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CH421370A - Hochvakuum-Pumpvorrichtung - Google Patents

Hochvakuum-Pumpvorrichtung

Info

Publication number
CH421370A
CH421370A CH382563A CH382563A CH421370A CH 421370 A CH421370 A CH 421370A CH 382563 A CH382563 A CH 382563A CH 382563 A CH382563 A CH 382563A CH 421370 A CH421370 A CH 421370A
Authority
CH
Switzerland
Prior art keywords
high vacuum
pumping device
vacuum pumping
vacuum
pumping
Prior art date
Application number
CH382563A
Other languages
English (en)
Inventor
Arthur Lloyd William
Zaphiropoulos Renn
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates filed Critical Varian Associates
Publication of CH421370A publication Critical patent/CH421370A/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CH382563A 1962-03-26 1963-03-26 Hochvakuum-Pumpvorrichtung CH421370A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US182528A US3156406A (en) 1962-03-26 1962-03-26 High vacuum pumping method and apparatus

Publications (1)

Publication Number Publication Date
CH421370A true CH421370A (de) 1966-09-30

Family

ID=22668854

Family Applications (1)

Application Number Title Priority Date Filing Date
CH382563A CH421370A (de) 1962-03-26 1963-03-26 Hochvakuum-Pumpvorrichtung

Country Status (3)

Country Link
US (1) US3156406A (de)
CH (1) CH421370A (de)
GB (1) GB977185A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3811794A (en) * 1972-11-22 1974-05-21 Bell Telephone Labor Inc Ultrahigh vacuum sublimation pump
US6347925B1 (en) * 2000-06-29 2002-02-19 Beacon Power Corporation Flywheel system with parallel pumping arrangement
US9960025B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Cold-matter system having ion pump integrated with channel cell

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR376565A (fr) * 1906-06-16 1907-08-13 Ion Des Procedes Georges Claude) Perfectionnements dans les appareils à vide par les basses températures
NL49158C (de) * 1936-05-29
GB879256A (en) * 1956-10-12 1961-10-11 Edwards High Vacuum Ltd Improvements in or relating to vaporisation of metals
US2897036A (en) * 1957-04-18 1959-07-28 High Voltage Engineering Corp Method of evacuation
LU36210A1 (de) * 1957-07-05
US3027651A (en) * 1958-07-23 1962-04-03 Leybold Hochvakuum Anlagen Process and system for removing condensable vapors
US2985356A (en) * 1958-12-04 1961-05-23 Nat Res Corp Pumping device

Also Published As

Publication number Publication date
US3156406A (en) 1964-11-10
GB977185A (en) 1964-12-02

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