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FR3069098B1 - Source generatrice de rayons ionisants compacte, ensemble comprenant plusieurs sources et procede de realisation de la source - Google Patents

Source generatrice de rayons ionisants compacte, ensemble comprenant plusieurs sources et procede de realisation de la source Download PDF

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Publication number
FR3069098B1
FR3069098B1 FR1700741A FR1700741A FR3069098B1 FR 3069098 B1 FR3069098 B1 FR 3069098B1 FR 1700741 A FR1700741 A FR 1700741A FR 1700741 A FR1700741 A FR 1700741A FR 3069098 B1 FR3069098 B1 FR 3069098B1
Authority
FR
France
Prior art keywords
source
several sources
realizing
compact
assembly including
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1700741A
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English (en)
Other versions
FR3069098A1 (fr
Inventor
Pascal Ponard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thales SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales SA filed Critical Thales SA
Priority to FR1700741A priority Critical patent/FR3069098B1/fr
Priority to TW107123868A priority patent/TWI783006B/zh
Priority to PCT/EP2018/068779 priority patent/WO2019011980A1/fr
Priority to US16/612,738 priority patent/US11004647B2/en
Priority to CN201880045808.8A priority patent/CN110870036B/zh
Priority to SG11201912205QA priority patent/SG11201912205QA/en
Priority to AU2018298781A priority patent/AU2018298781B2/en
Priority to JP2019561262A priority patent/JP7073407B2/ja
Priority to ES18736941T priority patent/ES2881314T3/es
Priority to KR1020207000373A priority patent/KR102584667B1/ko
Priority to EP18736941.8A priority patent/EP3652773B1/fr
Priority to IL271796A priority patent/IL271796B2/en
Publication of FR3069098A1 publication Critical patent/FR3069098A1/fr
Application granted granted Critical
Publication of FR3069098B1 publication Critical patent/FR3069098B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/066—Details of electron optical components, e.g. cathode cups
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/02—Electrical arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • X-Ray Techniques (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)

Abstract

L'invention concerne une source génératrice de rayons ionisants et en particulier de rayons X, un ensemble comprenant plusieurs sources et un procédé de réalisation de la source. La source génératrice de rayons ionisants comprend : • une enceinte à vide (12), • une cathode (14) pouvant émettre un faisceau d'électrons (18) dans l'enceinte à vide (12), • une anode (16) recevant le faisceau d'électrons (18) et comprenant une cible (20) pouvant générer un rayonnement ionisant (22) à partir de l'énergie reçu du faisceau d'électrons (18), • une électrode (24) disposée au voisinage de la cathode (14) et permettant de focaliser le faisceau d'électrons (18). Selon l'invention, l'électrode (24) est formée d'une surface conductrice disposée sur une face concave (26) d'un matériau diélectrique.
FR1700741A 2017-07-11 2017-07-11 Source generatrice de rayons ionisants compacte, ensemble comprenant plusieurs sources et procede de realisation de la source Expired - Fee Related FR3069098B1 (fr)

Priority Applications (12)

Application Number Priority Date Filing Date Title
FR1700741A FR3069098B1 (fr) 2017-07-11 2017-07-11 Source generatrice de rayons ionisants compacte, ensemble comprenant plusieurs sources et procede de realisation de la source
TW107123868A TWI783006B (zh) 2017-07-11 2018-07-10 用於產生游離輻射的微型源、包含複數個源的總成、以及用於製造該源的製程
KR1020207000373A KR102584667B1 (ko) 2017-07-11 2018-07-11 컴팩트한 이온화 선 생성 소스, 복수의 소스들을 포함하는 어셈블리 및 그 소스를 제조하는 방법
CN201880045808.8A CN110870036B (zh) 2017-07-11 2018-07-11 紧凑型电离射线生成源、包括多个源的组件以及用于生产该源的方法
SG11201912205QA SG11201912205QA (en) 2017-07-11 2018-07-11 Compact source for generating ionizing radiation, assembly comprising a plurality of sources and process for producing the source
AU2018298781A AU2018298781B2 (en) 2017-07-11 2018-07-11 Compact, ionising ray-generating source, assembly comprising a plurality of sources and method for producing the source
PCT/EP2018/068779 WO2019011980A1 (fr) 2017-07-11 2018-07-11 Source génératrice de rayons ionisants compacte, ensemble comprenant plusieurs sources et procédé de réalisation de la source
ES18736941T ES2881314T3 (es) 2017-07-11 2018-07-11 Fuente generadora de rayos ionizantes compacta, conjunto que comprende varias fuentes y procedimiento de realización de la fuente
US16/612,738 US11004647B2 (en) 2017-07-11 2018-07-11 Compact source for generating ionizing radiation, assembly comprising a plurality of sources and process for producing the source
EP18736941.8A EP3652773B1 (fr) 2017-07-11 2018-07-11 Source génératrice de rayons ionisants compacte, ensemble comprenant plusieurs sources et procédé de réalisation de la source
IL271796A IL271796B2 (en) 2017-07-11 2018-07-11 A compact source for creating ionizing radiation, an assembly that includes a large number of sources and a process for producing the source
JP2019561262A JP7073407B2 (ja) 2017-07-11 2018-07-11 電離放射線を生成するための小型放射源、複数の放射源を備えるアセンブリ、及び放射源を製造するためのプロセス

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1700741 2017-07-11
FR1700741A FR3069098B1 (fr) 2017-07-11 2017-07-11 Source generatrice de rayons ionisants compacte, ensemble comprenant plusieurs sources et procede de realisation de la source

Publications (2)

Publication Number Publication Date
FR3069098A1 FR3069098A1 (fr) 2019-01-18
FR3069098B1 true FR3069098B1 (fr) 2020-11-06

Family

ID=61258269

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1700741A Expired - Fee Related FR3069098B1 (fr) 2017-07-11 2017-07-11 Source generatrice de rayons ionisants compacte, ensemble comprenant plusieurs sources et procede de realisation de la source

Country Status (12)

Country Link
US (1) US11004647B2 (fr)
EP (1) EP3652773B1 (fr)
JP (1) JP7073407B2 (fr)
KR (1) KR102584667B1 (fr)
CN (1) CN110870036B (fr)
AU (1) AU2018298781B2 (fr)
ES (1) ES2881314T3 (fr)
FR (1) FR3069098B1 (fr)
IL (1) IL271796B2 (fr)
SG (1) SG11201912205QA (fr)
TW (1) TWI783006B (fr)
WO (1) WO2019011980A1 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
DE112019002822T5 (de) 2018-06-04 2021-02-18 Sigray, Inc. Wellenlängendispersives röntgenspektrometer
CN112470245B (zh) 2018-07-26 2025-03-18 斯格瑞公司 高亮度x射线反射源
WO2020051221A2 (fr) 2018-09-07 2020-03-12 Sigray, Inc. Système et procédé d'analyse de rayons x sélectionnable en profondeur
US11152183B2 (en) 2019-07-15 2021-10-19 Sigray, Inc. X-ray source with rotating anode at atmospheric pressure
FR3102055B1 (fr) 2019-10-17 2024-03-08 Thales Sa Dispositif de radiologie à plusieurs sources de rayons ionisants et procédé mettant en oeuvre le dispositif
US11335608B2 (en) * 2020-04-15 2022-05-17 Kla Corporation Electron beam system for inspection and review of 3D devices
FR3113132B1 (fr) 2020-07-30 2022-12-02 Thales Sa Dispositif d’imagerie par photons X rétrodiffusés
US11837428B2 (en) * 2020-07-31 2023-12-05 General Electric Company Systems and methods for electron beam focusing in electron beam additive manufacturing
FR3115452B1 (fr) 2020-10-26 2024-06-21 Thales Sa Dispositif de radiologie à sources et détecteur disposés en hélice
CN113649360B (zh) * 2021-08-16 2023-08-08 上海交通大学 一种消除物体表面沾污的方法及装置
FR3137812A1 (fr) 2022-07-07 2024-01-12 Thales Antenne d’émission à rayons X comprenant une pluralité de sources de rayons X
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004134173A (ja) 2002-10-09 2004-04-30 Mitsubishi Electric Corp 冷陰極電子源及びそれを用いた表示装置
FR2879342B1 (fr) 2004-12-15 2008-09-26 Thales Sa Cathode a emission de champ, a commande optique
KR100789592B1 (ko) * 2006-03-24 2007-12-27 박래준 탄소나노튜브를 이용한 전계방출 냉음극 연엑스선 발생관
JP5580288B2 (ja) * 2008-04-17 2014-08-27 コーニンクレッカ フィリップス エヌ ヴェ パッシブイオン集電極を持つｘ線管
WO2009151197A1 (fr) * 2008-06-13 2009-12-17 한국전기연구원 Tube ä rayons x utilisant un matériau nanostructuré et système correspondant
JP5963453B2 (ja) * 2011-03-15 2016-08-03 株式会社荏原製作所 検査装置
CN103227082B (zh) * 2012-12-22 2015-07-29 深圳先进技术研究院 X射线发射装置及x射线产生方法
WO2015039603A1 (fr) 2013-09-18 2015-03-26 清华大学 Dispositif à rayons x et équipement de tomodensitométrie équipé de celui-ci
WO2015099561A1 (fr) * 2013-12-24 2015-07-02 Siemens Research Center Limited Liability Company Agencement et procédé pour une émission de champ
JP6363864B2 (ja) * 2014-04-16 2018-07-25 株式会社ニューフレアテクノロジー 電子ビーム描画装置、及び電子ビームの収束半角調整方法
US9490099B2 (en) * 2014-08-20 2016-11-08 Wisconsin Alumni Research Foundation System and method for multi-source X-ray-based imaging
DE102014226812A1 (de) * 2014-12-22 2016-06-23 Siemens Aktiengesellschaft Vorrichtung zum Erzeugen eines Elektronenstrahls
KR20160102748A (ko) * 2015-02-23 2016-08-31 주식회사바텍 전계 방출 엑스선 소스 장치
KR102188055B1 (ko) * 2015-08-21 2020-12-07 한국전자통신연구원 엑스선 소스

Also Published As

Publication number Publication date
TWI783006B (zh) 2022-11-11
EP3652773A1 (fr) 2020-05-20
KR102584667B1 (ko) 2023-10-05
JP7073407B2 (ja) 2022-05-23
AU2018298781A1 (en) 2019-12-19
CN110870036B (zh) 2023-06-02
AU2018298781B2 (en) 2023-03-02
WO2019011980A1 (fr) 2019-01-17
SG11201912205QA (en) 2020-01-30
US20200203113A1 (en) 2020-06-25
JP2020526868A (ja) 2020-08-31
IL271796B2 (en) 2024-06-01
CN110870036A (zh) 2020-03-06
US11004647B2 (en) 2021-05-11
IL271796B1 (en) 2024-02-01
ES2881314T3 (es) 2021-11-29
FR3069098A1 (fr) 2019-01-18
EP3652773B1 (fr) 2021-05-26
KR20200024211A (ko) 2020-03-06
IL271796A (en) 2020-02-27
TW201909226A (zh) 2019-03-01

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