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EP1504846B1 - Polishing plate with a polishing cloth that does adhere only horizontally to the holder - Google Patents

Polishing plate with a polishing cloth that does adhere only horizontally to the holder Download PDF

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Publication number
EP1504846B1
EP1504846B1 EP04354026A EP04354026A EP1504846B1 EP 1504846 B1 EP1504846 B1 EP 1504846B1 EP 04354026 A EP04354026 A EP 04354026A EP 04354026 A EP04354026 A EP 04354026A EP 1504846 B1 EP1504846 B1 EP 1504846B1
Authority
EP
European Patent Office
Prior art keywords
layer
cloth
polishing
support
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP04354026A
Other languages
German (de)
French (fr)
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EP1504846A1 (en
Inventor
Lucien Grisel
Jean Roulet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Procedes Et Equipements Pour Les Sciences Et L'industrie
Original Assignee
Procedes Et Equipements Pour Les Sciences Et L'industrie
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Publication of EP1504846A1 publication Critical patent/EP1504846A1/en
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Publication of EP1504846B1 publication Critical patent/EP1504846B1/en
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/20—Mountings for the wheels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0072—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using adhesives for bonding abrasive particles or grinding elements to a support, e.g. by gluing

Definitions

  • the fixing of a polishing cloth on a support can intervene in different ways depending on the use of the fabric.
  • the fabric having an upper face intended to be in contact with a workpiece and a lower face through which the fabric is attached to the support, it can be, for example, fixed directly by gluing with an adhesive coating distributed on the underside fabric.
  • a first adhesive coating is disposed between the underside of the fabric and the flexible sheet and a second adhesive coating is disposed between the flexible sheet and the backing.
  • the flexible sheet provides an assembly having a certain rigidity.
  • the polishing cloth can not be peeled off the support without being damaged.
  • the permanent attachment of the fabric on the support makes the use of the tray and its storage inconvenient and cumbersome. Indeed, this requires storing, for each type of fabric, a support and, when polishing a part that requires several types of tissue, it is necessary to change, at each operation, the support of the tray on the machine of polishing.
  • the patent application WO-A-0153042 proposes to use a polishing cloth comprising a polishing element comprising a support on which is disposed an abrasive coating, a sub-fabric whose surface makes it possible to fix the polishing cloth on a tray and a layer with multiple gluing.
  • the multiple-bonding layer adheres the polishing element to the sub-fabric during the polishing operation and then replaces it after it has been used.
  • It can also be formed by a self-adhesive adhesive system in the form of a ribbon comprising, for example, an elastic support.
  • an abrasive coating comprises a self-adhesive adhesive layer disposed on the non-abrasive surface of a polishing cloth so as to secure the polishing cloth on a fabric support.
  • the self-adhesive layer preferably has sufficient peel strength to allow good adhesion between the polishing cloth and the carrier during use but not so high that it can be removed without tearing off the bottom layer.
  • the invention aims to achieve a relatively inexpensive polishing plate and to maintain a perfect adhesion between the fabric and the support, especially when the plate is subjected to a rotational movement, while facilitating a tissue change.
  • the adhesion layer consists of a web of artificial cellulosic fibers, impregnated with silicone elastomer with an adhesive mass of synthetic rubber, so that the fabric adheres perfectly only to horizontally to the support, the free surface of the underlayer being smooth.
  • the adhesion layer has a thickness of 400 .mu.m.
  • the adhesion means also comprise a layer of polyvinyl chloride, disposed between the first layer of adhesive and a second layer of adhesive disposed on the support.
  • a polishing plate 1 comprises a support 2, preferably in the form of a metal disk and comprising upper faces 2a and lower 2b ( figure 2 ).
  • a mechanical or mechano-chemical polishing cloth 3 must be fixed on the upper face 2a of the support.
  • the tray is intended to be arranged, by the bottom face 2b of the support, in a polishing machine and, preferably, on a tray support.
  • the tray is generally used in various applications, such as the preparation of metallographic samples, geological pieces or semiconductor substrates.
  • the polishing cloth 3 comprises a surface coating 4 for the mechanical or mechano-chemical polishing of parts.
  • the plate is driven in a rotational movement and the parts are placed on the surface coating 4 of the fabric, so as to obtain parts with a polished surface.
  • an abrasive liquid intended to facilitate the polishing of the parts such as a diamond suspension, is poured onto the surface coating of the fabric.
  • the surface coating of the fabric is of the type conventionally used for polishing parts. Thus, it can be diamond, composite smooth, embossed or embossed, or abrasive paper.
  • An intermediate layer 5 ensures the permanent fixing of the surface coating 4 on a sub-layer 6 having a smooth free surface 6a.
  • the free surface 6a is intended to ensure contact and fixation of the fabric on the support 2.
  • the underlayer 6 may be of any type of material having a smooth free surface 6a. It may, for example, be of polyvinyl chloride or polyester and the intermediate layer 5 is made of a strongly adhesive material such as a material having an acrylic adhesive mass.
  • the fixing of the polishing cloth 3 on the support 2 is carried out by means of at least one adhesion layer 7 fixed permanently to the upper face 2a of the support 2.
  • the permanent fixing of the adhesion layer 7 is carried out via at least a first layer of adhesive 8.
  • a layer of polyvinyl chloride 9 is preferably disposed between the first layer of adhesive 8 and a second layer of adhesive 10 disposed on the upper surface 2a of the support 2, as illustrated in FIGS. Figures 1 and 2 .
  • the first and second adhesive layers 8 and 10 are preferably made of an acrylic adhesive mass material and the adhesion layer 7 is constituted by a web of artificial cellulosic fibers, and preferably an impregnated fibranne®-type web. of silicone elastomer with an adhesive mass of synthetic rubber.
  • the adhesion layer 7 is preferably 400 ⁇ m thick.
  • the adhesion layer 7 allows the fabric to adhere perfectly to the support, but only horizontally thereto, especially thanks to the smooth free surface 6a of the underlayer 6 of the fabric 3.
  • the fabric does not adhere perfectly only horizontally to the support.
  • adhering only horizontally to the support it is meant that, when pulling on the polishing cloth along a traction axis located in the plane of the interface 11 between the free surface 6a of the underlayer 6 and the adhesion layer 7, the fabric 3 does not move and adheres perfectly to the adhesion layer 7, the plane of the interface 11 being a horizontal plane relative to the support 7.
  • the adhesion layer 7 being fixed permanently to the support 2, the fabric 3 adheres perfectly to the support 2 in the horizontal plane.
  • the fabric when the plate undergoes a rotational movement along a vertical axis of rotation s1, the fabric does not move despite the centrifugal force created, the vertical axis of rotation s1 being, preferably, an axis of symmetry of the plate 1.
  • the vertical axis of rotation s1 By against, it suffices to lift the fabric 3, that is to say to pull the fabric 3 along a traction axis not contained in the horizontal plane of the plate and, preferably, substantially vertically to the interface 11, for that the fabric no longer adheres to the support. It comes off virtually without any resistance to the detachment and can thus be very easily removed from the support without being damaged. A single support can therefore be used for the different types of fabrics used during the polishing process of a part.
  • Such a mode of adhesion advantageously makes it possible to achieve a reversible attachment of the polishing cloth 3 to the support 2 without using a mechanical fastening element.
  • This also reduces the storage space of the polishing trays, because the space required to store a predetermined amount of polishing cloth is less than that required to store the same amount of tissue respectively bonded to a carrier.
  • the cost of the adhesion layer 7, the adhesive layers 8 and 10, and the polyvinyl chloride layer 9 is relatively low compared to the cost of a magnetic coating and it is easier to clean. the tissues alone.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

The polishing sheet (1) consists of a backing layer (2) with a mechanical or mechano-chemical polishing material comprising a surface coating (4), an intermediate fixing layer (5) and an under-layer (6). (2) Has an adhesive surface of synthetic cellulose fibres impregnated with a silicone elastomer and adhesive synthetic rubber allowing the polishing material to adhere only perfectly horizontally to it.

