[go: up one dir, main page]

GB1148188A - Process for obtaining thin layers of a product by evaporation in vacuo - Google Patents

Process for obtaining thin layers of a product by evaporation in vacuo

Info

Publication number
GB1148188A
GB1148188A GB238267A GB238267A GB1148188A GB 1148188 A GB1148188 A GB 1148188A GB 238267 A GB238267 A GB 238267A GB 238267 A GB238267 A GB 238267A GB 1148188 A GB1148188 A GB 1148188A
Authority
GB
United Kingdom
Prior art keywords
vacuo
evaporation
product
thin layers
obtaining thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB238267A
Inventor
Igor Melnick
Bernard Pruniaux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of GB1148188A publication Critical patent/GB1148188A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

1,148,188. Depositing alumina. COMMISSARIAT A L'ENERGIE ATOMIQUE. 17 Jan., 1967 [18 Jan., 1966], No. 2382/67. Heading C1A. [Also in Division C7] Material, e.g. aluminium, in a crucible 7, is evaporated on to a heated substrate through a funnel 18 to which a gaseous oxidizing agent, e.g. water vapour or oxygen, is supplied to deposit layers of aluminium oxide.
GB238267A 1966-01-18 1967-01-17 Process for obtaining thin layers of a product by evaporation in vacuo Expired GB1148188A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR46341 1966-01-18

Publications (1)

Publication Number Publication Date
GB1148188A true GB1148188A (en) 1969-04-10

Family

ID=8599048

Family Applications (1)

Application Number Title Priority Date Filing Date
GB238267A Expired GB1148188A (en) 1966-01-18 1967-01-17 Process for obtaining thin layers of a product by evaporation in vacuo

Country Status (5)

Country Link
BE (1) BE691418A (en)
CH (1) CH467873A (en)
ES (1) ES335297A1 (en)
GB (1) GB1148188A (en)
LU (1) LU52832A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2308921A1 (en) * 1975-04-25 1976-11-19 Anvar Strain gauge with high mechanical strength - consists of steel substrate, alumina insulating layer and a metal layer
DE3627151A1 (en) * 1986-08-11 1988-02-18 Leybold Heraeus Gmbh & Co Kg METHOD AND DEVICE FOR REACTIVELY EVAPORATING METAL COMPOUNDS

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2308921A1 (en) * 1975-04-25 1976-11-19 Anvar Strain gauge with high mechanical strength - consists of steel substrate, alumina insulating layer and a metal layer
DE3627151A1 (en) * 1986-08-11 1988-02-18 Leybold Heraeus Gmbh & Co Kg METHOD AND DEVICE FOR REACTIVELY EVAPORATING METAL COMPOUNDS

Also Published As

Publication number Publication date
LU52832A1 (en) 1967-03-17
BE691418A (en) 1967-05-29
ES335297A1 (en) 1968-08-16
CH467873A (en) 1969-01-31

Similar Documents

Publication Publication Date Title
ES391740A1 (en) Deposition apparatus
GB1299237A (en) Composite structure of zinc oxide deposited epitaxially on sapphire
GB1431935A (en) Chemically resistant material
GB1148188A (en) Process for obtaining thin layers of a product by evaporation in vacuo
GB1275963A (en) Improvements relating to self-supporting films of dielectric material
GB1328298A (en) Production of a highly refractive oxide layer permeable to lihgt
GB1170709A (en) Improvements in or relating to the Doping of Semiconductor Crystals with Phosphorus
GB895879A (en) Improvements in and relating to the oxidation and/or transparency of thin partly oxidic layers
GB1331438A (en) Magnetic circuit having low reluctance
CH388258A (en) Process for the production of metallized textile fabrics by vapor deposition of metals in a high vacuum
GB1369749A (en) Crucible for vaporizing chemically active elements methods of manufacturing the same and ion sourve including said crucible
JPS5435176A (en) Depositing method by vacuum evaporation
GB1398976A (en) Methods of forming evaporated layers
GB1165828A (en) Process of Forming Oxide Coatings on Fe-Al and V-Al Alloys
JPS5210872A (en) Apparatus for production of compound thin films
GB1066078A (en) A process for the production of a thin, stoichiometric cdse layer
GB1262516A (en) Method for the manufacture of zinc dust
GB1183979A (en) Improvements in or relating to Hard, Well Adhering and Practically Non-Absorbent Thin Layers
GB966161A (en) Improvements in or relating to coating objects with a metal oxide layer
IT1046113B (en) Stable phase three potassium nitrate - by precipitating potassium nitrate vapour under vacuum in form of thin layer and cooling/relieving vacuum for ferroelectric memory cells
JPS5210866A (en) Process for production of compound thin film
GB840803A (en) A method of producing manganese of high purity
GB1340701A (en) Apparatus for use in coating a body with an evaporant
GB829336A (en) A vacuum furnace for vapourising the volatile constitutent of an alloy
ES313735A1 (en) Method for deposing thin films on a substrate by cathodic sublimation. (Machine-translation by Google Translate, not legally binding)