GB1375734A - - Google Patents
Info
- Publication number
- GB1375734A GB1375734A GB5278171A GB5278171A GB1375734A GB 1375734 A GB1375734 A GB 1375734A GB 5278171 A GB5278171 A GB 5278171A GB 5278171 A GB5278171 A GB 5278171A GB 1375734 A GB1375734 A GB 1375734A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cryopumping
- gas
- tube
- nov
- sorbent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
1375734 Cryogenic pumps L'AIR LIQUIDE SOC ANON POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE 12 Nov 1971 [13 Nov 1970] 52781/71 Heading F1N A cryopump has a cryopumping surface 108d, 108b easily accessible to the gas to be pumped and a cryopumping surface 108a less accessible to said gas, the less accessible surface 108a being positioned to receive a sorbent gas such as argon or carbon dioxide injected thereonto through a tube 120. In operation a primary vacuum is first produced by a mechanical pump followed by a sorption pump (neither shown). Thereafter cryopumping is commenced by cooling the cryopumping surfaces 108d, 108b and 108a with liquid helium in coils 110, 110 and a baffle 114 with liquid nitrogen in a coil 115. To remove the residual gases predetermined quantities of the sorbent gas are injected on to the cryopumping surface 108a by a measuring device, Figs. 1 and 2 (not shown). To prevent condensation of the sorbent gas in the tube 120 a heater 124 or a heated thermally conductive tube (130), Fig. 8 (not shown) is provided. The tube 120 may have fitted thereto a multi-orifice injection nozzle, Figs. 3 to 5 (not shown). In modifications the cryopumping surfaces are cooled by a cylindrical, reservoir filled with liquid helium, Figs. 9 and 10 (not shown).
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7040599A FR2114039A5 (en) | 1970-11-13 | 1970-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1375734A true GB1375734A (en) | 1974-11-27 |
Family
ID=9064083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5278171A Expired GB1375734A (en) | 1970-11-13 | 1971-11-12 |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US3769806A (en) |
| JP (1) | JPS56637B1 (en) |
| BE (1) | BE775243A (en) |
| CA (1) | CA947990A (en) |
| CH (1) | CH550941A (en) |
| DE (1) | DE2155994A1 (en) |
| FR (1) | FR2114039A5 (en) |
| GB (1) | GB1375734A (en) |
| IT (1) | IT941125B (en) |
| LU (1) | LU64250A1 (en) |
| NL (1) | NL172590C (en) |
| SE (1) | SE377830B (en) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2620880C2 (en) * | 1976-05-11 | 1984-07-12 | Leybold-Heraeus GmbH, 5000 Köln | Cryopump |
| US4148196A (en) * | 1977-04-25 | 1979-04-10 | Sciex Inc. | Multiple stage cryogenic pump and method of pumping |
| DE2949092A1 (en) * | 1979-12-06 | 1981-06-11 | Leybold-Heraeus GmbH, 5000 Köln | Cryopump |
| US4275566A (en) * | 1980-04-01 | 1981-06-30 | Pennwalt Corporation | Cryopump apparatus |
| USRE31665E (en) * | 1980-04-01 | 1984-09-11 | Cvi Incorporated | Cryopump apparatus |
| US4341079A (en) * | 1980-04-01 | 1982-07-27 | Cvi Incorporated | Cryopump apparatus |
| GB2115602B (en) * | 1982-02-24 | 1986-01-02 | Philips Electronic Associated | Getters in infra-red radiation detectors |
| US4559787A (en) * | 1984-12-04 | 1985-12-24 | The United States Of America As Represented By The United States Department Of Energy | Vacuum pump apparatus |
| US4608866A (en) * | 1985-03-13 | 1986-09-02 | Martin Marietta Corporation | Small component helium leak detector |
| IT1197069B (en) * | 1986-08-06 | 1988-11-25 | Sgs Microelettronica Spa | REFRIGERANT FLUID TRAP FOR VACUUM EVAPORATORS FOR THE DEPOSITION OF THIN METAL FILMS |
| US4926648A (en) * | 1988-03-07 | 1990-05-22 | Toshiba Corp. | Turbomolecular pump and method of operating the same |
| US4873833A (en) * | 1988-11-23 | 1989-10-17 | American Telephone Telegraph Company, At&T Bell Laboratories | Apparatus comprising a high-vacuum chamber |
| DE4017213C1 (en) * | 1990-05-29 | 1991-05-23 | Bruker Analytische Messtechnik Gmbh, 7512 Rheinstetten, De | |
| US5211022A (en) * | 1991-05-17 | 1993-05-18 | Helix Technology Corporation | Cryopump with differential pumping capability |
| JP3123126B2 (en) * | 1991-07-15 | 2001-01-09 | 株式会社日立製作所 | Vacuum container with cooler |
| US5653113A (en) * | 1995-04-07 | 1997-08-05 | Rigaku Corporation | Cooling system |
| US5806319A (en) * | 1997-03-13 | 1998-09-15 | Wary; John | Method and apparatus for cryogenically cooling a deposition chamber |
| TWI557320B (en) * | 2011-02-09 | 2016-11-11 | 布魯克機械公司 | Cryopump, frontal baffle plate for cryopump and method of making such frontal baffle plate |
| US20140202174A1 (en) * | 2013-01-24 | 2014-07-24 | Cryomech, Inc. | Closed Cycle 1 K Refrigeration System |
| JP6053552B2 (en) * | 2013-02-18 | 2016-12-27 | 住友重機械工業株式会社 | Cryo pump and cryopump mounting structure |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3122896A (en) * | 1962-10-31 | 1964-03-03 | Cryovac Inc | Pump heat radiation shield |
| US3252652A (en) * | 1963-01-24 | 1966-05-24 | Bendix Balzers Vacuum Inc | Process and apparatus for the production of high vacuums |
| US3364654A (en) * | 1965-09-27 | 1968-01-23 | Union Carbide Corp | Ultrahigh vacuum pumping process and apparatus |
| FR2048253A5 (en) * | 1969-12-01 | 1971-03-19 | Air Liquide |
-
1970
- 1970-11-13 FR FR7040599A patent/FR2114039A5/fr not_active Expired
-
1971
- 1971-11-08 SE SE7114209A patent/SE377830B/xx unknown
- 1971-11-10 IT IT30926/71A patent/IT941125B/en active
- 1971-11-10 JP JP8913571A patent/JPS56637B1/ja active Pending
- 1971-11-11 DE DE19712155994 patent/DE2155994A1/en not_active Ceased
- 1971-11-11 CH CH1641671A patent/CH550941A/en not_active IP Right Cessation
- 1971-11-11 LU LU64250D patent/LU64250A1/xx unknown
- 1971-11-12 GB GB5278171A patent/GB1375734A/en not_active Expired
- 1971-11-12 US US00198178A patent/US3769806A/en not_active Expired - Lifetime
- 1971-11-12 BE BE775243A patent/BE775243A/en not_active IP Right Cessation
- 1971-11-15 CA CA127,722A patent/CA947990A/en not_active Expired
- 1971-11-15 NL NLAANVRAGE7115666,A patent/NL172590C/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE2155994A1 (en) | 1972-05-18 |
| CH550941A (en) | 1974-06-28 |
| FR2114039A5 (en) | 1972-06-30 |
| BE775243A (en) | 1972-05-12 |
| US3769806A (en) | 1973-11-06 |
| LU64250A1 (en) | 1972-06-02 |
| NL7115666A (en) | 1972-05-16 |
| NL172590B (en) | 1983-04-18 |
| NL172590C (en) | 1983-09-16 |
| CA947990A (en) | 1974-05-28 |
| SE377830B (en) | 1975-07-28 |
| JPS56637B1 (en) | 1981-01-08 |
| IT941125B (en) | 1973-03-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |