機株式会社	半導体装置の製造方法
NL2014801B1 (en) *	2015-05-13	2017-01-27	Berkin Bv	Fluid flow device, comprising a valve unit, as well as method of manufacturing the same.
US10190702B2 (en) *	2016-03-15	2019-01-29	Dunan Microstaq, Inc.	MEMS based solenoid valve
NL2017227B1 (en) *	2016-07-25	2018-01-31	Univ Delft Tech	Versatile 3D Stretchable Micro-Environment for Organ-on-Chip Devices Fabricated with Standard Silicon Technology
CN108305892B (zh) *	2018-04-03	2024-05-24	京东方科技集团股份有限公司	一种柔性衬底基板及其制备方法、显示装置
JP2020160499A (ja) *	2019-03-25	2020-10-01	アズビル株式会社	制御装置
CN113251207B (zh) *	2021-05-13	2022-09-23	哈尔滨工业大学	一种基于pdms材料的气动梭阀及控制方法
CN117537159A (zh) *	2023-09-13	2024-02-09	箭牌家居集团股份有限公司	预排冷水阀门以及出水装置

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US4115750A (en) *	1973-10-10	1978-09-19	Amp Incorporated	Bimetal actuator
DE3750064T2 (de) *	1986-09-10	1994-09-22	Furukawa Electric Co Ltd	Ein elektronischer Verbinder.
US5069419A (en) *	1989-06-23	1991-12-03	Ic Sensors Inc.	Semiconductor microactuator
US5058856A (en) *	1991-05-08	1991-10-22	Hewlett-Packard Company	Thermally-actuated microminiature valve
US5271597A (en) *	1992-05-29	1993-12-21	Ic Sensors, Inc.	Bimetallic diaphragm with split hinge for microactuator
US5441597A (en) *	1992-12-01	1995-08-15	Honeywell Inc.	Microstructure gas valve control forming method
ATE156895T1 (de) *	1993-05-27	1997-08-15	Fraunhofer Ges Forschung	Mikroventil
US5673139A (en) *	1993-07-19	1997-09-30	Medcom, Inc.	Microelectromechanical television scanning device and method for making the same
JP2628019B2 (ja)	1994-04-19	1997-07-09	株式会社日立製作所	静電駆動型マイクロアクチュエータとバルブの製作方法、及び静電駆動型ポンプ
US5529279A (en) *	1994-08-24	1996-06-25	Hewlett-Packard Company	Thermal isolation structures for microactuators
JPH0988805A (ja)	1995-09-26	1997-03-31	Olympus Optical Co Ltd	形状記憶合金薄膜アクチュエータ及びその製造方法、並びに光偏向器
EP0880817B1 (en) *	1996-02-10	2005-04-27	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Bistable microactuator with coupled membranes
JP3368741B2 (ja) *	1996-02-28	2003-01-20	横河電機株式会社	マイクロバルブ及びその製造方法
JPH10173306A (ja)	1996-12-06	1998-06-26	Olympus Optical Co Ltd	形状記憶合金薄膜アクチュエータの製造方法
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US5870007A (en) *	1997-06-16	1999-02-09	Roxburgh Ltd.	Multi-dimensional physical actuation of microstructures
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AUPO794697A0 (en) *	1997-07-15	1997-08-07	Silverbrook Research Pty Ltd	A device (MEMS10)
DE59900839D1 (de) *	1998-05-08	2002-03-21	Infineon Technologies Ag	Mikroventil
US6384509B1 (en) *	1999-02-23	2002-05-07	Matsushita Electric Works, Ltd.	Semiconductor device
JP3705068B2 (ja) *	1999-02-23	2005-10-12	松下電工株式会社	半導体装置及びこれを用いた半導体マイクロアクチュエータ及び半導体マイクロバルブ及び半導体マイクロリレー
JP2000317897A (ja) *	1999-02-23	2000-11-21	Matsushita Electric Works Ltd	熱絶縁構造体及びこれを用いた半導体マイクロアクチュエータ及び半導体マイクロバルブ及び半導体マイクロリレー
JP2001153252A (ja) *	1999-11-25	2001-06-08	Matsushita Electric Works Ltd	半導体マイクロバルブ
US6626417B2 (en) *	2001-02-23	2003-09-30	Becton, Dickinson And Company	Microfluidic valve and microactuator for a microvalve
US6557820B2 (en) *	2001-05-22	2003-05-06	Lockheed Martin Corporation	Two-stage valve suitable as high-flow high-pressure microvalve
US6644786B1 (en) *	2002-07-08	2003-11-11	Eastman Kodak Company	Method of manufacturing a thermally actuated liquid control device

