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GB951465A - Sputter-ion vacuum pump apparatus - Google Patents

Sputter-ion vacuum pump apparatus

Info

Publication number
GB951465A
GB951465A GB7146/61A GB714661A GB951465A GB 951465 A GB951465 A GB 951465A GB 7146/61 A GB7146/61 A GB 7146/61A GB 714661 A GB714661 A GB 714661A GB 951465 A GB951465 A GB 951465A
Authority
GB
United Kingdom
Prior art keywords
anode
outwardly extending
central portion
ion
extending portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7146/61A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB951465A publication Critical patent/GB951465A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)

Abstract

951,465. Ion-getter pumps. VARIAN ASSOCIATES. Feb. 27, 1961 [March 24, 1960], No. 7146/61. Heading H1D. An ion-getter vacuum pump comprises an envelope having a central portion 3<SP>1</SP>, Fig. 2, adapted for connection to a structure to be evacuated and a portion surrounding and extending outwardly from the central portion and comprising two spaced wall portions 1, 3 joined at their outer edges by an end wall 2, anode 9 and cathode members 8 disposed within the said outwardly extending portion and adapted to produce a glow discharge therebetween substantially confined to the outwardly extending portion, and means 25, 26 for producing a magnetic field in a direction transverse with respect to the outwardly extending portion. A high voltage lead 18, 21 connected to the anode extends through the central portion through insulators, and the anode, which is of cellular form, is supported by an insulating structure 13 attached to the enveloped portions 1, 3 which may be rectangular or circular. A flange 6 is connected to the centred portion 3<SP>1</SP>, and mates with a flange 5 connected to a cylindrical member 4 which may, in turn, be connected to a further pump structure, thereby providing a plurality of pumps adapted to operate in series as shown in Fig. 5. Suitable reactive cathode materials are titanium, zirconium, molybdenum, tungsten, tantalum, magnesium, calcium, strontium, niobium, iron, chromium, nickel, barium, thorium and other transition elements of the fourth, fifth and sixth groups of the Periodic Table including rare earths. Specifications 883,189 and 951,464 are referred to.
GB7146/61A 1960-03-24 1961-02-27 Sputter-ion vacuum pump apparatus Expired GB951465A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1734660A 1960-03-24 1960-03-24

Publications (1)

Publication Number Publication Date
GB951465A true GB951465A (en) 1964-03-04

Family

ID=21782062

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7146/61A Expired GB951465A (en) 1960-03-24 1961-02-27 Sputter-ion vacuum pump apparatus

Country Status (3)

Country Link
US (1) US3125283A (en)
DE (1) DE1194093B (en)
GB (1) GB951465A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1489232A1 (en) * 1964-07-24 1969-11-20 Siemens Ag Vacuum pump
US3379365A (en) * 1966-08-15 1968-04-23 Varian Associates Magnetically confined ion getter pump having combined coupling flange and pole piece structure
US3364370A (en) * 1966-08-17 1968-01-16 Rca Corp Tubular cell anode for sputter ion pumps
US3473056A (en) * 1967-08-09 1969-10-14 Nat Electrostatics Corp Power transmission system for high voltage accelerators
DE3939571A1 (en) * 1989-11-30 1991-06-06 Leybold Ag Ion pump with multi-anode structure and close-mounted outlet - has anode magnetic circuits integral with outer vessel
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL49158C (en) * 1936-05-29
US2796555A (en) * 1954-06-29 1957-06-18 High Voltage Engineering Corp High-vacuum pump
NL131436C (en) * 1957-07-24
NL111716C (en) * 1958-08-01

Also Published As

Publication number Publication date
US3125283A (en) 1964-03-17
DE1194093B (en) 1965-06-03

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