[go: up one dir, main page]

JPS5216160A - Electron beam detection device - Google Patents

Electron beam detection device

Info

Publication number
JPS5216160A
JPS5216160A JP9191175A JP9191175A JPS5216160A JP S5216160 A JPS5216160 A JP S5216160A JP 9191175 A JP9191175 A JP 9191175A JP 9191175 A JP9191175 A JP 9191175A JP S5216160 A JPS5216160 A JP S5216160A
Authority
JP
Japan
Prior art keywords
electron beam
detection device
beam detection
elementnary
simplify
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9191175A
Other languages
Japanese (ja)
Other versions
JPS563624B2 (en
Inventor
Sadao Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9191175A priority Critical patent/JPS5216160A/en
Publication of JPS5216160A publication Critical patent/JPS5216160A/en
Publication of JPS563624B2 publication Critical patent/JPS563624B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To simplify the construction of the electron beam detecting device and to make possible the elementnary analysis based on the scattering angle dependency of the elastic scattering electron beam.
COPYRIGHT: (C)1977,JPO&Japio
JP9191175A 1975-07-30 1975-07-30 Electron beam detection device Granted JPS5216160A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9191175A JPS5216160A (en) 1975-07-30 1975-07-30 Electron beam detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9191175A JPS5216160A (en) 1975-07-30 1975-07-30 Electron beam detection device

Publications (2)

Publication Number Publication Date
JPS5216160A true JPS5216160A (en) 1977-02-07
JPS563624B2 JPS563624B2 (en) 1981-01-26

Family

ID=14039751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9191175A Granted JPS5216160A (en) 1975-07-30 1975-07-30 Electron beam detection device

Country Status (1)

Country Link
JP (1) JPS5216160A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034158A (en) * 1973-07-27 1975-04-02
JPS50118659A (en) * 1974-03-01 1975-09-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034158A (en) * 1973-07-27 1975-04-02
JPS50118659A (en) * 1974-03-01 1975-09-17

Also Published As

Publication number Publication date
JPS563624B2 (en) 1981-01-26

Similar Documents

Publication Publication Date Title
JPS51142372A (en) Time measuring device
JPS5241583A (en) Ion detecting device for mass analyzer
JPS5216160A (en) Electron beam detection device
JPS52106787A (en) Gas and humidity detection element
JPS541100A (en) Detector of address character rows of postal matter
JPS51134651A (en) Detection method of the thickness of asphalt pavement
JPS5223993A (en) Gas detecting element
JPS51126886A (en) Non contacting temperature detection device
JPS53108488A (en) Flaw detector for tubes
JPS5222473A (en) Panel measuring device
JPS51135474A (en) To analyze a semiconductor device
JPS51141600A (en) Fire detecting equipment
JPS54686A (en) Optical ionization detector
JPS5366331A (en) Timing detector
JPS51118996A (en) Material detector
JPS51113636A (en) Carried material detector and safety device
JPS5223983A (en) Breakage detector
JPS5217064A (en) Vehicle and speed detector unit
JPS51137432A (en) Spectrum analyser
JPS5241585A (en) Magnetic field detection device
JPS5221764A (en) Scattering electron checking diaphragm
JPS5332667A (en) Secondary electron detector
JPS5242195A (en) Banknote detector
JPS52450A (en) Angle detector
JPS5258947A (en) Measuring device for solids