GB766459A - Improvements in or relating to high-vacuum coating devices - Google Patents

Abstract

766,459. Coating by vapour deposition. HERAEUS GES., W. C. May 17, 1954 [May 15, 1953], No. 14420/54. Class 82(2) An apparatus for coating strip material by high vacuum vapour deposition or cathode sputtering comprises three mutually adjacent cylinder-shaped enclosures adapted to be tightly sealed against the outer atmosphere and interconnected by connecting members in the form of rectangular prisms which are short compared with the cylinder-shaped enclosures, at least one of the three enclosures serving for the accommodation of the material supply and take-up rolls and at least another of which is adapted to be placed under high-vacuum and serves for the accommodation of the vapour deposition or cathode sputtering devices, the two kinds of enclosures being separated by a lock chamber system at two places forming inlet and outlet sides for the strip material to pass into and away from a treatment area for the application of the coating, respectively, each lock chamber system comprising at least two intermediate chambers with the pressure decreasing or increasing in steps, the partition wall of said lock chamber systems being provided with narrow slots serving for the passage of the strip material, said slots being adjustable in width from outside by at leat one lip or edge formed by the partition wall, which is resiliently constructed and variable in height. In the form shown, the enclosure 2 contains the supply and take-up rolls 16 for the strip material 21 which, during coating, enters the central enclosure 11 which is sub-divided at the inlet-side and outlet-side into chambers 6a, 6b respectively, the pressure in which decreases and increases in steps, and then enters the enclosure 1 which contains evaporation crucibles 14, 15, or if sputtering is to be used, contains cathodes. The partition walls 7a, 7b between the chambers 6a, 6b form the lips of the passage slots, are made of resilient material, preferably rubber, and are adjustable in their height, so that they may be applied tightly upon the strip passing through the locks, by thrust screws 23 worked into the reinforced edges thereof. Glow discharge cathodes 18a, 18b effect preliminary and subsequent glow-discharge treatment of the strip material. In another embodiment (Fig. 2, not shown), a central enclosure accommodates the coating devices, and is flanked by two outer enclosures, one of which contains the supply roll and the other of which contains the take up roll for the strip material. The apparatus is stated to be suitable for the deposition of metallic or dielectric layers.