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DE69937421D1 - Vorrichtung zur Messung eines Mediumflusses - Google Patents

Vorrichtung zur Messung eines Mediumflusses

Info

Publication number
DE69937421D1
DE69937421D1 DE69937421T DE69937421T DE69937421D1 DE 69937421 D1 DE69937421 D1 DE 69937421D1 DE 69937421 T DE69937421 T DE 69937421T DE 69937421 T DE69937421 T DE 69937421T DE 69937421 D1 DE69937421 D1 DE 69937421D1
Authority
DE
Germany
Prior art keywords
medium
measuring
flow
zero
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69937421T
Other languages
English (en)
Other versions
DE69937421T2 (de
Inventor
Theodorus S J Lammerink
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Berkin BV
Original Assignee
Berkin BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berkin BV filed Critical Berkin BV
Application granted granted Critical
Publication of DE69937421D1 publication Critical patent/DE69937421D1/de
Publication of DE69937421T2 publication Critical patent/DE69937421T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Paper (AREA)
DE69937421T 1998-03-20 1999-03-10 Vorrichtung zur Messung eines Mediumflusses Expired - Lifetime DE69937421T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL1008665A NL1008665C1 (nl) 1998-03-20 1998-03-20 Mediumstroommeter.
NL1008665 1998-03-20
US09/272,575 US6370950B1 (en) 1998-03-20 1999-03-19 Medium flow meter

Publications (2)

Publication Number Publication Date
DE69937421D1 true DE69937421D1 (de) 2007-12-13
DE69937421T2 DE69937421T2 (de) 2008-08-21

Family

ID=26642782

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69937421T Expired - Lifetime DE69937421T2 (de) 1998-03-20 1999-03-10 Vorrichtung zur Messung eines Mediumflusses

Country Status (8)

Country Link
US (1) US6370950B1 (de)
EP (1) EP0943900B1 (de)
JP (1) JPH11326003A (de)
AT (1) ATE377184T1 (de)
DE (1) DE69937421T2 (de)
DK (1) DK0943900T3 (de)
ES (1) ES2296365T3 (de)
NL (1) NL1008665C1 (de)

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WO2003052355A1 (fr) * 2001-12-14 2003-06-26 Mitsubishi Denki Kabushiki Kaisha Debitmetre
JP3969167B2 (ja) * 2002-04-22 2007-09-05 三菱電機株式会社 流体流量測定装置
US6617175B1 (en) * 2002-05-08 2003-09-09 Advanced Technology Materials, Inc. Infrared thermopile detector system for semiconductor process monitoring and control
US7129519B2 (en) * 2002-05-08 2006-10-31 Advanced Technology Materials, Inc. Monitoring system comprising infrared thermopile detector
US6736005B2 (en) * 2002-05-28 2004-05-18 Mcmillan Company High accuracy measuring and control of low fluid flow rates
JP3650384B2 (ja) * 2002-08-29 2005-05-18 三菱電機株式会社 熱式流量検出装置
US7080545B2 (en) * 2002-10-17 2006-07-25 Advanced Technology Materials, Inc. Apparatus and process for sensing fluoro species in semiconductor processing systems
US7063097B2 (en) * 2003-03-28 2006-06-20 Advanced Technology Materials, Inc. In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration
WO2004088415A2 (en) * 2003-03-28 2004-10-14 Advanced Technology Materials Inc. Photometrically modulated delivery of reagents
NL1023405C2 (nl) 2003-05-13 2004-11-18 Berkin Bv Massadebietmeter.
US20060211253A1 (en) * 2005-03-16 2006-09-21 Ing-Shin Chen Method and apparatus for monitoring plasma conditions in an etching plasma processing facility
JP2008543563A (ja) 2005-06-22 2008-12-04 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド 一体型のガス混合装置およびプロセス
DE102005057687A1 (de) * 2005-12-01 2007-06-06 Endress + Hauser Flowtec Ag Vorrichtung zur Bestimmung und/oder Überwachung des Massedurchflusses eines fluiden Mediums
DE602006019688D1 (de) * 2006-03-31 2011-03-03 Sensirion Holding Ag Durchflusssensor mit durchflussanpassbarem Analog-Digital-Wandler
EP1840535B1 (de) * 2006-03-31 2011-01-12 Sensirion Holding AG Durchflusssensor mit Thermoelementen
US20080006775A1 (en) * 2006-06-22 2008-01-10 Arno Jose I Infrared gas detection systems and methods
EP1965179B1 (de) * 2007-02-28 2017-04-12 Sensirion Holding AG Strömungsdetektorvorrichtung mit Eigenüberprüfung
DE202007003027U1 (de) * 2007-03-01 2007-06-21 Sensirion Ag Vorrichtung zur Handhabung von Fluiden mit einem Flußsensor
US7874208B2 (en) * 2007-10-10 2011-01-25 Brooks Instrument, Llc System for and method of providing a wide-range flow controller
EP2187182B1 (de) * 2008-11-12 2015-08-05 Sensirion AG Verfahren zum Betrieb eines Durchflusssensors, der wiederholt einem thermischen und/oder chemischen Reinigungsprozess ausgesetzt ist, und Durchflussmessgerät
JP5282584B2 (ja) * 2009-01-20 2013-09-04 いすゞ自動車株式会社 エンジン排気管内に燃料を噴射する装置及び噴射量の測定方法
US9340878B2 (en) 2009-05-29 2016-05-17 Entegris, Inc. TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same
DE102009060302A1 (de) * 2009-12-23 2011-06-30 Truma Gerätetechnik GmbH & Co. KG, 85640 Gaszuführungsvorrichtung mit Massendurchflusssensor
US11608618B2 (en) 2011-01-03 2023-03-21 Sentinel Hydrosolutions, Llc Thermal dispersion flow meter with fluid leak detection and freeze burst prevention
US11814821B2 (en) 2011-01-03 2023-11-14 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with fluid leak detection and geo-fencing control
US9146172B2 (en) * 2011-01-03 2015-09-29 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection
NL2006895C2 (nl) 2011-06-03 2012-12-04 Berkin Bv Stromingsmeetapparaat en gebruik daarvan voor het bepalen van een stroming van een medium, alsmede werkwijze daarvoor.
DE102012001060A1 (de) * 2011-10-24 2013-04-25 Hydrometer Gmbh Verfahren zur Korrektur von Offset-Drift-Effekten einer thermischen Messeinrichtung, thermische Messeinrichtung und Gasdurchflussmessgerät
WO2014123481A1 (en) * 2013-02-08 2014-08-14 Provtagaren Ab Enhanced differential thermal mass flow meter assembly and methods for measuring a mass flow using said mass flow meter assembly
DE102013106863A1 (de) 2013-07-01 2015-01-08 Aixtron Se Vorrichtung zum Bestimmen des Massenflusses eines in einem Trägergas transportierten Dampfs
DE102013114486A1 (de) * 2013-12-19 2015-06-25 Innovative Sensor Technology Ist Ag Vorrichtung und Verfahren zum Bestimmen des Durchflusses eines Mediums
JP5680178B1 (ja) * 2013-12-26 2015-03-04 三菱電機株式会社 流量センサおよび内燃機関の制御システム
DE102014101792A1 (de) 2014-02-13 2015-08-13 Aixtron Se Vorrichtung zum Bestimmen des Massenflusses eines Gases beziehungsweise Gasgemisches mit ineinandergeschachtelten rohrförmigen Filamentanordnungen
JP6225766B2 (ja) * 2014-03-13 2017-11-08 オムロン株式会社 内部温度測定方法及び内部温度測定装置
DE102014119223B3 (de) * 2014-12-19 2016-03-31 Endress + Hauser Flowtec Ag Thermisches Durchflussmessgerät mit Diagnosefunktion
EP2930475B1 (de) 2014-12-22 2017-11-15 Sensirion AG Durchflusssensoranordnung
US10151772B2 (en) * 2015-01-23 2018-12-11 Embry-Riddle Aeronautical Univeristy, Inc. Hot wire anemometer
WO2018047836A1 (ja) * 2016-09-08 2018-03-15 株式会社村田製作所 風速測定装置および風量測定装置
WO2018047385A1 (ja) 2016-09-08 2018-03-15 株式会社村田製作所 風速測定装置および風量測定装置
DE102018208140B3 (de) 2018-05-24 2019-06-13 Continental Automotive Gmbh Pumpenvorrichtung und Verfahren zum Ermitteln eines Kühlmittelmassenstroms durch eine Pumpenvorrichtung einer Brennkraftmaschine
EP3933352A1 (de) 2020-07-01 2022-01-05 Sick Ag Thermische durchflussmessung
US12174050B1 (en) 2021-05-10 2024-12-24 Sentinel Hydrosolutions, Llc High sensitivity ultrasonic flow meter

