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EP0504424A1 - Hartmaterial mit diamant bekleidet, wegwerfeinsatz, und methode zum herstellen dieses materials und einsatzes - Google Patents

Hartmaterial mit diamant bekleidet, wegwerfeinsatz, und methode zum herstellen dieses materials und einsatzes Download PDF

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Publication number
EP0504424A1
EP0504424A1 EP91917335A EP91917335A EP0504424A1 EP 0504424 A1 EP0504424 A1 EP 0504424A1 EP 91917335 A EP91917335 A EP 91917335A EP 91917335 A EP91917335 A EP 91917335A EP 0504424 A1 EP0504424 A1 EP 0504424A1
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EP
European Patent Office
Prior art keywords
diamond
coated
insert
substrate
sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP91917335A
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English (en)
French (fr)
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EP0504424A4 (en
EP0504424B1 (de
Inventor
Naoya Itami Works Of Sumitomo Omori
Toshio Itami Works Of Sumitomo Nomura
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Sumitomo Electric Industries Ltd
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Sumitomo Electric Industries Ltd
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Publication date
Priority claimed from JP2269214A external-priority patent/JP3033169B2/ja
Priority claimed from JP3023496A external-priority patent/JP2987956B2/ja
Priority claimed from JP3023495A external-priority patent/JP2987955B2/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of EP0504424A1 publication Critical patent/EP0504424A1/de
Publication of EP0504424A4 publication Critical patent/EP0504424A4/en
Application granted granted Critical
Publication of EP0504424B1 publication Critical patent/EP0504424B1/de
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/141—Specially shaped plate-like cutting inserts, i.e. length greater or equal to width, width greater than or equal to thickness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148—Composition of the cutting inserts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B51/00—Tools for drilling machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B51/00—Tools for drilling machines
    • B23B51/0002—Drills with connected cutting heads, e.g. with non-exchangeable cutting heads; Drills with a single insert extending across the rotational axis and having at least two radially extending cutting edges in the working position
    • B23B51/0003—Drills with connected cutting heads, e.g. with non-exchangeable cutting heads; Drills with a single insert extending across the rotational axis and having at least two radially extending cutting edges in the working position with exchangeable heads or inserts
    • B23B51/00035—Spade drills
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B51/00—Tools for drilling machines
    • B23B51/02—Twist drills
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5001—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with carbon or carbonisable materials
    • C04B41/5002—Diamond
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/271—Diamond only using hot filaments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/274—Diamond only using microwave discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2200/00—Details of cutting inserts
    • B23B2200/08—Rake or top surfaces
    • B23B2200/081—Rake or top surfaces with projections
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2251/00—Details of tools for drilling machines
    • B23B2251/02—Connections between shanks and removable cutting heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2251/00—Details of tools for drilling machines
    • B23B2251/48—Chip breakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2251/00—Details of tools for drilling machines
    • B23B2251/50—Drilling tools comprising cutting inserts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Definitions