2000
- 2000-02-23 AT AT00103808T patent/ATE363030T1/de not_active IP Right Cessation
- 2000-02-23 DE DE60034899T patent/DE60034899T2/de not_active Expired - Lifetime
- 2000-02-23 CN CNB001027379A patent/CN1178272C/zh not_active Expired - Fee Related
- 2000-02-23 KR KR10-2000-0008772A patent/KR100414513B1/ko not_active IP Right Cessation
- 2000-02-23 CA CA002299131A patent/CA2299131C/en not_active Expired - Fee Related
- 2000-12-06 HK HK00107817A patent/HK1028439A1/xx not_active IP Right Cessation
2002
- 2002-01-24 US US10/053,576 patent/US6791233B2/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
US6791233B2 (en)	2004-09-14
DE60034899D1 (de)	2007-07-05
KR100414513B1 (ko)	2004-01-13
US20030160538A1 (en)	2003-08-28
KR20000062607A (ko)	2000-10-25
CN1178272C (zh)	2004-12-01
DE60034899T2 (de)	2008-01-24
CN1265451A (zh)	2000-09-06
CA2299131C (en)	2003-11-11
CA2299131A1 (en)	2000-08-23
ATE363030T1 (de)	2007-06-15

Publication	Publication Date	Title
HK1028439A1 (en)	2001-04-12	Microactuator
SG47438A1 (en)	1998-04-17	Insulating adhesive tape and lead frame and semi-conductor device employing the tape
DE69815142D1 (de)	2003-07-03	Quartzsubtrat heizelement
ES2143667T3 (es)	2000-05-16	Revestimiento de espuma reflectante.
EP0570224A3 (en)	1998-03-11	Semiconductor device
CA2419437A1 (en)	2003-02-12	Thermally insulated container
CA2232425A1 (en)	1998-09-21	Functionally gradient material and its use in a semiconductor circuit substrate
ATE329476T1 (de)	2006-06-15	Heizelement
DE60022694D1 (de)	2005-10-27	Elektrische heizende/wärmende Stoffgegenstände
DE3376760D1 (en)	1988-06-30	Transducer element, method for its manufacture and its use in a pressure pick-up device
ATE200840T1 (de)	2001-05-15	Widerstands-heizvorrichtung für flächige objekte, insbesondere für spiegel
FI880861A (fi)	1988-08-26	Elresistansbana.
DE50101290D1 (de)	2004-02-12	Sensoranordnung
ES2129064T3 (es)	1999-06-01	Dispositivo calefactado de fijacion y aparato de fijacion con elemento de resistencia calibrado.
WO2003028996A1 (fr)	2003-04-10	Article forme a partir d'un film resistant a la salissure
EP1031735A3 (en)	2004-04-07	Microactuator
MY111779A (en)	2000-12-30	Semiconductor device
DE69618448D1 (de)	2002-02-14	Beheizte klinge
ATE215732T1 (de)	2002-04-15	Temperaturwächter mit einem bei übertemperatur schaltenden bimetall-schaltwerk
TW200606015A (en)	2006-02-16	Adhesive film and production method therefor and flexible metal-clad laminate and production method therefor
EP0942243A3 (en)	2001-04-04	Peltier effect heat pump
ATE277384T1 (de)	2004-10-15	Magnetstreifen mit einer klebeschicht
KR970702536A (ko)	1997-05-13	칩 카드(chip card)
JPS6441192A (en)	1989-02-13	Thin film electroluminescent display element
EP1310365A3 (en)	2004-01-07	Temperature measurement device

Legal Events

Date	Code	Title	Description
2007-09-21	CHRG	Changes in the register	Free format text: DELETION OF PRIORITY CLAIM: 10.02.2000 JP 2000034077
2013-09-19	PC	Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)	Effective date: 20130223