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GB955000A - Improvements in or relating to copper etching solutions - Google Patents

Improvements in or relating to copper etching solutions

Info

Publication number
GB955000A
GB955000A GB1332261A GB1332261A GB955000A GB 955000 A GB955000 A GB 955000A GB 1332261 A GB1332261 A GB 1332261A GB 1332261 A GB1332261 A GB 1332261A GB 955000 A GB955000 A GB 955000A
Authority
GB
United Kingdom
Prior art keywords
solution
etching solution
relating
valence
copper etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1332261A
Inventor
Louis Edward Quintrell Walker
John Owen Edward Clark
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BAE Systems Electronics Ltd
Original Assignee
Marconi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marconi Co Ltd filed Critical Marconi Co Ltd
Priority to GB1332261A priority Critical patent/GB955000A/en
Publication of GB955000A publication Critical patent/GB955000A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

A copper etching solution whose etching action is based on the reaction MnXm+Cu-->Mn-xXm-x+CuXx, where X is an anion, M a metal of valence n in the fresh etching solution and n-x in the spent solution and m is an integer of valence, is regenerated by addition of an oxidizing agent, namely, sodium, potassium or ammonium dichromate, hypochlorite or permanganate, hydrogen peroxide, bleaching powder or ozone and hydrochloric or sulphuric acid. The etching solution may be a ferric or cupric salt, e.g. the chloride, solution and regeneration may be continuous.
GB1332261A 1961-04-13 1961-04-13 Improvements in or relating to copper etching solutions Expired GB955000A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1332261A GB955000A (en) 1961-04-13 1961-04-13 Improvements in or relating to copper etching solutions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1332261A GB955000A (en) 1961-04-13 1961-04-13 Improvements in or relating to copper etching solutions

Publications (1)

Publication Number Publication Date
GB955000A true GB955000A (en) 1964-04-08

Family

ID=10020840

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1332261A Expired GB955000A (en) 1961-04-13 1961-04-13 Improvements in or relating to copper etching solutions

Country Status (1)

Country Link
GB (1) GB955000A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3373113A (en) * 1964-08-22 1968-03-12 Fmc Corp Process for etching copper printed circuits
EP0178347A1 (en) * 1984-10-19 1986-04-23 Ibm Deutschland Gmbh Process for automatically regenerating cupric chloride etching solutions
EP0266518A1 (en) * 1986-10-29 1988-05-11 International Business Machines Corporation Metal etching process with etch rate enhancement
US5518131A (en) * 1994-07-07 1996-05-21 International Business Machines Corporation Etching molydbenum with ferric sulfate and ferric ammonium sulfate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3373113A (en) * 1964-08-22 1968-03-12 Fmc Corp Process for etching copper printed circuits
EP0178347A1 (en) * 1984-10-19 1986-04-23 Ibm Deutschland Gmbh Process for automatically regenerating cupric chloride etching solutions
EP0266518A1 (en) * 1986-10-29 1988-05-11 International Business Machines Corporation Metal etching process with etch rate enhancement
US5518131A (en) * 1994-07-07 1996-05-21 International Business Machines Corporation Etching molydbenum with ferric sulfate and ferric ammonium sulfate

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