Description

Domaine technique de l'inventionTechnical field of the invention

L'invention concerne un plateau de polissage comportant :

  • un support,
  • un tissu de polissage mécanique ou mécano-chimique comprenant un revêtement superficiel, une couche intermédiaire assurant la fixation permanente du revêtement superficiel sur une sous-couche ayant une surface libre,
  • et des moyens de fixation disposés entre le support et la surface libre de la sous-couche du tissu et comportant des moyens d'adhérence comportant au moins une couche d'adhérence fixée de manière permanente sur le support par l'intermédiaire d'une première couche de colle.
The invention relates to a polishing plate comprising:
  • a support,
  • a mechanical or mechano-chemical polishing cloth comprising a surface coating, an intermediate layer ensuring the permanent fixing of the surface coating on a sub-layer having a free surface,
  • and fixing means disposed between the support and the free surface of the underlayer of the fabric and having adhesion means comprising at least one adhesion layer permanently attached to the support via a first layer of glue.

État de la techniqueState of the art

De manière connue, la fixation d'un tissu de polissage sur un support, destiné, par exemple à être placé dans une machine de polissage, peut intervenir de différentes manières en fonction de l'utilisation du tissu. Le tissu comportant une face supérieure destinée à être en contact avec une pièce à polir et une face inférieure par laquelle le tissu est fixé au support, il peut être, par exemple, fixé directement par collage grâce à un revêtement adhésif réparti sur la face inférieure du tissu.In known manner, the fixing of a polishing cloth on a support, intended, for example to be placed in a polishing machine, can intervene in different ways depending on the use of the fabric. The fabric having an upper face intended to be in contact with a workpiece and a lower face through which the fabric is attached to the support, it can be, for example, fixed directly by gluing with an adhesive coating distributed on the underside fabric.

Il peut également être fixé grâce à une feuille souple en polychlorure de vinyle ou en matériau similaire. Un premier revêtement adhésif est disposé entre la face inférieure du tissu et la feuille souple et un second revêtement adhésif est disposé entre la feuille souple et le support. La feuille souple permet d'obtenir un ensemble présentant une certaine rigidité.It can also be fixed using a flexible sheet of polyvinyl chloride or similar material. A first adhesive coating is disposed between the underside of the fabric and the flexible sheet and a second adhesive coating is disposed between the flexible sheet and the backing. The flexible sheet provides an assembly having a certain rigidity.

Dans ces deux cas, après fixation, le tissu de polissage ne peut pas être décollé du support sans être endommagé. Or, la fixation permanente du tissu sur le support rend l'utilisation du plateau et son stockage peu pratique et encombrante. En effet, cela oblige à stocker, pour chaque type de tissu, un support et, lors du polissage d'une pièce qui nécessite plusieurs types de tissus, il est nécessaire de changer, à chaque opération, le support du plateau sur la machine de polissage.In these two cases, after fixing, the polishing cloth can not be peeled off the support without being damaged. However, the permanent attachment of the fabric on the support makes the use of the tray and its storage inconvenient and cumbersome. Indeed, this requires storing, for each type of fabric, a support and, when polishing a part that requires several types of tissue, it is necessary to change, at each operation, the support of the tray on the machine of polishing.

Il est également connu de fixer le tissu par attraction magnétique au moyen d'un revêtement magnétique collé sur la face inférieure du tissu. Bien que ce mode de fixation permette d'utiliser un même support pour plusieurs types de tissus, il nécessite, cependant, de coller sur la face inférieure de chaque tissu un revêtement magnétique qui est relativement coûteux.It is also known to fix the fabric by magnetic attraction by means of a magnetic coating adhered to the underside of the fabric. Although this mode of attachment allows to use the same support for several types of tissue, it requires, however, to stick on the underside of each fabric a magnetic coating that is relatively expensive.

Il a été proposé d'utiliser des couches permettant de faire adhérer un tissu de polissage sur un support de manière à pouvoir le décoller facilement une fois celui-ci usé et à le remplacer. Ainsi, la demande de brevet WO-A-0153042 propose d'utiliser un tissu de polissage comportant un élément de polissage comprenant un support sur lequel est disposé un revêtement abrasif, un sous-tissu dont une surface permet de fixer le tissu de polissage sur un plateau et une couche à recollage multiple. La couche à recollage multiple permet de faire adhérer l'élément de polissage sur le sous-tissu pendant l'opération de polissage puis de le remplacer une fois celui-ci usé. Elle peut, également, être formée par un système adhésif auto-collant sous forme d'un ruban comprenant, par exemple, un support élastique.It has been proposed to use layers for adhering a polishing cloth on a support so that it can be easily peeled off once used and replaced. Thus, the patent application WO-A-0153042 proposes to use a polishing cloth comprising a polishing element comprising a support on which is disposed an abrasive coating, a sub-fabric whose surface makes it possible to fix the polishing cloth on a tray and a layer with multiple gluing. The multiple-bonding layer adheres the polishing element to the sub-fabric during the polishing operation and then replaces it after it has been used. It can also be formed by a self-adhesive adhesive system in the form of a ribbon comprising, for example, an elastic support.

Dans la demande de brevet EP-A-0418093 , un revêtement abrasif comporte une couche adhésive auto-collante disposée sur la surface non abrasive d'un tissu de polissage de manière à fixer le tissu de polissage sur un support de tissu. La couche auto-collante présente, de préférence, une résistance de pelage suffisante pour permettre une bonne adhésion entre le tissu de polissage et le support lors de son utilisation mais pas trop élevée pour pouvoir être retirée sans arracher la couche inférieure.In the request for EP-A-0418093 an abrasive coating comprises a self-adhesive adhesive layer disposed on the non-abrasive surface of a polishing cloth so as to secure the polishing cloth on a fabric support. The self-adhesive layer preferably has sufficient peel strength to allow good adhesion between the polishing cloth and the carrier during use but not so high that it can be removed without tearing off the bottom layer.

Objet de l'inventionObject of the invention

L'invention a pour but de réaliser un plateau de polissage relativement peu cher et permettant de conserver une parfaite adhésion entre le tissu et le support, notamment lorsque le plateau est soumis à un mouvement de rotation, tout en facilitant un changement de tissus.The invention aims to achieve a relatively inexpensive polishing plate and to maintain a perfect adhesion between the fabric and the support, especially when the plate is subjected to a rotational movement, while facilitating a tissue change.

Selon l'invention, ce but est atteint par les revendications annexées.According to the invention, this object is achieved by the appended claims.

Plus particulièrement, ce but est atteint par le fait que la couche d'adhérence est constituée par une toile de fibres cellulosiques artificielles, imprégnée d'élastomère de silicone avec une masse adhésive en caoutchouc synthétique, de sorte que le tissu n'adhère parfaitement qu'horizontalement au support, la surface libre de la sous-couche étant lisse.More particularly, this object is achieved by the fact that the adhesion layer consists of a web of artificial cellulosic fibers, impregnated with silicone elastomer with an adhesive mass of synthetic rubber, so that the fabric adheres perfectly only to horizontally to the support, the free surface of the underlayer being smooth.

Selon un développement de l'invention, la couche d'adhérence a une épaisseur de 400µm.According to a development of the invention, the adhesion layer has a thickness of 400 .mu.m.

Selon un mode de réalisation préférentiel, les moyens d'adhérence comportent également une couche en polychlorure de vinyle, disposée entre la première couche de colle et une seconde couche de colle disposée sur le support.According to a preferred embodiment, the adhesion means also comprise a layer of polyvinyl chloride, disposed between the first layer of adhesive and a second layer of adhesive disposed on the support.

Description sommaire des dessinsBrief description of the drawings

D'autres avantages et caractéristiques ressortiront plus clairement de la description qui va suivre de modes particuliers de réalisation de l'invention donnés à titre d'exemples non limitatifs et représentés aux dessins annexés, dans lesquels :

  • La figure 1 représente schématiquement, en coupe, un plateau de polissage selon l'invention.
  • La figure 2 est une représentation schématique, en coupe, du support du plateau selon la figure 1.
  • La figure 3 est une représentation schématique, en coupe, du tissu de polissage du plateau selon la figure 2.
Other advantages and features will emerge more clearly from the following description of particular embodiments of the invention given by way of non-limiting example and represented in the accompanying drawings, in which:
  • The figure 1 schematically shows, in section, a polishing plate according to the invention.
  • The figure 2 is a schematic representation, in section, of the support of the tray according to the figure 1 .
  • The figure 3 is a schematic representation, in section, of the polishing cloth of the tray according to the figure 2 .

Description de modes particuliers de réalisationDescription of particular embodiments

Comme illustré aux figures 1 à 3, un plateau de polissage 1 comporte un support 2, de préférence sous forme d'un disque en métal et comprenant des faces supérieure 2a et inférieure 2b (figure 2). Un tissu de polissage 3 mécanique ou mécano-chimique doit être fixé sur la face supérieure 2a du support. Le plateau est destiné à être disposé, par la face inférieure 2b du support, dans une machine de polissage et, de préférence, sur un élément de support de plateau. Le plateau est, généralement utilisé, dans des applications diverses, telles que la préparation d'échantillons métallographiques, de pièces géologiques ou de substrats semi-conducteurs.As illustrated in Figures 1 to 3 , a polishing plate 1 comprises a support 2, preferably in the form of a metal disk and comprising upper faces 2a and lower 2b ( figure 2 ). A mechanical or mechano-chemical polishing cloth 3 must be fixed on the upper face 2a of the support. The tray is intended to be arranged, by the bottom face 2b of the support, in a polishing machine and, preferably, on a tray support. The tray is generally used in various applications, such as the preparation of metallographic samples, geological pieces or semiconductor substrates.

Comme illustré à la figure 3, le tissu de polissage 3 comprend un revêtement superficiel 4 permettant le polissage mécanique ou mécano-chimique de pièces. Ainsi, au cours d'une opération de polissage, le plateau est animé d'un mouvement de rotation et les pièces sont posées sur le revêtement superficiel 4 du tissu, de manière à obtenir des pièces avec une surface polie. De plus, lors de l'opération de polissage et selon le type de revêtement superficiel utilisé, un liquide abrasif destiné à faciliter le polissage des pièces, tel qu'une suspension diamantée, est déversé sur le revêtement superficiel du tissu. Le revêtement superficiel du tissu est du type de ceux classiquement utilisés pour réaliser le polissage de pièces. Ainsi, il peut être diamanté, composite lisse, embossé ou gaufré, ou en papier abrasif. Une couche intermédiaire 5 assure la fixation permanente du revêtement superficiel 4 sur une sous-couche 6 ayant une surface libre 6a lisse. La surface libre 6a est destinée à assurer le contact et la fixation du tissu sur le support 2. La sous-couche 6 peut être en tout type de matériau présentant une surface libre 6a lisse. Elle peut, par exemple, être en polychlorure de vinyle ou en polyester et la couche intermédiaire 5 est constituée par un matériau fortement adhésif tel qu'un matériau ayant une masse adhésive acrylique.As illustrated in figure 3 , the polishing cloth 3 comprises a surface coating 4 for the mechanical or mechano-chemical polishing of parts. Thus, during a polishing operation, the plate is driven in a rotational movement and the parts are placed on the surface coating 4 of the fabric, so as to obtain parts with a polished surface. In addition, during the polishing operation and according to the type of surface coating used, an abrasive liquid intended to facilitate the polishing of the parts, such as a diamond suspension, is poured onto the surface coating of the fabric. The surface coating of the fabric is of the type conventionally used for polishing parts. Thus, it can be diamond, composite smooth, embossed or embossed, or abrasive paper. An intermediate layer 5 ensures the permanent fixing of the surface coating 4 on a sub-layer 6 having a smooth free surface 6a. The free surface 6a is intended to ensure contact and fixation of the fabric on the support 2. The underlayer 6 may be of any type of material having a smooth free surface 6a. It may, for example, be of polyvinyl chloride or polyester and the intermediate layer 5 is made of a strongly adhesive material such as a material having an acrylic adhesive mass.

La fixation du tissu de polissage 3 sur le support 2 est réalisée au moyen d'au moins une couche d'adhérence 7 fixée, de manière permanente, à la face supérieure 2a du support 2. La fixation permanente de la couche d'adhérence 7 est réalisée par l'intermédiaire d'au moins une première couche de colle 8. Une couche en polychlorure de vinyle 9 est, de préférence, disposée entre la première couche de colle 8 et une seconde couche de colle 10 disposée sur la surface supérieure 2a du support 2, comme illustrée aux figures 1 et 2. Les première et seconde couches de colle 8 et 10 sont, de préférence, en un matériau de masse adhésive acrylique et la couche d'adhérence 7 est constituée par une toile de fibres cellulosiques artificielles, et de préférence une toile de type fibranne®, imprégnée d'élastomère de silicone avec une masse adhésive en caoutchouc synthétique. La couche d'adhérence 7 a, de préférence, une épaisseur de 400µm.The fixing of the polishing cloth 3 on the support 2 is carried out by means of at least one adhesion layer 7 fixed permanently to the upper face 2a of the support 2. The permanent fixing of the adhesion layer 7 is carried out via at least a first layer of adhesive 8. A layer of polyvinyl chloride 9 is preferably disposed between the first layer of adhesive 8 and a second layer of adhesive 10 disposed on the upper surface 2a of the support 2, as illustrated in FIGS. Figures 1 and 2 . The first and second adhesive layers 8 and 10 are preferably made of an acrylic adhesive mass material and the adhesion layer 7 is constituted by a web of artificial cellulosic fibers, and preferably an impregnated fibranne®-type web. of silicone elastomer with an adhesive mass of synthetic rubber. The adhesion layer 7 is preferably 400 μm thick.

La couche d'adhérence 7 permet au tissu d'adhérer parfaitement au support, mais uniquement horizontalement à celui-ci, notamment grâce à la surface libre 6a lisse de la sous-couche 6 du tissu 3. Ainsi, le tissu n'adhère parfaitement qu'horizontalement au support. Par n'adhérer qu'horizontalement au support, on entend que, lorsque l'on tire sur le tissu de polissage selon un axe de traction situé dans le plan de l'interface 11 entre la surface libre 6a de la sous-couche 6 et la couche d'adhérence 7, le tissu 3 ne se déplace pas et adhère parfaitement à la couche d'adhérence 7, le plan de l'interface 11 étant un plan horizontal par rapport au support 7. Ainsi, la couche d'adhérence 7 étant fixée de manière permanente au support 2, le tissu 3 adhère parfaitement au support 2 dans le plan horizontal. Ainsi, lorsque le plateau subit un mouvement de rotation selon un axe de rotation vertical s1, le tissu ne bouge pas malgré la force centrifuge créée, l'axe de rotation vertical s1 étant, de préférence, un axe de symétrie du plateau 1. Par contre, il suffit de soulever le tissu 3, c'est-à-dire de tirer sur le tissu 3 selon un axe de traction non contenu dans le plan horizontal du plateau et, de préférence, sensiblement verticalement à l'interface 11, pour que le tissu n'adhère plus au support. Il se détache alors pratiquement sans opposer aucune résistance au détachement et peut, ainsi, être très facilement retiré du support sans être endommagé. Un support unique peut donc être utilisé pour les différents types de tissus utilisés lors du procédé de polissage d'une pièce.The adhesion layer 7 allows the fabric to adhere perfectly to the support, but only horizontally thereto, especially thanks to the smooth free surface 6a of the underlayer 6 of the fabric 3. Thus, the fabric does not adhere perfectly only horizontally to the support. By adhering only horizontally to the support, it is meant that, when pulling on the polishing cloth along a traction axis located in the plane of the interface 11 between the free surface 6a of the underlayer 6 and the adhesion layer 7, the fabric 3 does not move and adheres perfectly to the adhesion layer 7, the plane of the interface 11 being a horizontal plane relative to the support 7. Thus, the adhesion layer 7 being fixed permanently to the support 2, the fabric 3 adheres perfectly to the support 2 in the horizontal plane. Thus, when the plate undergoes a rotational movement along a vertical axis of rotation s1, the fabric does not move despite the centrifugal force created, the vertical axis of rotation s1 being, preferably, an axis of symmetry of the plate 1. By against, it suffices to lift the fabric 3, that is to say to pull the fabric 3 along a traction axis not contained in the horizontal plane of the plate and, preferably, substantially vertically to the interface 11, for that the fabric no longer adheres to the support. It comes off virtually without any resistance to the detachment and can thus be very easily removed from the support without being damaged. A single support can therefore be used for the different types of fabrics used during the polishing process of a part.

Un tel mode d'adhérence permet avantageusement de réaliser une fixation réversible du tissu de polissage 3 sur le support 2 sans utiliser d'élément mécanique d'accrochage. Ainsi, il est possible changer uniquement le tissu de polissage du plateau, à chaque nouvelle étape d'un procédé de polissage d'une pièce, tout en conservant sur la machine de polissage, le même support recouvert par la même couche d'adhérence 7. Il permet également de stocker, uniquement les tissus de polissage et non plus les plateaux. Ceci permet, notamment, de gagner du temps lors du procédé de polissage, le changement de tissus étant effectué plus rapidement. Ceci permet également de réduire l'espace de stockage des plateaux de polissage, car l'espace requis pour stocker une quantité prédéterminée de tissus de polissage, est inférieur à celui requis pour stocker la même quantité de tissus respectivement collés à un support. De plus, le coût de la couche d'adhérence 7, des couches de colle 8 et 10, et de la couche en polychlorure de vinyle 9 est relativement peu élevé par rapport au coût d'un revêtement magnétique et il est plus facile de nettoyer les tissus seuls.Such a mode of adhesion advantageously makes it possible to achieve a reversible attachment of the polishing cloth 3 to the support 2 without using a mechanical fastening element. Thus, it is possible to change only the polishing cloth of the tray, at each new step of a polishing process of a workpiece, while retaining on the polishing machine, the same support covered by the same adhesion layer 7 It also allows to store, only the polishing cloths and not the trays. This allows, in particular, to save time during the polishing process, the tissue change being performed more quickly. This also reduces the storage space of the polishing trays, because the space required to store a predetermined amount of polishing cloth is less than that required to store the same amount of tissue respectively bonded to a carrier. In addition, the cost of the adhesion layer 7, the adhesive layers 8 and 10, and the polyvinyl chloride layer 9 is relatively low compared to the cost of a magnetic coating and it is easier to clean. the tissues alone.

