GB1181750A - An Ultrahigh-Vacuum Enclosure - Google Patents
An Ultrahigh-Vacuum EnclosureInfo
- Publication number
- GB1181750A GB1181750A GB59444/68A GB5944468A GB1181750A GB 1181750 A GB1181750 A GB 1181750A GB 59444/68 A GB59444/68 A GB 59444/68A GB 5944468 A GB5944468 A GB 5944468A GB 1181750 A GB1181750 A GB 1181750A
- Authority
- GB
- United Kingdom
- Prior art keywords
- chamber
- enclosure
- skirt
- vacuum
- acting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Abstract
1,181,750. Vacuum chambers; producing vacuum. COMMISSARIAT A L'ENERGIE ATOMIQUE. Dec. 13, 1968 [Jan.5, 1968], No.59444/68. Headings FIN and FIX. An ultrahigh-vacuum enclosure, e.g. for deposition of metals by evaporation, comprises a casing 1 supporting a removable bell housing 26 and incorporating a cryogenic vacuum pump, which can be isolated from the rest of the enclosure by a skirt 7 when the enclosure is opened by removing housing 26. Skirt 7 is moved downwardly to its closed position, from its open position shown, by pneumatic jacks 43, 44, acting through a rod 33 carrying sealing pistons 37, 50. Guide wheels 47 on skirt 7 run on rods 45. The cryogenic pump comprises an outer annular chamber 17, 18, 19 containing liquid nitrogen, surrounding an annular chamber 20 containing liquid helium, annular plates 22 extending from chamber 20 acting as condensation trays. A radiation shield 21 of thin metal surrounds chamber 17, 18 and 19, and a radiation shield 49 of flat or herringbone fins, Figs.2 and 3 (not shown), thermally insulates chamber 20 from the casing interior.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR135093 | 1968-01-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1181750A true GB1181750A (en) | 1970-02-18 |
Family
ID=8644212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB59444/68A Expired GB1181750A (en) | 1968-01-05 | 1968-12-13 | An Ultrahigh-Vacuum Enclosure |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3512369A (en) |
| BE (1) | BE725393A (en) |
| DE (1) | DE1900454A1 (en) |
| ES (1) | ES362123A1 (en) |
| FR (1) | FR1557891A (en) |
| GB (1) | GB1181750A (en) |
| LU (1) | LU57621A1 (en) |
| NL (1) | NL6900130A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2319035A1 (en) * | 1975-07-22 | 1977-02-18 | Physimeca | Vessel evacuation appts. using cryogenic pump - has gas molecule trap plate connected to vessel by double walled cooled nozzle |
| US4311018A (en) * | 1979-12-17 | 1982-01-19 | Varian Associates, Inc. | Cryogenic pump |
| US4438632A (en) * | 1982-07-06 | 1984-03-27 | Helix Technology Corporation | Means for periodic desorption of a cryopump |
| US4763483A (en) * | 1986-07-17 | 1988-08-16 | Helix Technology Corporation | Cryopump and method of starting the cryopump |
| US4907413A (en) * | 1988-06-02 | 1990-03-13 | Grumman Aerospace Corporation | Regenerable cryosorption pump with movable physical barrier and physical barrier thereof |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2737779A (en) * | 1946-05-24 | 1956-03-13 | Ernest O Lawrence | Condensable vapor extraction apparatus |
| US3360949A (en) * | 1965-09-20 | 1968-01-02 | Air Reduction | Cryopumping configuration |
| US3327491A (en) * | 1966-06-08 | 1967-06-27 | Andonian Associates Inc | Windowless vacuum chamber for exposing a cooled device to successive samplers |
-
1968
- 1968-01-05 FR FR135093A patent/FR1557891A/fr not_active Expired
- 1968-12-13 US US783628A patent/US3512369A/en not_active Expired - Lifetime
- 1968-12-13 GB GB59444/68A patent/GB1181750A/en not_active Expired
- 1968-12-13 BE BE725393D patent/BE725393A/xx unknown
- 1968-12-20 LU LU57621D patent/LU57621A1/xx unknown
-
1969
- 1969-01-03 NL NL6900130A patent/NL6900130A/xx unknown
- 1969-01-04 DE DE19691900454 patent/DE1900454A1/en active Pending
- 1969-01-04 ES ES362123A patent/ES362123A1/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1900454A1 (en) | 1969-09-04 |
| LU57621A1 (en) | 1969-04-08 |
| FR1557891A (en) | 1969-02-21 |
| BE725393A (en) | 1969-05-16 |
| ES362123A1 (en) | 1970-11-01 |
| NL6900130A (en) | 1969-07-08 |
| US3512369A (en) | 1970-05-19 |
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