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EP0566573B1 - Silencieux - Google Patents

Silencieux Download PDF

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Publication number
EP0566573B1
EP0566573B1 EP91918199A EP91918199A EP0566573B1 EP 0566573 B1 EP0566573 B1 EP 0566573B1 EP 91918199 A EP91918199 A EP 91918199A EP 91918199 A EP91918199 A EP 91918199A EP 0566573 B1 EP0566573 B1 EP 0566573B1
Authority
EP
European Patent Office
Prior art keywords
silencer
coupling component
flange
outlet
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP91918199A
Other languages
German (de)
English (en)
Other versions
EP0566573A1 (fr
Inventor
Hanns-Peter Berges
Lothar Brenner
Hartmut Kriehn
Sascha Bauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Mann and Hummel GmbH
Original Assignee
Leybold AG
Filterwerk Mann and Hummel GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE9014883U external-priority patent/DE9014883U1/de
Priority claimed from DE9014888U external-priority patent/DE9014888U1/de
Priority claimed from DE19904034253 external-priority patent/DE4034253A1/de
Application filed by Leybold AG, Filterwerk Mann and Hummel GmbH filed Critical Leybold AG
Publication of EP0566573A1 publication Critical patent/EP0566573A1/fr
Application granted granted Critical
Publication of EP0566573B1 publication Critical patent/EP0566573B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing

Definitions

  • the invention relates to a silencer with the features of the preamble of claim 1.
  • Silencers are usually located in the end area of exhaust pipes, which discharge the gases leaving the outlet of a machine (motor, pump or the like) to the outside.
  • the rotary vacuum pumps include single-shaft (rotary vane pumps, blocking vane pumps or the like) and twin-shaft (pumps with rotor pairs of screws, roots, claw type or the like) pumps, which are furthermore can be formed in one or more stages.
  • single-shaft rotary vane pumps, blocking vane pumps or the like
  • twin-shaft pumps with rotor pairs of screws, roots, claw type or the like
  • Vacuum pumps of this type are often used in chemical or other processes (etching, vapor deposition or the like).
  • the gases drawn in by the vacuum pump in these cases are generally harmful to the environment.
  • At the outlet of the vacuum pump there is therefore a permanently installed flue gas pipe which discharges the extracted gases to the outside via gas scrubbers or other cleaning systems.
  • the gases extracted in particular in the case of etching and vapor deposition processes are often dust-laden.
  • Such processes usually use dry-running vacuum pumps, there is the problem of dust deposits, particularly in the outlet area of the pump and in the adjoining exhaust pipes.
  • the present invention is therefore based on the object of designing a silencer in such a way that it can be accommodated in the vicinity of the machine even in the presence of permanently installed exhaust gas lines, the noise of which is to be reduced, and that it can be replaced without expensive assembly work on the exhaust gas lines, so that it can be replaced, for example, in the event of dust pollution without significant interruptions in operation.
  • a muffler carried by a flange or coupling component of the proposed type has the advantage that it can be replaced quickly without complex assembly work on the exhaust pipes.
  • Mufflers with baffles located within their housing which consist of concentrically arranged, alternately interlocking and closed on one side tubular cylinders are known from US-A-36 12 216.
  • the central arrangement of the inlet and the decentralized arrangement of the outlet on one end face are also described in this document.
  • a flange or coupling component that enables simple and quick replacement of the muffler is not disclosed.
  • the silencer according to the invention is particularly advantageous to use on the vacuum pumps mentioned, which are used in chemical or other processes (etching, vapor deposition processes or the like). Which is in the exit area Registering the pump Dust deposits can be removed without interrupting operation - for example by replacing the silencer.
  • the disturbing dusts preferably collect in the silencer according to the invention, so that the cleaning of the pipe routing in front of and behind the silencer is largely eliminated.
  • the vacuum pump 1 shown schematically in FIG. 1 has the rotor 4, which is located in the scooping space 11 formed by the housing 10.
  • the inlet and outlet of the vacuum pump are designated 29 and 36, respectively.
  • An exhaust pipe 51 connects to the outlet 36 and opens into a flange component 52.
  • the outgoing exhaust pipe 53 is also connected to the flange component 52.
  • a muffler 54 designed in the manner of a cartridge, as is shown, for example, in FIG. 3, is detachably fastened to the flange component 52. This arrangement enables an easy and quick change of the muffler without the need for expensive disassembly and assembly work on the exhaust pipes 51, 53 themselves.
  • the pump shown in FIG. 2 is a three-stage vacuum pump 1 with two shafts 2 and 3 and three pairs of rotors 4, 5 and 6 7 and 8, 9.
  • the axial length of the rotors decreases from the suction side to the pressure side.
  • the rotary pistons are of the claw type (Northey, cf. for example EP-A-290 662) and rotate in the scoops 11, 12, 13 which are formed by the shields 14 to 17 and the housing rings 18 to 20.
  • the shafts 2, 3 are arranged vertically. This also applies to the drive motor 22 arranged next to the pump housing. Below the lower bearing plate 17, the shafts 2, 3 are equipped with gear wheels 23, 24 of the same diameter, which synchronize the movement of the rotor pairs 4, 5 or 6, 7 or 8 , 9 serve.
  • the drive motor 22 also has a gearwheel 25 on its underside. The drive connection is established by a further gear 26, which is in engagement with the gears 24 and 25.
  • the upper end plate 14 is equipped with a horizontally arranged connecting flange 28, which forms the inlet 29 of the pump.
  • the inlet channel 31 opens at the end (opening 32) into the scoop chamber 11 of the first stage.
  • the end opening of the first stage is designated 33 and leads into the connecting duct 34.
  • the connecting duct 34 located in the shield 15 is connected to the inlet opening 35 of the second stage.
  • the end shield 16 is designed accordingly.
  • Below the lowest (third) pump stage is the outlet 36, which is connected to the front outlet opening 37 in the lower end shield 17.
  • An oil-containing space 40 formed by a common shaft trough 41, is provided below the system consisting of the pump housing and motor.
  • An oil pump 42 connected to the shaft 2 projects into this shaft trough 41.
  • Lubricant channels extend from the oil pump to the points of the pump (bearings, engagements of the gearwheels 23 to 26, oil seals or the like) which require oil lubrication .
  • cooling water channels 43 and 44 are provided in the side plates 14 and 17. Cooling water inlet and outlet are designated 45 and 46.
  • the cooling water inlet 45 is arranged at the lowest point of the channel system 43, 44, so that a simple cooling water drain is possible and complete emptying is ensured.
  • the outlet opening 36 of the pump 1 is formed by a connecting piece 55 which carries a coupling component 56, on which in turn the silencer 54 is detachably fastened.
  • the muffler 54, the coupling component 56 and also an intermediate component 57 which can optionally be inserted between the coupling component 56 and the connecting piece 55 are shown enlarged in FIG.
  • the coupling component 56 and the connecting piece 55 are connected to one another, either directly or via the intermediate component 57.
  • the intermediate component 57 is used to hold sensors 58, for example pressure sensors, the function of which will be described below. Gas type sensors can also be arranged at this point.
  • the coupling component 56 has a central passage opening 61 which is partly equipped with an internal thread 62 on the muffler side.
  • a pipe socket 63 equipped with a corresponding external thread can be screwed into this thread 62 and at the same time forms the inlet 64 of the silencer 54.
  • a central interior 65 which is surrounded by concentric baffle plates 66, adjoins the inlet opening 64. They are concentrically arranged, alternately interlocking, one-sided closed tubular cylinders, which cause multiple deflection of the gases passing through (see the arrows).
  • the outer cylinder is equipped with side openings 67 so that the gases enter an outer annular space 68. This outer annular space 68 is connected to one or more decentralized outlet openings 69.
  • a muffler-side open channel in the coupling component 56 is assigned to the outlet openings 69. This is provided with a radial extension 72, to which the exhaust gas line 53 is connected.
  • a peripheral sealing ring 73 is provided, which is arranged concentrically with the pipe socket 63.
  • the flange component 52 and the muffler 54 according to FIG. 1 are expediently designed like the coupling component 56 and the muffler 54 according to FIG. 3.
  • the exhaust gas reaches the interior (65) of the muffler (54) from the pump outlet (36).
  • the subsequent multiple redirection brings about the desired sound absorption.
  • the exhaust gases then exit from the outlet openings (69) and reach the exhaust line (53) via the ring channel (71) in the coupling component (56).
  • an intermediate component which can optionally be installed between the coupling component (56) and the outlet connector (55) serves to hold sensors (58).
  • a sensor (58) is connected to the muffler inlet area.
  • the flow resistance increases, which results in an increase in pressure in the inlet area of the silencer.
  • the pressure sensor With the help of the pressure sensor, the load on the muffler (54) with deposits can be monitored.
  • a further pressure sensor (58) is also shown, which is connected via the bore (74) to the outlet area of the silencer (54). If two pressure sensors (58) are used in this way, it is possible to observe the dust load on the muffler (54) by observing the difference in the pressures recorded by the sensors.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Exhaust Silencers (AREA)

