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FR2953641B1 - Circuit de transistors homogenes sur seoi avec grille de controle arriere enterree sous la couche isolante - Google Patents

Circuit de transistors homogenes sur seoi avec grille de controle arriere enterree sous la couche isolante

Info

Publication number
FR2953641B1
FR2953641B1 FR0958747A FR0958747A FR2953641B1 FR 2953641 B1 FR2953641 B1 FR 2953641B1 FR 0958747 A FR0958747 A FR 0958747A FR 0958747 A FR0958747 A FR 0958747A FR 2953641 B1 FR2953641 B1 FR 2953641B1
Authority
FR
France
Prior art keywords
transistor
region
insulating layer
bured
seoi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0958747A
Other languages
English (en)
Other versions
FR2953641A1 (fr
Inventor
Carlos Mazure
Richard Ferrant
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec SA filed Critical Soitec SA
Priority to FR0958747A priority Critical patent/FR2953641B1/fr
Priority to SG2010087047A priority patent/SG172545A1/en
Priority to TW099140776A priority patent/TW201131739A/zh
Priority to JP2010263678A priority patent/JP2011166116A/ja
Priority to KR1020100118916A priority patent/KR20110065343A/ko
Priority to CN2010105670660A priority patent/CN102088027A/zh
Priority to EP10192766A priority patent/EP2333833A1/fr
Priority to US12/961,293 priority patent/US8384425B2/en
Priority to US13/013,580 priority patent/US8508289B2/en
Publication of FR2953641A1 publication Critical patent/FR2953641A1/fr
Application granted granted Critical
Publication of FR2953641B1 publication Critical patent/FR2953641B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/201—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C5/00—Details of stores covered by group G11C11/00
    • G11C5/14—Power supply arrangements, e.g. power down, chip selection or deselection, layout of wirings or power grids, or multiple supply levels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/90—Masterslice integrated circuits
    • H10D84/903—Masterslice integrated circuits comprising field effect technology
    • H10D84/907—CMOS gate arrays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Thin Film Transistor (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Element Separation (AREA)
  • Logic Circuits (AREA)

Abstract

L'invention concerne selon un premier aspect un dispositif semi-conducteur formé sur un substrat semi-conducteur sur isolant comprenant une couche mince de matériau semi-conducteur séparée d'un substrat de base par une couche isolante, le dispositif comprenant un ensemble de motifs chacun formés d'au moins un transistor à effet de champ, chaque transistor disposant dans la couche mince d'une région de source, d'une région de drain et d'une région de canal délimitée par les régions de source et de drain, et comprenant en outre une région de grille de contrôle avant formée au dessus de la région de canal, les motifs étant agencés sous forme de rangées, les régions de source et de drain d'une même rangée présentant les mêmes dimensions et étant espacés par des régions de grille de contrôle avant de dimensions fixes, caractérisé en ce qu'au moins un transistor d'un motif dispose d'une région de grille de contrôle arrière formée dans le substrat de base au-dessous de la région de canal, la région de grille arrière étant apte à être polarisée pour décaler la tension de seuil du transistor et simuler ainsi une modification de la largeur du canal du transistor.
FR0958747A 2009-12-08 2009-12-08 Circuit de transistors homogenes sur seoi avec grille de controle arriere enterree sous la couche isolante Active FR2953641B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR0958747A FR2953641B1 (fr) 2009-12-08 2009-12-08 Circuit de transistors homogenes sur seoi avec grille de controle arriere enterree sous la couche isolante
TW099140776A TW201131739A (en) 2009-12-08 2010-11-25 Circuit of uniform transistors on SeOI with buried back control gate beneath the insulating film
SG2010087047A SG172545A1 (en) 2009-12-08 2010-11-25 Circuit of uniform transistors on seoi with buried back control gate beneath the insulating film
KR1020100118916A KR20110065343A (ko) 2009-12-08 2010-11-26 절연막 아래 후방 컨트롤 게이트가 매설된 절연기판상 반도체(ＳｅＯＩ) 상의 균일한 트랜지스터 회로
JP2010263678A JP2011166116A (ja) 2009-12-08 2010-11-26 絶縁膜下の埋め込みバック・コントロール・ゲートを有するＳｅＯＩ上の同型のトランジスタからなる回路
CN2010105670660A CN102088027A (zh) 2009-12-08 2010-11-26 具有绝缘膜下埋入背控制栅极的SeOI上一致晶体管电路
EP10192766A EP2333833A1 (fr) 2009-12-08 2010-11-26 Circuit de transistors uniformes sur SOI avec grille de contrôle arrière enterrée au dessous du film d'isolation
US12/961,293 US8384425B2 (en) 2009-12-08 2010-12-06 Arrays of transistors with back control gates buried beneath the insulating film of a semiconductor-on-insulator substrate
US13/013,580 US8508289B2 (en) 2009-12-08 2011-01-25 Data-path cell on an SeOI substrate with a back control gate beneath the insulating layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0958747A FR2953641B1 (fr) 2009-12-08 2009-12-08 Circuit de transistors homogenes sur seoi avec grille de controle arriere enterree sous la couche isolante

Publications (2)

Publication Number Publication Date
FR2953641A1 FR2953641A1 (fr) 2011-06-10
FR2953641B1 true FR2953641B1 (fr) 2012-02-10

Family

ID=42102200

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0958747A Active FR2953641B1 (fr) 2009-12-08 2009-12-08 Circuit de transistors homogenes sur seoi avec grille de controle arriere enterree sous la couche isolante

Country Status (8)

Country Link
US (1) US8384425B2 (fr)
EP (1) EP2333833A1 (fr)
JP (1) JP2011166116A (fr)
KR (1) KR20110065343A (fr)
CN (1) CN102088027A (fr)
FR (1) FR2953641B1 (fr)
SG (1) SG172545A1 (fr)
TW (1) TW201131739A (fr)

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CN102088027A (zh) 2011-06-08
TW201131739A (en) 2011-09-16
KR20110065343A (ko) 2011-06-15
US20110133776A1 (en) 2011-06-09
JP2011166116A (ja) 2011-08-25
FR2953641A1 (fr) 2011-06-10
EP2333833A1 (fr) 2011-06-15
US8384425B2 (en) 2013-02-26

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