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FR2616544B1 - Structure de capteur de pression differentielle evitant le blocage des membranes - Google Patents

Structure de capteur de pression differentielle evitant le blocage des membranes

Info

Publication number
FR2616544B1
FR2616544B1 FR888808331A FR8808331A FR2616544B1 FR 2616544 B1 FR2616544 B1 FR 2616544B1 FR 888808331 A FR888808331 A FR 888808331A FR 8808331 A FR8808331 A FR 8808331A FR 2616544 B1 FR2616544 B1 FR 2616544B1
Authority
FR
France
Prior art keywords
pressure sensor
differential pressure
sensor structure
membrane blocking
structure avoiding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR888808331A
Other languages
English (en)
Other versions
FR2616544A1 (fr
Inventor
Kazahaya Masashiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fischer and Porter Co
Original Assignee
Fischer and Porter Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fischer and Porter Co filed Critical Fischer and Porter Co
Publication of FR2616544A1 publication Critical patent/FR2616544A1/fr
Application granted granted Critical
Publication of FR2616544B1 publication Critical patent/FR2616544B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
FR888808331A 1987-06-15 1988-06-15 Structure de capteur de pression differentielle evitant le blocage des membranes Expired - Fee Related FR2616544B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/061,446 US4754365A (en) 1987-06-15 1987-06-15 Differential pressure transducer

Publications (2)

Publication Number Publication Date
FR2616544A1 FR2616544A1 (fr) 1988-12-16
FR2616544B1 true FR2616544B1 (fr) 1990-11-23

Family

ID=22035830

Family Applications (1)

Application Number Title Priority Date Filing Date
FR888808331A Expired - Fee Related FR2616544B1 (fr) 1987-06-15 1988-06-15 Structure de capteur de pression differentielle evitant le blocage des membranes

Country Status (5)

Country Link
US (1) US4754365A (fr)
JP (1) JPS6416945A (fr)
DE (1) DE3820418A1 (fr)
FR (1) FR2616544B1 (fr)
GB (1) GB2205956A (fr)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2266961B (en) * 1989-04-14 1994-02-02 Fuji Electric Co Ltd Capacitive differential pressure detector
DE3933512A1 (de) * 1989-10-06 1991-04-18 Endress Hauser Gmbh Co Differenzdruckmessgeraet
JPH04143627A (ja) * 1990-10-05 1992-05-18 Yamatake Honeywell Co Ltd 静電容量式圧力センサおよびその製造方法
DE4124662A1 (de) * 1991-07-25 1993-01-28 Fibronix Sensoren Gmbh Relativdrucksensor
US5323656A (en) * 1992-05-12 1994-06-28 The Foxboro Company Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
US5545594A (en) * 1993-10-26 1996-08-13 Yazaki Meter Co., Ltd. Semiconductor sensor anodic-bonding process, wherein bonding of corrugation is prevented
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US5753819A (en) * 1995-09-18 1998-05-19 Ssi Technologies, Inc. Method and apparatus for sealing a pressure transducer within a housing
WO1999004233A1 (fr) * 1997-07-15 1999-01-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Ensemble capteur tactile
US6122972A (en) * 1998-03-04 2000-09-26 Veris Industries Capacitive pressure sensor with moving or shape-changing dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
AU2629901A (en) 2000-01-06 2001-07-16 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (mems)
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
EP1128172B1 (fr) * 2000-02-22 2011-04-06 Endress + Hauser GmbH + Co. KG Capteur de pression
DE10050300A1 (de) 2000-10-10 2002-04-11 Endress Hauser Gmbh Co Druckmeßzelle
DE10133745A1 (de) * 2001-07-11 2003-01-23 Endress & Hauser Gmbh & Co Kg Drucksensor und Verfahren zu dessen Betrieb
US6848316B2 (en) * 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
US6886410B1 (en) * 2003-12-30 2005-05-03 Honeywell International Inc. Modified dual diaphragm pressure sensor
US7100453B2 (en) * 2003-12-30 2006-09-05 Honeywell International Inc. Modified dual diaphragm pressure sensor
US6991213B2 (en) * 2003-12-30 2006-01-31 Honeywell International Inc. Dual diaphragm valve
US6901807B1 (en) * 2003-12-30 2005-06-07 Honeywell International Inc. Positive and negative pressure sensor
US7591184B2 (en) * 2007-03-16 2009-09-22 Rosemount Inc. Industrial pressure sensor having enhanced dielectric fill fluid
CA2609619A1 (fr) 2007-09-10 2009-03-10 Veris Industries, Llc Indicateur d'etat
CA2609629A1 (fr) 2007-09-10 2009-03-10 Veris Industries, Llc Commande electrique de courant avec etalonnage automatique
CA2609611A1 (fr) 2007-09-10 2009-03-10 Veris Industries, Llc Indicateur d'etat a noyaux de bobinage segmentes
US7578194B1 (en) * 2008-02-11 2009-08-25 Sensata Technologies, Inc. Differential fluid pressure measurement apparatus
US8212548B2 (en) 2008-06-02 2012-07-03 Veris Industries, Llc Branch meter with configurable sensor strip arrangement
US8421639B2 (en) 2008-11-21 2013-04-16 Veris Industries, Llc Branch current monitor with an alarm
US8421443B2 (en) 2008-11-21 2013-04-16 Veris Industries, Llc Branch current monitor with calibration
US9335352B2 (en) 2009-03-13 2016-05-10 Veris Industries, Llc Branch circuit monitor power measurement
US8468894B2 (en) 2009-11-02 2013-06-25 Vega Grieshaber Kg Measuring cell and a method of use therefor
DE102009051613A1 (de) * 2009-11-02 2011-05-05 Vega Grieshaber Kg Messzelle
US9146264B2 (en) 2011-02-25 2015-09-29 Veris Industries, Llc Current meter with on board memory
US10006948B2 (en) 2011-02-25 2018-06-26 Veris Industries, Llc Current meter with voltage awareness
US9329996B2 (en) 2011-04-27 2016-05-03 Veris Industries, Llc Branch circuit monitor with paging register
US9250308B2 (en) 2011-06-03 2016-02-02 Veris Industries, Llc Simplified energy meter configuration
US9410552B2 (en) 2011-10-05 2016-08-09 Veris Industries, Llc Current switch with automatic calibration
US9424975B2 (en) 2013-08-23 2016-08-23 Veris Industries, Llc Split core transformer with self-aligning cores
US9588148B2 (en) 2014-01-23 2017-03-07 Veris Industries, Llc Input circuit for current transformer
US9607749B2 (en) 2014-01-23 2017-03-28 Veris Industries, Llc Split core current transformer
DE102014118616A1 (de) * 2014-12-15 2016-06-16 Endress + Hauser Gmbh + Co. Kg Druckmessaufnehmer
US10408911B2 (en) 2015-12-28 2019-09-10 Veris Industries, Llc Network configurable system for a power meter
US10371730B2 (en) 2015-12-28 2019-08-06 Veris Industries, Llc Branch current monitor with client level access
US10371721B2 (en) 2015-12-28 2019-08-06 Veris Industries, Llc Configuration system for a power meter
US10274572B2 (en) 2015-12-28 2019-04-30 Veris Industries, Llc Calibration system for a power meter
US10352807B2 (en) 2016-07-29 2019-07-16 Veris Industries, Llc Pressure transducer with Bluetooth communication
US11215650B2 (en) 2017-02-28 2022-01-04 Veris Industries, Llc Phase aligned branch energy meter
US11193958B2 (en) 2017-03-03 2021-12-07 Veris Industries, Llc Non-contact voltage sensor
US10705126B2 (en) 2017-05-19 2020-07-07 Veris Industries, Llc Energy metering with temperature monitoring