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DE3248603A1 (de) * 1982-12-30 1984-07-12 Robert Bosch Gmbh, 7000 Stuttgart Einrichtung zur messung des massendurchsatzes eines stroemenden mediums
US4527427A (en) * 1983-02-12 1985-07-09 Robert Bosch Gmbh Device for determining the flow rate of a flowing medium
EP0134859A1 (de) * 1983-09-21 1985-03-27 Honeywell Inc. Flüssigkeitsströmungsfühler
DE3444347A1 (de) * 1984-12-05 1986-06-12 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur luftmengenmessung
JP2631481B2 (ja) * 1987-12-08 1997-07-16 株式会社 リンテック 質量流量計とその計測方法
US5187674A (en) * 1989-12-28 1993-02-16 Honeywell Inc. Versatile, overpressure proof, absolute pressure sensor
US5218866A (en) * 1991-02-19 1993-06-15 The United States Of America As Represented By The Secretary Of The Army Method and device for measuring fluid velocities
JPH07111367B2 (ja) * 1991-02-26 1995-11-29 ディーエクスエル・インターナショナル・インコーポレーテッド 流量センサおよびその検査方法
JP3310430B2 (ja) * 1993-11-26 2002-08-05 株式会社半導体エネルギー研究所 計測装置および計測方法
JP3226715B2 (ja) * 1994-04-28 2001-11-05 株式会社半導体エネルギー研究所 計測装置
US5515714A (en) * 1994-11-17 1996-05-14 General Motors Corporation Vapor composition and flow sensor
JPH0989619A (ja) * 1995-07-19 1997-04-04 Ricoh Co Ltd 感熱式流量計
KR970059713A (ko) * 1996-01-17 1997-08-12 가나이 쯔도무 발열 저항체 타입 공기 유속 측정 장치
US5852239A (en) * 1996-06-12 1998-12-22 Ricoh Company, Ltd. Flow sensor having an intermediate heater between two temperature-sensing heating portions

Also Published As

Publication number Publication date
US20020043104A1 (en) 2002-04-18
EP0943900A1 (de) 1999-09-22
EP0943900B1 (de) 2007-10-31
DE69937421T2 (de) 2008-08-21
US6370950B1 (en) 2002-04-16
DK0943900T3 (da) 2008-02-18
ATE377184T1 (de) 2007-11-15
ES2296365T3 (es) 2008-04-16
NL1008665C1 (nl) 1999-09-21
JPH11326003A (ja) 1999-11-26

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