  • This invention relates to a diamond-coated hard material having a high bonding strength to a substrate and cutting tools and diamond-coated disposable inserts for cutting tools capable of cutting various light netals such as Al-Si alloys at a high rate for a long time.
  • Diamond having many excellent properties for example, very high hardness, chemical stability, high heat conductivity, high sound wave propagation speed, etc. has widely been used as hard materials utilizing these properties or diamond or diamond-like carbon coated hard materials, illustrative of which are as follows:
  • Diamond has a very high hardness and chemical stability and hardly reacts with Al, Cu, practically used light metals, etc. as described above. Thus, when diamond is applied to a cutting tool and subjected to cutting of such light metals or alloys thereof at a high rate, the surface of a workpiece is well finished. Accordingly, single crystal diamond, sintered diamond cutting tools or diamond-coated cutting tools have widely been put to practical use.
  • the inter-molecular force is increased with the increase of the contacted area thereof and the bonding strength of the diamond-coated layer to the substrate is thus increased.
  • diamond is chemically stable and does not form intermediate compounds with all materials.
  • a diamond-coated hard material having an excellent bonding strength is prepared, therefore, such a condition must be provided that a diamond coating layer and a substrate are bonded by a strong physical strength.
  • the inventors have thus made studies noting the surface state of a substrate for the purpose of developing a diamond-coated layer and a substrate having an excellent stripping resistance and consequently, have found that when a substrate is prepared by shaping and sintering a mixed powder of Si 3 N 4 as a predominant component and forming a diamond-coated layer on the substrate under such a state that the surface is as sintered, a high bonding strength is obtained.
  • the present invention is based on this finding.
  • the surface as sintered will sometimes be referred to as "sintered surface”.
  • a high bonding strength can also be obtained when a sintered and ground substrate is again subjected to a heat treatment to obtain a surface state as sintered before grinding (which will hereinafter be referred to as "heat-treated surface") and a diamond-coated layer is then formed.
  • the present invention provides (1) a diamond-coated hard material comprising a sintered body consisting of Si3N4 as a predominant component, at least a part of the sintered body having a sintered surface at least a part of which is coated with diamond and (2) a diamond-coated throwaway insert having a diamond- and/or diamond-like carbon-coating layer with a thickness of 0.1 to 200 ⁇ m, deposited from a gaseous phase, on the surface of a substrate consisting of Si3N4 as a predominant component, in which a partial or whole surface of a substrate having such a surface state as sintered is coated with a diamond- and/or diamond-like carbon-coating layer.
  • the inventors have found that when protrusions having a high bonding strength to a substrate are formed on the surface of the substrate by chemical or mechanical means and a diamond coating layer is formed thereon, thereby forming a state such that protrusions are intruded into the diamond coating layer, the bonding strength between the diamond coating layer and the substrate is optimised. This can be considered to be due to the contact area of the diamond coating layer with the substrate being increased and the protrusions having anchor action in the diamond coating layer, whereby the diamond coating layer is striped with difficulty from the substrate.
  • the roughness is not macroscopic roughness formed by a scratching treatment with (1) a diamond wheel or (2) grinding diamond grains, but roughness in a very small range in a standard length of 10 ⁇ m in a diamond coating layer-substrate interface.
  • the inventors have made various roughened states and consequently, have found that when at least one protrusive part is present in the standard length of 10 ⁇ m and the ratio of sum A of the lengths of dent parts to sum B of the lengths of the protrusions is in the range of 0.05 ⁇ A/B ⁇ 20 in the standard length and the protrusions are intruded by 0.2 ⁇ m into the diamond-coated layer, a high density strength is obtained. This is calculated by lapping a cross-section of the substrate coated with diamond, observing and photographing to review and model a boundary line of the diamond coating layer-substrate interface.
  • Fig. 1 the state of the diamond-coated layer- or diamond-like carbon-coated layer-substrate interface according to the present invention (I) is schematically shown.
  • the ratio of sum A of the protrusion lengths, i.e. ⁇ A to sum B of the recess lengths, i.e. ⁇ B must be in the range of 0.05 ⁇ ⁇ A/ ⁇ B ⁇ 20 and the intruded lengths of the protrusions are preferably at least 0.2 ⁇ m.
  • ⁇ A/ ⁇ B 19.
  • the ratio of sum B of the lengths of protrusions and sum A of the lengths of the protrusions is in the range of 0.05 to 20 and the protrusions are intruded into the diamond-coated layer.
  • the intruded length is preferably at least 0.2 ⁇ m.
  • the inventors have made various roughened states and consequently, have found that when the surface roughness in the substrate interface is defined by Rmax of 1.5 to 30 ⁇ m in the standard length of 50 ⁇ m , a strong bonding strength is obtained.
