GB1217443A - Apparatus for evaporation by levitation in an ultra-vacuum - Google Patents

Abstract

1,217,443. Vapour-deposition apparatus. EUROPEAN ATOMIC ENERGY COMMUNITY. March 5, 1969 [April 5, 1968], No.11803/69. Heading C7F. Apparatus for vapour deposition in ultravacuum comprises an ultra-vacuum chamber provided with at least one window or hatch 2, a mask 22 covering said window within the chamber and movable to uncover the window, a substrate support 3, an inductor 4 for effecting levitation and heating of the material 5 to be evaporated, a transfer device 10 operable to bring a succession of pieces of material 5 to a station beneath the inductor, the transfer device embodying upwardly removable carriers 6 for the material 5, means operable from outside the chamber for operation of the transfer device and comprising a first bar 9 passing through the chamber wall with a vacuum seal and arranged for rectilinear lengthwise movements, and raising means operable from outside the chamber by a second bar or rod 12 passing through the chamber wall with a vacuum seal and arranged for lengthwise movement, said raising means fulfilling simultaneously two functions, one to move the mask to uncover the window and the other to raise a carrier and material piece from the transfer device to position the carrier accurately on the inductor axis 11 and then to locate the material piece within the inductor. The chamber is evacuated and control bar 9 moves a holder 6 to a centred position on axis 11, and rod 12 is actuated upwards so that lug 18 coacting with helical groove 17 moves mask 22 from window 2, and so that tube 15 acts on carrier 26 to centre it accurately and lift it into the centre of induction coil 4 which is then switched on to levitate and evaporate material 5 whilst tube 15 is lowered so that the mask re-covers the window 2. While evaporation continues, crucible 29 is moved on to axis 11 to catch the globule of material 5 when coil 4 is de-energized and evaporation ended. Several materials 5 may be used.