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3618390A (en) * 1969-10-27 1971-11-09 Rosemount Eng Co Ltd Differential pressure transducer
US3620083A (en) * 1969-12-04 1971-11-16 Nasa Wide range dynamic pressure sensor
US3793885A (en) * 1972-09-05 1974-02-26 Rosemount Inc Diaphrgam construction for differential pressure transducer
DE2364027A1 (de) * 1973-12-21 1975-07-03 Siemens Ag Differenzdruckmesszelle mit elektrischem abgriff
JPS5436984A (en) * 1977-08-30 1979-03-19 Fuji Electric Co Ltd Pressure measuring apparatus
JPS5921497B2 (ja) * 1978-11-02 1984-05-21 富士電機株式会社 圧力測定装置
GB2048488B (en) * 1979-04-26 1983-04-27 Rosemount Eng Co Ltd Differential pressure sensing apparatus
US4301492A (en) * 1980-01-28 1981-11-17 Paquin Maurice J Pressure-sensing transducer
US4458537A (en) * 1981-05-11 1984-07-10 Combustion Engineering, Inc. High accuracy differential pressure capacitive transducer
DE3238430A1 (de) * 1982-10-16 1984-04-19 Philips Patentverwaltung Gmbh, 2000 Hamburg Differenzdrucksensor
US4598590A (en) * 1984-09-14 1986-07-08 At&T Bell Laboratories Electret transducer for blood pressure measurement
US4680971A (en) * 1985-11-19 1987-07-21 Kavlico Corporation Dual diaphragm differential pressure transducer
US4735098A (en) * 1985-11-19 1988-04-05 Kavlico Corporation Dual diaphragm differential pressure transducer

Also Published As

Publication number Publication date
FR2616544A1 (fr) 1988-12-16
GB8814248D0 (en) 1988-07-20
DE3820418A1 (de) 1988-12-29
GB2205956A (en) 1988-12-21
JPS6416945A (en) 1989-01-20
US4754365A (en) 1988-06-28

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Legal Events

Date Code Title Description
ST Notification of lapse