GB831216A - Manufacture of pure silicon - Google Patents
Manufacture of pure siliconInfo
- Publication number
- GB831216A GB831216A GB806657A GB806657A GB831216A GB 831216 A GB831216 A GB 831216A GB 806657 A GB806657 A GB 806657A GB 806657 A GB806657 A GB 806657A GB 831216 A GB831216 A GB 831216A
- Authority
- GB
- United Kingdom
- Prior art keywords
- trap
- temperature
- maintained
- silane
- activated charcoal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
- C01B33/046—Purification
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
<PICT:0831216/III/1> Silane is purified by passage through two activated charcoal-containing traps in series, one trap being maintained at a temperature of - 68 DEG to - 88 DEG C., so as to remove arsine and/or phosphine, and the other being maintained at a temperature of 0 DEG to 30 DEG C., so as to remove diborane. As shown, a trap 2 is maintained at a temperature of - 78 DEG C. by means of solid carbon dioxide, and a trap 3 is maintained at atmospheric temperature. The traps may be in series in either order. Gas absorbed by the activated charcoal in each trap may be desorbed (a) by maintaining the trap at the temperature maintained in the other trap during absorption, or (b) by passing argon through the activated charcoal of each trap while at a temperature of 200 DEG C. Pure silicon may be produced from the purified silane by the method disclosed in Specification 745,698, e.g. by heating silane at a concentration of 0.3% to a temperature of 500 DEG to 800 DEG C.
Priority Applications (26)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL112548D NL112548C (en) | 1953-09-25 | ||
BE561650D BE561650A (en) | 1953-09-25 | ||
BE565604D BE565604A (en) | 1953-09-25 | ||
BE532054D BE532054A (en) | 1953-09-25 | ||
NL225733D NL225733A (en) | 1953-09-25 | ||
BE561654D BE561654A (en) | 1953-09-25 | ||
FR75903D FR75903E (en) | 1953-09-25 | ||
FR1108543D FR1108543A (en) | 1953-09-25 | 1954-09-23 | High purity silicon production method |
CH1063854A CH370751A (en) | 1953-09-25 | 1954-09-25 | Process for the production of a coherent body consisting of a highly pure chemical element for semiconductor technology |
FR67266D FR67266E (en) | 1953-09-25 | 1954-09-29 | High purity silicon production method |
FR70026D FR70026E (en) | 1953-09-25 | 1956-08-14 | High purity silicon production method |
GB31424/56A GB829422A (en) | 1953-09-25 | 1956-10-16 | Method and apparatus for producing semi-conductor materials of high purity |
GB806657A GB831216A (en) | 1957-03-12 | 1957-03-12 | Manufacture of pure silicon |
FR749491A FR72741E (en) | 1953-09-25 | 1957-10-15 | High purity silicon production method |
FR72288D FR72288E (en) | 1953-09-25 | 1957-10-15 | High purity silicon production method |
FR749492A FR72742E (en) | 1953-09-25 | 1957-10-15 | High purity silicon production method |
US716652A US2987139A (en) | 1953-09-25 | 1958-02-21 | Manufacture of pure silicon |
DEI14512A DE1065389B (en) | 1953-09-25 | 1958-03-06 | Process for purifying silicon hydride to produce extremely pure silicon for semiconductor use |
FR760198A FR73392E (en) | 1953-09-25 | 1958-03-11 | High purity silicon production method |
CH5687258A CH373741A (en) | 1953-09-25 | 1958-03-12 | Process for purifying silane |
FR769353A FR73946E (en) | 1953-09-25 | 1958-07-02 | High purity silicon production method |
FR771605A FR74454E (en) | 1953-09-25 | 1958-07-31 | High purity silicon production method |
FR783396A FR75047E (en) | 1953-09-25 | 1959-01-06 | High purity silicon production method |
FR790410A FR75654E (en) | 1953-09-25 | 1959-03-24 | High purity silicon production method |
FR794679A FR75905E (en) | 1953-09-25 | 1959-05-14 | High purity silicon production method |
BE663513D BE663513A (en) | 1953-09-25 | 1965-05-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB806657A GB831216A (en) | 1957-03-12 | 1957-03-12 | Manufacture of pure silicon |
Publications (1)
Publication Number | Publication Date |
---|---|
GB831216A true GB831216A (en) | 1960-03-23 |
Family
ID=9845131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB806657A Expired GB831216A (en) | 1953-09-25 | 1957-03-12 | Manufacture of pure silicon |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB831216A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1289834B (en) * | 1960-08-11 | 1969-02-27 | Haldor Frederik Axel Dipl Ing | Process for purifying an inorganic halide compound or a mixture of such halide compounds |
US4871524A (en) * | 1987-09-03 | 1989-10-03 | Ethyl Corporation | Hydrogen purification process |
-
1957
- 1957-03-12 GB GB806657A patent/GB831216A/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1289834B (en) * | 1960-08-11 | 1969-02-27 | Haldor Frederik Axel Dipl Ing | Process for purifying an inorganic halide compound or a mixture of such halide compounds |
US4871524A (en) * | 1987-09-03 | 1989-10-03 | Ethyl Corporation | Hydrogen purification process |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB908506A (en) | Method for purifying silane | |
NO154454C (en) | PROCEDURE TO REDUCE THE CONCENTRATION OF ONE OR MORE FIRST GASES IN A MIXTURE WITH ANOTHER GAS, AND APPARATUS FOR EXECUTING THE PROCEDURE. | |
GB902713A (en) | Process of producing anhydrous urea | |
CH608384A5 (en) | Method for removing gaseous organic impurities from waste gases, and appliance to implement the same | |
GB1480866A (en) | Process for obtaining nitrogen-rich gases from gases containing oxygen and nitrogen | |
GB1333650A (en) | Process for the separation of vinyl chloride from gases | |
GB831216A (en) | Manufacture of pure silicon | |
KR920009697A (en) | Purification Method of Ammonia | |
MX165343B (en) | TREATMENT OF PERMEABLE MEMBRANES | |
GB1489706A (en) | Desorption of methyl bromide | |
GB1018405A (en) | A process for the production of highly pure hexagonal cadmium and zinc chalkogenides | |
GB950079A (en) | Improvements in or relating to concentrated hydrochloric acid production | |
JPS5245585A (en) | Method of stabilizing properties of crystal in flue gas desulfurizatio n process | |
JPS5244166A (en) | Method of growing semiconductor | |
JPS5432198A (en) | Production of uranium mononitride | |
JPS5592120A (en) | Impurity removal using natural zeolite and equipment therefor | |
GB941977A (en) | Purification of phosphorus and arsenic | |
GB365092A (en) | Improvements in or relating to the treatment of gaseous mixtures for the purpose of separating them into their components or enriching them with respect to one or more of their components | |
GB827681A (en) | Improvements in and relating to the separation of hydrogen from gaseous mixtures containing hydrogen | |
SU393672A1 (en) | METHOD FOR CONCENTRATING GAS IMPURITIES | |
JPS52146779A (en) | Desorption of solvent | |
JPS51117995A (en) | Hidrogen purifying process | |
JPS51122690A (en) | Method of separating and condensing oxygen | |
JPS5381483A (en) | Recovering method of fumigating agent | |
JPS5459075A (en) | Diffusing method of impurity |