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ES2144692T3 - Sensor de gas. - Google Patents

Sensor de gas.

Info

Publication number
ES2144692T3
ES2144692T3 ES96120427T ES96120427T ES2144692T3 ES 2144692 T3 ES2144692 T3 ES 2144692T3 ES 96120427 T ES96120427 T ES 96120427T ES 96120427 T ES96120427 T ES 96120427T ES 2144692 T3 ES2144692 T3 ES 2144692T3
Authority
ES
Spain
Prior art keywords
gas sensor
layer
displacement
gas
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES96120427T
Other languages
English (en)
Inventor
Andreas Dr Kappel
Randolf Dr Mock
Hans Prof-Dr Meixner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Application granted granted Critical
Publication of ES2144692T3 publication Critical patent/ES2144692T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PARA EVITAR UN DESPLAZAMIENTO DE LA SEÑAL DE MEDICION EL SENSOR DE GAS MUESTRA UNA CAPA (G) SENSITIVA AL GAS, QUE ESTA PROVISTA EN SU CARA INFERIOR CON UNA ESTRUCTURA (D) DE ELECTRODOS DE MEDICION Y EN SU CARA SUPERIOR CON UNA CAPA (V) CONDUCTORA ELECTRICA.
ES96120427T 1995-12-29 1996-12-18 Sensor de gas. Expired - Lifetime ES2144692T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19549146A DE19549146A1 (de) 1995-12-29 1995-12-29 Gassensor

Publications (1)

Publication Number Publication Date
ES2144692T3 true ES2144692T3 (es) 2000-06-16

Family

ID=7781646

Family Applications (1)

Application Number Title Priority Date Filing Date
ES96120427T Expired - Lifetime ES2144692T3 (es) 1995-12-29 1996-12-18 Sensor de gas.

Country Status (5)

Country Link
US (1) US5840255A (es)
EP (1) EP0781993B1 (es)
JP (1) JP3032168B2 (es)
DE (2) DE19549146A1 (es)
ES (1) ES2144692T3 (es)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69731604D1 (de) * 1997-01-31 2004-12-23 St Microelectronics Srl Herstellungsverfahren für integrierte Halbleitervorrichtung mit einem chemoresistiven Gasmikrosensor
EP1067377A3 (de) * 1999-06-23 2001-09-26 Siemens Aktiengesellschaft Gassensor
GB9927689D0 (en) 1999-11-23 2000-01-19 Capteur Sensors & Analysers Gas sensors
EP1236038B1 (de) * 1999-12-08 2005-11-23 Sensirion AG Kapazitiver sensor
DE19960798C2 (de) * 1999-12-16 2001-11-29 Siemens Ag Elektrisch beheizter Hochtemperaturgassensor
FR2835316B1 (fr) * 2002-01-28 2004-09-17 Dgtec Detecteur de gaz sur substrat mince
JP2006528767A (ja) * 2003-07-25 2006-12-21 パラゴン アクチエンゲゼルシャフト マイクロ構造化された化学的なセンサ
US20050069457A1 (en) * 2003-09-30 2005-03-31 Hon Hai Precision Industry Co., Ltd. Gas sensor with zinc oxide layer and method for forming the same
DE102011010767A1 (de) * 2011-02-09 2012-08-09 Forschungszentrum Jülich GmbH Verfahren zur Herstellung einer Vorrichtung zum Nachweis eines Analyten sowie Vorrichtung und deren Verwendung
EP2565635B1 (en) 2011-09-02 2017-11-15 Sensirion AG Sensor chip and method for manufacturing a sensor chip
CN104237320B (zh) * 2014-06-19 2017-01-25 电子科技大学 一种氢气传感器
EP3037810B1 (fr) * 2014-12-23 2017-10-25 EM Microelectronic-Marin SA Capteur d'humidite ameliore
CN106160719B (zh) * 2015-03-26 2019-02-19 孚创云端软件(深圳)有限公司 多功能按键及具有多功能按键的电子装置
US12188893B2 (en) 2016-08-30 2025-01-07 Analog Devices International Unlimited Company Electrochemical sensor, and a method of forming an electrochemical sensor
US10620151B2 (en) * 2016-08-30 2020-04-14 Analog Devices Global Electrochemical sensor, and a method of forming an electrochemical sensor
JP6770238B2 (ja) * 2017-03-31 2020-10-14 ミツミ電機株式会社 湿度センサ
CN114384124B (zh) * 2021-12-08 2024-06-28 四方光电股份有限公司 一种抗漂移的双气敏膜气体传感器

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4313338A (en) * 1978-08-18 1982-02-02 Matsushita Electric Industrial Co., Ltd. Gas sensing device
US4361539A (en) * 1980-05-05 1982-11-30 Instrumentation Laboratory Inc. Analysis system
US4387165A (en) * 1982-04-22 1983-06-07 Youngblood James L H2 S Detector having semiconductor and noncontinuous inert film deposited thereon
GB2142147A (en) * 1983-06-24 1985-01-09 Standard Telephones Cables Ltd Gas sensor
CH665908A5 (de) * 1983-08-30 1988-06-15 Cerberus Ag Vorrichtung zum selektiven detektieren der gasfoermigen bestandteile von gasgemischen in luft mittels eines gassensors.
JPH0736274Y2 (ja) * 1987-05-15 1995-08-16 ベックマン インスツルメンツ インコーポレーテッド 改良フローセル
JPH0695082B2 (ja) * 1987-10-08 1994-11-24 新コスモス電機株式会社 吸引式オゾンガス検知器
DE59106773D1 (de) * 1991-08-14 1995-11-30 Siemens Ag Gassensor mit halbleitendem Galliumoxid.
DE4134783A1 (de) * 1991-10-22 1993-04-29 Bosch Gmbh Robert Elektrisch leitende poroese anorganische materialien
US5372785A (en) * 1993-09-01 1994-12-13 International Business Machines Corporation Solid-state multi-stage gas detector
DE4334410C3 (de) * 1993-10-08 2002-05-29 Fraunhofer Ges Forschung Dünnschicht-Gassensor
DE4339737C1 (de) 1993-11-22 1995-01-19 Siemens Ag Gassensor

Also Published As

Publication number Publication date
DE59604675D1 (de) 2000-04-20
EP0781993A1 (de) 1997-07-02
JPH09196878A (ja) 1997-07-31
DE19549146A1 (de) 1997-07-03
EP0781993B1 (de) 2000-03-15
US5840255A (en) 1998-11-24
JP3032168B2 (ja) 2000-04-10

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