  • This surface roughness is defined as a surface roughness (Rmax) of a substrate after coated by lapping a cross-section of the substrate coated with diamond, observing and photographing to review a boundary line of the diamond coating layer-substrate interface.
  • Fig. 2 the state of the interface between the diamond-coated layer or diamond-like carbon-coated layer and the intermediate layer according to the present invention is schematically shown. That is, a macroscopic undulation appears in the interface, but Rmax is calculated regarding this undulation as linear as shown in Fig. 3.
  • the formed protrusive parts should satisfy the requirements that when a standard length is 50 ⁇ m in the interface of a diamond- and/or diamond-like carbon coated layer and a substrate, the surface roughness of the substrate interface is represented by an Rmax of 1.0 to 30 ⁇ m in the standard length and the protrusive parts are preferably intruded in the diamond coated layer by at least 0.2 ⁇ m.
  • the surface roughness at the substrate interface is represented by a Rmax of less than 1.0 ⁇ m, the bonding strength is not increased, while if more than 30 ⁇ m, on the contrary, the bonding strength is lowered.
  • a method for forming the specified roughness on a substrate there are 1 a method comprising depositing columnar or hexagonal pillar crystal grains and/or needle crystal grains on the surface of a substrate, 2 a method comprising removing an etchable binder by etching, 3 a method comprising masking a substrate, etching and then removing the mask, 4 a method comprising physically working, for example, by applying a laser.
  • a suitable method should be chosen therefrom.
  • the method 1 comprises subjecting a substrate to a heat treatment, freely growing columnar or hexagonal pillar crystal grains or needle crystal grains and/or promoting secondary crystal generation on the surface thereof by the substrate component;
  • method 2 is available for a material composed of a hard phase and a binder phase, differing in ability to be corroded by acids and alkalies; and
  • method 3 comprises providing a mask in a suitable pattern using a photomask, etching and then removing the mask by etching.
  • the reasons for selecting a hard material containing Si3N4 as a predominant component as a substrate are that (1) the thermal expansion coefficient of Si3N4 is similar to that of diamond and thermal residual stress is substantially reduced and (2) a roughened state can readily be formed on the surface of the substrate by the above described method 1, because the substrate is formed by shaping and sintering a mixed powder containing Si3N4 as a predominant component, columnar or hexagonal pillar crystal texture freely grows and coarse columnar or hexagonal pillar crystals are thus allowed to be present on the substrate surface.
  • the following two advantages can be given as an effect by the presence of the freely grown columnar or hexagonal pillar crystal texture:
  • this scratching treatment is more preferably carried out by adding the substrate and diamond grains to a solvent such as water, ethyl alcohol or acetone, and then applying an ultrasonic wave thereto, since a scratching treatment by pressing hard diamond grains against the substrate in physical manner results in breakage of the resulting protrusions.
  • Diamond nuclei are uniformly formed on the whole protrusive and non-protrusive parts of the substrate surface by this scratching treatment, whereby it is rendered possible to form such a state that the protrusions are intruded into the diamond coated layer.
  • the composition of a substrate is preferably obtained by sintering a mixed powder of Si3N4 powder, as a predominant component, containing at least 50 % of ⁇ - Si3N4 and 1 to 50 wt % of at least one sintering assistant selected from the group consisting of Al2O3, Y2O3, MgO, AlN and SiO2. If the content of ⁇ - Si3N4 is less than 50 %, formation of ⁇ -Si3N4 columnar or hexagonal pillar structure is insufficient even if the sintering is carried out under any conditions, and the strength and toughness of the subsirate itself are lowered. It is known that Si3N4 is a covalent bond material and its sintering property is inferior.
  • the sintering temperature should preferably be in the range of 1600 to 2000 °C, since if lower than 1600 °C, the grain growth is not sufficient and the strength of the sintered body is markedly lowered, while if higher than 2000 °C, decomposition of Si3N4 starts.
  • the ambient gas is generally N2 gas, since the use of gases other than N2 gas results in decomposition of Si3N4. If the pressure thereof is less than 1 atm, Si3N4 is decomposed, while if more than 3000 atm, operation on a commercial scale is difficult. Thus, it is preferable to use an N 2 gas atmosphere in the range of 1 to 3000 atm.
  • the sintering time is preferably 30 minutes to 5 hours, since if less than 30 minutes, compacting of crystal grains is insufficient, while if more than 5 hours, the crystal grains are coarsened and lower the strength.
  • Si3N4 hexagonal pillar crystals are found on the surface of the substrate. Coating of the sintered surface is also advantageous from an economical point of view such that the production cost can be reduced by a working cost required for grinding and finishing.