Abstract

La présente invention se réfère à un silencieux (54) conçu comme une cartouche, ainsi qu'à une machine (1) comportant un tel silencieux; un changement rapide du silencieux (54) est obtenu en particulier s'il est conçu comme étant démontable, présentant dans son intérieur des chicanes (66) pour une déflexion multiple des gaz quittant l'échappement de pompe (36), l'entrée (64) et la sortie (69) du silencieux se trouvant sur sa face frontale.

Claims (9)

  1. Silencieux (54) ayant un boîtier sensiblement cylindrique, ayant une entrée (64) centrale, agencée sur un côté frontal, ayant une ou plusieurs ouvertures de sortie (69) agencées décentralisées sur le même côté frontal et ayant des chicanes se trouvant à l'intérieur du boîtier, qui consistent en des cylindres tubulaires (66) agencés concentriquement, venant en prise les uns dans les autres alternativement et fermés d'un côté, et qui effectuent une déviation multiple des gaz sur leur trajet de l'entrée (64) centrale à la sortie (69) décentralisée, caractérisé en ce que, une partie constitutive de bride (52) ou une partie constitutive d'accouplement (56) est prévue, laquelle présente une ouverture de passage (61) centrale, dans laquelle débouche un conduit de gaz d'échappement (51) se trouvant en liaison avec la sortie (36) d'une machine ou d'une pompe (1), et laquelle présente un canal agencé décentralisé, de façon préférée un canal annulaire (71) entourant l'ouverture de passage (61), à laquelle est raccordé un conduit de gaz d'échappement (53) conduisant beaucoup plus loin, en ce que le silencieux (54) est fixé amovible à la partie constitutive de bride (52) ou à la partie constitutive d'accouplement (56), et en ce que la partie constitutive de bride (52) ou la partie constitutive d'accouplement (56) porte le silencieux (54), dans sa position d'exploitation, de telle sorte que, d'une part, la tubulure de sortie (55) de la machine ou de la pompe est reliée, par l'intermédiaire de l'ouverture de passage (61) centrale dans la partie d'accouplement (56), avec l'ouverture d'entrée (64) centrale du silencieux (54), et, d'autre part, l'ouverture de sortie ou les ouvertures de sortie (69) décentralisée(s) du silencieux (54) est (sont) reliée(s), par l'intermédiaire du canal (71) agencé décentralisé, avec le conduit d'échappement (53) conduisant plus loin.
  2. Silencieux selon la revendication 1, caractérisé en ce que, à l'ouverture d'entrée (64) centrale du silencieux (54) est associée une tubulure (63) ayant un filetage extérieur, et, que l'ouverture de passage (61) centrale dans la partie constitutive de bride (52) ou la partie constitutive d'accouplement (56) est pourvue d'un filetage intérieur.
  3. Silencieux selon la revendication 1 ou la revendication 2, caractérisé en ce que, pour l'étanchéité extérieure du silencieux (54) par rapport à la partie constitutive de bride (52) ou la partie constitutive d'accouplement (56), une bague d'étanchéité (73) périphérique, agencée concentriquement à la tubulure (63), est prévue.
  4. Silencieux selon une des précédentes revendications, caractérisé en ce que, à l'entrée (64) du silencieux (54) est associé un capteur de pression (58).
  5. Silencieux selon une des précédentes revendications, caractérisé en ce que, à la partie constitutive de bride (52) ou à la partie constitutive d'accouplement (56), une partie constitutive intermédiaire (57) est prélogée pour le raccordement de capteurs (58).
  6. Silencieux selon la revendication 4 ou la revendication 5, caractérisé en ce que, à l'entrée (64) et à la sortie (69) du silencieux (54), chaque fois, un capteur de pression (58) est associé.
  7. Machine, moteur ou pompe, caractérisé(e) en ce que, elle(il) est équipé(e) avec un silencieux (54) et une partie constitutive de bride (52) ou une partie constitutive d'accouplement (56) selon une des précédentes revendications.
  8. Pompe à vide rotative, caractérisée en ce que, elle est équipée avec un silencieux (54) et une partie constitutive de bride (52) ou une partie constitutive d'accouplement (56) selon une des revendications 1 à 6.
  9. Pompe à vide rotative selon la revendication 8 ayant un corps (10), qui présente au moins une chambre d'aspiration (11) pour le, ou bien les, rotor(s) (4 ou bien 4 à 9), et qui est équipée avec une admission (29) et une sortie (36), caractérisée en ce que, se raccordent à la sortie de pompe (36) une partie constitutive de bride (52) ou une partie constitutive d'accouplement (56) et un silencieux (54) selon une des revendications 1 à 6.
EP91918199A 1990-10-27 1991-10-19 Silencieux Expired - Lifetime EP0566573B1 (fr)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
DE9014883U DE9014883U1 (de) 1990-10-27 1990-10-27 Rotations-Vakuumpumpe
DE4034253 1990-10-27
DE9014888U DE9014888U1 (de) 1990-10-27 1990-10-27 Schalldämpfer
DE19904034253 DE4034253A1 (de) 1990-10-27 1990-10-27 Rotations-vakuumpumpe
DE9014888U 1990-10-27
DE9014883U 1990-10-27
PCT/EP1991/001991 WO1992008053A1 (fr) 1990-10-27 1991-10-19 Silencieux

Publications (2)

Publication Number Publication Date
EP0566573A1 EP0566573A1 (fr) 1993-10-27
EP0566573B1 true EP0566573B1 (fr) 1995-01-04

Family

ID=27201827

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91918199A Expired - Lifetime EP0566573B1 (fr) 1990-10-27 1991-10-19 Silencieux

Country Status (7)

Country Link
US (1) US5399817A (fr)
EP (1) EP0566573B1 (fr)
JP (1) JPH07504474A (fr)
KR (1) KR930703539A (fr)
DE (1) DE59104173D1 (fr)
ES (1) ES2067953T3 (fr)
WO (1) WO1992008053A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7988427B2 (en) * 2005-04-11 2011-08-02 Carrier Corporation Compressor muffler
US7463812B2 (en) 2007-01-19 2008-12-09 Adc Telecommunications, Inc. Overhead cable termination arrangement
DE202016001950U1 (de) * 2016-03-30 2017-07-03 Leybold Gmbh Vakuumpumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR332837A (fr) * 1903-06-06 1903-11-09 Benjamin Crawford Dispositif perfectionné pour rendre silencieux l'échappement des machines à gaz et autres machines à explosions
US806714A (en) * 1905-03-30 1905-12-05 John F Laird Exhaust-muffler.
US1598578A (en) * 1921-11-21 1926-08-31 Maxim Silencer Co Silencer
US3032139A (en) * 1959-03-11 1962-05-01 Buckeye Ind Inc Muffler for air cylinders and the like
US3612216A (en) * 1969-12-01 1971-10-12 Gen Impact Extrusions Mfg Ltd Muffler can

Also Published As

Publication number Publication date
JPH07504474A (ja) 1995-05-18
KR930703539A (ko) 1993-11-30
DE59104173D1 (de) 1995-02-16
EP0566573A1 (fr) 1993-10-27
US5399817A (en) 1995-03-21
ES2067953T3 (es) 1995-04-01
WO1992008053A1 (fr) 1992-05-14

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