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EA200300140A1 - Дифференциальный датчик давления - Google Patents

Дифференциальный датчик давления

Info

Publication number
EA200300140A1
EA200300140A1 EA200300140A EA200300140A EA200300140A1 EA 200300140 A1 EA200300140 A1 EA 200300140A1 EA 200300140 A EA200300140 A EA 200300140A EA 200300140 A EA200300140 A EA 200300140A EA 200300140 A1 EA200300140 A1 EA 200300140A1
Authority
EA
Eurasian Patent Office
Prior art keywords
differential pressure
chambers
pressure sensor
outer edges
overload
Prior art date
Application number
EA200300140A
Other languages
English (en)
Other versions
EA005793B1 (ru
Inventor
Дитфрид Бурчук
Вольфганг Даннхауэр
Франк Леффлер
Ральф Нюрнбергер
Фридрих Швабе
Original Assignee
Эндресс+Хаузер Гмбх+Ко.Кг
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Эндресс+Хаузер Гмбх+Ко.Кг filed Critical Эндресс+Хаузер Гмбх+Ко.Кг
Publication of EA200300140A1 publication Critical patent/EA200300140A1/ru
Publication of EA005793B1 publication Critical patent/EA005793B1/ru

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Semiconductor Lasers (AREA)
  • Steroid Compounds (AREA)

Abstract

Дифференциальный датчик давления с малым гистерезисным объемом, содержащий сенсор (1), две смежные с ним камеры (2, 3) для измерения давления, две воспринимающие давление камеры (22, 32), закрытые разделительными мембранами (21, 31), и две камеры (23, 33) перегрузки, разобщенные между собой мембраной (6) перегрузки, в котором мембрана (6) перегрузки содержит замкнутые наружную и внутреннюю кромки и прочно закреплена вдоль этих наружной и внутренней кромок.Международная заявка была опубликована вместе с отчетом о международном поиске.
EA200300140A 2000-07-13 2001-05-23 Дифференциальный датчик давления EA005793B1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP00115175A EP1172640A1 (de) 2000-07-13 2000-07-13 Differenzdrucksensor
PCT/EP2001/005929 WO2002006785A1 (de) 2000-07-13 2001-05-23 Differenzdruckaufnehmer

Publications (2)

Publication Number Publication Date
EA200300140A1 true EA200300140A1 (ru) 2003-06-26
EA005793B1 EA005793B1 (ru) 2005-06-30

Family

ID=8169241

Family Applications (1)

Application Number Title Priority Date Filing Date
EA200300140A EA005793B1 (ru) 2000-07-13 2001-05-23 Дифференциальный датчик давления

Country Status (9)