  • the thus obtained diamond-coated high hardness material can be applied widely to various machine parts, for example, replaceable inserts, microdrills, drills, endmills, routers, reamers, wear resistance tools, bonding tools, grinding wheels, dressers, printer heads, etc.
  • a partial or whole surface of sintered insert is ground, optionally subjected to an edge treatment, and then heat-treated in N2 gas and/or an inert gas atmosphere at a temperature range of 1300 to 2000 °C.
  • the gas pressure range is 1 to 3000 atm.
  • the whole surface of the insert is converted into a heat treated surface.
  • the temperature range is adjusted to 1300 to 2000 °C, since if lower than 1300 °C, the structure of the ground surface is not changed, while if higher than 2000 °C, decomposition reaction of Si3N4 takes place.
  • the ambient gas is composed of N2 gas and/or an inert gas, since the use of other gases results in decomposition of Si3N4 .
  • a part of a throwaway insert whose whole surface is converted into the heat-treated surface is subjected to grinding.
  • the mean major axis/minor axis ratio of the hexagonal pillar crystal is less than 1.5 or there are no hexagonal pillar crystals having major axes exceeding 2 ⁇ m, improvement of the bonding strength is hardly observed.
  • the thickness of the coated layer if less than 0. 1 ⁇ m, no improvement of the wear resistance by the coated layer is found, while if more than 200 ⁇ m, further improvement of the wear resistance cannot be given and this is not economical for hard materials or throwaway inserts. Therefore, a thickness of 0.1 to 200 ⁇ m is preferable.
  • the upper surface of the insert means a rake face and the lower surface means a surface opposite to the upper surface.
  • a surface hard material of the present invention will specifically be illustrated by examples.
  • a Si3N4-based ceramic mixed powder having a composition of Si3N4-4 wt% Al2O3 -4 wt% ZrO2-3 wt% Y2O3 was sintered in a N2 gas atmosphere of 5 atm at 1800 °C for 1 hour, thus obtaining a throwaway insert with a shape of SPG 422 having a columnar or hexagonal pillar crystal structure having a mean major axis of 2 ⁇ m and a mean minor axis of 4 ⁇ m formed on the surface thereof.
  • ⁇ designates a negative land angle
  • ⁇ designates a relief angle
  • 1 designates a negaland (negative land) width
  • ⁇ , ⁇ and l being respectively 25 o , 11 o and 0.05 mm.
  • Comparative Insert No. 1 having the same shape and same composition, having the upper and lower surfaces ground and having been subjected to the above described edge treatment and Comparative Insert No. 2 having the diamond-coated layer formed thereon were prepared.
  • the coated layer deposited on the surface of the substrate had a peak of 1333 cm ⁇ 1 characteristic of the diamond coated layer and/or diamond-like carbon coated layer.
  • Disposable inserts with a shape of SPG 422 were prepared by the use of, as a substrate, silicon nitride-based ceramics (specifically, Composition A: Si3N4- 4 wt% Al2O3-4 wt% ZrO2 -3 wt% Y2O3 and Composition B: Si3N4- 2 wt% Al2O3-5 wt% Y2O3) and then heat-treated under conditions as shown in Table 3. The states of hexagonal pillar crystals generated during the same time were shown in Table 3.
  • the inserts of the present invention, Samples Nos. 22 and 23 were outside the scope of the preferred embodiment.
  • a comparative insert Comparative Sample No. 3, was prepared by using a substrate having the same shape and composition as described above without conducting the heat treatment, and providing a diamond-coated layer on the insert having no hexagonal pillar crystal of silicon nitride on the surface thereof (The ultrasonic wave treatment was not carried out for the comparative sample).
  • Samples Nos. 14 to 21 showed that silicon nitride hexagonal pillar crystals were intruded into the diamond-coated layer by at most 1 to 5 ⁇ m, 3 to 5 protrusions were present in the standard length of 10 ⁇ m to obtain an A/B ratio of 0.1 to 10 ⁇ m or in the interface between the substrate and diamond-coated layer, the surface roughness was represented by an Rmax of 1 to 8 in the standard length of 50 ⁇ m.
  • Samples Nos. 22 and 23 were outside the scope of the preferred embodiment of the present invention.
  • the present invention can be applied to various cutting tools such as not only disposable inserts but also drills, microdrills, end mills, reamers, routers, etc., wear resistance tools such as TAB tools, capillaries, etc., and various grinding wheels and machine parts.
  • cutting tools such as not only disposable inserts but also drills, microdrills, end mills, reamers, routers, etc., wear resistance tools such as TAB tools, capillaries, etc., and various grinding wheels and machine parts.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
EP91917335A 1990-10-05 1991-10-04 Hartmaterial mit diamant bekleidet, wegwerfeinsatz, und methode zum herstellen dieses materials und einsatzes Expired - Lifetime EP0504424B1 (de)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP26921490 1990-10-05
JP269214/90 1990-10-05
JP2269214A JP3033169B2 (ja) 1990-10-05 1990-10-05 ダイヤモンド被覆スローアウェイチップ及びその製造法
JP3023496A JP2987956B2 (ja) 1991-02-18 1991-02-18 ダイヤモンドまたはダイヤモンド状炭素被覆硬質材料
JP23496/91 1991-02-18
JP23495/91 1991-02-18
JP2349591 1991-02-18
JP2349691 1991-02-18
JP3023495A JP2987955B2 (ja) 1991-02-18 1991-02-18 ダイヤモンドまたはダイヤモンド状炭素被覆硬質材料
PCT/JP1991/001359 WO1992005904A1 (en) 1990-10-05 1991-10-04 Hard material clad with diamond, throwaway chip, and method of making said material and chip

