[go: up one dir, main page]

GB977185A - High vacuum pumping method and apparatus - Google Patents

High vacuum pumping method and apparatus

Info

Publication number
GB977185A
GB977185A GB10850/63A GB1085063A GB977185A GB 977185 A GB977185 A GB 977185A GB 10850/63 A GB10850/63 A GB 10850/63A GB 1085063 A GB1085063 A GB 1085063A GB 977185 A GB977185 A GB 977185A
Authority
GB
United Kingdom
Prior art keywords
manifold
doughnut
vacuum
valve
bellows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB10850/63A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB977185A publication Critical patent/GB977185A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
GB10850/63A 1962-03-26 1963-03-19 High vacuum pumping method and apparatus Expired GB977185A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US182528A US3156406A (en) 1962-03-26 1962-03-26 High vacuum pumping method and apparatus

Publications (1)

Publication Number Publication Date
GB977185A true GB977185A (en) 1964-12-02

Family

ID=22668854

Family Applications (1)

Application Number Title Priority Date Filing Date
GB10850/63A Expired GB977185A (en) 1962-03-26 1963-03-19 High vacuum pumping method and apparatus

Country Status (3)

Country Link
US (1) US3156406A (de)
CH (1) CH421370A (de)
GB (1) GB977185A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3811794A (en) * 1972-11-22 1974-05-21 Bell Telephone Labor Inc Ultrahigh vacuum sublimation pump
US6347925B1 (en) * 2000-06-29 2002-02-19 Beacon Power Corporation Flywheel system with parallel pumping arrangement
US9960025B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Cold-matter system having ion pump integrated with channel cell

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR376565A (fr) * 1906-06-16 1907-08-13 Ion Des Procedes Georges Claude) Perfectionnements dans les appareils à vide par les basses températures
NL49158C (de) * 1936-05-29
GB879256A (en) * 1956-10-12 1961-10-11 Edwards High Vacuum Ltd Improvements in or relating to vaporisation of metals
US2897036A (en) * 1957-04-18 1959-07-28 High Voltage Engineering Corp Method of evacuation
LU36210A1 (de) * 1957-07-05
US3027651A (en) * 1958-07-23 1962-04-03 Leybold Hochvakuum Anlagen Process and system for removing condensable vapors
US2985356A (en) * 1958-12-04 1961-05-23 Nat Res Corp Pumping device

Also Published As

Publication number Publication date
US3156406A (en) 1964-11-10
CH421370A (de) 1966-09-30

Similar Documents

Publication Publication Date Title
US3137551A (en) Ultra high vacuum device
GB977185A (en) High vacuum pumping method and apparatus
US3116764A (en) High vacuum method and apparatus
US3525229A (en) On-off thermal switch for a cryopump
US3288354A (en) Vapor diffusion pumps
JPS57134559A (en) Physical vapor deposition device
US3050622A (en) Method and apparatus for connecting a getter-ion pump to an analytical mass spectrometer
US3306058A (en) Cryostat
US6263679B1 (en) Particulate dam for cryopump flange
US2397207A (en) Lens coating apparatus
US3811794A (en) Ultrahigh vacuum sublimation pump
US5356270A (en) Ultra high vacuum cryopump relief valve assembly
EP0214277B1 (de) Verfahren und vorrichtung zum regenerieren einer kryopumpe
US3283479A (en) Combination trap pump
JPH0765197B2 (ja) 真空処理装置
US2678761A (en) Exhaust head assembly
US2737779A (en) Condensable vapor extraction apparatus
US2887618A (en) Vacuum arrangement
US3258193A (en) Vacuum method
US2456968A (en) Process for outgassing photocells containing antimony
US3154138A (en) Vacuum vessel
GB1181750A (en) An Ultrahigh-Vacuum Enclosure
US3181776A (en) Split body diffusion pump
US2682451A (en) Still
SU1160793A1 (ru) Устройство для конденсации газов или паров