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GB1432887A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
GB1432887A
GB1432887A GB3063974A GB3063974A GB1432887A GB 1432887 A GB1432887 A GB 1432887A GB 3063974 A GB3063974 A GB 3063974A GB 3063974 A GB3063974 A GB 3063974A GB 1432887 A GB1432887 A GB 1432887A
Authority
GB
United Kingdom
Prior art keywords
detectors
specimen
cathode
ray tube
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3063974A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1432887A publication Critical patent/GB1432887A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/2447—Imaging plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24592—Inspection and quality control of devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB3063974A 1973-07-27 1974-07-10 Scanning electron microscope Expired GB1432887A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8466273A JPS5329472B2 (nl) 1973-07-27 1973-07-27

Publications (1)

Publication Number Publication Date
GB1432887A true GB1432887A (en) 1976-04-22

Family

ID=13836921

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3063974A Expired GB1432887A (en) 1973-07-27 1974-07-10 Scanning electron microscope

Country Status (3)

Country Link
JP (1) JPS5329472B2 (nl)
GB (1) GB1432887A (nl)
NL (1) NL177161C (nl)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2173666A (en) * 1985-04-12 1986-10-15 Plessey Co Plc Scanning optical microscopes
GB2184912A (en) * 1985-11-19 1987-07-01 Zeiss Stiftung Light scan microscopic dark-field display of objects

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216160A (en) * 1975-07-30 1977-02-07 Hitachi Ltd Electron beam detection device
JP4187544B2 (ja) * 2003-02-25 2008-11-26 富士通株式会社 走査透過型電子顕微鏡

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2173666A (en) * 1985-04-12 1986-10-15 Plessey Co Plc Scanning optical microscopes
GB2184912A (en) * 1985-11-19 1987-07-01 Zeiss Stiftung Light scan microscopic dark-field display of objects
GB2184912B (en) * 1985-11-19 1989-10-25 Zeiss Stiftung Method and apparatus for light scan microscopic dark-field display of objects

Also Published As

Publication number Publication date
NL177161B (nl) 1985-03-01
JPS5329472B2 (nl) 1978-08-21
NL7409907A (nl) 1975-01-29
NL177161C (nl) 1985-08-01
JPS5034158A (nl) 1975-04-02

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee