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EP2715139B1 - Pompe à vide - Google Patents

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Publication number
EP2715139B1
EP2715139B1 EP12793624.3A EP12793624A EP2715139B1 EP 2715139 B1 EP2715139 B1 EP 2715139B1 EP 12793624 A EP12793624 A EP 12793624A EP 2715139 B1 EP2715139 B1 EP 2715139B1
Authority
EP
European Patent Office
Prior art keywords
pump
chamber
pump chamber
stage
side panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP12793624.3A
Other languages
German (de)
English (en)
Other versions
EP2715139A1 (fr
EP2715139A4 (fr
Inventor
Soichi KUDARA
Yasuhiro Niimura
Masami Nagayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
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Filing date
Publication date
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Publication of EP2715139A1 publication Critical patent/EP2715139A1/fr
Publication of EP2715139A4 publication Critical patent/EP2715139A4/fr
Application granted granted Critical
Publication of EP2715139B1 publication Critical patent/EP2715139B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C13/00—Adaptations of machines or pumps for special use, e.g. for extremely high pressures
    • F04C13/007—Venting; Gas and vapour separation during pumping
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/18—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/40—Pumps with means for venting areas other than the working chamber, e.g. bearings, gear chambers, shaft seals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes

Definitions

  • the present invention relates to a vacuum pump for use in a process such as a CVD process or an etching process which serves as part of fabrication methods for producing semiconductors, liquid crystals, solar cells, LEDs, etc., and more particularly to a vacuum pump for use in a process wherein a sublimable gas or a corrosive gas tends to flow into the vacuum pump.
  • Vacuum pumps which are connected to a vacuum chamber to discharge a process gas introduced in the vacuum chamber, generally include a pump casing having an inlet port and an outlet port and a pump chamber defined therein, and rotors rotatably housed in the pump casing.
  • the process gas which has flowed through the inlet port into the pump chamber, is compressed by the rotors and then discharged out of the pump chamber through the outlet port.
  • the rotors are fixedly mounted on respective rotational shafts extending through the pump casing.
  • Each of the rotational shafts has opposite ends rotatably supported by respective bearings that are disposed in respective bearing compartments on respective sides of the pump casing.
  • the inlet port region of the pump casing of the vacuum pump which is connected to the vacuum chamber, is kept under a vacuum which is at the same level as the vacuum in the vacuum chamber and the outlet port region of the vacuum casing is kept substantially under the atmospheric pressure as it is vented to the atmosphere.
  • the opposite ends of the rotational shafts are rotatably supported by the respective bearings, and are sealed by contact seals or non-contact seals to protect the bearings against damage by products that are generated by the process gas which has entered the bearings.
  • the non-contact seals are widely used to seal the rotational shafts for protection against contact-induced damage of the rotational shafts.
  • the pressure of a process gas in the vacuum pump increases stepwise as the process gas flows through the successive pump chambers, such as first, second, and third pump chambers, of the vacuum pump.
  • the process gas is higher in pressure on the outlet side thereof than on the inlet side thereof. Therefore, the pressure of the process gas in the final-stage pump chamber is essentially equal to the atmospheric pressure on the outlet side (discharge port) thereof, and is lower than the atmospheric pressure on the inlet side thereof.
  • the pressure of the process gas in the bearing compartment which is adjacent to the final-state pump chamber and houses bearings therein, is commensurate with the pressure (average pressure) in the final-state pump chamber.
  • the pressure on the inlet side of the final-stage pump chamber changes due to an influx of the process gas from the vacuum chamber or the like.
  • the pressure on the inlet side of the final-stage pump chamber rises from 26664,5 Pa to 39996,7 Pa (200 Torr to 300 Torr).
  • the pressure on the outlet side of the final-stage pump chamber remains substantially unchanged from the atmospheric pressure because the outlet side is vented to the atmosphere through a pump discharge pipe.
  • the process gas introduced into the final-state pump chamber tends to leak into the bearing compartment. If the process gas contains a sublimable gas or the like, then since the bearing compartment is generally held at a low temperature, products generated by the process gas are deposited on the bearings disposed in the bearing compartment and a lubricant that is used to lubricate the bearings, thereby tending to damage to the bearings.
  • WO 2011 019 048 A1 discloses a dry pump comprised of a center cylinder and a side cover.
  • the center cylinder is comprised of a plurality of pump chambers including an upper pump chamber which communicates with an intake port and a lower pump chamber which communicates with a discharge port, a plurality of rotors which are respectively contained in the pump chambers, a rotor shaft which is a rotary shaft for the rotors, and a side surface which intersects with the axial direction of the rotor shaft and is adjacent to the lower pump chamber, and in which vent holes are formed.
  • the side cover covers the side surface containing the vent holes, to define a space.
  • the dry pump disclosed in Japanese laid-open patent publication No. 2005-105829 serves to minimize vaporization of the lubricant for effectively keeping the lubricant in the lubricant chamber at a low temperature while at the same time keeping the pump chamber at a high temperature to lend itself to the discharging of a gas such as a condensable gas or a sublimable gas.
  • this disclosed dry pump has nothing to do with the protection against the process gas of the bearings that is disposed in a bearing compartment disposed on a side of the pump casing. It has widely been customary to introduce a purge gas, such as an N2 gas or the like, into the non-contact seals on the rotational shafts to prevent the process gas from leaking into the bearings.
  • the present invention has been made in view of the above situation in the background art. It is therefore an object of the present invention to provide a vacuum pump which is capable of preventing a process gas introduced into pump chambers from leaking into bearings effectively for thereby protecting the bearings against the process gas. Furthermore, an aspect of the present invention is to maintain the interior of the pump at a high temperature to prevent a sublimable gas or the like, contained in the process gas, from being converted into a solid substance.
  • the vacuum pump inter alia comprises a pump casing having an inlet port, an outlet port, and a plurality of pump chambers defined therein, a rotational shaft having opposite ends rotatably supported by bearings and extending longitudinally in the pump casing, and a rotor housed in the pump chamber and coupled to the rotational shaft for rotation in unison with the rotational shaft.
  • the pump casing has an atmosphere-vented compartment defined therein which is held in fluid communication with the outlet port of the pump casing and vented to the atmosphere.
  • the atmosphere-vented compartment which is held in fluid communication with the outlet port of the pump casing and vented to the atmosphere is provided near the outlet port, even when the pressure in the pump chamber changes and non-contact seals are used to seal the rotational shaft, a chamber that is positioned outside the atmosphere-vented compartment and houses one of the bearing therein is maintained substantially at the atmospheric pressure at all times. Therefore, a process gas, which is introduced from a vacuum chamber into the pump chambers, is reliably prevented from leaking into the chamber positioned outside the atmosphere-vented compartment and housing one of the bearings therein. The bearing is thus protected against the process gas.
  • the rotor comprises a plurality of rotors disposed respectively in the pump chambers for rotation in unison with the rotational shaft.
  • the vacuum pump is a multistage vacuum pump
  • the pressure on an inlet side of the final-stage pump chamber is lower than the atmospheric pressure.
  • the pressure (average pressure) in the final-stage pump chamber changes, e.g., increases.
  • the atmosphere-vented compartment is disposed outside the final-stage pump chamber, such a change in the pressure (average pressure) in the final-stage pump chamber is prevented from affecting the pressure in the chamber positioned outside the atmosphere-vented compartment and housing one of the bearings therein.
  • the vacuum pump further comprises a side panel disposed on an end wall of the pump casing, the rotational shaft extending through the side panel, the side panel having a purge gas passage defined therein for supplying a purge gas to a portion of the rotational shaft which is disposed in the side panel.
  • the purge gas passage is defined in the side panel through which the rotational shaft extends, for supplying the purge gas to the portion of the rotational shaft which is disposed in the side panel, a non-contact seal is provided between the side panel and the rotational shaft for preventing the rotational shaft from suffering contact-induced wear.
  • the process gas which has flowed into the pump chambers, is prevented from leaking into the chamber positioned outside the atmosphere-vented compartment and housing one of the bearings therein.
  • the bearing is thus reliably protected against the process gas.
  • FIG. 1 is a vertical sectional front view of a vacuum pump 10 according to an embodiment of the present invention.
  • the vacuum pump 10 includes a booster pump 12 disposed on a vacuum side and a main pump 14 disposed on an atmosphere side, which are connected to each other by a joint pipe 16.
  • the main pump 14 comprises a six-stage roots vacuum pump
  • the booster pump 12 comprises a single-stage roots vacuum pump.
  • the booster pump 12 includes a pump casing 22 having a substantially cylindrical outer barrel 20 with a pump chamber 18 defined therein, and a pair of rotational shafts 26 disposed through the pump casing 22 and synchronously rotatable about their own axes in respective opposite directions by energizing an electric motor 24.
  • the pump chamber 18 houses a pair of rotor 28, such as two-lobed rotors, rotatably therein with a predetermined clearance therebetween.
  • the rotors 28 are fixedly mounted respectively on the rotational shafts 26.
  • the outer barrel 20 has an inlet port 20a defined in its wall and connected to a discharge pipe (not shown) extending from a vacuum chamber or the like that is to be evacuated by the vacuum pump 10, and an outlet port 20b defined in its wall and connected to the joint pipe 16.
  • a process gas from the vacuum chamber or the like flows through the inlet port 24a into the pump chamber 18, is compressed by the rotors 28 in the pump chamber 18, and is then discharged through the outlet port 20b into the joint pipe 16.
  • the outer circumferential surface of the outer barrel 20 of the pump casing 22, except the inlet port 20a and the outlet port 20b, is surrounded by a heater jacket 30 which is of a substantially hollow cylindrical shape. When energized, the heater jacket 30 heats the interior of the pump chamber 18.
  • the booster pump 12 is generally kept at a high vacuum level (low pressure level) therein, and has a low temperature as it does not produce much heat of compression. Therefore, even if the pressure in the pump chamber 18 is low, a sublimable substance or the like contained in the process gas, which has flowed into the pump chamber 18, is liable to be deposited on the inner circumferential surface of the pump chamber 18. However, by increasing the temperature in the pump chamber 18 by the heater jacket 30 as described above, the sublimable substance or the like contained in the process gas, which has flowed into the pump chamber 18, is prevented from being deposited on the inner circumferential surface of the pump chamber 18.
  • Two side panels 32a, 32b are disposed respectively on the axial ends of the pump casing 22.
  • the rotational shafts 26 are rotatably supported at their outer ends by bearings 36a, 36b housed in bearing housings 34a, 34b that are mounted respectively on the side panels 32a, 32b.
  • Two lubricant housings 40a, 40b for holding a lubricant therein are disposed on respective outer side surfaces of the side panels 32a, 32b.
  • the electric motor 24 has a motor housing coupled to one of the lubricant housings 40b.
  • the side panels 32a, 32b have respective purge gas passages 42a, 42b for supplying a purge gas, such as an N 2 gas or the like, to the portions of the rotational shafts 26 in the side panels 32a, 32b to prevent the process gas from flowing out of the pump chamber 18 into the bearings 36a, 36b.
  • a purge gas such as an N 2 gas or the like
  • the purge gas supplied from the purge gas passages 42a, 42b provides non-contact seals between the side panels 32a, 32b and the rotational shafts 26 for protecting the rotational shafts 26 against contact-induced wear.
  • the main pump 14 of this embodiment comprises a six-stage roots vacuum pump, and includes a pump casing 56 having a substantially cylindrical outer barrel 54 with six pump chambers 50a-50f, i.e., first- through sixth-stage pump chambers 50a-50f, defined therein, an atmosphere-vented compartment 52 defined therein adjacent to the sixth-stage pump chamber 50f, and a pair of rotational shafts 60 disposed through the pump casing 56 and synchronously rotatable about their own axes in respective opposite directions by energizing an electric motor 58.
  • the first-stage pump chamber 50a which is disposed on a suction side of the main pump 14, houses a pair of rotors 62a, such as three-lobed rotors, rotatably therein, as shown in FIG. 2 .
  • the second-stage pump chamber 50b houses a pair of rotors 62b, such as three-lobed rotors, rotatably therein
  • the third-stage pump chamber 50c houses a pair of rotors 62c, such as three-lobed rotors, rotatably therein.
  • the fourth-stage pump chamber 50d houses a pair of rotors 62d, such as three-lobed rotors, rotatably therein
  • the fifth-stage pump chamber 50e houses a pair of rotors 62e, such as three-lobed rotors, rotatably therein
  • the sixth-stage pump chamber 50e which is disposed on a discharge side of the main pump 14, houses a pair of rotors 62f, such as three-lobed rotors, rotatably therein.
  • One linear array of rotors 62a-62f is fixedly mounted on one of the rotational shafts 60, whereas the other linear array of rotors 62a-62f is fixedly mounted on the other rotational shaft 60.
  • the pump casing 56 has a pair of end walls 64a, 64b closing the respective opposite ends of the outer barrel 54 and five, i.e., first through fifth, partition walls 66a-66e that partition the interior of the outer barrel 54.
  • the end wall 64a and the first partition wall 66a define the first-stage pump chamber 50a therebetween in the outer barrel 54.
  • the first partition wall 66a and the second partition wall 66b define the second-stage pump chamber 50b therebetween in the outer barrel 54.
  • the second partition wall 66b and the third partition wall 66c define the third-stage pump chamber 50c therebetween in the outer barrel 54.
  • the third partition wall 66c and the fourth partition wall 66d define the fourth-stage pump chamber 50d therebetween in the outer barrel 54.
  • the fourth partition wall 66d and the fifth partition wall 66e define the fifth-stage pump chamber 50e therebetween in the outer barrel 54.
  • the fifth partition wall 66e and the end wall 64b define the sixth-stage pump chamber 50f therebetween in the outer barrel 54.
  • the end wall 64b and a side panel 80b, which is disposed adjacent and axially spaced from the end wall 64b, define the atmosphere-vented compartment 52 therebetween.
  • a process gas is introduced into the first-stage pump chamber 50a from an upper inlet side thereof which is connected to the joint pipe 16, is compressed by the rotors 62a in the first-stage pump chamber 50a, and is then discharged from the first-stage pump chamber 50a out of a lower outlet side thereof, as shown in FIG. 2 .
  • the process gas is subsequently compressed similarly in the second- through sixth-stage pump chambers 50b-50f.
  • the outer barrel 54 has an inlet port 54a defined in its side wall which is connected to the joint pipe 16 and held in fluid communication with the upper inlet side of the first-stage pump chamber 50a, and an outlet port 54b defined in its side wall which is held in fluid communication with the lower outlet side of the sixth-stage (final-stage) pump chamber 50f.
  • the outlet port 54b is also held in fluid communication with the atmosphere-vented compartment 52 through the end wall 64b. With this structure, the atmosphere-vented compartment 52 is allowed to vent to the atmosphere through the outlet port 54b.
  • the outer barrel 54 of the pump casing 56 is of a double-walled structure including an inner wall 68 and an outer wall 70 disposed outside of and spaced a certain distance from the inner wall 68, with first through fifth gas passages 72a-72e being defined therebetween.
  • first gas passage 72a extends around the first-stage pump chamber 50a
  • second gas passage 72b extends around the second-stage pump chamber 50b.
  • the third gas passage 72c extends around the third-stage pump chamber 50c
  • the fourth gas passage 72d extends around the fourth-stage pump chamber 50d
  • the fifth gas passage 72e extends around the fifth-stage pump chamber 50e.
  • the fifth gas passage 70e also extends around the sixth-stage pump chamber 50f.
  • the gas passages 72a-72e have respective portions held in fluid communication with the respective pump chambers 50a-50e through the respective lower outlet sides thereof, and also have respective portions held in fluid communication with the respective pump chambers 50b-50f through the respective upper inlet sides thereof. Therefore, as shown in FIG. 2 , the process gas that has flowed from the inlet port 54a into the first-stage pump chamber 50a through its upper inlet side is compressed in the first-stage pump chamber 50a, and then flows from the first-stage pump chamber 50a through its lower outlet side into the first gas passage 72a. Then, the process gas flows upwardly in the first gas passage 72a and reaches the upper inlet side of the second-stage pump chamber 50b.
  • the process gas flows into the second-stage pump chamber 50b through its upper inlet side and is compressed in the second-stage pump chamber 50b, and then flows from the second-stage pump chamber 50b through its lower outlet side into the second gas passage 72b. Then, the process gas flows upwardly in the second gas passage 72b and reaches the upper inlet side of the third-stage pump chamber 50c. Subsequently, the process gas is compressed in and flows through the third- through sixth-stage pump chambers 50c-50f. Thereafter, the process gas is discharged from the lower outlet side of the sixth-stage pump chamber 50f through the outlet port 54b out of the main pump 14.
  • the outer barrel 54 of the pump casing 56 is of the double-walled structure having the gas passages 72a-72e defined therein, the interiors of the pump chambers 50a-50f are reliably thermally insulated from the exteriors thereof by the high-temperature process gas flowing through the gas passages 72a-72e, for thereby maintaining the interior of the main pump 14 at a high temperature to prevent a sublimable gas or the like contained in the process gas from being converted into a solid substance and deposited in the main pump 14, i.e., on the inner circumferential surface of the pump casing 56.
  • the high-temperature process gas which flows through the gas passages 72a-72e from the lower outlet sides of the pump chambers 50a-50e to the upper inlet sides of the pump chambers 50b-50f in the next stages is effective to heat the pump chambers 50a-50f.
  • the outer circumferential surface of the outer barrel 54 of the pump casing 56 is surrounded by a thermally insulative jacket 74 which is of a substantially hollow cylindrical shape.
  • the thermally insulative jacket 74 thermally insulates the interiors of the pump chambers 50a-50f from the exteriors thereof, thereby keeping the interiors of the pump chambers 50a-50f constant in temperature.
  • Two side panels 80a, 80b are disposed respectively on the end walls 64a, 64b of the pump casing 56.
  • the rotational shafts 60 are rotatably supported at their outer ends by bearings 84a, 84b housed in bearing housings 82a, 82b that are mounted respectively on the side panels 80a, 80b.
  • Two lubricant housings 88a, 88b, for holding a lubricant therein, are disposed on respective outer side surfaces of the side panels 80a, 80b.
  • the electric motor 58 has a motor housing coupled to one of the lubricant housings 88b.
  • the side panels 80a, 80b have respective purge gas passages 90a, 90b for supplying a purge gas, such as an N 2 gas or the like, to the portions of the rotational shafts 60 in the side panels 80a, 80b to prevent the process gas from flowing out of the pump chambers 50a-50f into the bearings 84a, 84b.
  • the purge gas supplied from the purge gas passages 90a, 90b provides non-contact seals between the side panels 80a, 80b and the rotational shafts 60 for protecting the rotational shafts 60 against contact-induced wear.
  • the purge gas, which has flowed through the purge gas passage 90b also flows into the atmospheric-vented compartment 52.
  • the atmospheric-vented compartment 52 which is held in fluid communication with the outlet port 54b and vented to the atmosphere, is defined between the end wall 64b near the sixth-stage (final-stage) pump chamber 50f wherein the process gas is of the highest pressure and the side panel 80b which is disposed adjacent to the end wall 64b.
  • the lubricant housing 88b which houses therein the bearing housing 82 with the bearings 84b disposed therein is mounted on the side panel 80b.
  • a chamber R which is positioned outside the atmosphere-vented compartment 52 and houses the bearings 84b therein i.e., a chamber R which is surrounded by the side panel 80b and the lubricant housing 88b, is maintained essentially at the atmospheric pressure at all times.
  • the process gas, which has flowed into the pump chambers 50a-50f, is thus reliably prevented from leaking into the chamber R that is positioned outside the atmosphere-vented compartment 52 and houses the bearings 84b therein.
  • the bearings 84b are thus protected against the process gas.
  • the bearings 84b are protected against the process gas. If there are non-contact seals between the rotational shafts 60 and the side panel 80b, and the sixth-stage (final-stage) pump chamber 50f is positioned directly next to the side panel 80b, or in other words, if the atmosphere-vented compartment 52 is dispensed with, then the pressure in the chamber R which is positioned outside the atmosphere-vented compartment 52 and houses the bearing 84b therein, i.e., the chamber R which is surrounded by the side panel 80b and the lubricant housing 88b, is substantially equal to the average pressure in the sixth-stage (final-stage) pump chamber 50f.
  • the pressure on the outlet side of the sixth-stage pump chamber 50f is the atmospheric pressure of 760 Torr and the pressure on the inlet side thereof is, e.g., 200 Torr, which is lower than the atmospheric pressure
  • the atmospheric-vented compartment 52 which is held in fluid communication with the outlet port 54b and vented to the atmosphere, is defined between the end wall 64b near the sixth-stage (final-stage) pump chamber 50f and the side panel 80b which is disposed adjacent to the end wall 64b.
  • the pressure in the atmospheric-vented compartment 52 remains unchanged from the atmospheric pressure, and hence the pressure in the chamber R which is positioned outside the atmosphere-vented compartment 52 and houses the bearings 84b therein, i.e., a chamber R which is surrounded by the side panel 80b and the lubricant housing 88b, is not affected by the change in the pressure in the sixth-stage pump chamber 50f, but is maintained essentially at the atmospheric pressure.
  • the vacuum pump 10 thus constructed operates by energizing the electric motor 24 of the booster pump 12 and the electric motor 58 of the main pump 14 to actuate the booster pump 12 and the main pump 14 to discharge the process gas, which has been introduced into, e.g., a vacuum chamber, from the vacuum chamber.
  • a vacuum chamber e.g., a vacuum chamber
  • the chamber R which is positioned outside the atmosphere-vented compartment 52 and houses the bearings 84b therein, i.e., a chamber R which is surrounded by the side panel 80b and the lubricant housing 88b, is maintained essentially at the atmospheric pressure at all times, the process gas that has been introduced into the main pump 14 is reliably prevented from leaking into the bearings 84b. Therefore, the bearings 84b are protected against the process gas.
  • the present invention is not limited to the embodiments described above within the scope of the inventive concept as expressed herein.
  • the present invention is applied to a multistage roots vacuum pump.
  • the principles of the present invention are also applicable to vacuum pumps of different types, e.g., a single-stage roots vacuum pump, a claw vacuum pump, a screw vacuum pump, or a vacuum pump including at least two of roots, claw, and screw pump mechanisms on common rotational shafts.
  • the present invention is applicable to a vacuum pump for use in a process wherein a sublimable gas or a corrosive gas tends to flow into the vacuum pump.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (4)

  1. Pompe à vide comprenant :
    un carter de pompe (56) comportant un accès d'entrée (54a), un accès de sortie (54b) et une pluralité de chambres de pompe (50a-50f) définie dedans ;
    un arbre rotatif (60) ayant des extrémités opposées supportées en rotation par des roulements (84a, 84b) et s'étendant longitudinalement dans le carter de pompe (56) ; et
    un rotor (62a-62f) logé dans les chambres de pompe (50a-50f) et couplé à l'arbre rotatif (60) pour tourner à l'unisson avec l'arbre rotatif (60) ;
    caractérisée en ce que
    le carter de pompe (56) comporte un compartiment ventilé sur l'atmosphère (52) défini dedans, qui est maintenu en communication de fluide avec l'accès de sortie (54b) du carter de pompe (56) et ventilé sur l'atmosphère,
    dans laquelle le carter de pompe (56) comporte en outre un fût extérieur (54) ayant une structure à double paroi comprenant une paroi intérieure (68) et une paroi extérieure (70) disposée à l'extérieur et espacée d'une certaine distance par rapport à la paroi intérieure (68), et des passages de gaz (72a-72e) sont définis entre la paroi intérieure (68) et la paroi extérieure (70), à travers lesquels s'écoule un gaz de traitement à haute température à partir d'un côté de sortie inférieur des chambres de pompe vers un côté d'entrée supérieur des chambres de pompe dans les étages suivants pour chauffer les chambres de pompe,
    dans laquelle le carter de pompe (56) comporte en outre une paroi d'extrémité du côté de la sortie (64b) fermant une extrémité du fût extérieur (54), et
    dans laquelle le compartiment ventilé sur l'atmosphère (52) est défini entre la paroi d'extrémité du côté de la sortie (64b) et un panneau latéral (80b) qui est disposé adjacent à, et espacé de la paroi d'extrémité du côté de la sortie (64b).
  2. Pompe à vide selon la revendication 1, dans laquelle le carter de pompe (56) comporte en outre une paroi d'extrémité du côté de l'entrée (64a) fermant une extrémité du fût extérieur (54) et disposée adjacente à un panneau latéral (80a) qui est prévu au niveau d'un côté d'entrée du carter de pompe (56).
  3. Pompe à vide selon la revendication 1, dans laquelle l'arbre rotatif (60) s'étend à travers le panneau latéral (80b), et le panneau latéral (80b) comporte un passage de gaz de purge (90a) défini dedans pour fournir un gaz de purge à une portion de l'arbre rotatif (60) qui est disposée dans le panneau latéral (80b).
  4. Pompe à vide selon la revendication 2, dans laquelle l'arbre rotatif (60) s'étend à travers le panneau latéral (80a), et le panneau latéral (80a) comporte un passage de gaz de purge (90a) défini dedans pour fournir un gaz de purge à une portion de l'arbre rotatif (90) qui est disposée dans le panneau latéral (80a).
EP12793624.3A 2011-06-02 2012-05-29 Pompe à vide Active EP2715139B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011123980A JP5677202B2 (ja) 2011-06-02 2011-06-02 真空ポンプ
PCT/JP2012/064346 WO2012165645A1 (fr) 2011-06-02 2012-05-29 Pompe à vide

