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GB1340701A - Apparatus for use in coating a body with an evaporant - Google Patents

Apparatus for use in coating a body with an evaporant

Info

Publication number
GB1340701A
GB1340701A GB1340701DA GB1340701A GB 1340701 A GB1340701 A GB 1340701A GB 1340701D A GB1340701D A GB 1340701DA GB 1340701 A GB1340701 A GB 1340701A
Authority
GB
United Kingdom
Prior art keywords
vapour
coating
filament
april
rods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Craswell K B
Original Assignee
Craswell K B
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Craswell K B filed Critical Craswell K B
Publication of GB1340701A publication Critical patent/GB1340701A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1340701 Vapour deposition apparatus K B CRASWELL 19 April 1971 [8 April 1970] 16778/70 Heading C7F Vacuum-vapour deposition apparatus comprises a vacuum chamber 1, and first and second coating devices 13 mounted therein, each device comprising a filament 15 for generating an electron beam, and substance supporting means 17 for coating material, and supporting means 5 and 6 arranged so that devices 13 are relatively movable to adjust the distance there between. Crucibles 17 may have a continuous bottom, as at 5, to direct vapour upward, or may have an orifice 19 in the bottom and filament 15 therebelow to direct vapour downward; rods 11 coact with set screws 10 and 12 in block 9 and with rods 7 to make the vapour sources movable both horizontally and vertically. Coating materials mentioned are metals, metal oxides, glass and plastics.
GB1340701D 1971-04-19 1971-04-19 Apparatus for use in coating a body with an evaporant Expired GB1340701A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1677870 1971-04-19

Publications (1)

Publication Number Publication Date
GB1340701A true GB1340701A (en) 1973-12-12

Family

ID=10083501

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1340701D Expired GB1340701A (en) 1971-04-19 1971-04-19 Apparatus for use in coating a body with an evaporant

Country Status (1)

Country Link
GB (1) GB1340701A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2409596A1 (en) * 1977-11-22 1979-06-15 Balzers Hochvakuum ELECTRONIC BEAM EVAPORATION DEVICE FOR VACUUM EVAPORATION DEPOSIT SYSTEMS

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2409596A1 (en) * 1977-11-22 1979-06-15 Balzers Hochvakuum ELECTRONIC BEAM EVAPORATION DEVICE FOR VACUUM EVAPORATION DEPOSIT SYSTEMS

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee