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GB202211564D0 - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
GB202211564D0
GB202211564D0 GBGB2211564.6A GB202211564A GB202211564D0 GB 202211564 D0 GB202211564 D0 GB 202211564D0 GB 202211564 A GB202211564 A GB 202211564A GB 202211564 D0 GB202211564 D0 GB 202211564D0
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB2211564.6A
Other versions
GB2621345A (en
GB2621345B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Priority to GB2211564.6A priority Critical patent/GB2621345B/en
Publication of GB202211564D0 publication Critical patent/GB202211564D0/en
Priority to PCT/EP2023/071849 priority patent/WO2024033321A1/en
Publication of GB2621345A publication Critical patent/GB2621345A/en
Application granted granted Critical
Publication of GB2621345B publication Critical patent/GB2621345B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662—Balancing of rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
GB2211564.6A 2022-08-09 2022-08-09 Method of assembling a vacuum pump Active GB2621345B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB2211564.6A GB2621345B (en) 2022-08-09 2022-08-09 Method of assembling a vacuum pump
PCT/EP2023/071849 WO2024033321A1 (en) 2022-08-09 2023-08-07 Vacuum pump with improved balancing of the rotor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2211564.6A GB2621345B (en) 2022-08-09 2022-08-09 Method of assembling a vacuum pump

Publications (3)

Publication Number Publication Date
GB202211564D0 true GB202211564D0 (en) 2022-09-21
GB2621345A GB2621345A (en) 2024-02-14
GB2621345B GB2621345B (en) 2024-10-23

Family

ID=84546132

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2211564.6A Active GB2621345B (en) 2022-08-09 2022-08-09 Method of assembling a vacuum pump

Country Status (2)

Country Link
GB (1) GB2621345B (en)
WO (1) WO2024033321A1 (en)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
DE3844563A1 (en) * 1988-03-12 1989-11-23 Kernforschungsanlage Juelich Magnetic bearing having permanent magnets for absorbing the radial bearing forces
DE3931661A1 (en) * 1989-08-25 1991-04-04 Leybold Ag MAGNETIC BEARING VACUUM PUMP
JP2541371B2 (en) * 1990-12-19 1996-10-09 ダイキン工業株式会社 Magnetic bearing structure of high speed rotary vacuum pump
DE10022061A1 (en) * 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Magnetic bearing arrangement with damping device especially for turbo-compressor, has two bearings each including stator annular magnet stack and rotor annular magnet stack
WO2020217407A1 (en) * 2019-04-25 2020-10-29 株式会社島津製作所 Vacuum pump
JP2020186687A (en) * 2019-05-15 2020-11-19 エドワーズ株式会社 Vacuum pump and stationary component for screw groove pump part
FR3116309B1 (en) * 2020-11-19 2023-06-30 Pfeiffer Vacuum Vacuum pump

Also Published As

Publication number Publication date
GB2621345A (en) 2024-02-14
WO2024033321A1 (en) 2024-02-15
GB2621345B (en) 2024-10-23

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