Country Link
US (1) US6631644B2 (ru)
EP (2) EP1172640A1 (ru)
JP (1) JP3684229B2 (ru)
CN (1) CN1188677C (ru)
AT (1) ATE271215T1 (ru)
AU (1) AU2001272418A1 (ru)
DE (1) DE50102860D1 (ru)
EA (1) EA005793B1 (ru)
WO (1) WO2002006785A1 (ru)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20311320U1 (de) * 2003-07-22 2003-10-09 Endress + Hauser GmbH + Co. KG, 79689 Maulburg Dynamischer Druckmittler
DE10334853A1 (de) * 2003-07-29 2005-03-24 Endress + Hauser Gmbh + Co. Kg Differenzdruckaufnehmer
DE102004019389A1 (de) * 2004-04-19 2005-11-03 Endress + Hauser Gmbh + Co. Kg Druckaufnehmer mit austauschbarem Prozessanschluss
DE102004047419B4 (de) * 2004-09-28 2011-09-15 Endress + Hauser Gmbh + Co. Kg Druckmittler und Drucksensor mit Druckmittler
JP4940786B2 (ja) * 2006-06-29 2012-05-30 株式会社デンソー 圧力センサ
US7467555B2 (en) * 2006-07-10 2008-12-23 Rosemount Inc. Pressure transmitter with multiple reference pressure sensors
DE102006057829A1 (de) * 2006-12-06 2008-06-12 Endress + Hauser Gmbh + Co. Kg Differenzdruckaufnehmer
DE102006057828A1 (de) * 2006-12-06 2008-06-12 Endress + Hauser Gmbh + Co. Kg Differenzdruckmeßaufnehmer
NO326583B1 (no) * 2007-06-08 2009-01-12 Presens As Differensialtrykkmaler
DE102008054991A1 (de) 2008-12-19 2010-06-24 Endress + Hauser Gmbh + Co. Kg Differenzdruckmessumformer
DE102012025070A1 (de) 2012-12-21 2014-06-26 Endress + Hauser Gmbh + Co. Kg Hydraulisches Messwerk mit koplanaren Druckeingängen und Differenzdrucksensor mit einem solchen Messwerk
DE102012113033A1 (de) 2012-12-21 2014-06-26 Endress + Hauser Gmbh + Co. Kg Mechanische Stabilisierung und elektrische sowie hydraulische Adaptierung eines Silizium Chips durch Keramiken
DE102013106601A1 (de) 2013-06-25 2015-01-08 Endress + Hauser Gmbh + Co. Kg Druckmessgerät, insbesondere Differenzdruckmessgerät
DE102013113171A1 (de) 2013-11-28 2015-05-28 Endress + Hauser Gmbh + Co. Kg Piezoresistive Silizium-Differenzdruckmesszelle und Verfahren zu ihrer Herstellung
DE102014104831A1 (de) 2014-04-04 2015-10-08 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor
DE102014109491A1 (de) 2014-07-08 2016-02-11 Endress + Hauser Gmbh + Co. Kg Differenzdruckmesszelle
US9683675B2 (en) * 2014-11-24 2017-06-20 General Electric Company Pressure modulator
US9766145B2 (en) * 2015-07-03 2017-09-19 WIKA Alexander Weigand SE & Co. KG Active diaphragm seal assembly for pressure measurement
US9719872B2 (en) * 2015-09-29 2017-08-01 Rosemount Inc. High over-pressure capable silicon die pressure sensor with extended pressure signal output
US10060813B2 (en) 2015-09-29 2018-08-28 Rosemount Inc. High over-pressure capable silicon die pressure sensor
DE102016107235B3 (de) 2016-04-19 2017-01-26 Endress + Hauser Gmbh + Co. Kg Differenzdruckmesszelle
DE102016107236A1 (de) 2016-04-19 2017-10-19 Endress + Hauser Gmbh + Co. Kg Verfahren zum Fügen einer Differenzdruckmesszelle und Differenzdruckmesszelle
DE102016107238A1 (de) 2016-04-19 2017-10-19 Endress + Hauser Gmbh + Co. Kg Verfahren zum Fügen einer Differenzdruckmesszelle und Differenzdruckmesszelle
US10203258B2 (en) 2016-09-26 2019-02-12 Rosemount Inc. Pressure sensor diaphragm with overpressure protection
US10378987B2 (en) * 2017-03-10 2019-08-13 Honeywell International Inc. Pressure sensor with flow porting having integral flame-proof safety mechanism
EP3593105B1 (en) * 2017-03-10 2023-11-01 Honeywell International Inc. Pressure sensor having overpressure protection with reduced output error
CN110402378B (zh) * 2017-03-10 2022-03-08 霍尼韦尔国际公司 具有带有传感器过压保护的共面仪表主体的压力传感器
DE202017107618U1 (de) * 2017-12-14 2018-01-08 Endress + Hauser Gmbh + Co. Kg Differenzdruckmessaufnehmer
CN115151801A (zh) * 2019-12-20 2022-10-04 恩德莱斯和豪瑟尔欧洲两合公司 用于确定两个压力的差压的差压测量传感器
DE102020132960A1 (de) 2020-12-10 2022-06-15 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer mit Überlastschutz
CN114413976A (zh) * 2021-12-13 2022-04-29 重庆市伟岸测器制造股份有限公司 一种电容式差压传感器稳形结构
CN116878720B (zh) * 2023-04-20 2024-10-11 汉斯韦尔(山东)物联技术有限公司 一种高稳硅差压传感器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2712846A1 (de) * 1976-03-24 1977-11-24 Ict Instr Inc Messumformer zum messen von druckunterschieden
US4091682A (en) * 1977-04-04 1978-05-30 Sensor-Matic, Inc. Digital differential pressure measurement apparatus
JPS5930444Y2 (ja) * 1980-05-09 1984-08-30 株式会社山武 差圧検出器
DE3222620A1 (de) * 1982-02-15 1983-08-25 Siemens AG, 1000 Berlin und 8000 München Druck- oder druckdifferenzmessgeraet mit einer vor ueberlastung geschuetzten drucksonsor-einrichtung
US4713969A (en) * 1983-09-30 1987-12-22 Kabushiki Kaisha Toshiba Differential pressure transmission apparatus
JPS6073427A (ja) * 1983-09-30 1985-04-25 Toshiba Corp 差圧伝送器
DE3422945C2 (de) * 1984-06-20 1986-04-24 Endress U. Hauser Gmbh U. Co, 7867 Maulburg Sensor
JPH0526985Y2 (ru) * 1987-09-08 1993-07-08
DE4244257A1 (de) * 1992-12-22 1994-06-23 Grw Druckmestechnik Teltow Gmb Druck-/Differenzdruckmeßumformer

Also Published As

Publication number Publication date
EP1299701B1 (de) 2004-07-14
WO2002006785A1 (de) 2002-01-24
JP2004516454A (ja) 2004-06-03
ATE271215T1 (de) 2004-07-15
CN1188677C (zh) 2005-02-09
DE50102860D1 (de) 2004-08-19
EP1172640A1 (de) 2002-01-16
CN1449489A (zh) 2003-10-15
AU2001272418A1 (en) 2002-01-30
JP3684229B2 (ja) 2005-08-17
EA005793B1 (ru) 2005-06-30
US6631644B2 (en) 2003-10-14
EP1299701A1 (de) 2003-04-09
US20020017143A1 (en) 2002-02-14

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Legal Events

Date Code Title Description
MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): AM AZ BY KZ KG MD TJ TM

MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): RU