[go: up one dir, main page]

GB2621345B - Method of assembling a vacuum pump - Google Patents

Method of assembling a vacuum pump Download PDF

Info

Publication number
GB2621345B
GB2621345B GB2211564.6A GB202211564A GB2621345B GB 2621345 B GB2621345 B GB 2621345B GB 202211564 A GB202211564 A GB 202211564A GB 2621345 B GB2621345 B GB 2621345B
Authority
GB
United Kingdom
Prior art keywords
assembling
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2211564.6A
Other versions
GB202211564D0 (en
GB2621345A (en
Inventor
Hoesgen Christian
Christian Kalisch Dirk
Greven Alois
Englaender Heinz
Erich Radermacher Daniel
Dembek Roman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Priority to GB2211564.6A priority Critical patent/GB2621345B/en
Publication of GB202211564D0 publication Critical patent/GB202211564D0/en
Priority to PCT/EP2023/071849 priority patent/WO2024033321A1/en
Publication of GB2621345A publication Critical patent/GB2621345A/en
Application granted granted Critical
Publication of GB2621345B publication Critical patent/GB2621345B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662—Balancing of rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
GB2211564.6A 2022-08-09 2022-08-09 Method of assembling a vacuum pump Active GB2621345B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB2211564.6A GB2621345B (en) 2022-08-09 2022-08-09 Method of assembling a vacuum pump
PCT/EP2023/071849 WO2024033321A1 (en) 2022-08-09 2023-08-07 Vacuum pump with improved balancing of the rotor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2211564.6A GB2621345B (en) 2022-08-09 2022-08-09 Method of assembling a vacuum pump

Publications (3)

Publication Number Publication Date
GB202211564D0 GB202211564D0 (en) 2022-09-21
GB2621345A GB2621345A (en) 2024-02-14
GB2621345B true GB2621345B (en) 2024-10-23

Family

ID=84546132

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2211564.6A Active GB2621345B (en) 2022-08-09 2022-08-09 Method of assembling a vacuum pump

Country Status (2)

Country Link
GB (1) GB2621345B (en)
WO (1) WO2024033321A1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022106085A1 (en) * 2020-11-19 2022-05-27 Pfeiffer Vacuum Vacuum pump
US20220235776A1 (en) * 2019-05-15 2022-07-28 Edwards Japan Limited Vacuum pump and stator component of thread groove pump portion of the vacuum pump

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
DE3844563A1 (en) * 1988-03-12 1989-11-23 Kernforschungsanlage Juelich Magnetic bearing having permanent magnets for absorbing the radial bearing forces
DE3931661A1 (en) * 1989-08-25 1991-04-04 Leybold Ag MAGNETIC BEARING VACUUM PUMP
JP2541371B2 (en) * 1990-12-19 1996-10-09 ダイキン工業株式会社 Magnetic bearing structure of high speed rotary vacuum pump
DE10022061A1 (en) * 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Magnetic bearing arrangement with damping device especially for turbo-compressor, has two bearings each including stator annular magnet stack and rotor annular magnet stack
US12117009B2 (en) * 2019-04-25 2024-10-15 Shimadzu Corporation Vacuum pump including magnetic bearing and motor bearing operable as radial magnetic bearing, motor, and thrust magnetic bearing

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220235776A1 (en) * 2019-05-15 2022-07-28 Edwards Japan Limited Vacuum pump and stator component of thread groove pump portion of the vacuum pump
WO2022106085A1 (en) * 2020-11-19 2022-05-27 Pfeiffer Vacuum Vacuum pump

Also Published As

Publication number Publication date
GB202211564D0 (en) 2022-09-21
GB2621345A (en) 2024-02-14
WO2024033321A1 (en) 2024-02-15

Similar Documents

Publication Publication Date Title
AU2021263535A1 (en) Method of purging a blood pump
GB202109334D0 (en) Stator assembly for a roots vacuum pump
GB2621345B (en) Method of assembling a vacuum pump
GB202305056D0 (en) Stator for a vacuum pump
GB202202037D0 (en) A vacuum pump assembly
GB202012286D0 (en) A method of assembling a firearm
GB202003026D0 (en) A rotor assembly for a vacuum pump and method for manufacture
GB202318262D0 (en) Method for operating a vacuum pump
GB202219655D0 (en) Method for operating a vacuum pump
GB202216578D0 (en) A vacuum pump and method
GB202216579D0 (en) A vacuum pump and method
ZAA202301096S (en) Part of a pump
ZAA202301095S (en) Part of a pump
GB202404067D0 (en) A combination vacuum pump
GB2606224B (en) Stator for a vacuum pump
AU2024902696A0 (en) A Pump Assembly
GB2624987B (en) Method for operating a vacuum pump and vacuum pump
AU2022296010A1 (en) Breast pump assembly and method of aligning a breast pump assembly
GB202207213D0 (en) Method of assembling a loudspeaker
AU2021902869A0 (en) A Method of Constructing a Modular Trellis
GB202214193D0 (en) Method for a vacuum pump system
IL317400A (en) Shell stator for a vacuum pump
GB202308577D0 (en) Shell stator for a vacuum pump
IL308006A (en) Stator for a vacuum pump
GB202117590D0 (en) Stator for a vacuum pump