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GB1017741A - Improvements relating to vacuum coating processes - Google Patents

Improvements relating to vacuum coating processes

Info

Publication number
GB1017741A
GB1017741A GB1164A GB1164A GB1017741A GB 1017741 A GB1017741 A GB 1017741A GB 1164 A GB1164 A GB 1164A GB 1164 A GB1164 A GB 1164A GB 1017741 A GB1017741 A GB 1017741A
Authority
GB
United Kingdom
Prior art keywords
articles
carriers
rotate
vacuum coating
coating processes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1164A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lignes Telegraphiques et Telephoniques LTT SA
Original Assignee
Lignes Telegraphiques et Telephoniques LTT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR922213A external-priority patent/FR1361892A/en
Priority claimed from FR955784A external-priority patent/FR84875E/en
Application filed by Lignes Telegraphiques et Telephoniques LTT SA filed Critical Lignes Telegraphiques et Telephoniques LTT SA
Publication of GB1017741A publication Critical patent/GB1017741A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Prostheses (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

<PICT:1017741/C6-C7/1> A cylindrical object 1 is coated by vapour deposition whilst located between concentric carriers 1, 11 and 2, 21 which rotate about the same axis but at different speeds thus causing the articles to rotate about their own axis. In order to increase the friction between the articles and the carriers 2, 21 to cause them to rotate, the carriers are magnetized and the articles are either magnetized or if they are of insulating material ferromagnetic caps are placed over or magnets are fixed to the articles.
GB1164A 1963-01-22 1964-01-01 Improvements relating to vacuum coating processes Expired GB1017741A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR922213A FR1361892A (en) 1963-01-22 1963-01-22 Improvements to the thin-film deposition processes and to the devices for implementing said improved process
FR955784A FR84875E (en) 1963-12-03 1963-12-03 Improvements to the thin-film deposition processes and to the devices for implementing said improved process

Publications (1)

Publication Number Publication Date
GB1017741A true GB1017741A (en) 1966-01-19

Family

ID=26199469

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1164A Expired GB1017741A (en) 1963-01-22 1964-01-01 Improvements relating to vacuum coating processes

Country Status (2)

Country Link
DE (1) DE1521356A1 (en)
GB (1) GB1017741A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3699917A (en) * 1970-10-02 1972-10-24 Cogar Corp Vapor deposition apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4276855A (en) * 1979-05-02 1981-07-07 Optical Coating Laboratory, Inc. Coating apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3699917A (en) * 1970-10-02 1972-10-24 Cogar Corp Vapor deposition apparatus

Also Published As

Publication number Publication date
DE1521356A1 (en) 1969-07-24

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