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GB202213704D0 - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
GB202213704D0
GB202213704D0 GBGB2213704.6A GB202213704A GB202213704D0 GB 202213704 D0 GB202213704 D0 GB 202213704D0 GB 202213704 A GB202213704 A GB 202213704A GB 202213704 D0 GB202213704 D0 GB 202213704D0
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB2213704.6A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of GB202213704D0 publication Critical patent/GB202213704D0/en
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GBGB2213704.6A 2022-06-29 2022-09-20 Vacuum pump Ceased GB202213704D0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022104686A JP7493556B2 (en) 2022-06-29 2022-06-29 Vacuum pump

Publications (1)

Publication Number Publication Date
GB202213704D0 true GB202213704D0 (en) 2022-11-02

Family

ID=84817881

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB2213704.6A Ceased GB202213704D0 (en) 2022-06-29 2022-09-20 Vacuum pump

Country Status (5)

Country Link
JP (1) JP7493556B2 (en)
CN (1) CN119343531A (en)
GB (1) GB202213704D0 (en)
TW (1) TW202407219A (en)
WO (1) WO2024004849A1 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7476291B2 (en) 2006-09-28 2009-01-13 Lam Research Corporation High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation
JP6386737B2 (en) 2014-02-04 2018-09-05 エドワーズ株式会社 Vacuum pump
JP7356869B2 (en) 2019-11-05 2023-10-05 エドワーズ株式会社 Vacuum pump

Also Published As

Publication number Publication date
JP2024004829A (en) 2024-01-17
CN119343531A (en) 2025-01-21
TW202407219A (en) 2024-02-16
JP7493556B2 (en) 2024-05-31
WO2024004849A1 (en) 2024-01-04

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)