Publications (3)

Publication Number Publication Date
EP2715139A1 EP2715139A1 (fr) 2014-04-09
EP2715139A4 EP2715139A4 (fr) 2014-12-17
EP2715139B1 true EP2715139B1 (fr) 2018-01-10

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ID=47259490

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Application Number Title Priority Date Filing Date
EP12793624.3A Active EP2715139B1 (fr) 2011-06-02 2012-05-29 Pompe à vide

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US (1) US20140112815A1 (fr)
EP (1) EP2715139B1 (fr)
JP (1) JP5677202B2 (fr)
KR (1) KR101760550B1 (fr)
CN (1) CN103477080A (fr)
TW (1) TWI554684B (fr)
WO (1) WO2012165645A1 (fr)

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US9752571B2 (en) * 2012-07-03 2017-09-05 Brian J. O'Connor Multiple segment lobe pump
CN106662108A (zh) * 2014-06-27 2017-05-10 阿特利耶博世股份有限公司 真空泵系统中的泵送方法以及真空泵系统
WO2017031807A1 (fr) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 Pompe à vide non coaxiale à multiples chambres d'entraînement
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
DE202017003212U1 (de) * 2017-06-17 2018-09-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
CN107084135A (zh) * 2017-06-29 2017-08-22 德耐尔节能科技（上海）股份有限公司 一种干式螺旋真空泵
KR102610994B1 (ko) * 2019-06-19 2023-12-06 가시야마고교가부시끼가이샤 진공펌프
FR3119209B1 (fr) * 2021-01-25 2023-03-31 Pfeiffer Vacuum Pompe à vide de type sèche et groupe de pompage

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JPH05296171A (ja) * 1992-04-13 1993-11-09 Ulvac Japan Ltd 封液を用いない容積型真空ポンプの軸シール機構
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Also Published As

Publication number Publication date
JP5677202B2 (ja) 2015-02-25
EP2715139A1 (fr) 2014-04-09
KR20140023958A (ko) 2014-02-27
EP2715139A4 (fr) 2014-12-17
US20140112815A1 (en) 2014-04-24
TWI554684B (zh) 2016-10-21
CN103477080A (zh) 2013-12-25
WO2012165645A1 (fr) 2012-12-06
TW201307685A (zh) 2013-02-16
KR101760550B1 (ko) 2017-07-21
JP2012251471A (ja) 2012-12-20

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