Publications (3)

Publication Number Publication Date
EP0504424A1 true EP0504424A1 (de) 1992-09-23
EP0504424A4 EP0504424A4 (en) 1994-08-17
EP0504424B1 EP0504424B1 (de) 1999-12-15

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EP91917335A Expired - Lifetime EP0504424B1 (de) 1990-10-05 1991-10-04 Hartmaterial mit diamant bekleidet, wegwerfeinsatz, und methode zum herstellen dieses materials und einsatzes

Country Status (5)

Country Link
US (1) US5328761A (de)
EP (1) EP0504424B1 (de)
KR (1) KR950013501B1 (de)
DE (1) DE69131846T2 (de)
WO (1) WO1992005904A1 (de)

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EP0549801A4 (en) * 1991-06-24 1993-10-06 Idemitsu Petrochemical Co. Ltd. Diamond-covered member and production thereof
WO2024052345A1 (en) * 2022-09-05 2024-03-14 Tokamak Energy Ltd Subtractive manufacturing of complex, interlocking metal structures

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JP3452615B2 (ja) * 1992-10-26 2003-09-29 三菱マテリアル神戸ツールズ株式会社 超硬合金、硬質炭素膜被覆超硬合金および超硬合金の製造方法並びにこれらの合金を応用した工具
EP0627498B1 (de) * 1993-05-25 2000-08-09 Ngk Spark Plug Co., Ltd Substrat auf Keramikbasis und Verfahren zu dessen Herstellung
JPH07307377A (ja) * 1993-12-27 1995-11-21 Shin Etsu Chem Co Ltd 静電チャック付セラミックスヒーター
US5623827A (en) * 1995-01-26 1997-04-29 General Electric Company Regenerative cooled dome assembly for a gas turbine engine combustor
US5672031A (en) * 1995-05-12 1997-09-30 Kennametal Inc. Milling cutter
US5653152A (en) * 1995-09-01 1997-08-05 Kennametal Inc. Toolholder for roughing and finishing a workpiece
DE19644692A1 (de) * 1996-10-28 1998-04-30 Abb Patent Gmbh Beschichtung sowie ein Verfahren zu deren Herstellung
JPH10303057A (ja) * 1997-04-30 1998-11-13 Taiyo Yuden Co Ltd セラミック電子部品とその製造方法
US6387502B1 (en) 1998-09-04 2002-05-14 Ngk Spark Plug Co., Ltd. Diamond-coated hard metal member
US7695564B1 (en) * 2005-02-03 2010-04-13 Hrl Laboratories, Llc Thermal management substrate
US20100211180A1 (en) * 2006-03-21 2010-08-19 Jet Engineering, Inc. Tetrahedral Amorphous Carbon Coated Medical Devices
CN103748310B (zh) * 2011-04-26 2017-09-01 第六元素有限公司 超硬结构
EP3251776B1 (de) * 2016-06-02 2023-04-19 Sandvik Intellectual Property AB Verfahren und vorrichtungen zum ausschneiden von löchern

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JPS60122785A (ja) * 1983-12-08 1985-07-01 三菱マテリアル株式会社 ダイヤモンド被覆工具部材
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* Cited by examiner, † Cited by third party
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EP0549801A4 (en) * 1991-06-24 1993-10-06 Idemitsu Petrochemical Co. Ltd. Diamond-covered member and production thereof
WO2024052345A1 (en) * 2022-09-05 2024-03-14 Tokamak Energy Ltd Subtractive manufacturing of complex, interlocking metal structures

Also Published As

Publication number Publication date
WO1992005904A1 (en) 1992-04-16
DE69131846D1 (de) 2000-01-20
DE69131846T2 (de) 2000-05-18
KR950013501B1 (ko) 1995-11-08
EP0504424A4 (en) 1994-08-17
US5328761A (en) 1994-07-12
EP0504424B1 (de) 1999-12-15
KR920703251A (ko) 1992-12-17

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