Claims (9)

  1. A polishing plate comprising:
    - a holder (2),
    - a mechanical or chemical-mechanical polishing cloth (3) comprising a superficial coating (4) and a sub-layer (6) having a free surface,
    - and fixing means arranged between the holder (2) and the free surface (6a) of the sub-layer (6) of the cloth (3) and comprising adhesion means comprising at least one adhesion layer (7) fixed in permanent manner to the holder (2) by means of a first layer of adhesive,
    characterized in that:
    - the polishing cloth (3) comprises an intermediate layer (5) ensuring permanent fixing of the superficial coating (4) on the sub-layer (6),
    - the adhesion layer (7) is formed by a canvas of artificial cellulose fibres, impregnated with silicone elastomer with an adhesive mass of synthetic rubber, and the free surface of the sub-layer (6) is smooth so that the cloth (3) adheres perfectly only horizontally to the holder (2).
  2. The plate according to claim 1, characterized in that the adhesion layer (7) has a thickness of 400µm.
  3. The plate according to one of claims 1 and 2, characterized in that the adhesion means also comprise a polyvinyl chloride layer (9) arranged between the first layer of adhesive (8) and a second layer of adhesive (10) arranged on the holder (12).
  4. The plate according to any one of claims 1 to 3, characterized in that the sub-layer (6) of the cloth (3) is made from polyvinyl chloride.
  5. The plate according to any one of claims 1 to 3, characterized in that the sub-layer (6) of the cloth (3) is made from polyester.
  6. The plate according to any one of claims 1 to 5, characterized in that the superficial coating (4) of the cloth (3) is diamond-studded.
  7. The plate according to any one of claims 1 to 5, characterized in that the superficial coating (4) of the cloth (3) is composite.
  8. The plate according to claim 7, characterized in that the superficial coating (4) of the cloth (3) is embossed.
  9. The plate according to any one of claims 1 to 5, characterized in that the superficial coating (4) of the cloth (3) is made from abrasive paper.
EP04354026A 2003-08-08 2004-08-03 Polishing plate with a polishing cloth that does adhere only horizontally to the holder Expired - Lifetime EP1504846B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0309764A FR2858574B1 (en) 2003-08-08 2003-08-08 POLISHING PLATE COMPRISING A POLISHING FABRIC THAT ADDS HORIZALLALLY TO THE SUPPORT
FR0309764 2003-08-08

Publications (2)

Publication Number Publication Date
EP1504846A1 EP1504846A1 (en) 2005-02-09
EP1504846B1 true EP1504846B1 (en) 2011-11-02

Family

ID=33548322

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04354026A Expired - Lifetime EP1504846B1 (en) 2003-08-08 2004-08-03 Polishing plate with a polishing cloth that does adhere only horizontally to the holder

Country Status (3)

Country Link
EP (1) EP1504846B1 (en)
AT (1) ATE531480T1 (en)
FR (1) FR2858574B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109333390B (en) * 2018-09-26 2023-08-01 东莞市鼎泰鑫电子有限公司 Rubber substrate organic ceramic grinding block and preparation method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB799424A (en) * 1953-11-06 1958-08-06 Johnson & Johnson Pressure sensitive adhesive tapes and sheets
US3922464A (en) * 1972-05-26 1975-11-25 Minnesota Mining & Mfg Removable pressure-sensitive adhesive sheet material
US4427737A (en) * 1981-04-23 1984-01-24 E. R. Squibb & Sons, Inc. Microporous adhesive tape
US4460371A (en) * 1981-11-24 1984-07-17 Dennison Manufacturing Company Silicone pressure sensitive adhesive and uses
AU638736B2 (en) * 1989-09-15 1993-07-08 Minnesota Mining And Manufacturing Company A coated abrasive containing a pressure-sensitive adhesive coatable from water
US6746311B1 (en) * 2000-01-24 2004-06-08 3M Innovative Properties Company Polishing pad with release layer

Also Published As

Publication number Publication date
FR2858574A1 (en) 2005-02-11
FR2858574B1 (en) 2007-02-16
ATE531480T1 (en) 2011-11-15
EP1504846A1 (en) 2005-02-09

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